Product family datasheet XERADEX Excimer ultraviolet lamps, double-ended Areas of application _ Removing organic residue _ Etching plastic surfaces _ Activating wafer surfaces _ Setting of wetting angle _ Removing photo resist _ Producing ozone _ Creating a matt surface on lacquer _ Photocatalytic cleaning of wafers _ Radiation-induced CVD at low temperature __ Product benefits _ No cooling required in normal operation _ Compact design _ Mercury-free, low energy consumption Product features _ Xenon excimer VUV lamps (172 nm) _ Operation with pulse-type DC current _ High efficiency: approx. 40 % _ Instant operation; no startup time _ Unlimited switching cycles _ Instant restart with no effect on lifespan _ Recommended service life: 2,500 h _ Incoherent VUV radiation at 172 nm May 25, 2016, 17:16:11 XERADEX © 2016, OSRAM GmbH. All rights reserved. Page 1 of 4 Product family datasheet Product line drawing Product line drawing __ May 25, 2016, 17:16:11 XERADEX © 2016, OSRAM GmbH. All rights reserved. Page 2 of 4 Product family datasheet Technical data Electrical data Photometrical data Dimensions & weight Lifespan Diameter Length Radiation length Lifespan Product description Nominal wattage Lamp wattage Nominal voltage Irradiance XERADEX L40/375/DB-AZ48/90 60.00 W 60 W 230 V 40 mW/cm² 2) 40.0 mm 537.0 mm 375 mm 2500 h 230 V 40 mW/cm² 2) 40.0 mm 782.0 mm 620 mm 2500 h 2) 40.0 mm 782.0 mm 910 mm 2500 h 40.0 mm 1950 mm 1900 mm 2500 h XERADEX L40/620/DB-AZ48/90 100.00 W 100 W XERADEX L40/910/DB-AZ48/90 150.00 W 150 W 230 V 40 mW/cm² XERADEX L40/1800/DB-SH48/90 1) 100.00 W 300 W 230 V 40 mW/cm² 2) 1) Special coated base for use in acrid environmental conditions (XERADEX double ended) 2) With active cooling: 80 mW/cm², reduced lamp lifetime __ May 25, 2016, 17:16:11 XERADEX © 2016, OSRAM GmbH. All rights reserved. Page 3 of 4 Product family datasheet Safety advice XERADEX lamps produce extremely intensive UV radiation that is heavily absorbed by oxygen. Ozone is produced as a result. Adequate ventilation must be provided during their operation. The lamp should be operated only in air-tight housings. XERADEX lamps are operated at high voltage and may only be connected to original DBD control gear. Never connect it to any other control gear. Application advice For more detailed application information and graphics please see product datasheet. Disclaimer Subject to change without notice. Errors and omission excepted. Always make sure to use the most recent release. __ May 25, 2016, 17:16:11 XERADEX © 2016, OSRAM GmbH. All rights reserved. Page 4 of 4