Technologies & Products Press Conference 2014 CeraPlas™ A new kind of piezo-based cold plasma generator Markus Puff Head of Materials R&D Innovative Themes Piezo and Protection Devices Business Group November 12, 2014 Plasma has a wide spectrum of potential uses! Adhesion Laminating Water repellance Plasma requirements • Cold temperature • Atmospheric pressure • Air as process gas Food Wound healing Technologies & Products Press Conference 2014 • CeraPlas™ - a new kind of piezo-based cold plasma generator Cavities © EPCOS AG A TDK Company CC • 11/14 • 2 Challenges for plasma sources Drawbacks of grid-connected sources Requirements for future sources High-voltage sources • No high-voltage cables or connectors • High input power (>100 W to 10 kW) • Low plasma temperature • High plasma temperature • Compact size • Large size • Low power RF sources • Suitability for battery-driven, handheld devices • High input power (10 to 2000 W) • High plasma temperature • High operating frequency • Large size Dielectric barrier discharge sources • Atmospheric pressure • Easy handling • Ability to use different process gases • High efficiency (ozone generation rate) • High voltage source • Constant distance required Technologies & Products Press Conference 2014 • CeraPlas™ - a new kind of piezo-based cold plasma generator © EPCOS AG A TDK Company CC • 11/14 • 3 CeraPlas™ enables compact cold plasma solutions • A completely new kind of plasma generator PZT = lead zirconate titanate Pb Zr Ti • Based on multilayer technology with co-fired hard PZT ceramics and copper electrodes CeraPlas is an ideal component for generating cold plasma • Voltage supply and plasma generation combined in a single component • No special plasma generating electrode required • Ignition directly in air or in industrial gases (e.g. Ar, N2, He) • No high-voltage plugs or cables needed • Low plasma temperature (< 50 °C) • High ozone generation rate • Smaller and lighter and therefore well suited for handheld devices Technologies & Products Press Conference 2014 • CeraPlas™ - a new kind of piezo-based cold plasma generator © EPCOS AG A TDK Company CC • 11/14 • 4 Combined voltage supply and plasma generator High voltage generation • A single piezoelectric component generates high voltage in minimum space Low input voltage (12V) High output voltage (10 – 15 kV) • Vibrating system with mechanically coupled input and output sides for the transformation of low input voltage to high output voltage Plasma generation • Dielectric barrier discharge process on output electrode • Electrical discharge between two electrodes separated by an insulating dielectric barrier by applying an alternating voltage Technologies & Products Press Conference 2014 • CeraPlas™ - a new kind of piezo-based cold plasma generator © EPCOS AG A TDK Company CC • 11/14 • 5 Fixation for optimum efficiency Challenge Create a reliable electrical connection and mounting without damping Output Mechanical displacement Input Maximum mechanical displacement Mounting at the nodal points of mechanical displacement Maximum mechanical displacement Mounting at the nodal points of mechanical displacement leads to optimum efficiency. Technologies & Products Press Conference 2014 • CeraPlas™ - a new kind of piezo-based cold plasma generator © EPCOS AG A TDK Company CC • 11/14 • 6 Driver specially developed for CeraPlas • Optimally matched to requirements of plasma generator Driving voltage and current are in phase Input voltage [V] Input current [A] • New feedback control: ¬ Compensation of transformer’s input impedance for higher sensitivity and stability • Miniaturized design • Efficiency > 85% by using SMPS • Operating frequency at parallel resonance • Rapid regulation of load changes • No hard switching CeraPlas driver enables plug-and-play solutions. Technologies & Products Press Conference 2014 • CeraPlas™ - a new kind of piezo-based cold plasma generator © EPCOS AG A TDK Company CC • 11/14 • 7 Superior surface activation performance Poor 95° Poor wettability 45° Good wettability 80 Wettability Contact angle [°] 100 60 40 20 0 Complete wettability Complete 0° Ar None Air N2 Plasma treatment [8 l/min] Measurement courtesy of relyon plasma CeraPlas features a more effective surface activation than conventional techniques at a very low power input. Technologies & Products Press Conference 2014 • CeraPlas™ - a new kind of piezo-based cold plasma generator © EPCOS AG A TDK Company CC • 11/14 • 8 Component and module for plasma generation units CeraPlas™ component Output voltage [kV] CeraPlas™ module Up to 15 (depending on load) Input voltage [V] 12 to 24 [Vpp] 12 to 15 [V] Dimensions [mm] 72 x 6 x 2.8 72 x 6 x 2.8 (CeraPlas™) 100 x 25 (Driver) Max. transferred power [W] 10 Operating frequency fop [kHz] ~ 50 < 50 °C Plasma temperature Process gas Air and other industrial gases, e.g. N2, Ar, He Ozone generation rate Materials Terminal High Hard PZT with copper electrodes Solderable outer termination Plug connector to power supply Assembly Soldered and connected at nodal points Plug-and-play Availability Ex stock On request Technologies & Products Press Conference 2014 • CeraPlas™ - a new kind of piezo-based cold plasma generator © EPCOS AG A TDK Company CC • 11/14 • 9 First product featuring CeraPlas™ New piezobrush PZ2 from relyon plasma • Extremely efficient plasma generation • Multiple process gases • Low plasma temperature • Very robust and reliable • Compact design • More efficient performance than low pressure plasma chambers • High power density First proof of benefits on a system level Technologies & Products Press Conference 2014 • CeraPlas™ - a new kind of piezo-based cold plasma generator © EPCOS AG A TDK Company CC • 11/14 • 10 www.global.tdk.com • www.epcos.com