LG16 Liquid Flow Meter Series Compact Liquid Flow Meter for OEM Applications Liquid flow rates up to 5000 µl/min Resolutions down to sub nl/min Totally non-invasive, pressures up to 200 bar Digital I²C interface or analog out 0-5 V Product Summary Interface Options The LG16 Liquid Flow Meter series enables fast, noninvasive measurements of very low liquid flow rates below 5 ml/min. This product line is especially suited for OEM volume applications requiring small sized components with high performance at low cost. Excellent chemical resistance and bio-compatibility are ensured: The flow path of the LG16 Liquid Flow Sensor is formed by a straight-thru glass capillary and end fittings. There are no obstacles in the flow path 1 Digital - I2C-Bus Analog - Voltage Output (0-5 V) For more information on communication, please refer to section 3 of this document. Sensing Performance Table 1: Model specific performance of LG16 (all data for medium H2O, 23°C) Parameter H2O full scale flow ratea H2O sensor output limitb for digital version Accuracy below full scale (whichever error is larger) Repeatability below full scale (whichever error is larger) Temperature coefficient (additional error / °C; whichever is larger) Mounting orientation sensitivityd Flow detection response time 63 Response time on power-up Operating temperature Ambient storage temperaturee Operating pressure Proof pressure LG16-0025 LG16-0150 LG16-0430 LG16-1000 LG16-2000 Unit 1.50 7 80 1000 5000 µl/min 1.70 8 120 1100 5500 µl/min 10 5.0 5.0 5.0 5.0 % of m.v.c 0.5 0.3 0.15 0.2 0.2 % of full scale <1 0.5 0.5 0.5 0.5 % of m.v. 0.06 0.05 0.01 0.02 0.02 % of full scale 0.15 0.09 0.13 0.1 0.1 % m.v. / °C 0.007 0.005 0.003 0.004 0.004 % full scale / °C <0.4 <0.4 1.0 1.5 % of full scale 40 ms 120 ms +10…+50 °C -10…+60 °C 200 100 15 15 bar 400 200 30 30 bar aCorresponds with 4.8 V in analog version rate at which the sensor output saturates. See section 2 for performance between full scale and saturation point. cMeasured value dMaximum additional offset when mounted vertically eNon-condensing, flow path empty bFlow www.sensirion.com February 2015 V3 1/8 Table 2: Model specific performance of LG16, digital version only (all data for medium IPA, 23°C) Parameter LG16-0150D LG16-0430D LG16-1000D IPA full scale flow rate Accuracy below full scale (whichever error is larger) Repeatability below full scale (whichever error is larger) Temperature coefficient (additional error / °C; whichever is larger) bMeasured 500 10’000 100 600 11’000 20 0.3 1 0.01 0.4 20 1 1 0.05 0.5 .5 0.025 20 1 1 0.05 0.4 0.02 80 IPA sensor output limita aFlow rate at which the sensor output 70 LG162000HC-D 90 10 0.5 1.5 0.03 0.35 Unit µl/min ml/min µl/min ml/min % of m.v.b % of full scale % of m.v. % of full scale % m.v. / °C % full scale / °C saturates value 1.1 Switching between calibration fields Different calibrations are available in calibration fields (CF) on digital versions of the flow meter. The factory default is CF0. If the medium to be measured is different to the factory default calibration field, this has to be changed using the Sensirion Viewer Software or using digital commands via the I2C or RS485 interface. Table 3: Available calibrations on CF0 and CF1 Sensor LG16-0025D LG16- 0150D LG16-0430D LG16-1000D LG16-2000D LG16-2000-HC-D CF0 (default) H2O H2O H2O H2O H2O IPA CF1 IPA IPA IPA Analog flow meter variants only feature H2O calibration. For communication with the analog variant see section 3.4. www.sensirion.com February 2015 V3 2/8 2 Specifications Charts Figure 1: Flow meter accuracy and repeatability across the flow range. Relative error in % of measured value (left column) and absolute error in µl/min (right column) for H2O www.sensirion.com February 2015 V3 3/8 Figure 2: Flow meter accuracy and repeatability across the flow range. Relative error in % of measured value (left column) and absolute error in µl/min or ml/min (LG16-2000-HC) (right column) for IPA www.sensirion.com February 2015 V3 4/8 3 Communication with the Sensor The OEM flow sensor LG16 shows bi-directional, linear transfer characteristics. It can be ordered as analog or digital output version. Please see the following section for more details and the table on page 7 for an overview of the available options. Digital Sampling Time, 16 bit Digital Sampling Time, 9 bit 74 ms 1 ms Table 4: DC Characteristics Power Supply DC, VDD Digital version Analog version Operating Current, VDD = 4.0-12 V, no load aUse Min. Typ. Max. Units 4.0 6.0 5.0 7.0 12a 12a V V Digital communication between a master and the LG16 sensor runs via the standard I²C-interface. The physical interface consists of two bus lines, a data line (SDA) and a clock line (SCL) which need to be connected via pull-up resistors to the bus voltage of the system. These lines can be used on 3.3V or 5.0V level with a clock frequency of 100 kHz. For the detailed specifications of this I²C communication, please refer to specific I²C Application Notes from Sensirion. 3.1 Electrical Specifications Parameter 3.3 Digital Communication via I²C-Bus 3.4 Analog Communication 6.8 The LG16 is available as analog version, with the voltage output representing the current flow rate. mA Analog Out Voltage Range Negative full scale flow Zero flow Positive full scale flow Minimum load resistance 9 V max. for best performance 3.2 Electrical Connector and Sensor Pinout Connector Type: 5 pin Molex PCB Header 532610590 (right angle). Assembled flat ribbon cable Molex 1.25 mm Pitch Receptacle Type 51021-0500 (PicoBlade™ 51021) included. Pin 1 2 3 4 5 SDA (bi-directional) SCL VDD GND Analog out www.sensirion.com 1 2 3 0.2 V 2.5 V 4.8 V 10 k The analog sensor’s output limit is 5V, thus the actual flow rate output limit is lower than the corresponding digital version’s output limit (noted in Table 1). 4 5 February 2015 V3 5/8 4 Fluidic Connection Table 5: Fluidic Specifications and Pressure Rating Parameter LG16-0025 LG16-0150 LG16-0430 LG16-1000 LG16-2000 Wetted materials: Fluid connector ports (Fittings) Pressure drop (at full scale flow rate, H2O, 23°C) Pressure drop (at full scale flow rate, IPA, 23°C) Total internal volume a1/8” Quartz Glass (Fused Silica) PEEK None Internal sensor tube material Fitting material Sealing material Borosilicate Glass 3.3 FEP ¼-28 flat-bottom for 1/16” or 1/8” OD plastic tubinga >1 mbar >1 mbar 5 mbar 2 mbar 25 µl 80 µl UNF 6-40 for 1/32” OD tubing VICI® Nanovolume™ compatible 1 bar n.a. 1 µl 3 mbar 60 mbar 1.5 µl 1 mbar 7 mbar 5 µl OD tubing with 2 mm minimum ID is recommended for the LG16-2000. For more information on the fluidic connection please find: “Application Note Sensor Ports and Tubing Connections” in the Download Center on our webpage (www.sensirion.com/liquidflow-download). 5 Mechanical Specifications Table 6: Mechanical Specifications Parameter LG16-0025 Largest dimensions Total mass Inner diameter d 25 µm LG16-0150 LG16-0430 LG16-1000 LG16-2000 150 µm 53 x 22 x 9 mm 6g 430 µm 1.0 mm 1.8 mm LG16-0025 / LG16-0150 / LG16-0430 LG16-1000 / LG16-2000 53±1 All dimensions in mm Attention Fragile Mechanical shocks and connecting to the fittings without suitable tools leads to stress on the internal thin-walled glass capillary and can cause it to break. While tightening the fittings, fix the fluidic ports position with a wrench. Test for leakage after every time new connections are made. www.sensirion.com February 2015 V3 ! 6/8 6 Ordering Information For OEM applications the sensor can be purchased in larger quantities without any additional parts (25 pcs. minimum order quantity). Each model is available with analog output (ending “A”) or with digital output (ending “D”). Fluid connection material is not included. Product LG16-0025A LG16-0025D LG16-0150A LG16-0150D LG16-0430A LG16-0430D LG16-1000A LG16-1000D LG16-2000A LG16-2000D LG16-2000HC-D www.sensirion.com Signal output analog digital ● ● ● ● ● ● ● ● ● ● ● Calibration H2O IPA ● ● ● ● ● ● ● ● ● ● ● ● ● ● February 2015 V3 Article Number 1-100427-01 1-100428-01 1-100409-01 1-100410-01 1-100852-02 1-100853-02 1-100405-01 1-100406-01 1-100403-01 1-100404-01 1-100840-01 7/8 Important Notices Warning, personal injury Do not use this product as safety or emergency stop devices or in any other application where failure of the product could result in personal injury (including death). Do not use this product for applications other than its intended and authorized use. Before installing, handling, using or servicing this product, please consult the datasheet and application notes. Failure to comply with these instructions could result in death or serious injury. If the Buyer shall purchase or use SENSIRION products for any unintended or unauthorized application, Buyer shall defend, indemnify and hold harmless SENSIRION and its officers, employees, subsidiaries, affiliates and distributors against all claims, costs, damages and expenses, and reasonable attorney fees arising out of, directly or indirectly, any claim of personal injury or death associated with such unintended or unauthorized use, even if SENSIRION shall be allegedly negligent with respect to the design or the manufacture of the product. ESD Precautions The inherent design of this component causes it to be sensitive to electrostatic discharge (ESD). To prevent ESD-induced damage and/or degradation, take customary and statutory ESD precautions when handling this product. Warranty This warranty does not apply to any equipment which has not been installed and used within the specifications recommended by SENSIRION for the intended and proper use of the equipment. EXCEPT FOR THE WARRANTIES EXPRESSLY SET FORTH HEREIN, SENSIRION MAKES NO WARRANTIES, EITHER EXPRESS OR IMPLIED, WITH RESPECT TO THE PRODUCT. ANY AND ALL WARRANTIES, INCLUDING WITHOUT LIMITATION, WARRANTIES OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR PURPOSE, ARE EXPRESSLY EXCLUDED AND DECLINED. SENSIRION is only liable for defects of this product arising under the conditions of operation provided for in the datasheet and proper use of the goods. SENSIRION explicitly disclaims all warranties, express or implied, for any period during which the goods are operated or stored not in accordance with the technical specifications. SENSIRION does not assume any liability arising out of any application or use of any product or circuit and specifically disclaims any and all liability, including without limitation consequential or incidental damages. All operating parameters, including without limitation recommended parameters, must be validated for each customer’s applications by customer’s technical experts. Recommended parameters can and do vary in different applications. SENSIRION reserves the right, without further notice, (i) to change the product specifications and/or the information in this document and (ii) to improve reliability, functions and design of this product. SENSIRION warrants solely to the original purchaser of this product for a period of 12 months (one year) from the date of delivery that this product shall be of the quality, material and workmanship defined in SENSIRION’s published specifications of the product. Within such period, if proven to be defective, SENSIRION shall repair and/or replace this product, in SENSIRION’s discretion, free of charge to the Buyer, provided that: Copyright © 2001-2015, SENSIRION. The flow meters of the LG16 Series comply with requirements of the following directives: notice in writing describing the defects shall be given to SENSIRION within fourteen (14) days after their appearance; such defects shall be found, to SENSIRION’s reasonable satisfaction, to have arisen from SENSIRION’s faulty design, material, or workmanship; the defective product shall be returned to SENSIRION’s factory at the Buyer’s expense; and the warranty period for any repaired or replaced product shall be limited to the unexpired portion of the original period. CMOSens® is a trademark of Sensirion All rights reserved REACH, RoHS and WEEE Statement EU Directive 1907/2006/EC concerning Registration, Evaluation, Authorization and Restriction of Chemicals (REACH) EU Directive 2002/96/EC on waste electrical and electronic equipment (WEEE), OJ13.02.2003; esp. its Article 6 (1) with Annex II. EU Directive 2002/65/EC on the restriction of certain hazardous substances in electric and electronic equipment (RoHS), OJ01.01.2011 Headquarters and Subsidiaries SENSIRION AG Laubisruetistr. 50 CH-8712 Staefa ZH Switzerland Sensirion Inc., USA phone: +1 805 409 4900 [email protected] www.sensirion.com Sensirion Korea Co. Ltd. phone: +82 31 345 0031 3 [email protected] www.sensirion.co.kr phone: +41 44 306 40 00 fax: +41 44 306 40 30 [email protected] www.sensirion.com Sensirion Japan Co. Ltd. phone: +81 3 3444 4940 [email protected] www.sensirion.co.jp Sensirion China Co. Ltd. phone: +86 755 8252 1501 [email protected] www.sensirion.com.cn Sensirion AG (Germany) phone: +41 44 927 11 66 [email protected] www.sensirion.com To find your local representative, please visit www.sensirion.com/contact www.sensirion.com February 2015 V3 8/8