Qualiflow AFM55 Mfcs & mfms sery Datasheet

Mass flow controllers &
accessories
t h e c a t a l o g u e D 1 0 -0 3 V0 2
www.qualiflow.com
MFCs & MFMs series
Smart solutions to meet your needs
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Special MFC configuration upon request (metal design...)
AF C 5 0 / A F M 5 5 The traditional analog Qualiflow Therm AFC 50 and AFM 55 with elastomeric seals and magnetic
valve :
- Unique fast and reliable horizontal magnetic valve
- Low pressure drop option for TEOS SDC, TiCl4, etc… Using Large sensor diameter gives very low
pressure drop and defeats contamination and clogging
- Perfect flow splitting through special bypass design, giving optimal linearity and accuracy
10sccm
25slm
AF C 5 0 D / A F M 5 5 D The highest performances of digital P.C.B. combined with elastomeric seals on the Qualiflow
Therm AFC 50 D and AFM 55 D :
- Full potential of digital technology
- Low pressure drop option for TEOS SDC, TiCl4, etc..
- 100% compatible with analog AFC50
10sccm
25slm
AF C 2 0 2 / A F M 3 0 2 For high flow from 30 slm to 250 slm, the traditional analog Qualiflow Therm AFC 202 and AFM
302 with elastomeric seals and magnetic valve :
- Unique fast and reliable horizontal magnetic valve
- Special pressure compensated stainless steel valve for ultra fast flow control
- No particle generation or entrapment
30sccm
250slm
AF C 2 0 2 D / A F M 3 0 2 D For high flow from 30 slm up to 250 slm, the highest performances of digital P.C.B. combined with
elastomeric seals on the Qualiflow Therm AFC 202D and AFM 302D :
- Full potential of digital technology
- Special pressure compensated stainless steel valve for ultra fast flow control
30slm
250slm
AF C 2 6 0 - 2 6 1 / A F M 3 6 0 - 3 6 1 The traditional analog Qualiflow Therm AFC 260 & 261 and AFM 360 & 361 with elastomeric
seals and reliable thermal valve :
-�� Compatible with other MFC
-� Economic design, simple construction
-� Possibility to regulate with external readout
10sccm
5slm
10slm
20slm
AF M 1 0 & 1 1 A small flow meter designed to replace rotameter whenever an electrical signal of the flow
measurement is required :
- Low cost design, simple construction
- Small footprint
- Accuracy up to ±2% F.S.
2slm
60slm
100slm
200slm
395, rue Louis Lépine - BP7 - 34935 Montpellier - Cedex 9 - France - [email protected] - tel# (0)4 67 99 47 47 fax# (0)4 67 99 47 48
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