Wafer-carrier Mounting Photomicrosensors
EE-SPY801/802
Photomicrosensors for detecting
wafer-carrier mounting.
■ The mounting position is set with a pedestal.
■ The contact surface with the wafer carrier uses a special
chemical-resistant fluoro-resin.
■ The unique optical system enables stable detection of
almost all wafer-carriers.
■ Light modulation effectively reduces external light
interference.
■ Utilizes talc-free clean cables.
Refer to Precautions on page 95.
Ordering Information
List of Models
Appearance
Infrared light
Sensing
method
Sensing distance
Output configuration
Cable length
Model
EE-SPY801
Reflective type
0 to 3 mm
Turns ON when wafer carrier
is present.
2m
EE-SPY802
Accessories (Order Separately)
Item
Model
EE9-C01
Pedestal
EE9-C02
Note: There are no sensor functions provided.
EE-SPY801/802 Wafer-carrier Mounting Photomicrosensors
93
Ratings/Characteristics
Item
Models
EE- SPY801/802
Sensing distance
(Standard sensing object)
0 to 5 mm (White paper: 15 × 15mm2, reflection factor: 90%)
0 to 3 mm (Black paper: 15 × 15mm2, reflection factor: 10%)
Sensing object
Transparent or opaque wafer carriers
Operation indicator
Lit orange when object is detected.
Light source
GaAs infrared LED with a peak wavelength of 940 nm
Supply voltage
12 to 24 VDC ±10%, ripple (p-p): 5% max.
Current consumption
30 mA max.
Control output
NPN open collector:
Load power supply voltage: 5 to 24 VDC
Load current: 100 mA max.
100 mA load current with a residual voltage of 0.8 V max.
40 mA load current with a residual voltage of 0.4 V max.
Response time
5 ms max.
Ambient illumination
3,000 lx max. with incandescent light or sunlight on the surface of the receiver
Ambient temperature
Operating: −10 to +55°C
Storage: −25 to +65°C (with no icing)
Ambient humidity
Operating: 5% to 85%
Storage: 5% to 95% (with no condensation)
Vibration resistance
Destruction: 1 to 500 Hz, 1.0-mm single amplitude or 150 m/s2 each in X, Y, and Z directions
3 times and for 11 min. each
Shock resistance
Destruction: 500 m/s2 for 3 times each in X, Y, and Z directions
Enclosure rating
IEC IP30
Connecting method
Pre-wired (Standard length: 2 m)
Weight (packaged)
Sensor: Approx. 43 g; Accessory (Guide): Approx. 9 g
Case
Material
Ethylene tetrafluoro ethylene (ETFE)
Base plate Polybutylene phthalate (PBT)
Accessories
Instruction Manual
I/O Circuit
Model
Output
configuration
Timing charts
With wafer carrier
Without wafer carrier
EE-SPY801
EE-SPY802
Turns ON when
wafer carrier is
present.
Operation indicator ON
(orange)
OFF
Output
transistor
Load
(etc., relay)
94
ON
OFF
Operates
Releases
Output circuit
Operation indicator (orange)
Main
circuit
EE-SPY801/802 Wafer-carrier Mounting Photomicrosensors
+ (Brown)
OUT
Load
(Black)
− (Blue)
12 to 24 VDC
Standard Usage
This sensor is designed to detect wafer-carrier mountings.
The bottom of the wafer carrier has a ribbed construction for
the leg section, as shown in the following diagram. The EESPY801/802 detects the wafer-carrier mounting using a
reflective optical sensor that detects the leg section of the
wafer-carrier.
Install a Sensor (or Guide) at each of the four corners
indicated by a circle in the following diagram.
A
D
Wafer carrier side view
(details omitted)
(Top view)
Wafer carrier side view
(details omitted)
(Side view)
Sensor
Sensor
Wafer carrier leg section
B
C
A and C
EE-SPY801 or EE9-C01
B and D
EE-SPY802 or EE9-C02
Precautions
Refer to General Precautions on page 23 to 28 for general precautions.
Warning
Do not use this product in sensing devices
designed to provide human safety.
Precautions for Correct Use
Make sure that this product is used within the rated ambient
environment conditions.
● Wiring
When extending the cable, use an extension cable with
conductors having a total cross-section area of 0.15 mm2. The
total cable length must be 5 m maximum.
To use a cable length longer than 5 m, attach a capacitor with
a capacitance of approximately 10 µF to the wires as shown
below. The distance between the terminal and the capacitor
must be within 5 m.
● Mounting
Mount the Photomicrosensors securely on a flat surface, and
tighten the mounting screws using a tightening force of
0.30 N·m max. (Using a spring washer is recommended to
prevent the screws from becoming loose.)
● Adjustment
The EE-SPY801/802 requires 10 ms to be in stable operation
after power is supplied.
If separate power supplies are used for the EE-SPY801/802
and load, be sure to supply power to the EE-SPY801/802
before supplying power to the load.
● Operating Environment
Do not use the EE-SPY801/802 in locations subject to salty air
or corrosive gases, such as hydrogen chloride gas.
EE-SPY801/802 Wafer-carrier Mounting Photomicrosensors
95
Dimensions (Unit: mm)
EE-SPY802
EE-SPY801
Indicator window (orange)
Indicator window (orange)
22
22
32 +1.3
−0.3
32+1.3
−0.3
30+1.3
0
8
35°
11
11
35°
35°
2
3.5
15
15
30+1.3
0
8
35°
2
3.5
6
6
Sensing
window
Sensing window
7.4
8
5
5
Vinyl-insulated round cable of
3.5 dia., 3 cores,
(0.15 mm2 with 1.0-dia. insulator);
Standard length: 2 m
2
15
15
Two, M4 (depth: 6)
7.4
8
Vinyl-insulated round cable
of 3.5 dia., 3 cores,
(0.15 mm2 with
1.0-dia. insulator);
Standard length: 2 m
2
Two, M4 (depth: 6)
Accessories (Order Separately)
Pedestal
EE9-C01
Pedestal
EE9-C02
22
22
32+1.3
−0.3
32+1.3
−0.3
11
11
35°
35°
30+1.3
0
35°
30+1.3
0
15
15
6
6
5
5
2
15
Two, M4 (depth: 6)
96
35°
15
2
Two, M4 (depth: 6)
EE-SPY801/802 Wafer-carrier Mounting Photomicrosensors
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ALL DIMENSIONS SHOWN ARE IN MILLIMETERS.
To convert millimeters into inches, multiply by 0.03937. To convert grams into ounces, multiply by 0.03527.
OMRON ELECTRONIC
COMPONENTS LLC
55 E. Commerce Drive, Suite B
Schaumburg, IL 60173
847-882-2288
Cat. No. X064-E1-02
8/05
OMRON CANADA, INC.
OMRON ON-LINE
885 Milner Avenue
Toronto, Ontario M1B 5V8
Global - http://www.omron.com
USA - http://www.components.omron.com
Canada - http://www.omron.ca
416-286-6465
Specifications subject to change without notice
Printed in USA