Total support for materializing the ideal cleanroom CLEANROOM TOTAL SOLUTION 2012 C L E A N R O O M T O T A L S O L U T I O N http://www.fujielectric.co.jp/products/cleanroom/ Safety notes Use the system properly by reading the Operation Manual and the Specifications carefully or consulting the dealer where you purchased the system. Only qualified personnel with the appropriate expertise and knowledge in the relevant fields should operate the system. Printed on recycled paper. Gate City Ohsaki East Tower 1-11-2, Osaki, Shinagawa, Tokyo 141-0032, Japan Phone :+81-3-5435-7111 Website URL http://www.fujielectric.co.jp Information in this catalog is subject to change without notice. 2012-8 Printed in Japan EK613 S o l u t i o n FPD Semi-conductor Pharmaceutical/Food FFU Monitoring System・・・・・・・p31 We are capable of offering optimum solutions, such as the state-ofthe-art local unit cleanroom, indispensable for cleanness at low cost. How to choose the FFU monitoring system Function List F-SITE-FMR500 ARGE SCALE 2 L F-SITE-FMC500 F i e l d OST PERFORMANCE How to choose FFU Standard Type[WLFA] Large air volume Type[WLFB] 1-phase Type[WLFC] AC motor Type[WLFD] Stand-alone Type[WLFE] Thin Type[WLFF] Controller Specifications How to choose FFU for manufacturing equipment F-Stage[WLFG] F-Cube-N[WLFH] Heat-resisting FFU[WLFI WLFJ] Chemical FFU[WLFK] 1 C FFU・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・p11 F i e l d For cleanroom technology, Fuji Electric started development of cleanroom equipment at the beginning of the 1970s and constructed our own semiconductor plant cleanroom in the 1980s. Since then, we have accumulated extensive know-how for cleanroom through improvement of the production environment jointly promoted with customers operating large-scale cleanrooms. To solve various problems, we have developed high-performance products based on our wide range of element technologies as an electrical equipment manufacturer and materialized various solutions. Automobile/ Precision components/ Lithium-ion battery S o l u t i o n Solution examples・・・・・・・・・・・・・・・・p7 F-SITE-FMV300 We can provide prompt support for large-scale cleanrooms with our industry-leading production system and experience. F-SITE-FMC200 F-SITE-FMC100 LSI LCI COLOGY Lineups Our FFU materializes the highest efficiency in the industry by diverting the hydroelectric turbine technology that we have developed and improved for many years into air cleaning and by applying our power electronics technology to flexible operation of electricity supply. Lighting panel/Blank panel CCURACY Joinery (Doors, Windows) Interior and partion panel Maintenance hatch, Maintenance passage Free access floor Power distribution equipment Energy saving measures・・・・・・・p57 Proposal for energy saving/ replacement Materialization of energy saving/ replacement N 1 CLEANROOM EW TECHNOLOGY With our comprehensive capability as a manufacturer, we have been improving various state-of-the-art technologies, such as FFU Active Control with the particle sensor, the wind direction/velocity sensor and the ultra-precise temperature control etc. History of development for the cleanroom at Fuji Electric Engineering tools CLEANROOM Re p l ac em e n t We can provide accurate cleanroom design materializing a clean environment by using our engineering capability in airflow analysis as much as possible. Bypass panel (Filter) 3 A Ceiling grid frame F i e l d E Cleanroom materials・・・・・・・・・・・p47 2 S o l u t i o n Industrial sectors requiring the cleanroom and levels What is the cleanroom? A floor area or space, usually not well defined, operating at a lower airborne contamination level than the general surrounding environment Cleanroom is a specially constructed enclosed area which is environmentally controlled, with respect to airborne particulates, temperature, humidity, air pressure, air flow patterns, air motion, static charges, and lighting. To secure high-quality and reliability of products, it is very important to prevent adhesion of particles. This technology is applied to prevention of hospital-acquired infection, bacterial contamination in pharmaceutical plants, and food alteration in food plants. The industrial sectors requiring a cleanroom are constantly expanding. Class 4 0.3μm Class 1 Class 6 Class 7 0.5μm 0.5μm Class 8 0.5μm Class 10 0.1μm Class 5 Class 100 0.3μm 0.3μm Class 10 Class 100 Class 1000 Class 10000 LSI manufacturing wafer process LSI assembly/test process Semiconductor/FPD Silicon single crystal Photo mask Photoresist Printed circuit board Liquid crystal for display Organic EL Solve by introducing the cleanroom Foreign material contamination Food spoilage Chemicals for manufacturing LSI Solar panel Precision electronic components Magnetic head Precision machinery Bacterial contamination Class 3 Semiconductor manufacturing equipment Food sector Hospital-acquired infection Class 2 Class 1 Increase of failures and defectives Medical and Pharmaceutical sector Class 1 0.1μm Cleanliness (Conventional expression, piece/ft 3 ) Industrial sector Reduction in yield rate Cleanliness (ISO class) Various kinds of failures caused by air pollution Disk Photographic film Optical fiber Miniature bearing Lens Precision measuring instrument manufacturing Antibiotic Cleanliness of the cleanroom is generally expressed in the number of particles contained in the unit volume of air. Therefore, the smaller the numbers of the cleanliness Standard Standard particle size Cleanliness conventionally FS-209D FS-209E used (pieces/ft3) 0.1μm 0.3μm 0.5μm 0.5μm 1.5 Standards (FS-209D E) were used generally but has been 2 abolished when ISO14644 has been enacted (2000). 10 1 widely used in actual cleanrooms. 100 This expresses the fine-particulate concentration as the 10 number of particles in 1 cubic foot (pieces/ft3). altered to 0.3 μm or 0.1 μm at the actual sites. Thus, it is necessary to pay attention to the subject particle size and the unit volume (m3/ft3) to confirm the class. 10 Cleanliness class 1,000 100 100 10,000 1,000 1,000 100,000 10,000 10,000 100,000 100,000 3 CLEANROOM M1 2.5 M1.5 3 M2 3.5 M2.5 4 M3 4.5 M3.5 5 M4 5.5 M4.5 6 M5 6.5 M5.5 7 M6 7.5 M6.5 8 Preparation packaging line Medical equipment and disposals Sterile hospital room Operating room Milk and milk products Meat and meat processing Brew Confectionery and bakery Barrier system Others However, the cleanliness class based on FS 209D is still 1 Injection drug Prescription laboratory Foods 1 For the standard of cleanliness, the U. S. Federal FS-209D standard, the standard particle sizes are often 0.1μm 1 class, the higher the grade (less dust) of the cleanroom. Although the standard particle size is 0.5 μm in the JIS/ISO Medical and Pharmaceutical Expression of the cleanliness level Isolator Mushroom cultivation Cosmetics Recommended method FFU-method cleanroom Clean cooling equipment CLEANROOM 4 S o l u t i o n Components of FFU-method cleanroom In response to current requirements and future demand, it is possible to construct an ideal cleanroom. System ceiling materials The FFU-method cleanroom is a method of cleaning a space by constructing a grid-shaped ceiling with aluminum frames and by installing the necessary number of FFUs (fan filter units) for materializing the required cleanliness. This is suitable for a cleanroom requiring high cleanliness with single airflow and adopted widely to large-scale cleanrooms in the semiconductor and flat panel industries. In order to improve performance and maintenance efficiency of the cleanroom, all materials required such as grid ceiling frames, lighting panels, blank panels and interior panels are provided. Temperature control equipment A wide range of lineups covering from the large air-volume type for system ceilings to the thin type of stockers with limited spaces is provided. Various kinds of FFUs for manufacturing equipment, which you can select in accordance with functions and air volume, are available. Environmental sensor Concept catalog In order to improve quality and shorten the processing time, various kinds of temperature control equipment covering from the highly accurate temperature/humidity environment control to the temperature control for wafers and glass substrates are provided. Custom made production is available upon request. P.11 FFU P.47 Cleanroom component equipment Concept catalog Various kinds of cleanroom component equipment considering high efficiency, power saving and low noise are lined up, covering from an air shower to a garment stocker. Concept catalog Various kinds of environmental sensors such as F-Planet, a cleanroom environmental sensor, a wind direction/velocity sensor are provided, so that you can quickly support trend analysis and environment alteration. Airflow control equipment Concept catalog Various kinds of equipment controlling airflow, such as air curtains, FFU with louvers, draft chambers, and exhaust units, are provided. FFU monitoring system P.31 Special environment booth This system provides real-time monitoring capable of stable manufacturing and improvement of yield rate. Our monitoring system, the F-SITE series, is a lineup which can at will materialize the visualization of the cleanroom covering from a large-scale to a small-scale cleanrooms. Concept catalog Various kinds of clean booths satisfying wide requirements, such as high cleanliness support, chemical pollution measures, and prevention of radiation exposure, are available. We do custom-made for necessary places, necessary sizes, and necessary performance. Best choice from Solution examples for respective purposes and use P.7 1 Merits 5 CLEANROOM Energy saving effects The equipment consumes less energy than the pressure chamber method requiring a large-sized air conditioner. Furthermore, you can operate the cleanroom with economy since ON / OFF switching and air velocity adjustment can be made for each FFU independently. [kW] 100 90 80 70 60 50 40 30 20 10 0 Difference in Enery Required (estimates of Fuji Electric) 78.7 Pressure chamber method 19.3 FFU-method 2 Redundancy Even if several units of FFU fail, performance as a cleanroom can be maintained. It can be said that the system has high resistance to failures. 3 Flexibility Cleanliness in an area is adjustable by adding or changing the position of FFUs. It is possible to flexibly handle alteration of production lines. 4 No leakage Above the system ceiling 5 Easy maintenance With the no-leakage method, there is no risk of cleanliness deterioration in the cleanroom since maintenance service can be executed while operating the cleanroom. There is no risk of particle leakage to the cleanroom side since the space above the system ceiling achieves negative pressure compared to the inside of the cleanroom. Inside of the cleanroom CLEANROOM 6 S o l u t i o n Solution examples FPD Solution examples Semiconductor areas having different 2 Separate levels of cleanliness air velocity required 3 Securing for a large area Cleanliness of 1,000 to 100,000 in a wide area can simply be cleaned without constructing a system ceiling. Areas having different levels of cleanliness, which used to be separated with panels, can be separated with highspeed air blowers. Even in a space with a high ceiling more than 10 m such as a stocker area, high speed flow of 0.8 m/s secures the wind velocity required for pass lines Cleaning inside of the equipment in accordance with the shape and the specifications suitable for the equipment installed. Chemical pollution of wafers can be reduced by applying improved materials/structures and incorporating chemical filters. The unit can be installed in a small space with increasing temperature by employing the small-sized heat-resisting motor. Flexibility of installation positions will be expanded. Clean cooling equipment Air curtain Large air volume FFU Chemical FFU Heat-resisting FFU of inspection areas, 1 Cleaning dry areas Concept catalog Prevention of foreign substance 4 adhesion in a stocker Cleaning a stocker area efficiently with thick body and large air volume Maintenance/Production area Concept catalog of chemical 5 Removal constituents Chemical pollutants that are problem in the FPD manufacturing process, such as NH3, SOx, NOx, are removed Maintenance/Production area P.11 6 Quick cooling of Photo Process 2 Cleaning of thermal oxidation units P.12 P.12 temperature/humidity control 4 Precise for the resist-coating part 3 Cleaning of EFEM glass substrates Deposition process S o l u t i o n Maintenance area 1 Cleaning of coater/developers Substrates after being baked can be cooled quickly by applying cold air to the glass efficiently with the special nozzle. Particle adhesion can be reduced on EFEM by adjusting pressure between an FFU and FOUP or equipment. Atmosphere of some parts requiring precise temperature/ humidity management, such as the resist-coating part can be controlled at high accuracy of +/-0.01 ℃ and +/-0.3% with our unique controlling method. Homogenization of resist film quality can be materialized. Substrate quick cooling unit FFU for manufacturing equipment Precise temperature/humidity control unit External air Cleaned air Thin type FFU Chemical washer P.11 Stocker area 7 Air cooling of glass substrates Substrates after being baked are cooled with air at the cassette by the cassette. It is possible to cool the surface temperature uniformly in a short time. Glass substrate cooling equipment Photo process Concept catalog Large-sized clean booth for G10 Concept catalog homogenization of 8 Temperature substrate before photo process Surface temperature of substrates before entering the stepper is uniform and highly accurate. Dispersion of pattern transfer caused by uneven temperature can be reduced. Glass substrate temperature stabilizing equipment Photo process Concept catalog control for 11 Temperature entire CR Photo process Concept catalog 9 Large-sized air shower for G10 Transportation P.12 Photo Process Concept catalog sensitive difference of pressures between 6 Detecting the inside and outside of the manufacturing equipment 5 Cleaning of the cleaning equipment This is a large-sized air shower for large glass substrates of G10 size Entire height of the equipment can be minimized by applying design suitable for the equipment structure. Pressure in the equipment can be controlled properly by detecting slight air velocity with the ultrasonic method. Preventing penetration of chemicals and particles. Large-sized air shower FFU for equipment Wind direction/velocity sensor Acceptance Concept catalog Cleaning process P.12 monitoring of 7 Real-time manufacturing environment Manufacturing equipment Concept catalog 8 Energy saving operation of the cleanroom Class 10 of G10-sized inspection equipment can be materialized in a large-sized clean booth of W8000 x D6000 x H3500. Temperature of an entire cleanroom is controlled by the cold water coil. Causes of fluctuation of yield rate can be determined by executing real-time monitoring of cleanliness, temperature and humidity in important processes. Energy saving operation with eliminating waste can be materialized through optimization of the air volume of an FFU in combination with the environment sensor. Large-sized clean booth Cold water coil F-Planet Cleanroom monitoring system Inspection 7 External air processing CLEANROOM Concept catalog Entire cleanroom Concept catalog Production line Concept catalog Cleanroom P.31 CLEANROOM 8 S o l u t i o n Solution examples Medicine/Foods and dehydration of 2 Sterilization medical equipment 1 Radiation shielding Automobile, Precision components, Lithium ion battery 1 Preventing adhesion of dust in the coating line accurate temperature control for 2 Highly the lens inspection process It is possible to dry products requiring sterilization such as syringes of injectors efficiently with thermal insulation from outside. Since the heat-resisting filter is incorporated, it is not necessary to worry about contamination due to hot air. Winding up of dust in the pre-coating line of automobiles can be prevented efficiently with the FFU with the special diffuser expanding the blast area. Environmental temperature in processes requiring highly accurate temperature control such as lens production of optical equipment can be controlled with accuracy of +/-0.005 ℃by applying our unique multi-step controlling method. Radiation shielding lead booth Hot air dehydration sterilization bench FFU with diffuser Highly accurate thermal chamber Concept catalog 3 Stabilizing quality of medical equipment Sterilization and dehydration Concept catalog equipment supporting 4 Cleanroom the explosion-proof areas Coating Concept catalog 3 Environmental management of the production line Inspection S o l u t i o n Human bodies can be protected from the radiation emitted from a reagent, such as cancer drugs with the protective plate incorporating lead. Product filling Concept catalog 4 Local cleaning of the production line For the environment of processes being influenced by humidity, such as contact lens production, dehumidification and temperature control can be provided with the freezer method. For hazardous areas requiring the explosion proof structure, such as pharmaceutical factories and chemical factories, we can provide designs considering safety. With the trend for monitoring of the respective processes, the production environment such as temperature, humidity and cleanliness can be controlled constantly. It is possible to clean processes containing a lot of processing dust and problems of dust adhesion easily. Dehumidification thermal booth Explosion-proof air shower F-Planet Clean booth Low humidity Explosion proof Concept catalog 5 Clean dehydration of the pharmaceutical solution Concept catalog prevent food contamination with 6 To foreign substances Production line Concept catalog 5 LED, Solar battery, Lithium ion battery A general area and a clean area in a food factory can be separated without providing a shutter. Dust in a room can be removed quickly by balancing air intake and exhaust. Humidity of environments of processes where humidity in the air must be avoided, such as lithium ion battery production can be reduced with the desiccant method. Hot air dehydration booth Air curtain Low dew point dry room Concept catalog 7 Safety air conditioning for toxic reagents Cleanroom Concept catalog It is easy to construct a clean area with Cleanliness Class 100,000 degrees, which is often used in pharmaceutical plants and food plants. Draft chamber Clean cooling equipment Testing laboratory CLEANROOM Concept catalog Dust can be collected efficiently by connecting to the suction hose. Dust collection unit Concept catalog Cleanroom Concept catalog 8 Easy construction of a clean area Hazardous substances and harmful microorganisms can be cleaned and exhausted without diffusing them in the room. Explosion-proof specifications are supported, too. Concept catalog Electrolyte filling process Production line 6 Removal of dust in the cleanroom Dehydration of solution, which took some time previously, can be executed in a short time by blowing hot air at high speed. Dehydration 9 Solution examples Cleanroom Concept catalog CLEANROOM 10 F F U FFU By use, by functions and features, and by air volume Full lineups you can choose the best from various angles. FFU Various types for the system ceiling are provided for cleaning up the entire room WLFB As conforming to the global standards, best performance is materialized in a limited installation space WLFC WLFG F i e l d WLFA FFU for manufacturing equipment WLFH 1 Standard type Large-air volume type 1-phase type ■ ■ ■ 3 Φ 200 V ■ Full communication functions P.15 Large air volume of 50 CMM WLFD ■ P.25 WLFF WLFI Heat-resisting FFU (Super thin type) AC motor type Stand-alone type ■ ■ ■ Simple structure Easy operation P.18 11 CLEANROOM ■ Clean booth etc. Optimum for sole use P.19 Optimum for installing on the side panel of stockers ■ P.20 P.27 WLFJ Heat-resisting FFU (High air velocity type) The system can be used in high temperature environment (50℃). ■ Thin type with height of 105 to 120 mm The system can be used in high temperature environment (50℃). ■ Air volume 0.65 m/s of the high static pressure fan P.29 P.29 ■ Thin type Supporting 1 Φ 100 V ordinary outlet Filter-integrated type ■ Communication functions ■ Discontinued P.17 WLFE F-Cube-N ■ 1 Φ 200 V / 3 Φ 200 V ■ Super thin ■ Supporting RoHS 1 Φ 200 V P.16 F-Stage ■ WLFK Chemical FFU Optimum for chemical contamination measures for the manufacturing equipment such as coaters and developers ■ Easily replaceable chemical filters ■ P.30 CLEANROOM 12 F F U Field 1 F F U Features of Fuji FFU Reliable performance You can accurately select a system suitable for the respective use. We have abundant experience for more than 40 years as a supplier of the clean equipment and have supplied more than 500,000 units of FFUs. Select for use 3-phase Power supply specifications 1-phase Number of large-scale systems: 100 to several 10,000 units 3-phase Available Available P.16 1-phase type WLFC P.17 Dedicated design Available AC motor type WLFD P.18 Stand-alone type WLFE P.19 Standard type WLFA Clean booth Dedicated design Not available Not available Available Installed on the manufacturing equipment F-Cube-N WLFH P.23 Chemical WLFK Thin type WLFF The standard material for casing is the coated steel sheet having superior corrosion resistance and cost performance. However, various kinds of materials such as stainless steel are selectable according to the purpose of use. Size variation Various sizes of FFUs can be manufactured according to the grid dimensions and the available installation space. Reducing the work load By using the multiple operation controller, the number of cable connection points can be reduced (1/4 comparison with conventional) and the installation cost can be saved, while the launching time of the cleanroom can be shortened by shortening the installation period. Occurrence of communication errors due to defective connection of cables and external noises can be reduced. Feature Custom type for equipment Heat-resisting WLFI WLFJ Selectable materials Improvement of reliability Standard type for equipment F-Stage WLFG Various types of FFUs such as the large air volume type that is the highest in the industry and the thin type optimum for installing on the side panel of the stocker are available. 1 Not available Variable air volume Large-air volume type WLFB Power supply 1-phase specifications Not available Number of small-scale systems: 10 to several 100 units P.15 P.23 1 P.20 Industry highest energy-saving motor The brushless DC motor having superior efficiency in comparison with the induction motor is adopted as standard. Industry highest energysaving performance has been materialized. Feature FFU specifications Type (the production range is shown in the brackets) Grid size Power supply specifications Standard type WLFA D750×W1500 (D:500∼) ( W:∼1800) 3Φ200V Large-air volume type WLFB D750×W1500 (D:500∼) ( W:∼1800) 3Φ200V DC600W Available BFFU750 CAN 1-phase type WLFC D610×W1220 (D:500∼) ( W:∼1800) 1Φ200V DC210W Available BFFU250-1P CAN AC motor type WLFD D610×W1220 (D:500∼) ( W:∼1800) 3Φ200V AC200W Not available* − − Stand-alone type WLFE D610×W1220 (D:500∼) ( W:∼1800) 3Φ200V DC170W Not available* BDR170T − Thin type WLFF D1200×W1500 (D:500∼) ( W:∼1800) 3Φ200V Motor Upper side communication DC210W Available DC100W ×2 Available Adaptable controller Communication method SDR3204-2R-TD (4C4M) RS485 BFFU250( 1C1M) BFFU500( 1C2M) BFFU1000( 1C4M)BFFU1000( 4C4M) SDR3204-2R-TD (4C4M) 3 CAN RS485 Feature 5 Adjustable air volume to the optimum By using our core technology, power electronics technology, highly accurate speed control becomes possible. You can set the optimum air volume for your use environment. The large-air volume type of the industry highest class is also included in our lineups. The waterwheel designing know-how of the hydro power generation engineering, our traditional business field, is applied to fan designing. By adopting the airfoil section in the fan shape, the efficiency has been improved. *In 1980, we had adopted the turbo fan to the FFU for the first time in the world. F-Stage[WLFG] 1Φ200 V / 3Φ200 V HEPA, ULPA selectable Not available 115 mm *1 RoHS (Supporting CE optionally) *2 F-Cube-N[WLFH ] 1Φ100 V General outlet / 1Φ200 V (Optional) / DC 24 V (Optional) ULPA is incorporated as standard (HEPA selectable for specific sizes only) The remote air volume adjustment and the failure monitoring are available optionally 150 mm RoHS (Optional) /CE (Optional) *1 Thickness of the main unit when 40 mm filter is used. *2 F-Stage 61, F-Cube 122 only Feature 4 Surprising quietness The lowest level of noise in the class has been materialized by implementing the inlet of the fan making smooth flow and the rectifier structure in the unit The system does not affect to the surrounding environment with the design considering prevention of vibration. This is our unique control system capable of operating multiple FFUs with a single controller. Since installation can be simplified, it is optimum for a cleanroom system using many FFUs. Patented Multiple operation controller Controller (1C4M) * 1 controller: 4 motors Comparison of FFU for equipment CLEANROOM 2 Airfoil high efficiency fan Multiple operation controller *It is optionally possible to output abnormal signals externally 13 Feature The turbo fan type becomes currently the mainstream in the world. For mounting on the side panel of the stocker Power supply Filter Communication functions Thickness Standard F i e l d Variable air volume Abundant lineups Standard type WLFA Main FFU Sub FFU FFU controller The controller controlling FFU is our core technology evolved from our inverter technology. Major features SDR3204-2R-TD Highly efficient conversion (AC-DC-AC) Controllability (built-in PWM control circuit) Remote operability (CAN/RS485 communication system) Sub FFU Sub FFU Current limit circuit Connection cable between Communication cable Power supply cable Low-voltage protection circuit Main FFU and Sub FFU Rotational speed detection in BLDC sensorless motor Various kinds of DC-FFU are equipped with the controller. For details, refer to P. 21 to P. 22. CLEANROOM 14 F F U Standard type WLFA Large-air volume type WLFB Outline dimensional drawing Outline dimensional drawing Control box Power supply cable VCTF 2.0Sq 4 cores 2 m 2 sets (Including the rivet head 1469.6) Outline dimensional drawing 270 Communication cable Shield 0.2Sq 2 cores RS485 2 m 2 sets 1464 ±1 47.4 259 245 255 714 ±1 Loader connection port (Modular) 91 1464 (30) F i e l d (Including the rivet head 719.6) 714 ±1 Rating plate 1464 Rotating direction 18 1 365 220 220 (1) Power supply Sw 1464 Power/Operation/Abnormality indicator lamp ② Fan maintenance direction ① 10 10 63 210 1460 (Filter size) (2) 1467 (1.5) 1467 1464 ±1 1.6(1.2) Rivet FFU 120 8 (Filter size: 1460 x 710) (1460) (2) Filter Performance curve 450 1400rpm 350 1300rpm 300 1200rpm 250 1100rpm 200 150 50 5 10 15 20 25 35 900rpm 800rpm 40 45 Input power Current 1.0 600 0.9 0.6 0.5 0.4 0.3 0.2 5 10 15 20 25 30 Air volume [m3/min] 35 40 45 50 0.0 400 1200rpm 300 1000rpm 1100rpm 200 61 58 60 55 59 100 10 20 30 40 0 5 10 15 20 25 30 Air volume [m3/min] 35 40 45 50 Input power 50 60 70 Current 2.0 1.5 400 300 200 0 0 900rpm 66dB(A) Air volume [m3/min] 1.0 0.5 100 0.1 0 1300rpm Current [A] 100 Input power [W] 0.7 150 1400rpm 500 0.8 200 Air volume/Static pressure 500 0 0 50 Air volume [m3/min] Current [A] Input power [W] CLEANROOM 30 1000rpm 58dB(A) 55 57 51 53 48 43 46 100 50 15 Total static pressure (Static pressure of the blower) [Pa] Total static pressure (Static pressure of the blower) [Pa] 1450rpm 250 0 600 400 0 0 300 Performance curve Air volume/Static pressure 10 20 30 40 Air volume [m3/min] 50 60 0.0 0 10 20 30 40 50 60 Air volume [m3/min] CLEANROOM 16 F F U AC motor type WLFD WLF0170W 1-phase type WLFC WLF00 単相 Communication cable Shield 0.2Sq 2 cores RS485 2 m 2 sets Power supply cable VCTF 2.0Sq 3 cores 2 m 2 sets Outline dimensional drawing Outline dimensional drawing (Including the rivet head 1229.6) 1224 ±1 Electric wire fixture M4 terminal block 614 614 ±1 (Including the rivet head 619.6) F i e l d Rating plate 1224 Loader connection port (Modular) 1 1224 Terminal block cover (30) Power/Operation/Abnormality indication lamp Power supply Sw 18 1224 220 (1) 220 63 800rpm 55dB(A) 100 47 50 0 5 10 15 52 54 20 25 30 35 40 45 Air volume [m3/min] Current 0.9 140 0.8 120 0.7 40 0.4 0.3 0.2 0 0.0 5 10 15 20 25 30 Air volume [m3/min] 35 40 45 51dB(A) 100 47 50 0 0 5 10 15 20 25 30 35 40 Air volume [m3/min] Current 0.8 150 0.5 0.1 150 160 0.6 20 AC200V50Hz 200 140 130 Current [A] Current [A] 60 AC200V60Hz 250 Input power 170 Input power [W] Input power [W] 80 10 Total static pressure (Static pressure of the blower) [Pa] Total static pressure (Static pressure of the blower) [Pa] 900rpm 150 Air volume/Static pressure 300 1000rpm 100 CLEANROOM 1227 Performance curve 200 (1.5) (2) 1227 (2) 1100rpm Input power 0 1220 (filter size) 8 Filter 250 0 17 Rivet Air volume/Static pressure 300 160 FFU (1220) (Filter size: 1220 x 610) Performance curve 1.6(1.2) (10) 210 120 1224 ±1 120 110 0.7 100 90 80 0 5 10 15 20 25 30 Air volume [m3/min] 35 40 45 70 0 5 10 15 20 25 Air volume [m3/min] 30 35 40 0.6 0 5 10 15 20 25 Air volume [m3/min] 30 35 40 CLEANROOM 18 F F U Stand-alone type WLFE Thin type WLFF Outline dimensional drawing Outline dimensional drawing 1493 1445 300 18 nut sert (for filter connection) 300 300 300 300 614 300 1145 1193 FF ie i elldd 300 Rating plate 1224 Sub FFU motor cable 2 (L=400) Flange (1.6t) 1224 (30) Sub FFU motor cable 1 (L=400) Handl 220 220 (1) 1 18 Terminal block cover Rating plate 150 FFU fixture (To be provided by the contractor) 900 1460 (Filter size) 16.5 6 120 10 (10) 1220 (filter size) (1.5) (2) 1227 1423 1227 4 Performance curve 400 90% 300 80% 250 70% 200 150 100 50 43 37 0 5 10 15 47 20 25 Input power 35 40 50% 45 Current 0.7 0.5 15 20 25 30 Air volume [m3/min] 35 40 45 50 0.0 1100rpm 1200rpm 1000rpm 100 50 44 0 5 10 Input power 15 20 25 30 Air volume [m3/min] 5 10 15 20 25 30 Air volume [m3/min] 35 40 45 50 0 0 35 800rpm 40 45 Current 1.0 0.8 50 0 900rpm 59dB(A) 56 57 52 54 54 46 Current [A] 10 150 100 0.3 0.1 5 1300rpm 150 0.4 0.2 0 200 Input power [W] 100 1400rpm 200 0.6 150 250 1500rpm 250 0 50 0.8 Current [A] Input power [W] CLEANROOM 30 60% 55dB(A) Air volume [m3/min] 50 19 54 51 200 0 Total static pressure (Static pressure of the blower) [Pa] Total static pressure (Static pressure of the blower) [Pa] 100% M4 nut sert Air volume/Static pressure 300 350 0 250 Performance curve Air volume/Static pressure 35 0.6 0.4 0.2 5 10 15 20 25 30 Air volume [m3/min] 35 40 45 0.0 0 5 10 15 20 25 30 Air volume [m3/min] 35 40 45 CLEANROOM 20 F F U Controller specifications RS485 communication type Type Applicable motor type SDR3204-2R-TD BDR170-T GCG21155-TL8FE21 GCG2954-T8TD17B-c Motor rated output 210 W / 1450 min Number of motors connected Tolerable motor wire length Rated current 170 W / 1350 min -1 1 - 4 units 1 unit Max 12 m - 3-phase 200 V (Nominal) 3-phase 200 V (Nominal) 0.9 A (per 1 motor) 0.87 A Allowable overload current 110%-30s of the rated current 130%-30s of the rated current 3-phase 200 to 230 V, 50/60 Hz Voltage/Frequency variation Voltage: +/-10% Frequency: +/-5% Rated input current Within 3% 310 VA 500 to 1450 min -1 250 to 1350 min -1 +/-3% for the set value of the maximum speed +/-4% for the set value of the maximum speed About 15 kHz About 16 kHz Speed setting method Upper side communication command or handy loader Internal variable resister, external variable resister or the externally set voltage Speed setting resolution Upper side communication command: 1 min -1 Handy loader: 10 min -1 1/256 for the set value of the maximum speed Controlling method Sine wave PWM control, without the magnetic pole position detection sensor, V/F speed constant control, individual operation control for four units Sine wave PWM control Speed accuracy Carrier frequency Rotating direction Only normal rotating direction Instantaneous voltage drop capacity If the voltage drops from the continuous operation rated voltage state 165 V or more to less than 165 V, the operation will continue for 15 ms. (Equivalent to 85% load) The start from the stopping state shall be within 60s (when Acceleration/Deceleration time actual units are combined), while the stop from the operating state shall be free*run stop Communication method Synchronization scheme Communication rate EIA RS-485 - 2-wire half-duplex communication - Asynchronous communication - 38,400 bps - Number of controllers to be connected Max. 31 units (Motor max. 124 units) This can be used as the failure indication lamp by connecting LED to the external I/O connector. Status indication - C contact of the relay Charge lamp (Power supply base board) Red: LED 1 (To be turned on when the DC intermediate voltage is about 50V or more) Red: LED5 (To be turned on when the DC intermediate voltage is about 50 V or more) Communication response Green: LED 1 (Receiving: On, No receiving signal: Off) - Green: LED 2 (Transmitting: On, No transmitting signal: Off) - Communication established Red: LED 3 (Normal: Off, Abnormal: On) Processing inspection Power supply Operation Failure reset switch Protection Orange: LED 9 (Normal: Off, Abnormal: Flashing ) Orange: LED 2 to 4 (Normal: Flashing, Abnormal: On ) Green: LED 8 (Auto mode: On, Manual mode: Flashing) Red: LED 5 (Energized: On) Green: LED 4 to 7 (Inverter outputting: On, Inverter stopping: Off, Failure: Flashing) SW2 Push switch Overcurrent, Overvoltage, Low voltage, Controller overheating, Overload, Power open phase, Motor step-out, Communication failure, Memory failure, CPU failure Overcurrent, Overvoltage, Low voltage, Controller overheating, Overload, Hall effect sensor failure, Abnormal speed, Memory failure, CPU failure Built-in RoHS Support THD: 35% or less (Power supply voltage 200 V, at the time of the rated output operation, Harmonic order within 40) Controller efficiency Controller calculation life Inrush current Weight Green: LED 1 (Normal: On, Abnormal: Off) SW1 Push switch EMC filter Relative harmonic content - 95% (Power supply voltage 200 V, at the time of the rated output operation) 100,000 hours or more (at surrounding temperature 30oC) 10 years or more (at surrounding temperature 40oC) 6A0-peak or less 7A0-peak or less About 2.1 kg About 0.9 kg Reliability Control base board Display/Operation Communication request Orange: LED 2 to 4 (Normal: Indicating the rotation speed, Abnormal: indicating the abnormal contents) Operation Failure output (External I/O) - Voltage unbalance Rated input current Loss 1 unit − Single unit operation BFFU1000 (1C4M) UGBTEF-12MKMK05A UGBTEF-12SKMK07 / GCG21155-TL8FE21 1 unit Max 9 m - Max 12 m 500 W (250 W x 2 unit) 750 W 1000 W (250 W x 4 units) 1 - 4 units (Switchable) 3-phase 200 V (Nominal) 3.3 Arms 1.0 Arms x 4 units 150% of the rated current – 1 minute 3-phase 200/220 V, 50/60 Hz Voltage: +/-10% Frequency: +/-5% Within 2% 2.14 Arms or less 4.3 Arms or less 3.51 Arms or less 6% or less (When rated operation) Rated speed (Revolution) 1100 min -1 Speed control range 500 ∼ 1100 min -1 Speed accuracy Carrier frequency Less than 165 V – within 15 msec (Operation continues at 165 V or more) 1450 min -1 1260 min -1 500 ∼ 1260 min 500 ∼ 1450 min -1 Set speed (Revolution) +/-1% 1260 min -1 500 ∼ 1300 min -1 -1 Maximum revolution +/-1% or less 10 kHz Upper side communications command handy loader speed Speed setting method adjustment volume* High/Low speed switch * Available (Speed detection with the hall effect sensor) BFFU1000 (4C4M) 4 units 4 units synchronized operation individual operation 1 - 2 units (Switchable) 1.0 Arms x 2 unit 1.0 Arms 1.17 Arms or less 1.07 Arms or less BFFU750 (1C1M) 2 units synchronized operation UGBTEF-12SKMK07 / GCG21155-TL8FE21 Instantaneous voltage drop capacity Speed setting resolution Speed detection Upper side Display communication Communication specifications Electrical specifications Set with parameters (Factory default: 20 seconds) Voltage/Frequency tolerable variation BFFU500 (1C2M) 1 1.1 kVA Required power capacity Speed control range Operation control Operation control 0.9 A Single unit operation Tolerable motor wire length Rated electric power 250 W Rated voltage 1.0 Arms Rated current Allowable overload current Main power supply 1-phase 200/220 V, 50/60 Hz Speed control Speed control 3.1 A (Reference value) Single unit operation FF ie i elldd Unbalance between voltage phases Within 2% Applicable motor type BFFU250-1P (1C1M) BFFU250 (1C1M) Number of electric motor connected Rated input Input power supply Main power supply -1 Type Rated output Output rating Rated voltage Controller specifications CAN communication type Upper side communications command handy loader Highest rotational speed: 1 min -1 Rotational speed control: 1% Available (Speed detection with the sensor-less method) 3-phase 120 degrees – Square wave Controlling method energized PWM control speed at a 3-phase 120 degrees energized – Square wave PWM control speed constant control Sensor-less method Rotational direction Stopping brake constant ratl Counterclockwise when viewed from the shaft end Not available Start-up characteristics Acceleration: 60 sec. to the set value (from the stopping state) (Acceleration and deceleration) Communication standards Communication method Synchronization method Communication rate Power supply (energized) Operation (Operation/Stop) Failure (Error) Deceleration: Free run CAN ( ISO 11898) Ver. 2.0B Active 2-wire differential voltage method Asynchronous 125 kbps Available (LED: Yellow light) Available (LED: Green light/Off) Available (LED: Red light) Direct operation ON-OFF switch speed control volume * ON-OFF switch handy loader Remote operation Operation with the communication between upper side devices (CAN) High/Low speed switch * Operation with the communication between upper side devices (CAN) Harmonic content Leak current Shaft voltage Withstand voltage 35% or less 0.5 mA or less (For 1 unit of motor) 3.5 V peak or less (Expected value) AC1800V for 1 second Protection Inrush current control function Operation information memory function RoHS CE Dimensions (W x D x H) mm Weight 2.0 mA or less (For 4 units of motor) 3.5 V peak or less (Expected value) AC1500V for 1 minute Input: 2 kV Conforming with IEC 61000-4-5 Standard: EN 61000-6-2 Table-4, Between line and ground: 2 kV, Between line and line: 1 kV Surge breakdown voltage Insulation resistance EMC Life expectancy 5.0 V peak or less (Expected value) 10 MΩ or more (DC500V megger) Immunity: EN 61800-3: 2004 2nd Env/Emission: EN 61800-3:2004 C3 100,000 hours or more (Electrolytic capacitor life @ 30oC) Overcurrent, Overvoltage, Low-voltage, IGBT overheating, IGBT internal short-circuit, Overload, Power open phase, Motor cable disconnection, Abnormal speed , Start-up failure, Motor ground, DSP failure, Set parameter failure Time differential start by the base board ID Power outage >> Automatic restoration to the operating state before the power outage - 240 x 145 x 50 About 0.8 kg Supported Supported 240 x 145 x 63 About 0.8 kg 260 x 190 x 63 About 1.5 kg 240 x 145 x 50 About 1.9 kg 340 x 190 x 65 260 x 220 x 65 About 1.8 kg * Separate module components are required 21 CLEANROOM CLEANROOM 22 FFU for equipment F i e l d 1 FFU for equipment You can find the optimum answer with functions, features, and air volume. Since the FFU for equipment is attached to the manufacturing equipment, various functions are required as a part of the manufacturing equipment. Our FFU for equipment is capable of materializing the customersʼ various requirements. Select with functions/features Series Functions/Features You can choose with air volume and air velocity Thickness Standards WLFG 1φ200V・3φ200V supporting immediate delivery*1 Filter selectable RoHS CE *3 115mm*2 P.25 0.9 F i e l d Discontinued 0.8 F-Stage 0.7 RoHS (Optional) CE (Optional) 150mm P.27 F-Cube-N Air velocity [m/s] 1φ100V supporting immediate delivery*1 Communication function WLFI Hot environment (50℃) Outgassing measure 1 WLFH 0.6 0.5 0.4 0.3 0.2 105mm RoHS P.29 0.1 Heat-resisting FFU 0 (Ultra thin type) 0 1.2 2.4 3.6 4.4 5.6 6.8 8.0 WLFJ Heat-resisting FFU Chemical FFU 10.4 11.6 12.8 14.0 15.2 16.4 17.6 18.8 20 21.2 Air volume [CMM] Hot environment (50℃) Outgassing measure wind speed 0.65 m/s 190mm RoHS P.29 (High air velocity type) WLFK 9.2 Outgassing measure communication function equipped with the chemical filter - 230mm P.30 Heat-resisting (Ultra thin) F-Stage (HEPA t=50mm) F-Cube-N (ULPA) Heat-resisting (High air velocity) F-Stage (HEPA t=40mm) F-Cube-N (HEPA) Chemical *1 Immediate delivery means about one week after receiving the order. *2 When the filter of 40 mm is used *3 F-Stage 61 and F-Stage 122 support 3φ200V only Features of FFU for manufacturing equipment Feature 1 23 CLEANROOM Thin type The highest level of thinness in the industry is materialized in consideration of installation in a limited space (Min 115 mm) Feature 2 Feature 3 Energy-saving/air volume variable As adopting DC brushless motor to all series, energy-saving operation is possible at the optimum air volume with variable speed of the motor. In comparison with the conventional FFU, the power consumption has been reduced by about 30%. (Compared with our conventional type product) Conformance to RoHS, CE, SEMI To export to overseas, the system conforms to various standards. It is possible to issue the parameter sheet of the export trade control order. Feature 4 Feature 5 Outgassing measures Outgassing is reduced by strictly selecting constituent materials for the main unit, the outlet, the filter and the sealing materials. Communication function To maximize excellent controllability of brushless DC motor, the air volume can be controlled by varying the motor speed through the communication function. CLEANROOM 24 FFU for equipment F-Stage Specifications Ultra thin FFU with 115 mm thickness WLFG F-Stage50 F-Stage61 F-Stage122 G01D□4□□□□0-0 G11D□5□□□□0-0 G21D□6□□□□0-0 G31D□1□□□□0-0 400 500 610 1220 400 500 610 610 F-Stage40 Name Type (WLF-) D Dimensions [mm] W Discontinued *4 H 125 (115) * Main unit 75 mm + Filter thickness Power supply 1Φ200V /3Φ200V Motor DC brushless motor *1 Air velocity [m/s] 6.3 (4.4) 3.8 (2.7) 0.5 (0.35) 0.5 (0.35) 52 (51) 51 (50) 38 (31) 44 (38) 8.5 9.6 Weight [kg] Low noise The thickness of 115 mm is materialized by combining with the filter newly developed. In comparison with the conventional product, the noise has been reduced by about 10 dB. * When the HEPA filter (Thickness 40 mm) is used 77 (73) 65 (45) 16.5 11.6 Environmental regulations Surprising thickness 54 (54) 53 (49) 1 *3 0.37 (0.3) Volume knob (0 to 100%) Speed controlling method Power consumption [W] 15.1 (122) 0.5 (0.35) ZAM/SUS430 Main unit materials Noise [dB (A)] *2 9.4 (6.6) FFie i elldd Air volume [m3/min] RoHS supported HEPA (t=40mm/50mm) 99.99% (0.3μm) Filter ULPA (t=50mm) 99.999% (0.1μm) *1 This air volume value is an indication in case of the HEPA filter and the external static pressure of 0 Pa. *4 For F-Stage 40, the control box shall be installed separately. (Attached cable length: 2 m) *2 This noise value is a value in case of the HEPA filter and the external static pressure of 0 Pa at 1.5 m directly under the filter. ●Values in ( ) indicate the case of HEPA (t = 40 mm) . *3 This power consumption value is in case of the HEPA filter, the external static pressure of 0 Pa and 3Φ200V power supply. ●If the general atmosphere is taken from the suction side, the filter of t = 50 mm of which retaining amount is large shall be selected. (In comparison with our product of the biggest model) In comparison with the conventional products, the energy consumption has been saved by about 34% (In comparison with our product of the biggest model) Response to regulations RoHS command is supported as standard CE marking is supported optionally. Main unit size G1 500×500×75 Power supply G2 610×610×75 CE support AC 200V G3 1220×610×75 H51 H52 H61 H62 H11 H12 500×500 610×610 1220×610 Thickness ULPA 40 50 40 50 40 50 40 50 - U42 U52 U62 U12 Size - 400×400 500×500 610×610 1220×610 Thickness - 50 50 50 50 *40 mm thickness is HEPA filter only 25 CLEANROOM G21D□6□□□□1-0 G31D□1□□□□1-0 3Φ200V CE marking Supporting W 4-φ7 x 35 50 35 H (115) 75 (40) ■ Main unit (with the power supply, Abnormal signal output terminal block, RUN/STOP switch, Speed adjustment volume) ■ Filter ■ 2 m connection cable between the main unit and the controller box (F-Stage 40 only) ■Mounting bracket ■ Pre-filter Y 50 D W X Y F-Stage40 F-Stage50 F-Stage61 F-Stage122 400 400 370 370 500 500 470 470 610 610 580 580 1220 610 580 1190 *For F-Stage 40, the control box shall be installed separately. Differential pressure gauge set DC brushless motor Filter H42 Type (WLF-) Power supply 0 : Not available 1 : Available Motor type 400×400 F-Stage122(CE) Standard accessory Product revision number G0 400×400×75 Size F-Stage61(CE) 25 WLF G2 1 D H61 1 0 0 0 - 0 H41 Name Aperture dimensions D *1 Only F-Stage 61 and F-Stage 122 are supporting *2 Other specifications are same as the above-mentioned standard product. Type explanation example HEPA Outline dimensional drawing CE support (Optional) Energy saving 0 : Not available 1 : Available Abnormality indication lamp Optional ■ Differential pressure gauge ■ Tube (3 m) ■ Pitot tube ■ Abnormality indication lamp (If the indication lamp is mounted, abnormal signals are not outputted.) 0 : Not available 1 : Available Casing materials 1:ZAM 2:SUS430 ■ 4 m extension cable between the main unit and the controller box (F-Stage 40 only) *The cable length between the main unit and the controller box must be within 6 m in total. ■ CE marking support (F-Stage 61/F-Stage 122) CLEANROOM 26 FFU for equipment F-Cube-N Compact FFU available with the ordinary 1Φ100V power outlet Specifications WLFH Name F-Cube-N-30U F-Cube-N-40U F-Cube-N-50U Type WLFH-30U□ WLFH-40U□ WLFH-50U□ Filter 500 610 610 610 610 W 300 400 500 610 1220 610 1220 H Installation/ X Aperture dimensions [mm] Y 270 370 470 580 580 580 580 270 370 470 580 1190 580 1190 150 1Φ100V 50/60 Hz/1 Φ200V (Optional) / DC24V (Optional) Power supply DC brushless motor 100 W DC brushless motor 87 W Motor Air volume [m3/min] 2.2 4.1 6.6 10.1 16.6 10.1 16.6 Air verociy [m/s] 0.5 0.5 0.5 0.5 0.5 0.5 0.5 Power consumption [W] 24 37 63 87 103 68 76 Noise [dB (A) ] 50 55 55 58 59 51 57 13.5 20.5 Aluminum (Side panel) ‒ SUS (Inlet part) 5 Available (optional) RoHS (optional) /CE (optional) Environmental regulations/CE marking F-Cube-N-30∼61 (Individual control, Group control, High-speed/low-speed switching, Collective fault output) Power supply SW Air volume adjustment knob External signal terminals Power socket D By combining the small FFU monitoring systems, the FFU air volume becomes variable and the failure monitoring is available. W Captive mounting (Floor-installation type or Hanging type) * The communication function is not available in F-Cube-N-30 and 40. In case of abnormal × In case of normal ○ Y Y X 7 Number of FMC100 to be connected: Max 100 units (1 port) ●Installation/Aperture dimensions 30 H 4- × Captive mounting (Floor-installation type or Hanging type) 150 7.5 Power Off H 30 Number of FMC200 to be connected: Max 254 units (4 ports) X W 30 Output 30 D Power supply SW Air volume adjustment knob External signal terminals Power socket 40 40 State ●Installation/Aperture dimensions F-Cube-N-122 40 Failure signals can be outputted by using the abnormal signal output cable (optional). 150 7.5 Abnormal signal output FFU monitoring system FMC100/200 20.5 13.5 11.5 6.4 Not available Communication functions Outline dimensional drawing Communication function CAN 1 (It is optionally possible to install the adjustment dial externally.) 99.99% or more (0.3μm) 99.999% or more (0.1μm) 400 Weight [kg] The air volume can be adjusted continuously with the adjustment dial. The operating status can be confirmed with the indication lamp. WLFH-122H□ HEPA 300 Main unit materials Air volume simple adjustment (operatable with 1φ200V or DC24V at option.) F-Cube-N-122H WLFH-61H□ FF ie i elldd Highly accurate clean environment can be materialized with the builtin high-performance ULPA filter. Since the protective screen is attached to the surface, the filter may not be damaged at the time of installation. The equipment can be operated with the ordinary power outlet (1φ100V) and any troublesome power construction is not required. Operation is very simple such that connecting to the ordinary outlet for power supply and turning on the equipment only. F-Cube-N-61H D Dimensions [mm] Filter built-in structure WLFH-122U□ WLFH-61U□ ULPA Dust collection efficiency Power construction is not required F-Cube-N-61U F-Cube-N-122U 4- 7 40 [○: Conductive. ×: Nonconductive] Identification 30 40 50 61 122 - 300×300 P 400×400 D 500×500 610×1220 K Symbol U H A Filter ULPA (Standard) HEPA *1 *1 The HEPA specifications are supported in Size 61 and 122 only. 27 CLEANROOM ■ Main unit Symbol Size 610×610 Standard accessory WLF H 40 U D Type explanation example C H T Optional (Optional ID numbers are shown in the brackets.) ■ Pre-filter (P) ■ Abnormal signal output (A) ■ Differential pressure gauge + Pitot tube (D) ■ Ceiling bracket (C) ■ FFU monitoring system FMC100/200 (T) Optional *2 Not available Pre-filter Differential pressure tube + Pitot tube Pitot tube only Abnormal signal output Ceiling bracket (4 pieces) Horizontal bracket ■ Power supply cable (2.0 m) ■ Fixing bracket (4 pcs.) ■ Horizontal bracket (H) ■ Pitot tube (K) FFU monitoring system *3 *2 Please list all optionals you need if any. *3 F-Cube-N-30 and 40 do not have communication function. CLEANROOM 28 FFU for equipment Chemical FFU Heat-resisting FFU WLFI WLFK WLFJ This can be used in hot environments (50℃) Thin type considering storage in the device (Main unit: H = 230 mm + Chemical H = 150 mm) Applicable standard RoHS/SEMI (Conformance) Optimum to chemical contamination measures of manufacturing devices such as coaters and developers Measures against outgassing Measures against outgassing With the variable air volume with the volume knob and the failure output relay Variable air volume and failure monitoring with communication function are available 1 For the chemical filter removing chemical contaminants, the waffle cooker structure is employed for easy and quick replacement. Development of the thin type fan materialized 230 mm height. FFie i elldd Chemical filter Thin type 230 mm Waffle cooker structure 230mm Ultra thin type Measures against outgassing High air velocity type (0.65 m/s) This can be used in hot environments Supporting RoHS/SEMI (Conformance) Design withstanding hot environments such as a diffusion furnace (50℃) Supporting RoHS standards in consideration of the exports to the EU region The manufacturing equipment also conforms to SEMI of the standards for production devices. Main unit materials: SUS 430BA Filter: Boron-free filter (PTFE) Sealing materials: Low siloxane type Communication function (Individual control, Group control, High-speed/low-speed switching, Collective fault output) By combining the small FFU monitoring systems, the FFU air volume becomes variable and the failure monitoring is available. CAN Ultra thin type FFU monitoring system FMC100/200 Ultra thin type of 105 to 120 mm is materialized by adopting the high static pressure fan. Number of FMC200 to be connected: Max 254 units (4 ports) Measures against outgassing Main unit: Polyester resin coating Outlet: SUS 304 BA (Punching board) Filter: Boron-free filter (PTFE) Sealing materials: Low siloxane type Specifications Item Name Type Filter Particle collection efficiency FFU dimensions [mm] Power supply Air volume [m3/min] External static pressure [Pa] Noise [dB (A) ] Main unit materials Weight [kg] 29 CLEANROOM Number of FMC100 to be connected: Max 100 units (1 port) High air velocity type The outlet air velocity of 0.65 m/s is materialized by using multiple units of the high static pressure fan. Description Heat-resisting FFU (High air velocity type) Heat-resisting FFU (Ultra thin type) WLFJ WLFI ULPA filter Filter element: PTFE ULPA filter Filter element: PTFE 99.9999% or more 0.1 μm 99.9999% or more 0.1 μm 1453W × 481D × 105H 1000W × 350D × 190H (Fan part 160 mm) 1φ115V 50/60Hz 1φ115V 50/60Hz 6.0(0.32m/s) 11.3(0.65m/s) 0 0 70 73 Steel plate (Polyester resin coating) Steel plate (Polyester resin coating) 38 24 Chemical FFU P-Q properties 200.00 180.00 160.00 Specifications 140.00 120.00 100.00 80.00 60.00 40.00 20.00 0.00 0.00 5.00 10.00 15.00 Air volume (CMM) 20.00 25.00 N=1420rpm N=1300rpm N=1200rpm N=1100rpm N=1000rpm N=900rpm N=800rpm N=700rpm N=600rpm N=500rpm N= Chemical filter pressure loss Item Description Name Chemical FFU Type WLFK Filter ULPA filter Filter material: PTFE Particle collection efficiency 99.9999% or more 0.1 μm FFU dimensions [mm] 1050W × 750D × 230H Power supply 3φ200V 50/60Hz Air volume [m 3 /min] 16.0 (0.45m/s) Total static pressure [Pa] 160 Maximum power consumption [W] 140 Noise [dB (A) ] 65±2 Main unit materials SUS430BA Weight [kg] 65 CLEANROOM 30 FFU monitoring system FFU monitoring system F-SITE series You can choose any type of the monitoring system as you like, covering from large-scale complex demands to small-scale specific demands. F-SITE series Select the FFU monitoring system from the series Wide monitoring system Spot monitoring system (Large scale) (Small scale) F−S ITE−FMV300 F−S ITE−FMC200 F−S ITE−FMC100 Clean equipment integrated monitoring system FFU monitoring system FANET Small-scale FFU display/operation unit F-MONITOR Small-scale FFU monitoring system ICIU Small-scale FFU monitoring system S-ICIU 2 F−S ITE−FMC500 F i e l d F−S ITE−FMR500 FFU monitoring PC with Windows 7 Monitoring of the environmental sensor (F-PLANET) Connection with the wind direction/ wind velocity sensor Connection with the temperature/ humidity sensor Connection with PLC Supporting any I/F with various applications P.37 31 CLEANROOM FFU monitoring PC with Windows 7 Connection with PLC P.39 Software-less FFU monitoring unit standardizing our MONITOUCH FFU monitoring system with our unique CAN interface FFU monitoring system with our unique CAN interface RS-485 communication port is provided as standard CAN communication port is provided as standard CAN communication port is provided as standard P.41 P.43 P.43 CLEANROOM 32 FFU monitoring system F i e l d 2 FFU monitoring system You can choose the optimum system by connection size and communication type. This is an integrated monitoring system handling measurement values of various kinds of sensors such as the operating status of an FFU, temperature, humidity, cleanliness, wind direction, and wind velocity. Visualization of the cleanroom is materialized so that the optimum manufacturing environment can be produced as saving energy. P.37 (Large scale) Custom P.43 Spot monitoring system (Small scale) F−S I TE−FMC200 F−S I TE−FMC100 F−S I TE−FMR500 F−S I TE−FMC500 F−S I TE−FMV300 P.41 P.37 P.39 60,000 units 370 units FFU size (unit) FMV300 Spot monitoring system Up to 327 units RS485 Wide monitoring system FMR500 Up to 65,000 units Communication CAN&RS485 type FMC500 Up to 65,000 units CAN Maximum number Communication Up to 254 units FMC 200 CAN of FFU to be type connected Up to 100 units FMC 100 CAN Concept RS-485 communication and the direct connection without the CAN communication converter ・Large-scale system F-SITE-FMC500 F-SITE-FMR500 Wide monitoring system Functions Simple type P.39 Widemonitoring system (Large scale) You can choose by the connection size and the communication type ・Custom support Environmental monitoring sensing system Max31 RS485 ・Supporting F−PLANET ・Supporting ・The respective types of sensors are monitored through the browser. Concept catalog Cleanroom sensor 2 Ethernet Concept catalog Wind direction/velocity sensor Concept catalog temperature control ・Supporting F-SITE F i e l d Environmental monitoring system F-SITE temperature control ・Supporting F-SITE Ethernet P.45 P.46 LSI ・RS-485 communication is (Small scale) LCI converted to LAN. ・CAN communication is 31 x 4 x 2 system converted to LAN. RS485 PLC MICREX-SX Spot monitoring system CAN Information acquisition unit FFU ・Temperature control ・Energy-saving control ・Smoke exhasut control P.11 FFU Max. 254 units (4 ports) 31 x 4 x 3 system RS485 Temperature controller F-SITE-FMC100 F-SITE-FMC200 F-SITE-FMV300 P.41 CAN Max. 100 units (1 port) P.43 P.43 CAN ・Transmission to other systems For details, refer to Fuji integrated controller series SPH 3000 catalog (LH992a) http://www.fujielectric.co.jp/products/plc/lineup/sph/index.html Concept catalog P.11 Ethernet 33 CLEANROOM RS485 CAN CLEANROOM 34 FFU monitoring system FFU monitoring system functions Series FFU monitoring system functions Logging Security Others Windows version It is possible to support for the FFU temperature controlling system for saving energy If you want to provide integrated monitoring with the control system PC for manufacturing equipment If you want to connect to the upper side system more easily If you want to remember the FFU revolution and use it arbitrarily after adjusting the revolution Duplex Multiple-motor operation/Independent operation Trend function Connection of the environmental sensor etc. Transmission to upper side systems Storage Password Parallel system with 2 units or more is configurable Electric output such as alarms Log-on Operating privileges Operation history Alarm history XP/Windows7 Optional XP/Windows7 F i e l d Optional 2 Optional Optional Optional 4 units independent Optional Optional Optional 4 units independent Optional Optional Optional Optional Optional 4 units independent Optional Optional Optional Optional Latest alarm indication Fire control Optional Optional Optional Smoke exhaust control Emergency stop Control from PLC of other facilities Scheduled operation/stop Operation/stop control by floor Operation/stop control by area Operation/stop control by group Individual operation/Stop control Forced operation System condition screen Overcurrent Overvoltage Cooling heating value Memory failure CPU failure Motor sensor disconnection Revolution failure Communication equipment failure (G/W) Model No.: BFFU250 * Others (Refer to FFU series controller specifications) Power supply voltage: 3φ 200 V to 230 V 50/60Hz Power consumption: 200 W (Max) Motor: GCG2954-T8FF Controlling method: PWM control Protection circuit Control PLC failure *1 Output short circuit Motor step-out Communication failure Memory failure CPU failure Retry function FFU failure Overcurrent Overvoltage Low voltage Controller overheat Overload Voltage open phase Motor ground Communication failure Model No.: SDR-3204-2R-TD Power supply voltage: 3φ 200 V to 230 V 50/60 Hz Motor rated output: 210 W/330 W Applicable motor: GCG21155-TL8FE21 GCG21155-TL8FE33 Contolling method: Sine wave PWM control Protection circuit: FFU monitoring Output short circuit Motor step-out Communication failure Memory failure CPU failure Retry function Controlling status Overcurrent Overvoltage Low voltage Controller overheat Overload Voltage open phase Motor ground Measurement value indication, FFU base board current, Temperature Model No.: SDR3204-2R-TD Power supply voltage: 3φ 200 V to 230 V 50/60 Hz Motor rated output: 210 W/330 W Applicable motor: GCG21155-TL8FE21 GCG21155-TL8FE33 Controlling method: Sine wave PWM control Protection circuit FFU monitoring system functions Monitoring Operation speed DCBL motor controller base board specifications Not possible FFU 254 units Not possible FFU 100 units CAN ~ S-ICIU CAN CAN CAN protocol method (ISO11898) Data frame 64-bit Variable speed output: 255 steps Communication rate:Between FFU 125 kbps Transmission distance 300 m (RS-485) Not possible FFU 65,000 units CAN ~ ICIU CAN CAN CAN protocol method (ISO11898) Data frame 64-bit Variable speed output: 255 steps Communication rate:Between FFU 125 kbps Transmission distance 300 m (RS-485) Not possible FFU 372 units/F-MONITOR LCI (LAN-CAN-Interface) to S.W. HUB to Monitoring PC CAN protocol method (ISO11898) Data frame 64-bit Variable speed output: 255 steps Communication rate:Between FFU 125 kbps Transmission distance 300 m (RS-485) Possible FFU 65,000 units Electrical specifications: EIA RS-485 Communication method: 2-wire half-duplex communication Synchronization method: Asynchronous communication Communication rate:Between FFU 38400 bps Transmission distance 300 m (RS-485) AC FFU Communication base board Number of unit that can be connected Electric specifications: EIA RS-485 Communication method: 2-wire half-duplex communication Synchronization method: Asynchronous communication Communication rate:Between FFU 38400 bps Transmission distance 300 m (RS-485) RS-485 ~ F-MONITER Spot monitoring system CAN is converted to Ethernet Spot monitoring system FMC100 CAN Wide monitoring system FMC200 From LSI (LAN Serial Interface) to the monitoring PC RS-485 RS-485 FMC500 Equipment configurations CAN RS-485 is converted to Ethernet Spot monitoring system FMV300 RS-485 Wide monitoring system FMR500 Form Communication method FFU monitoring system Specifications Model No.: BFFU250 * Refer to FFU series controller specifications Power supply voltage: 3φ 200 V to 230 V 50/60Hz Power consumption: 200 W (Max) Motor: GCG2954-T8FF Controlling method: PWM control Protection circuit Overcurrent Overvoltage Cooling heating value Memory failure CPU failure Motor sensor disconnection Revolution failure Model No.: BFFU250 * Refer to FFU series controller specifications Power supply voltage: 3φ 200 V to 230 V 50/60Hz Power consumption: 200 W (Max) Motor: GCG2954-T8FF Controlling method: PWM control Protection circuit Overcurrent Overvoltage Cooling heating value Memory failure CPU failure Motor sensor disconnection Revolution failure *1 If PLC is optionally connected 35 CLEANROOM CLEANROOM 36 FFU monitoring system Features of F-SITE-FMC500 Clean equipment integrated monitoring system Materializing the visualization Wide monitoring system This is an integrated monitoring system handling measurement values of various kinds of sensors such as the operating status of an FFU, temperature, humidity, cleanliness, wind direction, and wind velocity. Visualization of the cleanroom is materialized so that the optimum manufacturing environment can be produced as saving energy. (Large scale) Feature 1 Monitoring screen indicating various parameters simultaneously The energy can be saved as securing the optimum cleanliness by controlling the revolution of DC-FFU. System diagram Floor monitoring Feature 2 FFU floor drawing Since the FFU arrangement is indicated on the construction CAD drawing, it is possible to monitor and operate at the indications of actual positions. FFU list indication Switchable by floor Alarm history Operation history To the maintenance system screen You can zoom in/out from the entire floor display with the zoomed display. You can operate the system as if operating CAD such as vertical and horizontal scrolling. System stop User registration Sound setting Password revision Feature System configuration F-SITE-FMR500 System diagram drawing The revolution of the FFU is indicated with five colors, and FFU symbols, such as failures, communication failures, are indicated with different colors. Feature This monitors communication status between PC and FFU interface or PC and PLC, and total number of operating FFUs. 4 Weekly schedule LSI The total number of FFUs, the total number of operating FFUs, and the total number of failures are indicated. LCI RS485 CAN Operation patterns currently applied to the group The communication status of interfaces of DC-FFU, the number of registered FFU, the number of operating FFU, and the number of failures are indicated. Manual control group The communication status of the PLC for control, the number of registered FFUs, the number operating FFUs, the number of failures and contents of PLC failures are indicated. Cleanroom temperature adjustment control This is the system for executing remote monitoring control of the temperature controller through the RS485 communication. On the upper side computer, the temperature indicator controller network system is constructed to monitor and configure various parameters Feature ■ Four-unit operating FFU 5 Alarm monitoring screen Failure history of FFUs and communication units is indicated. You can narrow down the relevant data with the search function. The control history of the selected group (Latest 1000 items) Feature 6 Temperature controller The power for the temperature controller is supplied separately. Operation history management Operation history of max. 3,000 items can be saved automatically. The history can be searched with conditions, so that maintenance management can be executed easily. Max. 30 units AC100V∼240V You can search the alarm history from max 10,000 items of data with conditions of FFU ID or Group etc. Depending on the severity, alarms are classified into Heavy failure , Medium failure , and Light failure . The Serious failure is subject to FFU stop. CLEANROOM With the efficient operation of facilities (CR scheduled operation), it is possible to reduce the power consumption to the adequate contracted power level. You can register with drag & drop operation. Ethernet 37 Schedule function 2 3 For the FFU revolution operation, you can operate individually, by group, by floor, for any area range. To the operation system screen F i e l d FFU monitoring Monitoring the environmental sensor (F-PLANET) Connection with the wind direction/velocity sensor Connection with the temperature/humidity sensor Connection with PLC You can search the operation history from max 3,000 items of data with the search criteria of FFU ID or Group etc. The history can be recorded up to max. 3000 items. If the number of record exceeds 3,000 items, the oldest are deleted. CLEANROOM 38 FFU monitoring system Features of F-SITE-FMC500 FFU monitoring system (FANET) Flexible operability Wide monitoring system With this application, you can easily design and revise the screen by yourself. Any complicated knowledge about software and PLC is not required. (Large scale) Feature 1 FFU layout screen The FFU layout drawing exactly the same as the actual installation can be provided easily. With this application, you can revise and add layouts by yourself after completion of the layout drawing. (Knowledge of software is not required.) Feature 2 Floor monitoring screen It is possible to monitor the respective floors of the cleanrooms. If there is any failed FFU, the symbol of the tree indication screen of the applicable floor is displayed in red. Feature Simple operation You can operate simply with icons. 2 3 F i e l d FFU monitoring Connection with PLC System configuration F-SITE-FMC500 Ethernet ■ Data of FFU (Operation/Stop, revolution set value) is stored on the hard disk. LCI LCI CAN CAN LCI CAN ■ To lock the start/stop and the revolution setting operation of the FFU. If the operation is locked, release the lock. (A password must be entered.) ■ To operate the FFU ■ To stop the FFU ■ In the event of any abnormal conditions on the FFU, recover from the abnormality, and then press the Reset button to make the device ready for operation again. ■ To read the FFU data in the hard disk ■ To Change the revolution of the FFU ■ To display the communication status of LCI (Lan Can Interface). As the contents, the IP number, port, and connection status with PC are displayed. One-unit operating type FFU 39 CLEANROOM Two-unit operating type FFU Four-unit operating type FFU ■ To display the status of the FFU in the area selected with “FFU Parameters” As the contents, the revolution, the control current value, and the status are displayed. CLEANROOM 40 FFU monitoring system Features of F-SITE-FMV300 FFU monitoring system Excellent operability Spot monitoring system Our POD MONITOUCH series are adopted and the monitoring/operation screen for FFU is mounted. With the touch panel method, it has excellent operability and visibility, and is ready for immediate operation without software. (Small scale) Functions Item Abnormal status list Operating revolution list is displayed Numerical values of the revolution of the individual FFU are displayed by system Disconnected FFU is not displayed Multi-step operation revolution setting F-MONITOR FFU monitoring System configuration Outline dimensional drawing F1 231 RS-485 direct F3 F4 215.2 F2 MJ2 Entire system The revolution of the five-step operation is set by entering a numerical value With the set value initialization function Entire control Operation command Five-step operation Specified revolution operation Stop order Reset command System control (by A/B/C systems) Operation command Five-step operation Specified revolution operation Stop order Reset command Group control (Main FFU /Sub FFU 1 group) Revolution indication Operating status indication Operation command Five-step operation Specified revolution operation Stop order Reset command Individual control Revolution indication Operating status indication Operation command Specified revolution operation Stop order MJ1 System Individual A System (max.300m) FFU A-01 FFU A-31 B System (max.300m) C System FFU B-01 FFU B-31 FFU C-01 FFU C-31 (max.300m) 2 F-SITE-FMV300 CN1 FF ie i elldd 69 7 303.8 Contents Status list of total number of FFU is displayed Connection (normal): Indication in blue Abnormal: Abnormal items are indicated in orange You can move to the group directive screen by touching on the display Disconnected FFU is not displayed F5 F6 ■ F7 31.47 RS485 RS485 Main screen : To move to the respective operation screens ■ Status/setting screen : To move to abnormality list ■ Abnormality list screen : To comprehend abnormal status of the FFU 288 Four-unit operating type FFU ■ System control screen : To move to the respective systems (circuits) ■ Overall control screen : To operate FFUs of all circuits collectively ■ Operating revolution list screen : To comprehend revolution of the FFU Specifications Unit form Item Main unit to be used Applicable FFU Communication method Communication cable length System Connection port shape 41 CLEANROOM Contents WLZCNS-SSS Type: V810C 10.4-inch TFT color LC touch panel Power supply AC 100 to 240 V 60 VA DCBL-FFU made by Fuji Electric Controller type: SDR3204-2R-TD *Address setting is required previously. Item Number of units to be connected to the respective systems F1: Move to the main screen F2: Move to the state selection screen Global function switch RS485 Max. 300 m /port 3 system A-system connection port: MJ1 (RJ45) B-system connection port: MJ2 (RJ45) C-system connection port: CN1 (D-SUB 9-pin) Contents Each system Main FFU 31 units (31 groups x 4 units = 124 units) Max. 124 units x 3 systems = 372 units ■ System control screen : To operate FFU of A-circuit collectively ■ Individual control screen : FFUs connected to the respective circuits ■ Individual control screen : To operate a single FFU F3: Move to the overall control screen F4: Move to the system control selection screen F5: Move to the group control selection screen F6: Move to the individual control selection screen F7: Turn off the backlight Buzzer 2 types (Intermittent single tone, Intermittent long tone) Backlight Automatic turn-off the light 180 sec. CLEANROOM 42 FFU monitoring system FFU monitoring system Spot monitoring system (Small scale) ICIU You can control and monitor the FFU individually or by group with simple operation without software. Furthermore, this is an operating/monitoring unit that can be connected easily through the CAN direct communication. Functions Simple LCD Various kinds of control information of the registered FFU are displayed in the LCD. The FFU can be controlled by selecting the mode. ICIU Mode STATE MONITOR GROUP MONITOR FFU monitoring system FAULT MONITOR FFU SETTING GROUP SETTING HIGH/LOW SWITCH SET SUMMARY Spot monitoring system (Small scale) Contents This is the function displaying status of the registered FFU and controlling them individually. This is the function displaying status of the respective groups individually and controlling them by group. This function displays the contents of the abnormal conditions in the FFU. This is the function setting for enabling/disabling control of the FFU. This is the function assigning the FFU by group. This is the function setting values of high/low speed operation. This is the function confirming the registered FFU. S-ICIU Mode STATE MONITOR GROUP MONITOR FAULT MONITOR FFU SETTING GROUP SETTING SUMMARY Contents This is the function displaying status of the registered FFU and controlling them individually. This is the function displaying status of the respective groups individually and controlling them by group. This function displays the contents of the abnormal conditions in the FFU. This is the function setting for enabling/disabling control of the FFU. This is the function assigning the FFU by group. This is the function confirming the registered FFU. S-ICIU ICIU Simple operation button All operations on this unit (setting of FFU etc.) shall be made with the buttons. Item POWER Conditions for turning on the LED When any abnormal conditions generated on the FFU connected to this unit or the registered FFU. When this unit is energized Outline dimensional drawing ICIU S-ICIU 140 320 4.05 33.80 110 XXXXXX XXXX Standard format max. 300 m 10 300 20 250 φ XXXXXX Independent CAN Interface Unit OFF SET / ESC DC IN POWER FAULT Page Change ON Next RUN Previous STOP 140 XXX 146.60 XXX 1.75×7 15 62.50 170 XXXXXX Remarks *1: AWM2919 VW-1 80oC 30V 24AWG * 1PR SHIELDED LOW VOLTAGE COMPUTER CABLE: made by KDC (Korea) CLEANROOM FAULT Button name Contents Page Change To move the screen To select the function and finalize the respective set values SET/ESC To move to the next item on the menu screen, while counting up Next on the screen for setting values such as speed To move to the previous item on the menu screen, while Previous counting down on the screen for setting values such as speed To use for starting the FFU operation and others RUN STOP To use for stopping the FFU operation and others 128 61.20 Contents CAN (ISO 11898) Ver. 2.0B Active 125 kbps (High Speed) CAN protocol Dedicated connector AWM2919 VW-1 5P * 24AWG (11/0.16TA) is recommended.*1 Item (main unit indication) 25 CAN communication port specifications Abnormal LED to be identified at a glance 120 F-SITE-FMC200 F-SITE-FMC100 WLF-ICIU WLF-S-ICIU Type AC80 ~ 250 V 50/60 Hz DC 5V Adapter (AC100 ~ 240V 50/60Hz) Rated input 5W 2W Power consumption Communication I/F Communication standard CAN (ISO 11898) Ver. 2.0B Active Communication rate 125kbps Number of ports 4 1 Form of port Dedicated connector Number of FFU to be connected Max. 254 units (Number of FFU to be connected for a single ICIU) Max. 100 units (Number of FFU to be connected for a single ICIU) Communication cable length Max. 300 m/port ICIU power supply (Energized) Display LED-Green FFU abnormality detection LED-Red FFU status information LCD-4Line. 20Character Operation Power switch (ON/OFF) Various operation buttons FFU collective control Speed control Possible FFU individual control Possible Operating environment Environment Indoor (Without sunlight, heat sources such as radiators, and excessive vibration etc.) Operating temperature range 0 ~ 40°C Operating humidity range 90% RH or less (No condensation) Fixing method Others Fixing of the main unit with the side brackets (Screw to be used: M3) Dimensions 170 x 320 x 62 mm 147 x 140 x 34 mm Weight 2.5 kg 1 kg 43 2 S-ICIU Specifications Item Communication standards Communication rate Communication protocol Connector Connection cable F i e l d This is our lightest FFU operating/monitoring unit. You can control and monitor individually or by group. Furthermore, this is an operating/monitoring unit that can be connected easily through the CAN direct communication. CLEANROOM 44 FFU monitoring system LCI Lan Can Interface LSI Lan Sereal Interface LSI outlines LCI outlines LSI is connected to a PC for the upper side monitoring control through Ethernet, communicates with the FFU controller in the cleanroom through RS-485, controls the speed of the FFU, and monitors the operating status. This is required as the G/W for FMR500 (FFU monitoring system). Quick cooperation between the control systems can be executed converting CAN (Controller Area Network) supporting the automotive LAN to Ethernet. This is required as the G/W of th FMR500/FMC500 (FFU monitoring system) System configuration FMR500 Four-unit operation type LCI 1 to 4 units operation type 170 First circuit CAN RS485 FFU #2 FFU #1 Second circuit Third circuit 180 FFU #2 TIA 568A category Five cables (Recommended) With shield RJ45 (shield) TIA 568A category five cables (Cable size: 24AWG 4P single-line Shield) Specifications: Impedance 100 ohms RJ45 (shield) Item Type Operating temperature Operating humidity Storage temperature Storage humidity Dielectric strength voltage Noise resistance (test conditions) Vibration resistance (test conditions) Shock resistance (test conditions) Atmosphere Cooling method Installation location RAM Surrounding I/F Operation Operation indication Communication indication Power supply voltage Dimensions Weight 45 CLEANROOM Contents LSI 0°C to 50°C (Main unit) 20 to 90% RH (Non condensing) -20°C to 70°C 20 to 90% RH (Non condensing) AC500 V,1 minute: Ethernet part 1500 V rising edge 1 ns, 5 minutes (noise simulator) Conform to JIS C0040 Conform to JIS C0041 Without corrosive gas Natural air cooling Indoor Flash memory 1 MB system/for application RS-485, Ethernet In operation/error indication Link and transmission/reception AC 100 ~ 230 V 50 ~ 60 Hz 180 x 170 x 36 [mm] 735 g FFU FFU FFU FFU 2 Connector specification Specifications FFU FFU #31 * Terminal resistance: 100 ohms is incorporated at the LSI side. The connector with terminal resister is connected to the final FFU. Cable specifications FFU F i e l d 140 FFU #1 FFU 36 FFU #31 254 IDs in total 309 S.W.HUB First circuit FFU #1 Second circuit 171 30 45 Ethernet 62 IDs in total Outline dimensional drawing 319 S.W.HUB The equipment can be connected to 254 units in total of the controller handling one to four circuits. FMR500 FMC500 Outline dimensional drawing LSI Ethernet System configuration RS-485 is mounted to two ports at maximum. Each port can be connected to 31 units of the controller, and it can be connected to 62 units of the controller in total. Since the controller can control four FFUs, it is possible to monitor and control a maximum of 248 FFUs. Fourth circuit Specification of Pin ⑧:Blown ■ ⑦:White/Brown □/■ ⑥:Orange ■ ⑤:White/Blue □/■ ④:Blue ■ ③:White/Orange □/■ ②:Green ■ ①:White/Green □/■ 1st Pair 2nd Pair 3rd Pair 4th Pair : : : : ④&⑤ ③&⑥ ①&② ⑦&⑧ Specifications of the RS-485 communication part 1st Pair 2nd Pair 3rd Pair 4th Pair : : : : ④&⑤ ③&⑥ ①&② ⑦&⑧ Item Contents Communication mode RS-485 Communication method Half duplex, asynchronous communication Transfer rate 38,400 bps Date bit: 8 bits Character configuration Parity bit: Even Stop bit: 1 bit Flow control Flow control: Not available Live-line desorption Impossible Connector Modular jack RJ-45 type 1 channel Terminal No. Signal name Direction Function Not connected yet 1 N.C. Not connected yet 2 N.C. Not connected yet 3 N.C. Input/output Transmission/reception data (-) 4 RSInput/output Transmission/reception data (+) 5 RS+ 8 1 Not connected yet 6 N.C. Not connected yet 7 N.C. Not connected yet 8 N.C. Terminal resistance 100 ohms resister is incorporated FFU Specifications Specification of Pin ⑧:Blown ■ ⑦:White/Brown □/■ ⑥:Orange ■ ⑤:White/Blue □/■ ④:Blue ■ ③:White/Orange □/■ ②:Green ■ ①:White/Green □/■ FFU Item Type Rated input Consumption current Communication I/F Communication standard upper side Communication rate [Monitoring PC] Number of ports Form of port Number of units to be connected Communication cable length Communication I/F Communication standard lower side Communication rate [FFU] Number of ports Form of port Number of units to be connected Communication cable length Power supply (Energized) Indication LAN cable connection Communication status indication Operation Operating environment Environment Operating temperature range Operating humidity range MAC address setting Others Fixing method Dimensions Weight FFU FFU #254 Cable specifications Contents LCI 1-phase 100/200 V 50/60 Hz Max. 200 mA (when 220 V power supply is used) 10BASE-T / 100BASE-TX (Auto Detect) 10 Mbps / 100 Mbps 1 RJ-45 Max. 254 units (Number of LCI to be connected for a single unit of the monitoring PC) Max. 100m CAN (ISO 11898) Ver. 2.0B Active 125 kbps 4 Dedicated connector Max. 254 units (Number of FFU to be connected for a single unit of LCI) Max. 300 m/port Available (LED) Available (LED) Available (LED) Power supply switch (ON/OFF) Indoor (Without sunlight, heat sources such as radiators, and excessive vibration etc.) 5°C to 40°C 85 %RH or less (No condensation) Set by connecting the dedicated PC Fixing of the main unit with the side brackets (Screw to be used: M4) 319 x 171x 45 [mm] 1.6 kg Heat shrinkable tube 5051-04 5557-04R 0.3 sq 2 core shield RS485 * 1500 mm cabtyre (Gray) 5559-04P Heat shrinkable tube 5051-03 0.3 sq 2 core shield RS485 * 1500 mm cabtyre (Gray) Connector specification Connector Pin 5051-04 5159 5051-03 5159 1 2 3 4 1 2 3 Connector layout 1 2 3 4 Blue White Shield Blue: Blue base, White: White base 1 2 3 Blue White Shield Blue: Blue base, White: White base 5557-04R 5556 5559-04P 5558 4 3 2 1 3 2 3 1 4 Blue White Shield Blue: Blue base, White: White base 1 1 4 2 3 2 4 Blue White Shield Blue: Blue base, White: White base * Made by Molex CLEANROOM 46 Cleanroom materials Cleanroom materials Materials required for providing total solution of the cleanroom are lined up. Materials improving performance and maintenance efficiency of the cleanroom. Field Grid ceiling frame P.51 Lighting panel / Blank panel P.52 Bypass panel (Filter) P.53 Free access floor P.56 Power distribution equipment P.56 F i e l d 3 Joinery (Door, Window) Interior panel Maintenance hatch Maintenance passage P.53 47 CLEANROOM P.54 P.55 CLEANROOM 48 Cleanroom materials F i e l d 3 Cleanroom materials High performance equipment functioning in the cleanroom more richly and safely is lined up. With our abundant experience in system construction for large-scale factories, we have commercialized various kinds of building materials under the keywords of outgas-less, short construction period, and safety. We can respond to your requirements with the total solution covering from design to construction of the cleanroom using high performance equipment. P.56 Power distribution equipment FFU P.11 It is possible to manufacture various sizes of FFU in accordance with the grid dimensions and the available installation spaces. Maintenance hatch P.55 This is the ceiling access panel door to ensure airtightness. P.51 Grid ceiling frame This is a frame having both flexibility and functionality in consideration of the earthquake-resistant structure. P.52 Lighting panel / Blank panel Lighting integrated with ceiling panels. Also, it is possible to access from the ceiling for maintenance. Dry coil Concept catalog P.54 Interior panel F i e l d Low outgas materials are used for non-seal type airtight materials in consideration of the outgas pollution. 3 Door / Window This air volume adjustment panel is designed to have sufficient strength for walking on the panel. Maintenance passage Free access floor P.53 Bypass panel (Filter) P.53 P.56 P.55 This panel is dedicated to passages in consideration of safety. This has excellent aperture ratio adjustment performance and flexibility of layout, and it is easy to make utility connections to devices installed in the upper part. 49 CLEANROOM CLEANROOM 50 Cleanroom materials To prepare against any emergency cases with the frame of which earthquake resistance is enhanced Easy maintenance. Providing bright, wide and comfortable spaces Grid ceiling frame ◆ Lighting time / luminance Lighting panel/Blank panel 110 100 Luminance [%] Lighting panel Joint part summary Main frame Joint sleeve Luminance [%] 105 95 90 85 80 75 * Test condition/current: 0.7 A Surrounding temperature: 85℃ Semiconductor connection temperature: 125℃ 70 65 60 Number of lamps [Unit] 100 90 80 70 60 50 40 30 20 10 0 100 Frame edge Main frame surface joint Joint sleeve LED lamp fittings details Specifications Hanging bolt Item Main frame Sub frame Materials Aluminum drawing material Aluminum drawing material Standard length 6000mm 0∼6000mm Withstand load 90kg/㎡ 90kg/㎡ 10000 Lighting time [Hr] 100000 ◆ Luminance / number of lamps LED lighting panel Sub frame 1000 Hf fluorescent lamp (65W) LED(64W) * Calculation conditions W = 25 m D = 10 m H = 5 m, Reflectance Ceiling 50% Wall 30% Flor 10%, Calculation height H = 0 m 200 300 400 500 Luminance [lx] 600 700 800 Features The ceiling can be constructed flatly. For the fluorescent lamp type, it is possible to replace the lamp from the ceiling so that access for maintenance is easy. The environmentally friendly LED type requires no maintenance and does not contain mercury. System ceiling inside It is possible to walk on the panel. Main frame Sub frame Cleanroom inside It has excellent load bearing on the top of the lighting, so that it is possible to walk on it. Maintenance for the fluorescent lamp type can be executed from the inside of the bench. Outline dimensional drawing Specifications Light source/Lamp LED LED ×48 Total flux 4800 lm 7040 lm Hf fluorescent lamp FHF32EX-N-H*2 units (9900 lm) Power consumption Power supply 64W AC100∼240V 50/60Hz 65W (88W) AC100∼242V 50/60Hz 748.00±1 Type * Figures in ( ) are for high-efficiency models. 1798.00±1 Blank panel You can choose either steel or aluminum composite panel according to the purpose of use. Aluminum (Surface resincoating) Polyethylene core Aluminum composite panel type 51 CLEANROOM 3 This is a frame having both flexibility and functionality in consideration of the earthquake-resistant structure. Bracket M6 bolt (Securing the room cleanliness.) F i e l d Features Maintenance can be executed from the top side. Galvalume steel Steel folding type Specifications Materials Basic size Withstand load Workability Composite panel 750×1500 Ordinary Good Steel 750×1500 Good Ordinary CLEANROOM 52 Cleanroom materials Air volume of the aperture can be controlled, while the structure is strong and safe. Thorough measures against outgassing. You can choose any one out of three types. Bypass panel (Filter) Interior panel Features 特 長 Upper frame (Split type) Non-seal specifications in consideration of the outgassing contamination The low outgassing material is used for the airtight material. Aluminum extrusion materials 6063-T5 Airtight seal EPDM Panel fitting material Aluminum extrusion materials 6063-T5 Panel frame material Air volume is secured while it is possible to walk on it. Air volume can be adjusted by installing the filter. Degrees of freedom for the bench layout can be expanded. Airtight joint sealant Removable joint sealant TPO Aluminum extrusion materials 6063-T5 Surface materials Specifications Features As maintaining the required air volume, strength of the panel is also secured so that you can walk on it safely. Safety measures shall be provided at low costs. Size Various kinds Materials Core materials Weight ZAM □750 Various kinds 9kg * Size example Pressure loss characteristics Outline dimensional drawing Pressure loss (Pa) 750 750 Lower frame Aluminum extrusion materials 6063-T5 Specifications Item 20 40 60 80 100 120 140 Air volume(CMM) You can layout doors and windows as you like according to the aperture size and purpose of use. Panel thickness Panel width Wall panel maximum length Surface materials Core materials Jointing method Furniture (Door, window) Heat insulating performance (W/m2・K) Noise barrier performance Heat insulating Non-combustible 900 - - 40, 50 8400 Color steel sheet, Hot-dip galvanized steel sheet Urethane foam Fit angle 40, 50 4000 - 40, 50 80 - 4000 8000 - Heat insulating urethane resin Metallic honeycomb - Fireproof - - Rock wool - Ordinary High Ordinary High Ordinary High Ordinary High 0.5 0.2 2.1 3 Breaking strength Standard F i e l d * Size example 20 18 16 14 12 10 8 6 4 2 0 0.0 0.5 Features Surface material specifications For the door of the cleanroom, the single door, the family door, and high airtight specifications are available. Item High corrosion-resistant galvanized steel sheet Galvalume Color steel sheet Medium Slightly high High Outline dimensional drawing Valid H 4,200 Valid W 810 Valid H 2,060 Corrosion-resistance Anti-fingerprint property Medium Price Ordinary Gassing * Size example CLEANROOM Self-corrosion-resistant features Chemical resistance Valid W 3,510 53 Corrosion-resistance of the disconnected part Medium Non Non Medium High High High Medium Slightly high High Non Exist We will provide the optimum size for your layout and purpose of use. CLEANROOM 54 Cleanroom materials Four types of the floor materials are provided so that you can choose one in accordance with the purpose of use such as aperture ratio, layout, and withstanding load. In the design stage, operability is considered. Easier maintenance has been materialized. Maintenance hatch, Maintenance passage Free access floor Maintenance hatch Features 特 長 The layout plan can be provided easily by setting the appropriate size for the grid dimensions. Features This has a high degree of freedom for the aperture ratio adjustment and layout, and it is easy to connect the device installed on it to the utility. Outline dimensional drawing 600 Punching type SUS type Slit type 748 Specifications 600 1798 Ceiling maintenance hatch Side maintenance hatch Features Punching type Die-cast aluminum □500∼□600 Medium Bad Light 16∼60% Slit type Die-cast aluminum □500∼□600 High Good Medium 0% SUS type SUS304 □500∼□600 High Bad Heavy 50% Slit type Die-cast aluminum □500∼□600 Low Good Light 17∼54% Surface finishing materials Ni-Cr coat Epoxy coating SUS plate Ni-Cr coat Epoxy coating Non Ni-Cr coat Epoxy coating Special specifications Chemical resistance, Whisker measures Chemical resistance, Whisker measures - Chemical resistance, Whisker measures F i e l d Maintenance passage Item Materials Size Withstanding load Workability Weight Aperture ratio 3 Instead of providing the maintenance passage separately with the cost, you can execute maintenance more safely and easily by arranging the blank panels for walking at the time of designing. All power to be used in an area is supplied collectively with a single unit. Outline dimensional drawing Power distribution equipment 2890 785 785 535 785 Power distribution panel 1835 特 長 Features Outline dimensional drawing 3670 This is the packaging power supply unit that is capable of supplying the power in an area, such as the FFU, the lighting, the flow control valve of the cooling coil, and the temperature controller, with a single unit. 600 FFU 1835 Lighting Power board 55 CLEANROOM Power distribution panel Temperature controller Flow control valve Power distribution panel 1200 CLEANROOM 56 R e p l a c e m e n t Do you have any problems with energy-saving measures? Another proposal / To save energy efficiently with replacement It is possible to materialize energy savings by replacing the high-efficiency equipment. System flow for the pressure chamber method system flow System flow for the FFU method System revision Example You can save the energy of annually by replacing 1,000 FFUs. * Based on our estimation OA Filter Device Dry coil Large blower 2,000 MWh equivalent to the cost saving of 17 million yen Equipment replacement OA High efficiency FFU Device Dry coil Re p l ac e m e nt 57 CLEANROOM CLEANROOM 58 R e p l a c e m e n t Another proposal Replacement Reason why the energy can be saved with the clean equipment Three reasons why clean equipment is effective for saving energy 1 Ratio is high If the power consumed in the semiconductor/LCD panel plant is classified by the purpose of use, about 40% of them are consumed in the air conditioning facilities, and it is understandable that implementation of clean equipment must be very effective for saving energy. Pure water/Wastewater 4% Lighting and so on Reasons why the replacement is effective 1 Life of the equipment A The life of the clean equipment is about 10 years. Configuration of FFU 4% Various piping 12% Production facility Control base board 40% Air conditioning facility Fan 40% Control base board The control base board uses the aluminum electrolytic capacitor as the smoothing filter. Generally, the life of the capacitor decides the life of the entire base board. The life may vary with use conditions, for instance the higher surrounding temperature, the shorter life. It is said that the estimated period for replacement is five years. 2 The heat load is also reduced It is possible to reduce the exhaust heat by reviewing the cleanroom method and using high efficiency clean equipment. Then the heat load in the entire factory can be reduced and the power consumption of the refrigerating machine can be reduced. * Reference “Recommendation for periodic inspections for general-purpose inverter” The Japan Electrical Manufacturer’s Association Comparison of the blower heat removing energy by different cleanroom methods Motor [kW/m2] Although the life of the motor may be determined with various elements, it depends on the life of the bearing in most cases. Although the life of the bearing can be expressed with the mechanical life and the life of grease, we understand that the life of the motor is determined by the life of the grease since the influences on the life of the grease are significant. In general, the guaranteed life by the motor manufacturer shall be 20,000 hours. 0.12 0.1 0.08 0.06 0.04 0.089 0.02 0 0.021 FFU method By replacing the FFU partially in several years, you can save the investment budget required for a year and provide flexible energy-saving plans. Since the temperature of the cleanroom is stable approximately at 23oC throughout the year, and it is a good operational environment. The actual available period is longer than the guaranteed life in the most cases. However, the life of electrical components is generally two to five years, and it is ideal to replace the equipment at around ten years. Reasons why the replacement is effective 2 Use of subsidies A CLEANROOM Re p l ac e m e nt Pressure chamber method 3 Investment can be divided 59 Motor You can use the subsidies for replacing the clean equipment. CLEANROOM 60 R e p l a c e m e n t Fuji Electric can materialize more effective and smooth energy-saving 1 Cleanroom energy saving operation system FFU efficiency comparison Optimization of channel shape Sirrocco fan Low pressure inlet By using the DC-FFU together with the FFU monitoring system (F-SITE series) developed by us, operation/stop and revolution and alarm history of the FFU can be managed collectively at the center, so that the cleanroom can be operated efficiently from the viewpoint of energy. Graphical monitoring screen based on the architectural drawings provided with AutoCAD Operation/Stop/Failure/Speed are indicated in colors High efficiency turbo fan Induction motor It is possible to operate, stop and control the revolution from the FFU list collectively. DC brushless motor Total efficiency Old type FFU The latest type FFU 13 % 52% Warning with alarm tone Max. 10,000 items each of the operation history and the alarm history can be stored. FAN comparison Vanes curved in various rotational directions Vanes curbed to backward for the rotational direction This can output larger air volume among the centrifugal blowers It has excellent efficiency with stable operation in a wide air volume range Relatively inexpensive production cost Sirrocco fan △ Fan efficiency Turbo fan Efficiency has been improved by adopting the airfoil section ◎ FFU monitoring system (F-SITE series) DC-FFU DC-FFU DC-FFU DC-FFU DC-FFU DC-FFU Furthermore, the feedback operation can be made in accordance with the temperature, humidity and cleanliness by linking to our environmental sensor, so that energy saving with optimum operation of FFU can be materialized. Motor comparison R ep l a c em e nt Individual air volume control DC-FFU Induction motor Loss comparison Motor efficiency 61 CLEANROOM The induced current flows in the rotor due to the magnetic field. The resistive losses may occur in the rotor at that time. △ Feedback DC brushless motor (using the permanent magnet) Since the permanent magnet is used in the rotor, no copper loss may occur due to induced current in the rotor. ◎ DC-FFU FFU monitoring system (F-SITE series) Temperature/humidity Cleanliness Environmental information Wind direction/wind velocity Environmental sensor CLEANROOM 62 R e p l a c e m e n t Fuji Electric can materialize more effective and smooth energy-saving 2 Flow of replacement Energy saving effect example Please leave everything such as the energy saving effect estimation, installation, adjustment and test to Fuji Electric. step 1 If you replace 1000 units of AC-FFU currently used with the DC-FFU, the following amount of energy can be saved. Site survey In consideration of performance and efficiency, an AC-FFU with power consumption of 280 W can be replaced with a DC-FFU with power consumption of 65 W.(* Our calculation) Confirmation of the system configuration Confirmation of the component equipment Confirmation of utilities (280 W – 65 W) x 24 hours x 365 days x 1,000 units Design System optimization design Selection of equipment Energy saving effect estimation Provision of drawings Annual saving of energy is about 1,900 MWh step 2 Replacement example In case of Company-A step 3 Outlines Installation on site Intending the energy saving effect, FFU of the AC motor + Sirrocco fan type is replaced with the DC motor + Turbo fan type Number of units to be replaced: About 5,000 units Equipment installation Wiring Operation confirmation Commissioning test Cleanliness test 63 CLEANROOM R ep l a c em e nt Local adjustment Energy saving effect step 4 Planed value: 7,100 MWh (FFU saving energy amount) Actual value: 7,150 MWh (FFU saving energy amount) CLEANROOM 64 R e p l a c e m e n t Fuji Electric can materialize more effective and smooth energy-saving 3 Fuji Electric’s cleanroom is always next to the state-of-the-art technology History of development of the cleanroom in Fuji Electric Fuji Electric has always been the supplier of the most advanced cleanroom system for 40 years and made uninterrupted efforts to innovate technology and safety. 1970s 1980s Start development/manufacturing of clean products Fuji CR technical keyword 1500nm Semiconductor process rule 1990s 2000s System ceiling method CR 800nm 600nm Non-seal method interior panel 350nm The 3rd generation LC mother glass generation Semiconductor factory CR system Clean bench Fuji CR actual results Large air volume FFU DC brushless FFU AC type FFU LCD factory CR system Magnetic disk media Cleanroom energy saving factory CR system promotion Use of the airflow simulation 250nm 2010s CR monitoring system 180nm 130nm The 4th generation 90nm The 6th generation The 5 th generation Chemical pollution measure CR system Environmental monitoring system Multiple operation FFU 65nm 45nm The 7th and 8th generation 32nm 22nm The 10th generation Localized response system PDP factory CR system Organic EL factory clean system CR system of carrier devices Engineering tool By using the full of unique engineering tools of Fuji Electric having abundant results and experiences, we can solve any kinds of issues that the customers currently faced. Cleanroom laboratory 65 CLEANROOM Equipment to be evaluated By using the wind tunnel test equipment and the anechoic chamber, we can execute various measurements and evaluation such as properties, noises, vibrations and radiated noise. Analysis/evaluation technology We can analyze and evaluate particles, airflow, temperature/humidity and chemical gases in the customer’s cleanroom, and then provide suggestions for improvement. Airflow simulation With the computer simulation, airflow status in the equipment and the cleanroom, and the temperature distribution are estimated. Particle behavior simulation It makes possible to simulate particle behavior in dynamic state. Behavior of dust at the time of equipment operation can be predicted, and the results can be useful for equipment and system design. R ep l a c e m en t We have the cleanroom laboratory to verify and evaluate the developed products and verify the system design. CLEANROOM 66