Omron D6F-P0001A1 A compact, high-accuracy flow sensor with superior resistance to environments. Datasheet

D6F-P
MEMS Flow Sensor
A Compact, High-accuracy Flow
Sensor with Superior Resistance
to Environments.
• Anti-dust performance is improved using the Cyclon method.
• A full lineup of models with different connector types: barb
joints, lead terminals for direct mounting on-board, and manifolds.
• High accuracy of ±5% FS.
RoHS Compliant
Refer to the Safety Precautions on page 4.
Ordering Information
Model
Applicable fluid (See note 1.)
Flow rate range
D6F-P0001A1 (Lead terminals)
0 to 0.1 L/min.
D6F-P0010A1 (Lead terminals)
25
Air (See note 2.)
D6F-P0010A2 (Connector)
Minimum order
25
25
0 to 1 L/min.
D6F-P0010AM2
(Connector manifold mount)
25
D6F-CABLE2 (Optional)
(A2 and AM2)
−
−
25
D6F-P
Note: 1. The Sensor be calibrated for different gas types. Consult your Omron representative.
Note: 2. Dry gas must not contain large particles, e.g., dust, oil, or mist.
Output Voltage Characteristics
D6F-P0010A1/-P0010A2/-P0010AM2
3.0
3.0
2.5
2.5
Output voltage (V)
Output voltage (V)
D6F-P0001A1
2.0
1.5
1.0
0.5
0.0
2.0
1.5
1.0
0.5
0.0
0
0.02
0.04
0.06
Flow rate (L/min)
0.08
0.10
0
0.25
1
Flow rate
L/min (normal)
0
Output voltage
0.50
0.90
1.30
1.70
2.10
2.50
Output voltage
0.50
1.60
2.10
2.31
2.50
V
±0.10
±0.10
±0.10
±0.10
±0.10
±0.10
V
±0.10
±0.10
±0.10
±0.10
±0.10
0.02
0.04
0.06
0.08
0.10
Measurement conditions: Power supply voltage of 12 ±0.1 VDC, ambient temperature of 25±5°C, and ambient humidity of 35% to 75%.
Flow rate
L/min (normal)
0.5
0.75
Flow rate (L/min)
0
0.25
0.50
0.75
1.00
Measurement conditions: Power supply voltage of 1±0.1 VDC, ambient temperature of 25±5°C, and ambient humidity of 35% to 75%.
1
D6F-P
MEMS Flow Sensor
Characteristics/Performance
Model
D6F-0001A1
Flow Range (See note 1.)
0 to 0.1 L/min
Calibration Gas (See note 2.)
Air
Flow Port Type
D6F-P0010A1
D6F-P0010A2
Barb joint
Manifold
Maximum outside diameter: 4.9 mm
Electrical Connection
Lead terminals
Power Supply
4.75 to 5.25 VDC
Lead terminal
Current Consumption
15 mA max. with no load and a Vcc of 5.0 V
Output Voltage
0.5 to 2.5 VDC (Load resistance: 10 kΩ)
Accuracy
±5% FS (25°C characteristic)
Repeatability (See note 3.)
±1.0% FS
Output Voltage (Max.)
3.1 VDC (Load resistance: 10 kΩ)
Output Voltage (Min.)
0 VDC (Load resistance: 10 kΩ)
Rated Power Supply Voltage
10 VDC
Rated Output Voltage
4 VDC
Case
PBT
Degree of Protection
IEC IP40
Withstand Pressure
50 kPa
D6F-P0010AM2
0 to 1 L/min
Three-pin connector
±0.4% FS
Pressure Drop (See note 3.)
0.005 kPa
Operating Temperature
−10 to 60°C (with no condensation or icing)
0.19 kPa
Operating Humidity
35% to 85% (with no condensation or icing)
Storage Temperature
−40 to 80°C (with no condensation or icing)
Storage Humidity
35% to 85% (with no condensation or icing)
Temperature Characteristics
±5% FS for 25°C characteristic at an ambient temperature of -10 to 60°C
0.67 kPa
Insulation Resistance
Between Sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC)
Dielectric Strength
Between Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.)
Weight
8.5 g
D6F-P
Note: 1. A 0 to 1 L/min. (normal) volumetric flow rate at 0°C, 101.3 kPa.
Note: 2. Dry gas. (must not contain large particles, e.g., dust, oil, or mist.)
Note: 3. Reference (typical)
2
8.0 g
D6F-P
MEMS Flow Sensor
Connections/Dimensions (Unit: mm)
■ PCB Terminals
D6F-P0001A1/D6F-P0010A1
Label: Gives model and lot numbers.
23.3
10
11.7
MADE IN JAPAN
D6F
27.2
7.3
2.6 dia.
Two, 4.9 dia.
Two, 1.1 dia.
14
7.6±0.2
Connector
XG8V-0344
(manufactured
by OMRON)
Label
16.2
6
3. GND
2.54
1.7
6
Two, 3-dia.
through hole
1.2
9.8
A
17.2
13.5
Two, R: 1.4
1. Vcc
5.08
2. Vout
Detailed View of A
2.8 dia.
1.5
13.2
7.2
13.5
Three, 1.3-dia. lands
4.76
Three, 0.8-dia.
through holes
2.54
5.04
Recommended Dimensions for
Connector Mounting Holes
7.2
4.76
■ Connectors
D6F-P0010A2
23.3
10
7.3
11.7
2.6 dia.
MADE IN JAPAN
A
8.5
14
17.2
7.6±0.2
16.2
6
8.5
Label: Gives model and lot numbers.
Label
D6F
27.2
Two, 1.1 dia.
Two, 4.9 dia.
1.2
1.7
Two, R: 1.4
13.5
1.5
1.Vcc
2.8 dia.
2.Vout
13.2
3.GND
Detailed View of A
D6F-P0010AM2
Use one of the following connectors from JST
Mfg. Co., Ltd. to connect to the D6F.
D6F-P
Note:
*1. Recommended Installation Dimensions
1) Pressure welding connector
Socket: 03SR-3S
Wire: AWG#30 or
6.7±0.1
Two, 7 +0.5
dia.
0
M3 threaded 14±0.05
2) Crimp type connector
Contact: SSH-003T-P0.2
Wire: AWG#32 to #28
Housing: SHR-03V-S
22
18
6.7±0.1 *1
8
2
0
Two, 4 −0.05
dia.
B
27.2
1+0.1
0
14±0.05
A
D6F
22.1
MADE IN JAPAN
3.5 dia.
6.4 9.6
Two, 0.3
(entire circumference)
3. GND
2.7±0.1
2.Vout
0.3±0.1
1.Vcc
0.3±0.1
Lot number label
Detailed View of A
Detailed View of B
Grooves to stop rotation
Connector Details
■ Cable (Optional)
D6F-CABLE2
White wire
Black wire
3: GND
2: Vout
15±3
(5)
Red wire
180±10
1: Vcc
3
D6F-P
MEMS Flow Sensor
Safety Precautions
WARNING
The D6F is built for use with general-purpose devices. In cases
such as those described below, where safety is required, implement measures to ensure the safety of the system and all
devices, such as fail-safe designs, redundancy designs, and regular maintenance.
• Safety devices for ensuring safety for persons
• Transportation equipment control (such as applications to stop
operation)
• Aviation and space equipment
• Nuclear power equipment
Do not use the D6F for applications in which D6F operation
would directly affect human life.
Caution
Make sure that the power to all equipment is turned OFF before
you install the Sensor. Installing the Sensor while the power supply is ON may result in electrical shock or abnormal operation.
Precautions for Correct Use
● Fluids,Tubes, and Sensor Installation
D6F-P
All Models
(1) Use clean fluids. Dust and mist can affect the characteristics
of the Sensor or damage the Sensor. Install a filter and mist
separator on the upstream tube.
(Not required for the [email protected] or D6F-P.)
(2) Do not use combustible gases (e.g., hydrogen), corrosive
gases (e.g., chlorine, sulfur, acidic, or alkali gas), or other
non-approved fluids. They may damage the Sensor.
(3) The performance specifications that are given for the G6F
do not apply if any fluids other than the specified applicable
fluid are used.
(4) Foreign matter in the tubes that are connected to the Sensor
may damage the Sensor. Prevent any foreign matter from
entering the tubes after the Sensor is removed from its
packaging.
(5) Attach the tubes so that fluid flows only in the direction designated by the arrows on the Sensor. Correct measurements cannot be obtained if the fluid flows in the wrong
direction.
(6) We recommend that you install the tubes horizontally. If the
tubes are not installed horizontally, an error of ±1% FS or
higher may result.
(This does not apply to the D6F-03A3.)
(7) Install the Sensor on a flat surface. Incorrect installation may
damage the Sensor and make it impossible to obtain correct
measurements.
(8) After the Sensor is installed, check to confirm that it operates correctly.
(9) Do not drop the Sensor, remove the cover, or attempt to disassemble the Sensor in any way.
D6F-P0001A1, D6F-P0010A1, and D6F-P0010A2
(1) Depending on the ambient environment and installation
location, dust, dirt, and other foreign matter may come in
inside the Sensor and block a part or all of the flow path or
accumulate on internal components. This may result in the
Sensor not being able to perform to the specifications given
above. Always perform a pre-evaluation on your actual
equipment and be aware of the possible problems that may
occur before you use the Sensor with the actual equipment.
4
(2) Attach all tubes so that the fluid flows only in the direction
from the positive side (+) to the negative side (−).
(3) For PCB-mounting, perform terminal soldering only after the
Sensor is secured into place on the PCB.
(4) Use M2.6 panhead screws or equivalent tapping screws to
mount the Sensor, and tighten the screws to a maximum
torque of 0.59 N·m.
D6F-P0010AM2
(1) Depending on the ambient environment and installation
location, dust, dirt, and other foreign matter may come in
inside the Sensor and block a part or all of the flow path or
accumulate on internal components. This may result in the
Sensor not being able to perform to the specifications given
above. Always perform a pre-evaluation on your actual
equipment and be aware of the possible problems that may
occur before you use the Sensor with the actual equipment.
(2) Attach all tubes so that the fluid flows only in the direction
from the positive side (+) to the negative side (−).
(3) Use M3 panhead screws or equivalent tapping screws to
mount the Sensor, and tighten the screws to a maximum
torque of 0.59 N·m.
(4) Install O-rings to seal the fluid inlet and outlet points. The
recommended O-ring is JIS B 2401, nominal number P4.
Installation Example
M3 panhead screw or a tapping screw
with the same diameter
O-ring
● Operating Environment
Do not use the Sensor in the following locations:
• Locations directly subject to heat radiated from heating equipment
• Locations subject to water or oil
• Locations subject to direct sunlight
• Locations subject to intense temperature changes
• Locations subject to icing or condensation
• Locations subject to excessive vibration or shock
● Countermeasures against Noise
Noise may make it impossible to obtain correct measurements.
Consider the following countermeasures.
• Allow as much space as possible between the Sensor and
devices that generates high frequencies (such as high-frequency
welders and high-frequency sewing machines) or surges.
• Attach surge absorbers or noise filters to noise-generating
devices that are near the Sensor (in particular, equipment with
inductance, such as motors, transformers, solenoids, and
magnetic coils).
(It also helps to separate pipes and ducts, and to use shielded
cables.)
● Power Supply
• Do not directly solder power supply leads to the connector terminals. Use only the appropriate connectors.
• Wire with the correct terminal names and polarities. Incorrect
wiring will cause failure of internal components.
• When using a commercially available switching regulator,
ground the FG (frame ground) and G (ground) terminals.
D6F-P
MEMS Flow Sensor
RoHS Directive
The RoHS mark is displayed on the packing of products for
which the six substances banned by the RoHS Directive have
been abolished (both in processing and in the electronic components mounted to the PCBs).
*
RoHS marking may be terminated if it is later determined that parts that were
previously treated as RoHS compliant are not compliant due to circumstances at the supplier of the parts.
● RoHS Compliance Criteria
The following standards are used to determine RoHS compliance for the six banned substances.
(Items to which the RoHS Directive is not applicable are not
given.)
• Lead: 1,000 ppm max.
• Hexavalent chromium: 1,000 ppm max.
• Mercury: 1,000 ppm max.
• PBB: 1,000 ppm max.
• Cadmium: 100 ppm max.
D6F-P
• PBDE: 1,000 ppm max.
5
MEMS Flow Sensor
D6F-P
D6F-P
• Application examples provided in this document are for reference only. In actual applications, confirm equipment functions and safety before using the product.
• Consult your OMRON representative before using the product under conditions which are not described in the manual or applying the product to nuclear control systems, railroad
systems, aviation systems, vehicles, combustion systems, medical equipment, amusement machines, safety equipment, and other systems or equipment that may have a serious
influence on lives and property if used improperly. Make sure that the ratings and performance characteristics of the product provide a margin of safety for the system or
equipment, and be sure to provide the system or equipment with double safety mechanisms.
OMRON Corporation
ELECTRONIC AND MECHANICAL COMPONENTS COMPANY
6
Contact: www.omron.com/ecb
Cat. No. A183-E1-01
0812
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