NEC AE0505D44H40F Multilayer piezoelectric actuator Datasheet

Vol.06
●All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data.
●Please request for a specification sheet for detailed product data prior to the purchase.
●Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog.
2011.06.22 9307MPAVOL06E1106H2
PRECAUTIONS TO BE TAKEN WHEN USING MULTILAYER
PIEZOELECTRIC ACTUATORS
(Please read these precautions before using our products)
1. Before using our products or designing a system using our products, read
the precautions and specifications(such as level of quality)for the products
you intend to use on the last page of this manual.
2. The main failures with multilayer piezoelectric actuators are deterioration of
insulation resistance, short-circuit, and open-circuit.
Before using the products, design systems carefully to ensure redundancy,
prevention of the spread of fire, and prevention of faulty operation allowing
for the occurrence of failures.
3. Use the products after checking the working conditions and rated performance
of each of the multilayer piezoelectric actuator series.
Selection of AE series(a resin-coated type)or ASB, ASL and AHB series(a
metal-sealed type)should be based on the intended working temperature
and humidity.
●All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data.
●Please request for a specification sheet for detailed product data prior to the purchase.
●Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog.
2011.06.22 9307MPAVOL06E1106H2
CONTENTS
Resin coated type multilayer piezoelectric acutuators AE series ............................
5
Metal sealed type multilayer piezoelectric actuators .................................................
ASB series(85℃ rated)
, ASL series(150℃ rated)
,
AHB series(High displacement model)
11
Reliability .................................................................................................................
19
Guide to use ............................................................................................................
21
Precautions ............................................................................................................. 23
Multilayer Piezoelectric Actuators Vol.06 3
●All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data.
●Please request for a specification sheet for detailed product data prior to the purchase.
●Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog.
2011.06.22 9307MPAVOL06E1106H2
NEC TOKINʼs multilayer piezoelectric actuators are available in four series.
Resin-coated type
General-purpose
85℃ rated
AE series
Metal case type
High-performance
General-purpose
85℃ rated
ASB series
150℃ rated
ASL series
High displacement
model
AHB series
*AE series is resin-coated products. Therefore we recommend using metal case type, ASB,
ASL and AHB series in high humidity condition.
NEC TOKINʼs multilayer piezoelectric actuators are designed using unique
element structure technology and using ceramic materials with high
electrostrictive factors developed by NEC TOKIN.
*For detail information of piezoelectric ceramic material, please refer to a catalogue of “Piezoelectric ceramics”.
Features
□ Special ceramics developed by NEC TOKIN are used in piezoelectric ceramic elements.
□ As compared with conventional actuator elements, NEC TOKINʼs multilayer piezoelectric actuators have
advantages as follows.
Insulator
Direction of displacement
■ Advantages over electromagnetic actuators
⃝ Faster response
⃝ High resolution for positioning
⃝ Large generated force
⃝ Low power consumption
⃝ No electromagnetic noise
■ Advantages over bimorph piezoelectric actuators
⃝ High energy conversion efficiency(around 7 times the
energy conversion efficiency of the bimorph type
actuator), and low power consumption
⃝ Large generated force
⃝ Stable displacement, and reduced shift and creep phenomena
⃝ Response speed(more than 100 times the response
speed of the bimorph piezoelectric actuator)
■ Advantages over stacked piezoelectric actuators
⃝ Compact size(less than 1/10 the specific volume of
the stacked piezoelectric actuator)
⃝ Low drive voltage, and ease of use
⃝ Inexpensive
Internal
electrode
External
electrode
Ceramic
Structure of NEC TOKINʼs Multilayer
Piezoelectric Actuato
4 Multilayer Piezoelectric Actuators Vol.06
●All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data.
●Please request for a specification sheet for detailed product data prior to the purchase.
●Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog.
2011.06.22 9307MPAVOL06E1106H2
Resin coated type multilayer piezoelectric actuators
AE Series
Outline
Features
⃝ Large generated force: 3,500 N/cm2(typ.)
⃝ High-speed response: Driving up to about 1/3 of selfresonant frequency(in several ten kHz)is possible.
⃝ Accurate positioning: Controllable in nm order.
⃝ Low power consumption: Can be retained at the
leakage current state(100μA or less).
⃝ Very small size: 1/10 or smaller than conventional
multilayer actuators(specific volume)
Multilayer piezoelectric actuators are ceramic elements
for converting electrical energy into mechanical energy
such as displacement or force by utilizing the
piezoelectric longitudinal effect.
NEC TOKIN's multilayer piezoelectric actuators are
produced based on our unique element structure
design and using originally developed piezoelectric
ceramic materials with high electrostrictive factors.
Compared to conventional piezoelectric actuators,
they are smaller in size but can generate higher
displacement and force at low voltages.
Especially, the resin-coated AE series actuators
feature compact size and wide variety in shape for
applications such as ultra-fine positioning mechanisms
and drive sources.
Applications
Auto focusing of cell phone camera, Image stabilization
of DSC, Positioning, Motors, Pumps, Valves, Vibration
source, Vibration controls, Sensors, Mirror / Prism
positioning, Manipulators, AFM, Printer, etc
Numbering system
Example: AE 0505 D16 XXX F
Comply with RoHS
*Compliant to RoHS directive in effect
as of April, 2011
Additional code(optional) Example: H40=Overall length is 40mm
D=Thin coating type
Nominal displacement:
Indicated by two digits in micrometers[μm]
in succession to D
Example: D16=16μm
Ceramic cross section:
Unit: Millimeters[mm]
Example: 0505=5 mm×5 mm
*Coating area is not include.
Series name:
AE=Resin-coated type
Multilayer Piezoelectric Actuators Vol.06 5
●All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data.
●Please request for a specification sheet for detailed product data prior to the purchase.
●Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog.
2011.06.22 9307MPAVOL06E1106H2
Standard Parts List
Displacement[μm]
Model
Maximum
driving voltage
[150VDC]
Overall length
[mm]
Generated force
[N]
Stiffness
[N/um]
Resonance
frequency
[kHz]
Capacitance
[μF]
Insulation
resistance
[MΩ]
4.6 ± 1.5
5
200
43.5
261
0.09
100
9.1 ± 1.5
10
200
22.0
138
0.18
100
17.4 ± 2.0
20
200
11.5
69
0.35
50
42.0 ± 6.6
40
200
4.8
34
0.82
20
9.1 ± 1.5
10
850
93.4
138
0.75
50
17.4 ± 2.0
20
850
48.9
69
1.4
10
42.0 ± 6.6
40
850
20.2
34
3.4
5
18.4 ± 3.5
20
3,500
190.2
69
5.4
5
42.0 ± 6.6
40
3,500
83.3
34
13.6
2
AE0203D04F
AE0203D04DF
AE0203D08F
AE0203D08DF
AE0203D16F
AE0203D16DF
AE0203D44H40F
AE0203D44H40DF
AE0505D08F
AE0505D08DF
AE0505D16F
AE0505D16DF
AE0505D44H40F
AE0505D44H40DF
AE1010D16F
AE1010D16DF
AE1010D44H40F
AE1010D44H40DF
AE1414D16F
18.4 ± 3.5
20
7,000
380.4
69
10.8
2
AE2525D15F
15.6 ± 2.0
20
20,000
1,282.0
69
30.5
0.4
*Tow coating types are available. AE **** D ** DF has thinner coating thickness.
*For detail information of measurement conditions and outer dimension, please refer to “Performance” and “Outer Dimension” sections.
Performance
Item
Standard
Conditions
Operating temperature range
ー 25 to + 85℃
When applied with a DC voltage: Ambient temperature
When driven by an AC voltage: Ambient temperature + Temperature
rise due to generated heat
Recommended Storage
condition
ー 5 to + 40℃ / less than 40%R.H
Recommend storage at room temperature.
No condensation.
Maximum driving voltage
150VDC
Displacement
See the standard parts list
At 150VDC
See the standard parts list
The force required for restricting the displacement to 0 when the
maximum driving voltage is applied.
Generated force
(compression resistance)
Capacitance
See the standard parts list
Capacitance allowance
+ / ー 20 %
Dissipation factor
5% or less
Insulation resistance
See the standard parts list
Value obtained in 1 minute at 150 VDC
Resonance frequency
See the standard parts list
With both ends of element in free state
Typical value of the element under our test conditions
Tensile strength
1/10 of generated force
Typical value of the element under our test conditions
Young's modulus
4.4 × 1010N/m2
Typical value of the element under our test conditions
Temperature cycle test
Displacement: Initial value ± 20%
Capacitance: Initial value ± 30%
tanδ: Less than initial rated value
Insulation resistance: 1MΩ or more
Appearance: No noticeable defect
Room temperature(3 min)
–25℃(30 min.)
Room temperature(3 min)
+85℃(30 min)
Repetition of 10 cycles of the above
f = 1kHz, V = 1Vrms
6 Multilayer Piezoelectric Actuators Vol.06
●All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data.
●Please request for a specification sheet for detailed product data prior to the purchase.
●Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog.
2011.06.22 9307MPAVOL06E1106H2
Outer Dimensions
(−)
W1
T1
W2
T2
(+)
Direction of displacement
Overall length 40mm Product
H
(+)
Direction of displacement
H
Overall length 5,10 and 20mm Products
(−)
Note:
Factory-shipped polarization : Red lead wire =(+),
White lead wire =(-)
Above drawings do not include dimension of wire
W1
T1
W2
T2
connection area and diameter of the wire. Please contact
us for details.
Unit:mm
Model
AE0203D04F
AE0203D04DF
AE0203D08F
AE0203D08DF
AE0203D16F
AE0203D16DF
AE0203D44H40F
AE0203D44H40DF
AE0505D08F
AE0505D08DF
AE0505D16F
AE0505D16DF
AE0505D44H40F
AE0505D44H40DF
AE1010D16F
AE1010D16DF
AE1010D44H40F
AE1010D44H40DF
T1
W1
H
2 ± 0.1
3 ± 0.1
5 ± 0.1
2 ± 0.1
3 ± 0.1
10 ± 0.1
2 ± 0.1
3 ± 0.1
20 ± 0.1
2 ± 0.1
3 ± 0.1
40 ± 0.1
5 ± 0.1
5 ± 0.1
10 ± 0.1
5 ± 0.1
5 ± 0.1
20 ± 0.1
5 ± 0.1
5 ± 0.1
40 ± 0.1
10 ± 0.1
10 ± 0.1
20 ± 0.1
10 ± 0.1
10 ± 0.1
40 ± 0.1
T2
W2
3.5Max.
4.5Max.
2.4Max.
3.4Max.
3.5Max.
4.5Max.
2.4Max.
3.4Max.
3.5Max.
4.5Max.
2.4Max.
3.4Max.
3.5Max.
4.5Max.
2.4Max.
3.4Max.
6.5Max.
6.5Max.
5.4Max.
5.4Max.
6.5Max.
6.5Max.
5.4Max.
5.4Max.
6.5Max.
6.5Max.
5.4Max.
5.4Max.
11.5Max.
11.5Max.
10.4Max.
10.4Max.
11.5Max.
11.5Max.
10.4Max.
10.4Max.
L
100
100
100
100
100
100
100
100
100
AE1414D16F
14.2 ± 0.1
14.2 ± 0.1
20 ± 0.1
15.7Max.
15.7Max.
100
AE2525D15F
25.1 ± 0.1
25.1 ± 0.1
20 ± 0.1
26.6Max.
26.6Max.
100
*L = Length of lead wire
Multilayer Piezoelectric Actuators Vol.06 7
●All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data.
●Please request for a specification sheet for detailed product data prior to the purchase.
●Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog.
2011.06.22 9307MPAVOL06E1106H2
Wire diameter
Unit:mm
φd
φD
L
AWG
UL
number
0.3
0.5
100
32
1993
0.3
0.5
100
32
1993
0.3
0.5
100
32
1993
0.3
0.5
100
32
1993
0.3
0.5
100
32
1993
0.5
0.8
100
26
1371
0.5
0.8
100
26
1371
0.5
0.8
100
26
1371
0.5
0.8
100
26
1371
AE1414D16F
0.5
0.8
100
26
1371
AE2525D15F
0.5
0.8
100
26
1371
Model Number
L
AE0203D04F
AE0203D08F
φD
φd
AE0203D04DF
AE0203D08DF
φd =Diameter of lead wire
AE0203D16F
φD =Outer diameter including the thickness of coating
AE0203D16DF
AE0203D44H40F
L =Length of lead wire
AE0203D44H40DF
Lead wire: Copper wire with Tin plating
Coating: PTFE(Polytetrafluoroethylene)
AE0505D08F
AE0505D08DF
AE0505D16F
AE0505D16DF
AE0505D44H40F
AE0505D44H40DF
AE1010D16F
AE1010D16DF
AE1010D44H40F
AE1010D44H40DF
Special Design Parts
Non-standard parts are available per order basis.
Please use the guideline below as reference regarding
generated displacement and generated force.
Displacement: Roughly proportional to the
element length
Generated force: Roughly proportional to the
sectional area of the element
Shape: Product cross-section: 1mm×1mm square
or larger
Product length: 1mm or longer
Can be provided in cylindrical ring or
other shapes.
Please contact us for further details.
Example of special design parts
Ceramic Dimension
AL1.65 × 1.65 × 5DF
AE1.65 × 1.65 × 5DF
1.65 × 1.65 × 5mm
1.65 × 1.65 × 5mm
Condition
Maximum Operating Voltage(V)
± 10V
150VDC
Displacement
(300nm p-p)
(4μm)
At maximum operating voltage
Capacitance(nF)
90
43
f=1kHz, V=1Vrms
Operating Temperature
Small size piezo actuator
- 25 ~ +85℃
8 Multilayer Piezoelectric Actuators Vol.06
●All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data.
●Please request for a specification sheet for detailed product data prior to the purchase.
●Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog.
2011.06.22 9307MPAVOL06E1106H2
Characteristic Data
Fig-1 Voltage vs. Displacement
Fig-2 Generated force vs. Displacement of
AE0505D16F in Driving voltage
50
20
16
Displacement(μm)
Displacement(μm)
AE0505D44H40
30
AE0505D16
20
AE0505D08
10
14
100V
12
10
8
Generated force
50V
6
4
AE0203D04
0
150V
18
40
0
50
Voltage(V)
100
2
0
150
0
200
Fig-3 Generated force vs. Displacement-1
400
600
Generated force(N)
Fig-4 Generated force vs. Displacement-2
Driving voltage: 150VDC
Driving voltage: 150VDC
40
40
05
D4
4H
F
H40
D44
05
20
③
A E0
Displacement(μm)
AE
203
30
①:AE0203D04F
②:AE0203D08F
③:AE0203D16F
40
F
505D
10
AE0505D
16F
20
AE25
25D1
5F
10
①
0
30
④
08F
②
200
400
600
Generated force(N)
800
1000
④:AE1010D16F
⑤:AE1414D16F
F
4H40
10D4
AE10
AE0
Displacement(μm)
1000
50
50
0
800
0
⑤
0
10000
Generated force(N)
20000
Fig-5 Temperature vs. Displacement
60
Driving voltage: 150VDC
AE0505D44H40
Displacement(μm)
50
40
30
AE0505D16
20
AE0505D08
10
0
−40
AE0203D04
−20
0
20
40
Temperature(℃)
60
80
100
* Listed data are reference values. For the voltage vs. displacement characteristic, the same length of piezo series shows the same voltage vs. displacement
characteristic.
* Definition of generated force for Fig-2, Fig-3 and Fig-4;
Force is the force required for restricting the displacement to 0 when the maximum driving voltage is applied.
Multilayer Piezoelectric Actuators Vol.06 9
●All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data.
●Please request for a specification sheet for detailed product data prior to the purchase.
●Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog.
2011.06.22 9307MPAVOL06E1106H2
Fig-7 Voltage vs. Displacement in time
Fig-6 Temperature vs. Displacement
50
40
Displacement(μm)
30
⊿L150
20
15
10
⊿L150−⊿L0
5
0
Displacement(μm)
Displacement(μm)
30
AE0505D16
(5×5×20mm)
⊿L0
−5
0
20
75
Voltage(V)
150
⊿L150−⊿L0
Ambient Temperature:23℃
Model: AE0505D16F
20
10
⊿L150
10
0
0
⊿L0
−10
160
140
−20
0
20
40
Temperature(℃)
60
80
Voltage
120
100
Voltage(V)
−20
−40
100
80
60
40
20
0
−20
−20
1 kHz
Heat generation
500 Hz
Heat generation
T(℃)
70
60
50
40
Time(sec)
60
80
100
Model: AE0505D16F
Temperature measurement:5 minutes later from operation
100
T(℃)
80
20
Fig-9 Heat generation vs. Drive frequency-2
Fig-8 Heat generation vs. Drive frequency-1
Driving signal waveform: Sine wave (150Vp-p)
Model:AE0505D16F
0
80
Peak voltage
DC bias
40 V
20 V
100 V
50 V
150 V
75 V
Symbol
60
40
20
200 Hz
40
10
30
100
1000
Driving frequency(Hz)
100 Hz
20
50 Hz
10
0
100
200
Time(sec)
300
10 Multilayer Piezoelectric Actuators Vol.06
●All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data.
●Please request for a specification sheet for detailed product data prior to the purchase.
●Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog.
2011.06.22 9307MPAVOL06E1106H2
Metal sealed type multilayer piezoelectric actuators
ASB Series(85˚C rated)
, ASL series(150˚C rated)
, AHB series(High
displacement model)
Outline
Features
⃝ High reliability: Realization of MTTF = 36,000 hours
(at 85℃ and 100 V)
⃝ Easier installation into equipments thanks to the built-in
pre-load mechanism and mounting attachment
⃝ Minimum mechanical abrasion
⃝ Large generated force: 800 N
⃝ Accurate positioning: Controllable in nm order
Numbering system
Multilayer piezoelectric actuators convert electrical energy
into mechanical energy such as displacement or force
by making use of the piezoelectric longitudinal effect.
NEC TOKINʼs multilayer piezoelectric actuators are
produced based on our unique element structure design
by making use of originally developed piezoelectric
ceramic materials with high electrostrictive factors.
Compared to conventional piezoelectric actuators,
they are smaller in size but can generate higher
displacements and forces at low voltages.
Especially, the metal sealed ASB/ASL and AHB
series actuators are much less influenced by ambient
humidity because of insulation from the atmosphere.
As a result, long service life and high performance
never experienced in the past have been attained to
allow use in various applications such as semiconductor
device production equipment and optical communication
equipment which require high reliability.
Applications
Fine adjustment of various X-Y tables steppers,
Mirror/prism positioning, Linear motors, Fluid flow
control valve drive, Vibration source, Manipulators,
etc.
Example: AS B 170 C 801 N P 0 LF
Comply with RoHS
*Compliant to RoHS directive in effect as of April 2011
New design No.
Sequentially numbered starting from 0
Configuration of drive block
P=Plane, D=V groove(Refer to page 14 for detail.)
Configuration of mount
N=Female thread type
F=Flange type(refer to page 12 for details)
W=Without a flange
Generated force
Unit: Newton[N]
The first two digits are effective numerals.
The last digit is an exponent of 10.
Example: 801=800 N=80 kgf
Maximum drive voltage
C=150 VDC
Nominal displacement
Unit: Micrometers(μm)
The first two digits are effective numerals.
The last digit is an exponent of 10.
Example: 170=17μm
Construction of housing and
operating temperature range
B=Bellows(pre-load), maximum operating temperature: 85℃
L=Bellows(pre-load), maximum operating temperature: 150℃
Series name
AS=Encapsulated in metal case
AH=Encapsulated in metal case(High displacement model)
Multilayer Piezoelectric Actuators Vol.06 11
●All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data.
●Please request for a specification sheet for detailed product data prior to the purchase.
●Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog.
2011.06.22 9307MPAVOL06E1106H2
Standard Parts List
◦ ASB series
Displacement[μm]
Model
Generated force
[N]
Resonance
frequency
[kHz]
Capacitance
[μF]
Insulation
resistance
[MΩ]
17.0 ± 3
800
14
1.5
30
34.0 ± 6
800
12
3.0
15
51.0 ± 9
800
10
4.5
10
68.0 ± 12
800
8
6.0
5
20.0 ± 3
200
37
0.5
100
Maximum driving voltage
[150VDC]
ASB170C801 ■● 0LF
ASB170C801W ● 1-A0LF
ASB340C801 ■● 0LF
ASB340C801W ● 1-A0LF
ASB510C801 ■● 0LF
ASB510C801W ● 1-A0LF
ASB680C801 ■● 0LF
ASB680C801W ● 1-A0LF
ASB170C201WP1-A0LF
*Note: ■ in model number has “N” or “F” letter.
● in model number has “P” or “D” letter.
Example)ASB170C801NP0LF, ASB510C801WD1-A0LF
*Model number, ASB *** C801W ● 1-A1LF is the model without a flange.
*For detail information of measurement conditions and outer dimension, please refer to “Performance” and “Outer Dimension” sections.
◦ ASL series
Displacement[μm]
Model
Maximum driving voltage
[150VDC]
Generated force
[N]
Resonance
frequency
[kHz]
Capacitance
[μF]
Insulation
resistance
[MΩ]
ASL170C801 ■● 0LF
19.0 ± 3
800
14
1.34
30
ASL340C801 ■● 0LF
39.0 ± 6
800
12
2.55
15
ASL510C801 ■● 0LF
58.0 ± 9
800
10
3.84
10
ASL680C801 ■● 0LF
77.0 ± 12
800
8
5.07
5
Generated force
[N]
Resonance
frequency
[kHz]
Capacitance
[μF]
Insulation
resistance
[MΩ]
10
*Note: ■ in model number has “N” or “F” letter.
● in model number has “P” or “D” letter.
Example)ASL170C801FP0LF
*No flange type is also available for ASL-series. Please contact us for detail.
◦ AHB series
Displacement[μm]
Model
Maximum driving voltage
[150VDC]
AHB550C801 ■● 0LF
55.0 ± 8
800
12
6.4
AHB700C801 ■● 0LF
70.0 ± 15
800
8
8.2
5
AHB800C801 ■● 0LF
80.0 ± 15
800
8
9.3
5
AHB800C302WD1-A0LF
80.0 ± 15
3000
8
37.0
2
*Note: ■ in model number has “N” or “F” letter.
● in model number has “P” or “D” letter.
Example)AHB800C801NP0LF
*No flange type is also available for AHB-series. Please contact us for detail.
*For detail information of measurement conditions and outer dimension, please refer to “Performance” and “Outer Dimension” sections.
Flange type
No flange type
Product appearance example
12 Multilayer Piezoelectric Actuators Vol.06
●All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data.
●Please request for a specification sheet for detailed product data prior to the purchase.
●Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog.
2011.06.22 9307MPAVOL06E1106H2
Performance
Item
Standard
Conditions
When applied with DC voltage: Ambient temperature
When driven by pulse: Ambient temperature + Temperature rise due
to generated heat
Operating temperature range
ASB/AHB : ー 25 to + 85℃
ASL : ー 40 to + 150℃
Recommended Storage
condition
ー 5 to + 40℃
Maximum driving voltage
150VDC
Displacement
See the standard parts list
At 150VDC
See the standard parts list
The force required for restricting the displacement to 0 when the
maximum driving voltage is applied.
Generated force
(compression resistance)
Capacitance
See the standard parts list
Capacitance tolerance
+ / ー 20%
Dissipation factor
5% or less
Insulation resistance
See the standard parts list
Value obtained in 1 minute at 150 VDC
Resonance frequency
See the standard parts list
With both ends of element in free state
Typical value of the element under our test conditions
Airtightness
1 × 10 ー 8 atm cc/sec or less
Temperature cycle test
Displacement: Initial value ± 30%
Capacitance: Initial value ± 30%
tan δ : Less than initial rated value
Insulation resistance: 1 MΩ or more
Appearance: No noticeable defect
High-temperature shelf test
Displacement: Initial value ± 30%
Capacitance: Initial value ± 30%
tan δ : Less than initial rated value
Insulation resistance: 1 MΩ or more
Appearance: No noticeable defect
f = 1kHz, V = 1Vrms
ASB, AHB
ASL
Room temperature(3 min) Room temperature(3 min)
- 25℃(30 min)
- 40℃(30 min)
Room temperature(3 min) Room temperature(3 min)
+ 150℃(30 min)
+ 85℃(30 min)
Repetition of 10 cycles of the above
Temperature
Time
ASB, AHB: 85 ± 2℃
ASL: 150 ± 2℃
1,000 ± 48 h
Solvent resistance test
Displacement: Initial value ± 30%
Capacitance: Initial value ± 30%
tan δ : Less than initial rated value
Insulation resistance: 1 MΩ or more
Appearance: No noticeable defect
Mark: Easily legible
Solvent: Isopropyl alcohol
Temperature: 23 ± 5℃
Time: Immersion for 1 min
Heat resistance test
Displacement: Initial value ± 30%
Capacitance: Initial value ± 30%
tan δ : Less than initial rated value
Insulation resistance: 1 MΩ or more
Appearance: No noticeable defect
Mark: Easily legible
Temperature: 150 ± 3℃
Time: 96 ± 4 h
Multilayer Piezoelectric Actuators Vol.06 13
●All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data.
●Please request for a specification sheet for detailed product data prior to the purchase.
●Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog.
2011.06.22 9307MPAVOL06E1106H2
Dimensions(Common to ASB, ASL and AHB Series)
● Female thread type
TOP VIEW
17
Enlarged of section A
Model
P type
ASL170C801NP0LF
φ2.2
Direction of displacement
φ11.5±0.5
ASB340C801NP0LF
D type
Section A
ASB170C801NP0LF
ASL340C801NP0LF
ASB510C801NP0LF
ASL510C801NP0LF
90°
ASB680C801NP0LF
ASL680C801NP0LF
L±0.5
2.5±0.2
130±10
2
19±0.5
[mm]
38.4
58.4
78.4
98.4
Model
L(mm)
AHB550C801NP0LF
58.4
AHB700C801NP0LF
78.4
AHB800C801NP0LF
78.4
* Both P type and D type have the same
overall lengths
φ19.6±0.5
9±0.2
L(mm)
17
*Lead wire: AWG26, UL1371
Red color:(+)
White color:(−)
M4 screw of min. 3 deep
Prepared hole of max. 5 deep
BOTTOM VIEW
● Flange type
Enlarged of section A
TOP VIEW
17
Model
P type
ASL170C801FP0LF
φ2.2
ASB340C801FP0LF
D type
Direction of displacement
4−φ3.5
ASB170C801FP0LF
ASL340C801FP0LF
ASB510C801FP0LF
φ11.5±0.5 Section A
90°
ASL510C801FP0LF
ASB680C801FP0LF
ASL680C801FP0LF
L±0.5
130±10
2.5±0.2
2
[mm]
13.0±0.5
P.C.D.28
3.0±0.2
45°
45°
L(mm)
32.4
52.4
72.4
92.4
Model
L(mm)
AHB550C801FP0LF
52.4
AHB700C801FP0LF
72.4
AHB800C801FP0LF
72.4
* Both P type and D type have the same
overall lengths
*Lead wire: AWG26, UL1371
Red color:(+)
White color:
(−)
φ35±0.5
BOTTOM VIEW
14 Multilayer Piezoelectric Actuators Vol.06
●All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data.
●Please request for a specification sheet for detailed product data prior to the purchase.
●Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog.
2011.06.22 9307MPAVOL06E1106H2
● Without flange type
TOP VIEW
Enlarged of section A
ASB340C801W ● 1-A0LF
44.4
ASL340C801W ● 1-A0LF
D type
Section A
24.4
ASL170C801W ● 1-A0LF
φ2.2
φ11.5±0.5
L(mm)
Model
ASB170C801W ● 1-A0LF
P type
ASB510C801W ● 1-A0LF
ASB680C801W ● 1-A0LF
84.4
L±0.5
ASL680C801W ● 1-A0LF
5±1
1.5±0.2
Model
L(mm)
AHB550C801W ● 1-A0LF
44.4
AHB700C801W ● 1-A0LF
64.4
AHB800C801W ● 1-A0LF
64.4
* Note: ● in model number has “P” or “D” letter.
11.2±0.2
Example)AHB800C801NP0LF.
13±0.5
100±5
64.4
ASL510C801W ● 1-A0LF
90°
*Lead wire: AWG26, UL1371
Red color:(+)
White color:(−)
[mm]
7.2±0.2
BOTTOM VIEW
● ASB170C201WP1-A0LF
● AHB800C302WD1-A0LF
TOP VIEW
TOP VIEW
φ3.6±0.1
90°
CO.5
MAX6.5
φ20.0±0.3
5.9±0.1
Section A
0.8±0.2
65±0.5
*Lead wire: AWG32, UL1993
Red color:(+)
White color:(−)
φ20.0±0.3
1.5±0.1
MAX8.2
24.5±0.5
2.0±0.1
(2.6)
Enlarged of section A
CO. 2±0.1
+0
−0.1
L=100±0.5
6.6
Lead wire
Lead wire (L=100)
100±5
Lead wire (L=100)
Lead wire
(0.3)
[mm]
21.6±0.1
5±1
(0.5)
(0.5)
19.5±0.1
5±1
(0.8)
*Lead wire: AWG26, UL1371
Red color:(+)
White color:(−)
[mm]
12.7±0.1
BOTTOM VIEW
Multilayer Piezoelectric Actuators Vol.06 15
●All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data.
●Please request for a specification sheet for detailed product data prior to the purchase.
●Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog.
2011.06.22 9307MPAVOL06E1106H2
Example of fixing method for without flange type
Metal sealed actuator (Without flange type)
The base of the actuator should be settled to pedestal.
Keep caution on the electrical insulation for the lead wire.
Lead wire
Characteristic Data
◦ ASB series
60
70
ASB680C801*P0
60
50
B6
AS
60
C8
10
40
30
20
C8
01
AS
B3
ASB
40
ASB170C801*P0
0
50
100
0
0
01
*P
0
801*P
10
150
DC voltage(V)
*P
C8
170C
10
Displacement (μm)
Displacement (μm)
ASB340C801*P0
20
B5
0
30
AS
*P
ASB510C801
*P0
40
01
50
50
200
Crest value of voltage
150V (SIN waveform)
DC bias : 75V
ASB510C801*P0
Applied voltage 150VDC
80
Displacement (μm)
Fig-12 Drive frequency vs. Displacement
Fig-11 Compression load vs. Displacement
Fig-10 Voltage vs. Displacement
70
0
40
ASB340C801*P0
30
20
ASB170C801*P0
10
400
600
Generated force(N)
0
10
800
100
1000
Drive frequency(Hz)
Fig-15 Temperature vs. Insulation resistance
Fig-14 DC bias vs. Capacitance
Fig-13 Temperature vs. Displacement
6
60
5
ASB340C801*P0
20
4
ASB510C801*P0
3
ASB340C801*P0
2
ASB170C801*P0
ASB170C801*P0
–20
0
20
40
Temperature(℃)
60
80
0
108
ASB510C801*P0
107
10
1
10
0
Insulation resistance (Ω)
40
30
ASB170C801*P0
9
10
ASB510C801*P0
Capacitance (μF)
Displacement (μm)
50
Measured voltage : 150VDC
1010
Measured frequency : 1kHz
Applied voltage 150VDC
50
100
DC bias voltage(V)
150
6
–25 –15 –5
5
25
45
65
Temperature(℃)
85 105
125
16 Multilayer Piezoelectric Actuators Vol.06
●All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data.
●Please request for a specification sheet for detailed product data prior to the purchase.
●Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog.
2011.06.22 9307MPAVOL06E1106H2
◦ ASL series performance compare with ASB series
Fig-17 Temperature vs. Capacitance
Fig-16 Temperature vs. Displacement
2500
50
Capacitance(nF)
Displacement(μm)
60
ASB510C801***
40
30
ASL510C801***
20
10
0
2000
ASB Type
1500
1000
ASL Type
500
0
-40
-20
0
20
80
100
40
60
Temperature(℃)
120
140
160
-40
-20
0
20
40
60
80
100 120 140 160
SAMPLE:5×5×20mm
Temperature(℃)
◦ AHB series
Fig-18 Voltage vs. Displacement
Fig-19 Compression load vs. Displacement
100
100
90
AHB800C801
90
70
AHB700C801
60
50
40
AHB550C801
30
60
40
30
10
10
50
100
DC Voltage(V)
0
150
AHB700C801
50
20
0
AHB800C801
70
20
0
Voltage: 150VDC
80
Displacement(μm)
Displacement(μm)
80
AHB550C801
0
200
400
600
800
1000
Generated Force(N)
Fig-20 Heat generation vs. Drive frequency
90
Model: AHB800C801NP0LF
0〜150Vp-p
Surface temperature(℃)
80
70
0〜100Vp-p
60
0〜50Vp-p
50
40
Driving waveform: SIN wave 0~Vp-p
Temperature measurement: 10 minutes after the device is in operation
30
20
0
100
200
300
400
Driving frequency(Hz)
500
600
Multilayer Piezoelectric Actuators Vol.06 17
●All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data.
●Please request for a specification sheet for detailed product data prior to the purchase.
●Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog.
2011.06.22 9307MPAVOL06E1106H2
Application Example
Semiconductor manufacturing system
Positioning of stepper, Clamping actuator of wire bonding, Valve actuation of mass flow controller, Actuator of
shaker, Actuator of damping system, Positioning of light source.
Precision machinery, Mechatronics
Sewing machine, Robot, Vibration of parts feeder, Positioning of equipment, Pressure sensor
Home appliance, Audio equipment
Actuator of pump, Speaker
Imaging equipment
Actuator of resolution improvement, Actuator of autofocusing, Actuator of damping
Computer, OA equipment
Pressure sensor, Positing of memory device(data storage or others)
Optical equipment
Positioning of stage, Actuator of autofocusing, Actuator of shaker and damping system
Communications
Polarization control, Wavelength control
Medical equipment
Micropump, Ultrasonic transducer
Measuring instrument
Pressure sensor, Acceleration sensor, Fine positioning
Automobile
Vibration control
18 Multilayer Piezoelectric Actuators Vol.06
●All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data.
●Please request for a specification sheet for detailed product data prior to the purchase.
●Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog.
2011.06.22 9307MPAVOL06E1106H2
Reliability
Majority of failure mode of multilayer piezoelectric actuators is the short circuit due to degraded insulation.
Though the cause of degradation of insulation has not been clarified perfectly, it has been found that the
failure rate varies greatly between statistic uses(DC voltage application)and dynamic uses(pulse voltage
application). Like other electrical components, piezo actuators can be influenced by humidity as well as
applied voltage and ambient temperature. NEC TOKIN has added the metal sealed type piezo actuators
featuring high reliability by eliminating influence of the ambient atmosphere.
This section describes reliability guidelines for static and dynamic usages of the resin-coated and metal
sealed types actuators.
Reliability of our multilayer piezoelectric actuators is represented by MTTF(mean time to failure)in case of
static usage. Though the number of repetitions is considered to be used to represent the reliability in the
case of dynamic usage, the accurate relationship between the indicator and cause has not been determined
because of various influential causes and the mutual action between them. For the present, therefore, only
the obtained data and our concept are described.
(1)Resin-coated Type(AE Series)
a. DC voltage application
The acceleration factors have been obtained empirically for each of the drive voltage, ambient
temperature and relative humidity based on many experimental result. The MTTFr in actual
applications is estimated using equation(1)below with MTTFs observed under accelerated condition
as the reference value.
MTTF r=MTTF s×A v×A h×A t • • • (1)
MTTF r : Estimated value
MTTF s : Reference value (=500h)
A v : Acceleration factor for drive voltage=
150
3.2
V r : Actual voltage (V)
Vr
A h : Acceleration factor for relative humidity=
90
4.9
H r : Actual relative humidity (RH%)
Hr
A t : Acceleration factor for ambient temperature=1.5
40–Tr
10
T r : Actual ambient temperature(℃)
[Example] The following calculation is made for the case of use at 25℃, 60% RH and 100 V:
MTTF r =500×
150
100
3.2
×
90
4.9
60
×1.5
40–25
10
=500×3.66×7.29×1.84
24,500h (2.8years)
b. Pulse voltage application
When this element is driven by a pulse voltage, temperature rises as a result of heating due to
dielectric loss of ceramics. Therefore, the element is not likely to be influenced by the humidity, thus
extending the service life greatly. Since this effect is affected by the element shape, pulse waveform
and frequency, it cannot be calculated by an equation as in the case of DC voltage application.
In NEC TOKINʼs testing on the AE0203D08, there was no failure confirmed after 0-150 V rectangular
pulse wave was applied with 500 Hz for 500 hours(equivalent to 900 million pulses were applied).
Please pay attention to the physical damage due to ringing phenomenon caused by the fixed method
of the element and the speed of the voltage rise.
Please refer to the separately printed literature, “ NEC TOKIN Multilayer Piezoelectric Actuators Userʼs
Manual” for more detail.
Multilayer Piezoelectric Actuators Vol.06 19
●All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data.
●Please request for a specification sheet for detailed product data prior to the purchase.
●Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog.
2011.06.22 9307MPAVOL06E1106H2
(2)Metal Sealed Type(ASB, ASL and AHB Series)
a. DC voltage application
MTTFr of the metal sealed type under the actual operating conditions is calculated/estimated from the
reference MTTFs and the acceleration factor as in the case of the resin-coated type. However since
the internal element is sealed from the atmosphere, it is not influenced by the atmospheric humidity.
Therefore, equation(2)below is used.
MTTF r =MTTF s×A v×A t
• • • (2)
MTTF r : Estimated value
MTTF s : Reference value (=36,000h)
A v : Acceleration factor for drive voltage=
100
2
V r : Actual operating voltage (V)
Vr
A t :Acceleration factor for ambient temperature=1.5
85–Tr
10
T r : Actual operating temperature (℃)
[Example] The following calculation is made for use at 25(c and 150 V:
MTTF r=36,000×
100
150
2
×1.5
85–25
10
=36,000×0.44×11.3
179,000h (20.4years)
b. Pulse voltage application
Like the resin-coated type, it is extremely difficult to estimate reliability by using an equation in the
metal sealed type because of the influence of the pulse waveform, frequency, etc. in addition to the
voltage and ambient temperature.
In NEC TOKINʼs testing on the ASB170C801NP0, there was no failure confirmed up to 1000 hours
(equivalent to 100 million pulses were applied)under the conditions below.
[Conditions for evaluation]
Temperature: 85 ± 2℃
Humidity: 90 to 95% RH
Load: 200 N to 500 N(20 kgf to 50 kgf)
Drive voltage waveform: Rectangular wave, 30 Hz, 0 V to 100 V, duty ratio at 30%
20 Multilayer Piezoelectric Actuators Vol.06
●All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data.
●Please request for a specification sheet for detailed product data prior to the purchase.
●Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog.
2011.06.22 9307MPAVOL06E1106H2
Guide to Use
Fixing Method:
⃝ Carefully prevent the piezo actuators from being bent, being twisted, or being applied tensile force.
Reference: Guide for tolerance of twisting and tension
Reference value
Twisting force
3 × 10 - 1N・m or less
Tension
50 N or less
Remarks
For an actuator which generates a force of 800 N
(compression resistance)
⃝ Install the actuator so that the center axis of generated displacement is aligned with the center axis of the load.
a. Resin-coated type
• Epoxy-based adhesives are recommended for bonding. Select adhesives that have high rigidity and
allow minimum thickness so that the generation force and displacement cannot be deteriorated. Also do
not form adhesives at the side of actuator.
• When thermosetting resin is used, perform polarizing treatment(see the caution section)again after the
adhesive is settled.
• The resin-coated type is weak to tensile force because of its structure and may be broken when tensile
force is applied onto the device. Using the device in the state that constantly applies compression is
effective against any mechanical damage. The pressure applied to this element should be kept at 20 to
50% of the force generated by this element(compression resistance).
• Install the element so that the axis of generated displacement is vertical to the mounting surface.
b. Metal sealed type
• Select the mounting bracket(female thread type or flange type)according to the mounting method, and
install the element utilizing the bracket.
• Fix the element securely so that the generated force and displacement cannot be deteriorated.
• Connect the driven item at the displacement generating end after securing the mounting portion so that
it avoids unnecessary stress applied at the time of installation.
• Though this product is designed to apply a compressive force to the internal element by the metal case, avoid
any usages that cause bending, twisting, or tension force when the device is in use
Example of Actuator mounting:
Moving part or load
Moving part or load
Spherical surface
Hinge
Only one side is touching the actuator.
(Stress is concentrated on one edge
and generates share mode stress)
Piezo Actuator
The actuator may break.
a) Example of wrong mounting
Imperfect alignment between actuator and load
<Actuator will be broken>
Piezo Actuator
Piezo Actuator
b) Example of correct mounting
Mount the device so that the load is uniformly
applied by the spherical surface or the hinge
Driving Method:
⃝ Connect the red lead wire to the positive(+)terminal of the power supply. Also prevent reverse voltage application.
⃝ Basically the voltage controls the aimed displacement and generated force. In driving, however, it is also necessary
to take ringing due to the resonance or hysteresis of the element itself into consideration. In pulse driving, it is further
necessary to pay sufficient attention to heat generation due to dielectric loss, charge/discharge current due to the
capacitive component and the power output impedance as well. Please refer to the separately printed
literature, “NEC TOKIN Multilayer Piezoelectric Actuators Userʼs Manual”
Multilayer Piezoelectric Actuators Vol.06 21
●All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data.
●Please request for a specification sheet for detailed product data prior to the purchase.
●Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog.
2011.06.22 9307MPAVOL06E1106H2
Generated force and load relation:
Static load: No load value change when actuator moves.
20
400N static load is applied
Displacement(μm)
15
M
10
5
0
−5
M
Model: AE0505D16
−10
0
50
100
Voltage(V)
400N
150
Piezo Actuator
20
Total displacement is not changed.
Displacement(μm)
15
10
5
Zero point shift.
150V
0
−5
−10
−15
−20
Static load: Initial position (0V position) is dropped
by spring constant but total displacement has the
same value under static load.
0V
0
200
400
600
800
1000
Load(N)
Fluctuating load: Load value changes by spring reaction when actuator moves.
20
Displacement(μm)
18
Spring load of
14.3N/μm
16
14
12
10
Reduction of displacement
8
6
4
Model: AE0505D16
2
0
0
50
100
150
Voltage(V)
Reduction of displacement
20
Displacement(μm)
18
Piezo Actuator
Spring load of 14.3N/μm
16
14
12
Load-Displacement
line of actuator
10
8
6
4
Displacement loss
2
0
0
200
400
600
800
1000
Load(N)
Spring load (Fluctuating load): Displacement
is changed by relation between generated
force and spring constant of actuator.
22 Multilayer Piezoelectric Actuators Vol.06
●All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data.
●Please request for a specification sheet for detailed product data prior to the purchase.
●Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog.
2011.06.22 9307MPAVOL06E1106H2
Precautions
⃝ Connect the red lead wire to the positive(+)terminal of the power supply.
⃝ Carefully avoid electric shock since a high voltage is in use.
⃝ Never apply excessive tension to a lead wire. Do not handle the product by picking up or moving the lead wire.
⃝ Do not disassemble the case of the metal sealed type.
⃝ Machining of the actuator element and replacement of the lead wire are prohibited.
⃝ Do not handle the resin-coated type(AE series)with bare hands. Otherwise, the reliability of the element
would be degraded.
⃝ Do not wash resin-coated type(AE series)by organic solvant.
⃝ Avoid excessive physical shock resulting from, for example, dropping. Otherwise, the internal piezoelectric ceramic
element may be damaged.
⃝ If the actuator is exposed to high temperature above 100℃ or if it is used after long storage period(more
than three months), it should be polarized by using the circuit configuration and conditions shown below.
R1
V
S
PA
R2
Protective resistor R1=1kΩ
Protective resistor R2=1kΩ
Polarizing conditions: DC voltage application
0V→150±0.2V (to be retained for 10 seconds) →0
⃝ Do not apply voltage exceeding maximum rating voltage, or do not do rapid charging and discharging.
These might lead to degradation of the reliability or mechanical fracture.
⃝ Do not use the actuator in high concentration of highly inflammable gas. Otherwise, ignition may occur.
⃝ Use the actuator so as not to cause bending, twisting or tension. Furthermore, align the center axis of displacement
of the actuator with the center axis of the mechanical load.
⃝ Drive the actuator so that the rising speed is more than three times as much as the resonance period in
order to prevent the device from damaging by ringing.
⃝ Store the resin-coated type(AE series)preferably in a dry atmosphere(desirably below 40% RH)at ordinary
temperatures(- 5 to + 40˚C). Avoid condensation on the product surface.
⃝ Store actuators where there is no vibration.
⃝ These products must be handled properly as industrial waste. When disposing, please contact your local waste
disposal service.
⃝ Piezo actuator is industrial wastes, make sure disposal method under the laws.
Multilayer Piezoelectric Actuators Vol.06 23
●All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data.
●Please request for a specification sheet for detailed product data prior to the purchase.
●Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog.
2011.06.22 9307MPAVOL06E1106H2
24 Multilayer Piezoelectric Actuators Vol.06
●All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data.
●Please request for a specification sheet for detailed product data prior to the purchase.
●Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog.
2011.06.22 9307MPAVOL06E1106H2
Multilayer Piezoelectric Actuators Vol.06 25
●All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data.
●Please request for a specification sheet for detailed product data prior to the purchase.
●Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog.
2011.06.22 9307MPAVOL06E1106H2
26 Multilayer Piezoelectric Actuators Vol.06
●All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data.
●Please request for a specification sheet for detailed product data prior to the purchase.
●Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog.
2011.06.22 9307MPAVOL06E1106H2
When using our products, the following precautions should
be taken.
(1)
Safety designing of an apparatus or a system allowing for failures of electronic components used
in the system
In general, failures will occur in electronic components at a certain probability. NEC TOKIN makes
every effort to improve the quality and reliability of electronic component products. However, it is
impossible to completely eliminate the probability of failures. Therefore, when using NEC TOKINʼ
s electronic component products, systems should be carefully designed to ensure redundancy in
the event of an accident which would result in injury or death, fire, or social damage, to ensure
the prevention of the spread of fire, and the prevention of faulty operation. (Please refer to precautions to be taken when using multilayer piezoelectric actuators for the details of failures.)
(2)
Quality level of various kinds of parts, and equipment in which the parts can be utilized
Electronic components have a standard quality level unless otherwise specified.
NEC TOKIN classifies the level of quality of electronic component products into three levels, in
order from a lower level, a standard quality level, a special quality level, and a custom quality level
in which a customer individually specifies a quality assurance program. Each of the quality levels
has recommended applications.
If a user wants to use the electronic parts having a standard quality level in applications other
than the applications specified for the standard quality level, they should always consult a member
of our companyʼs sales staff before using the electronic parts.
Standard quality level
Special quality level
Custom quality level
: Computers, office automation equipment, communications equipment,
measuring instruments, AV equipment, household electrical appliances,
machine tools, personal equipment, industrial robots
: Transportation equipment (automobiles, railways, shipping, or the
like), traffic signals, disaster prevention/crime prevention systems, a
variety of safety devices, and medical equipment which is not directly
intended for life-support purposes
: Equipment for airplanes, aerospace equipment, nuclear power control
systems, and medical equipment, apparatus or system for life-support
purposes
Unless otherwise shown, the quality level of NEC TOKINʼs electronic component products included in
documents such as catalogues, data sheets or data books is the standard quality level.
(3)
This manual is subject to change without notice.
The contents of this manual are based on data which is correct as of June 2011, and they may be
changed without notice. If our products are used for mass-production design, please cousult with
a member of our companyʼs sales staff by way of precaution.
(4)
Reprinting and copying of this manual without prior written permission from NEC TOKIN
Corporation are not permitted.
(5)
Industrial property problems
In the event any problems associated with industrial property of a third party arising as a result of
the use of our products, NEC TOKIN assumes no responsibility for problems other than problems
directly associated with the constitution and manufacturing method of the products.
(6)
Should any of these products come under the category of strategic goods or services(according
to Japanʼs foreign trade and foreign exchange regulations), the sender must obtain an export
license from the Japanese Government before said products can be exported outside Japan.
●All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data.
●Please request for a specification sheet for detailed product data prior to the purchase.
●Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog.
2011.06.22 9307MPAVOL06E1106H2
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