AWM3000 Series Mass flow sensor for gases FEATURES · Ranges 0...30 to 0...±1000 sccm1 or 0...0.5 to 0...2 "H2O (0...1.25 to 0...5 mbar) · 1...5 V, 1...3.75 V, 4...20 mA output · Actual mass flow sensing · Low differential pressure sensing SERVICE To be used with dry gases only The AWM series is NOT designed for liquid flow and will be damaged by liquid flow through the sensor SPECIFICATIONS ELECTRICAL CONNECTION Maximum ratings Supply voltage2 Power consumption AWM3303V AWM3...CR all others 8 to 15 V typ. 10 ±0.01 V P2 typ. 100 mW typ. 50 mW typ. 50 mW, max. 60 mW Temperature limits Operating Storage -25 to 85°C -40 to 90°C Mechanical shock 100 g (5 drops, 6 axes) 1 2 3 Note: 1 sccm denotes standard cubic centimeters per minute 2 Output voltage is ratiometric to supply voltage June 2006 / 582 P1 Pin 1: Vout Pin 2: +V s Pin 3: GND 1/6 www.sensortechnics.com AWM3000 Series Mass flow sensor for gases FLOW SENSOR CHARACTERISTICS3 VS = 10 ±0.01 V, TA = 25°C Pressure range Output voltage @ trim point Part no. Flow range (full scale) AWM3100V 2 0 0 sccm 5.0 l/sec AWM3150V 3 0 sccm 5.0 l/sec 3.4 V @ 25 sccm 5.0 l/sec 5 V @ 2 "H2O Max. flow change4 2 "H2O AWM3200V 5 V @ 2 0 0 sccm AWM3300V 1 0 0 0 sccm 5.0 l/sec 5 V @ 1 0 0 0 sccm AWM3303V ±1000 sccm 5.0 l/sec 5 ±0.15 V AWM3200CR 2 "H2O 5.0 l/sec 20 ±1 mA @ 2 "H2O AWM3201CR 0.5 "H2O 5.0 l/sec 20 ±1 mA @ 0.5 "H2O PERFORMANCE CHARACTERISTICS VOLTAGE OUTPUT VERSIONS (VS = 10 ±0.01 V, TA = 25°C) Characteristics Zero offset Repeatability and hysteresis Offset Span Typ. Max. AWM3100V 0.95 1.0 1.05 AWM3150V 0.90 1.0 1.10 AWM3200V 0.92 1.0 1.08 AWM3300V 0.90 1.0 1.10 AWM3303V 2.95 3.0 3.05 AWM3100V, AWM3200V ±0.5 all others ±1.0 (combined) Temperature effects5 Min. -25 to 85 °C6 -25 to 25 °C 25 to 85 °C AWM3150V ±100 AWM3303V ±50 all others ±25 Response time Common mode pressure 2/6 V % reading mV AWM3100V -4.0 AWM3150V ±5.0 AWM3200V 24.05 AWM33... -5.0 AWM3100V 4.0 AWM3150V ±5.0 AWM3200V -24.05 AWM33... 7 Unit % reading 5.0 1.0 3.0 ms 25 p si June 2006 / 582 www.sensortechnics.com AWM3000 Series Mass flow sensor for gases PERFORMANCE CHARACTERISTICS CURRENT OUTPUT VERSIONS (VS = 10 ±0.01 V, TA = 25°C) Characteristics Zero offset Min. Typ. Max. AWM3200CR 3.7 4.0 4.3 AWM3201CR 3.6 4.0 4.4 Repeatability and hysteresis (combined) ±0.5 Non-linearity 5 Temperature effects5 Offset Span -25 to 85 °C6 -25 to 25 °C 25 to 85 °C ±2.0 24 AWM3201CR 325 AWM3200CR -315 AWM3201CR -325 External output load 60 8 100 to 300 mA % reading mA 5 AWM3200CR Response time7 Unit % reading ms Ohm GAS CORRECTION FACTORS9 Gas type Helium (He) Hydrogen (H2) Argon (Ar) Nitrogen (N2) Oxygen (O2) Ai r Nitric oxide (NO) Carbon monoxide (CO) Methane (CH4) Ammonia (NH3) Nitrous oxide (N2O) Nitrogen dioxide (NO2) Carbon dioxide (CO2) Correction factor (approx.) 0.510 0.710,11 0.95 1.0 1.0 1.0 1.0 1.0 1.1 1.1 1.35 1.35 1.35 Notes: 3 A 5 micron filter is recommended for all devices. 4 Maximum allowable rate of flow change to prevent damage. 5 Temperature shifts in differential pressure devices are mostly due to the density change of the gas over temperature. 6 Shift is relative to 25 °C. 7 Initial warm-up time for signal conditioned circuitry is 1 minute max. 8 Output load connected from Vout to GND (current sinking). 9 Gas correction factors are referenced to nitrogen (N2) as calibration gas type. Approximate gas correction factors are provided as guidelines only. Individual gas types may perform differently at temperature extremes and varying flow rates. 10 When sensing Hydrogen (H2) or Helium (He) it may be necessary to power the mass flow sensor using increased supply voltage: Hydrogen typ. 12 V, Helium typ. 15 V 11 Hydrogen (H2) flow measurement requires the use of a special sensor. These devices provide normal operation when sensing hydrogen flow and are designated with an "H" at the end of the order number. June 2006 / 582 3/6 www.sensortechnics.com AWM3000 Series Mass flow sensor for gases OUTPUT FLOW VS INTERCHANGEABILITY VS = 10 ±0.01 V, TA = 25°C 13 12 13 OUTPUT CURVES 4/6 June 2006 / 582 www.sensortechnics.com AWM3000 Series Mass flow sensor for gases OUTPUT FLOW VS INTERCHANGEABILITY VS = 10 ±0.01 V, TA = 25°C 13 13 12 13 OUTPUT CURVES June 2006 / 582 5/6 www.sensortechnics.com AWM3000 Series Mass flow sensor for gases 6.3 (0.25) OUTLINE DRAWING 2.8 (0.11) 7.60 (0.30) 1.40 (0.055) 2.9 (0.114) 1.8 (0.07) 5.1 (0.20) 54.4 (2.14) P1 8.4 (0.33) P2 31.5 (1.24) Note: Positiv flow direction is defined as proceeding from port 1 (P1) to port 2 (P2) and results in positive output. mass: approx. 10.8 g 23.6 (0.93) 2.8 (0.11) 1.0 (0.04) 5.1 (0.20) 1 2 3 0.6 (0.025) 1.52 (0.06) 2.5 (0.10) 4.1 (0.16) 7.3 (0.287) 23.9 (0.94) 30.5 (1.20) 12.7 (0.50) 15.5 (0.61) dimensions in mm (inches) ORDERING INFORMATION Flow range Dry gas 0...30 sccm AWM3150V 0...200 sccm AWM3100V 0...1000 sccm AWM3300V 0...±1000 sccm AWM3303V Dry gas Pressure range Voltage output Current output 0...0.5 "H2O (0...1.25 mbar) --- AWM3201CR 0...2 "H2O (0...5 mbar) AWM3200V AWM3200CR Sensortechnics reserves the right to make changes to any products herein. Sensortechnics does not assume any liability arising out of the application or use of any product or circuit described herein, neither does it convey any license under its patent rights nor the rights of others. 6/6 June 2006 / 582 www.sensortechnics.com