Model 97 UltraStable™ 316L SS Pressure Sensor High Performance 0-100 mV Output Absolute and Sealed Gage High Pressure þ Hydraulic Controls þ Process Control þ Robotics þ Oceanography þ Refrigeration/Compressors þ Pressure Transmitters DESCRIPTION The Model 97 is a small profile, media compatible, piezoresistive silicon pressure sensor packaged in a 316L stainless steel housing. The sensing package utilizes silicone oil to transfer pressure from the 316L stainless steel diaphragm to the sensing element. The Model 97 is designed for high performance, high pressure applications. A ceramic substrate is attached to the package that contains laser-trimmed resistors for temperature compensation and offset correction. An additional lasertrimmed resistor is included which can be used to adjust an external differential amplifier and provide span interchangeability to within ±1%. For low pressure flush mount sensors and sensors with other pressure fittings, please contact the factory. FEATURES DIMENSIONS þ ¼ NPT Thread þ –20°C to +85°C Compensated Temperature Range þ ±0.25% Pressure Non-linearity þ ±1.0% Interchangeable Span (provided by gain set resistor) þ Solid State Reliability þ Low Power STANDARD RANGES Range 1-74 psia psis 0 to 1000 ● ● 0 to 3000 ● ● 0 to 5000 ● ● ISO – Wide Temperature Range Model 97 UltraStable™ 316L SS Pressure Sensor PERFORMANCE SPECIFICATIONS All parameters specified at 1.5mA and at 25°C, after 10 second warm up, unless otherwise indicated. Unless specifically indicated, only those parameters indicated as tested are verified on each part. Parameters are specified for the compensated version only. PARAMETERS MIN TYP MAX UNITS NOTES Full Scale Output Span 75 100 125 mV 1 Zero Pressure Output (Offset) –1 0 1 mV 2 0.25 ±% Span 3 Pressure Non Linearity –0.25 Pressure Hysteresis Repeatability 50 µV 0.02 ±% Span Input and Output Resistance 2000 4000 Ω Temperature Error - Span (–20 to +85°C) –0.75 +0.75 % Span Temperature Error - Offset (–20 to +85°C) –0.75 +0.75 % Span 4 % Span 4 4 2750 Thermal Hysteresis - Span 0.05 Thermal Hysteresis - Offset 0.05 % Span 0.1 ±% Span/year Long Term Stability - Span Long Term Stability - Offset 0.1 Supply Current 0.5 Output Load Resistance Insulation Resistance (50 VDC) 1.5 4 ±% Span/year 2.0 mA 5 5 MΩ 6 50 MΩ 7 Rated 8 Pressure Overload 3X Compensated Temperature Range –20°C to +85°C 9 Operating Temperature Range –40°C to +125°C 9 Storage Temperature Range –50°C to +125°C 9 Media - Pressure Port Liquids and Gases compatible with 316L Stainless Steel Media - Reference Port Liquids and Gases. Compatible with Silicon, Pyrex, Gold, Fluorosilicone Rubber and 316L Stainless Steel Weight 27 g 10 Notes 1. For amplified output circuits see application note TN-003. 6. 2. Measured at vacuum for absolute (A) and one atmosphere for sealed gage (S). 7. Between case and sensing element. 8. 3X rated or 10,000 psi, whichever is less. 3. Best fit straight line. 9. 4. Over temperature range –20°C to +85°C, % span, with respect to +25°C. Maximum temperature specification for product with cable and connector is –20°C to 105°C. 10. Weight depends upon configuration (cable, connector, pressure fitting). 5. Guarantees output/input ratiometricity. ORDERING INFORMATION Load resistance to reduce measurement errors due to output loading. APPLICATION SCHEMATIC CONNECTIONS PAD NO. / CABLE FUNCTION 1 +OUT 2 –EX 3 +EX 4 –OUT 5 GAIN SET 6 GAIN SET April 2000 ISO – Wide Temperature Range 1-75