LCOS-SLM (Liquid Crystal on Silicon - Spatial Light Modulator) X10468/X13267/X13138 series Control your light ! Shape your beam ! Improve your image ! The X10468/X13267/X13138 series devices are a reflective type of pure phase Spatial Light Modulators (SLMs), based on Liquid Crystal on Silicon (LCOS) technology in which liquid crystal (LC) is controlled by a direct and accurate voltage, and can modulate a wavefront of light beam. The LCOS-SLMs are carefully designed to achieve high light utilization efficiency from various points of view, such as reflectivity, aperture ratio and diffraction noise due to the pixel structure. The X10468/X13267/X13138 series can be controlled via a PC using the Digital Video Interface (DVI), which is a standard interface for PC displays. The distortions in the LCOS chip, such as wavefront distortion and non-linear response of the LC, are efficiently compensated by the controller. Easy PC control, precise and linear phase modulation characteristics can be accomplished with the X10468/X13267/X13138 series. They can also provide high diffraction efficiency and high light utilization efficiency. Features Applications Pure, linear and precise phase control Laser material processing High light utilization efficiency Optical manipulation High diffraction efficiency Wavefront correction High power handling capability Pulse shaping Ease of use (DVI compatible) Optical testing Reflective type LCOS chip inside the head Principle of modulation The LCOS chip has a parallel-aligned nematic liquid crystal layer to modulate light. It only changes the phase of light without any change of intensity and rotation of polarization state. Phase modulation is changed according to the alignment of the LC. The LC alignment is controlled, pixel by pixel, using a CMOS backplane and a DVI signal via a PC. Input readout light PC LCOS chip DVI signal LCOS-SLM CONTROLLER RESET POWER OUTPUT ERROR POWER Controller Reflected light LC CMOS Modulated only phase ! KACCC0638EA www.hamamatsu.com 1 LCOS-SLM (Liquid Crystal on Silicon - Spatial Light Modulator) X10468/X13267/X13138 series Selection guide There are eight standard types of the X10468/X13267/X13138 series available. The -01/-07/-08 types have no dielectric mirror but have higher diffraction efficiency and covers the wide wavelength range of the readout light spectrum. The -02/-03/-04/-05/-06 types have a dielectric mirror for a specified wavelength range. Figure 1 shows the spectral response for these types. The ultra violet light will cause a damage at the wavelength range less than 400 nm for the -05 type. Please consult us the details. Hamamatsu produces OEM devices that meet your requirements in the wavelength range from 355 nm to 1550 nm. We are able to design and optimize device elements according to a light wavelength used in your application. For the wavelength band between 1350 and 1400 nm on the -08 type, the reflectance degrades about 5% due to the absorption by the glass substrate. [Figure 1] Spectral response -01 No dielectric mirror type -07 -08 -05 Dielectric mirror type -04 300 400 500 -06 600 -02 700 800 -03 900 1000 1100 1200 1300 1400 1500 1600 Wavelength (nm) KACCB0270EC Absolute maximum ratings Parameter Operating temperature (°C) Storage temperature (°C) +10 to +40*1 -20 to +55*1 X10468 series X13267 series X13138 series *1: No condensation. Humidity may cause deterioration of characteristics, so be careful with the humidity. The characteristics of this product depend on temperature. Using this product at an ambient temperature of about 25 °C is recommended. Note: Exceeding the absolute maximum ratings even momentarily may cause a drop in product quality. Always be sure to use the product within the absolute maximum ratings. Structure Head Parameter X10468 series X13267 series X13138 series Number of pixels (pixels) 792 × 600 792 × 600 1272 × 1024 Pixel pitch (μm) 20 12.5 Effective area size (mm) 15.8 × 12 9.9 × 7.5 15.9 × 12.8 Fill factor (%) 98 Weight (g) 350 96 Controller Parameter X10468 series X13267 series X13138 series Supply voltage AC (V) 100 to 230 Weight Power supply Including frequency Main unit cables (Hz) (g) (g) 50/60 3300 4200 Input signal DVI signal Input signal level format (pixels) Digital Video 800 × 600 Interface 800 × 600 (DVI-D) 1280 × 1024 DVI frame rate Typ. Max. Power consumption (levels) (Hz) (Hz) (VA) 256 60 120 50 2 LCOS-SLM (Liquid Crystal on Silicon - Spatial Light Modulator) X10468/X13267/X13138 series Electrical and optical characteristics Parameter X10468-01 X10468-02 X10468-03 X10468-04 X10468-05 X10468-06 X10468-07 X10468-08 X13267-01 X13267-02 X13267-03 X13267-04 X13267-05 X13267-06 X13267-07 X13267-08 X13138-01 X13138-02 X13138-03 X13138-04 X13138-05 X13138-06 X13138-07 X13138-08 Readout light wavelength Light utilization efficiency typ. (%) (nm) 400 to 700 79 (633 nm) 800 ± 50 95 (785 nm) 1050 ± 50 95 (1064 nm) 510 ± 50 94 (532 nm) 410 ± 10 92 (405 nm) 650 ± 50 95 (633 nm) 620 to 1100 82 (1064 nm) 1000 to 1550 82 (1550 nm) 400 to 700 76 (633 nm) 800 ± 50 98 (785 nm) 1050 ± 50 98 (1064 nm) 510 ± 50 98 (532 nm) 410 ± 10 92 (405 nm) 650 ± 50 98 (633 nm) 620 to 1100 80 (1064 nm) 1000 to 1550 80 (1550 nm) 400 to 700 76 (633 nm) 800 ± 50 98 (785 nm) 1050 ± 50 98 (1064 nm) 510 ± 50 98 (532 nm) 410 ± 10 92 (405 nm) 650 ± 50 98 (633 nm) 620 to 1100 80 (1064 nm) 1000 to 1550 80 (1550 nm) Rise time*2 (ms) 5 (633 nm) 30 (785 nm) 20 (1064 nm) 10 (532 nm) 10 (405 nm) 10 (633 nm) 10 (1064 nm) 30 (1550 nm) 5 (633 nm) 30 (785 nm) 20 (1064 nm) 10 (532 nm) 10 (405 nm) 10 (633 nm) 10 (1064 nm) 30 (1550 nm) 5 (633 nm) 30 (785 nm) 20 (1064 nm) 10 (532 nm) 10 (405 nm) 10 (633 nm) 10 (1064 nm) 30 (1550 nm) Fall time*2 (ms) 25 (633 nm) 80 (785 nm) 80 (1064 nm) 25 (532 nm) 20 (405 nm) 30 (633 nm) 80 (1064 nm) 140 (1550 nm) 25 (633 nm) 80 (785 nm) 80 (1064 nm) 25 (532 nm) 20 (405 nm) 30 (633 nm) 80 (1064 nm) 140 (1550 nm) 25 (633 nm) 80 (785 nm) 80 (1064 nm) 25 (532 nm) 20 (405 nm) 30 (633 nm) 80 (1064 nm) 140 (1550 nm) *2: Time required to change from 10% to 90% for 2π modulation (typical value) 3 LCOS-SLM (Liquid Crystal on Silicon - Spatial Light Modulator) X10468/X13267/X13138 series Operating characteristics Light utilization efficiency The X10468/X13267/X13138 series have high light utilization efficiency, which is defined a ratio of the 0th order diffraction light level to the input light level. The high light utilization efficiency mainly depends on reflectivity, and the amount of diffraction loss caused by the pixel structure. We adopted advanced CMOS technology to make the diffraction loss smaller. As a result, the diffraction loss is less than 5%. The -02/-03/-04/-05/-06 types have a dielectric mirror which has high reflectivity. Therefore, these types have very high light utilization efficiency. The -01/-07/-08 types have relatively low light utilization efficiency compared to the ones with the dielectric mirror but have wide spectral response characteristics. Phase modulation [Figure 2] Phase modulation (typical example) (Ta=25 °C) 2.5 2.0 Phase modulation (π rad) The X10468/X13267/X13138 series can achieve phase modulation of more than 2 π radians over the 400-1550 nm readout wavelength range. The X10468/X13267/X13138 series comes pre-calibrated from the factory for a specified wavelength range to have more than 2 π radians of phase modulation and its linear characteristics. Figure 2 shows typical phase modulation characteristics. A phase shift of 2 π radians or more and a linear phase response are achieved. The phase modulation curves for 95% pixels lies within +/- 2 σ. 1.5 1.0 Average +2σ -2σ 0.5 0 -0.5 0 32 64 96 128 160 192 224 256 Input signal level KACCB0271EA 4 LCOS-SLM (Liquid Crystal on Silicon - Spatial Light Modulator) X10468/X13267/X13138 series Diffraction efficiency The X10468/X13267/X13138 series is a pure phase SLM with high precision phase control; therefore, it has high diffraction efficiency close to the theoretical values. Figure 3 shows images of diffracted spots, when a multi-level phase grating is formed in the X10468 series and Figure 4 shows typical diffraction efficiency characteristics. Here, the diffraction efficiency is defined I1/I0, I1 is intensity of the 1st order diffraction spot, I0 is the intensity of the 0th order light when no pattern is displayed. [Figure 3] Diffracted spots images (typical example) [Figure 4] Diffraction efficiency (typical example) (Ta=25 °C) 100 90 0th (a) No pattern +1st -1st (b) 2-level grating (25 lp/mm) Diffraction efficiency (%) 80 70 60 50 X10468-01 X10468-02 X10468-03 X10468-04 Theoretical X10488-05 X10468-06 X10468-07 X10468-08 40 30 20 10 0 0 +1st 5 10 15 20 25 30 Spatial frequency (lp/mm) KACCB0272EA (c) 4-level grating (12.5 lp/mm) 5 LCOS-SLM (Liquid Crystal on Silicon - Spatial Light Modulator) X10468/X13267/X13138 series Phase fluctuation As the LCOS-SLM is driven by AC power, the output light will fluctuate according to the drive frequency even when a uniform pattern is displayed over the entire surface. Figure 5 shows an example of the phase fluctuation for the -04 types. The drive frequency is 120 Hz for SXGA operation (X13138-04) and 240 Hz for SVGA operation (X10468/X13267-04). In SXGA operation, which operates at low frequency, the phase fluctuation is about four times greater than that in SVGA operation. [Figure 5] Phase fluctuation (typical example) 0.03 0.02 Phase (πrad) 0.01 0 -0.01 -0.02 SVGA operation SXGA operation -0.03 0 10 20 30 40 50 60 70 80 90 100 Time (ms) KACCB0386EA Output image examples The X10468/X13267/X13138 series has high precision phase control and high diffraction efficiency, and is very suitable for holographic applications. Figure 6 (a) is a interferometer picture of the output wavefront with a flatness calibration. The image in Figure 6 (b) was reconstructed as the 1st diffraction order of the phase hologram through the Fourier transform optics. Figure 6 (c) shows a clear Laguerre Gaussian (LG) beam of (0, 1) order. [Figure 6] Output image examples (a) Interferogram of output wavefront with calibration 800 × 600 pixels RMS: 0.025 λ (λ=532 nm) (b) Reconstructed image of CGH (c) LG beam 6 LCOS-SLM (Liquid Crystal on Silicon - Spatial Light Modulator) X10468/X13267/X13138 series Dimensional outlines (unit: mm) Head 12 ± 0.2 16 ± 0.2 39 ± 1.2* 110 ± 0.3 4.7 Reflecting surface 17.5 ± 0.2 (4 ×)M2.6 4 max. 37 ± 1.2* 74 ± 0.3 6 ± 0.1 4 ± 0.1 39 ± 0.3 M6 20 ± 0.2 17.5 ± 0.2 12 ± 0.2 (4 ×)M2.6 4 max. * Although the center of the LCOS effective area may deviate due to production tolerance, the aperture and the LCOS effective area are aligned. KACCA0295ED 7 LCOS-SLM (Liquid Crystal on Silicon - Spatial Light Modulator) X10468/X13267/X13138 series Controller DVI IN DIGITAL OUT ANALOG OUT FUSE T2.5AL250V 250 ± 1.0 AC 100V-230V2A 260 ± 1.0 CONTROLLER RESET ERROR 10.2 ± 1.0 POWER OUTPUT 100 ± 1.0 LCOS-SLM POWER KACCA0296EB The X10468/X13267/X13138 series does not include a PC. Prepare a PC by referring to the followings: ∙ OS that supports the provided software*3 : Microsoft® Windows® XP/7 ∙ PC must have a DVI-D port for connecting to the X10468/X13267/X13138 series. ∙ The provided software supports dual monitor control. The first monitor is for PC screen and the second one is for phase images on the X10468/X13267/X13138 series. In this case, the phase image displayed on the second monitor can be controlled by operation on the first monitor. Note that you need a dual ported DVI-D display card to perform this operation. *3: The provided software that comes with the X10468/X13267/X13138 series has generating functions such as for a computer generated hologram (CGH). Note: Microsoft, Windows are either registered trademarks or trademarks of Microsoft Corporation in the United States and/or other countries. 8 LCOS-SLM (Liquid Crystal on Silicon - Spatial Light Modulator) X10468/X13267/X13138 series Related information www.hamamatsu.com/sp/ssd/doc_en.html Precautions ∙ Disclaimer Information described in this material is current as of September, 2015. Product specifications are subject to change without prior notice due to improvements or other reasons. This document has been carefully prepared and the information contained is believed to be accurate. In rare cases, however, there may be inaccuracies such as text errors. Before using these products, always contact us for the delivery specification sheet to check the latest specifications. The product warranty is valid for one year after delivery and is limited to product repair or replacement for defects discovered and reported to us within that one year period. However, even if within the warranty period we accept absolutely no liability for any loss caused by natural disasters or improper product use. Copying or reprinting the contents described in this material in whole or in part is prohibited without our prior permission. www.hamamatsu.com HAMAMATSU PHOTONICS K.K., Solid State Division 1126-1 Ichino-cho, Higashi-ku, Hamamatsu City, 435-8558 Japan, Telephone: (81) 53-434-3311, Fax: (81) 53-434-5184 U.S.A.: Hamamatsu Corporation: 360 Foothill Road, Bridgewater, N.J. 08807, U.S.A., Telephone: (1) 908-231-0960, Fax: (1) 908-231-1218 Germany: Hamamatsu Photonics Deutschland GmbH: Arzbergerstr. 10, D-82211 Herrsching am Ammersee, Germany, Telephone: (49) 8152-375-0, Fax: (49) 8152-265-8 France: Hamamatsu Photonics France S.A.R.L.: 19, Rue du Saule Trapu, Parc du Moulin de Massy, 91882 Massy Cedex, France, Telephone: 33-(1) 69 53 71 00, Fax: 33-(1) 69 53 71 10 United Kingdom: Hamamatsu Photonics UK Limited: 2 Howard Court, 10 Tewin Road, Welwyn Garden City, Hertfordshire AL7 1BW, United Kingdom, Telephone: (44) 1707-294888, Fax: (44) 1707-325777 North Europe: Hamamatsu Photonics Norden AB: Torshamnsgatan 35 16440 Kista, Sweden, Telephone: (46) 8-509-031-00, Fax: (46) 8-509-031-01 Italy: Hamamatsu Photonics Italia S.r.l.: Strada della Moia, 1 int. 6, 20020 Arese (Milano), Italy, Telephone: (39) 02-93581733, Fax: (39) 02-93581741 China: Hamamatsu Photonics (China) Co., Ltd.: B1201, Jiaming Center, No.27 Dongsanhuan Beilu, Chaoyang District, Beijing 100020, China, Telephone: (86) 10-6586-6006, Fax: (86) 10-6586-2866 Cat. No. KACC1172E13 Sep. 2015 DN 9