Agilent
E4991A RF Impedance/Material Analyzer
Data Sheet
Definitions
Measurement Parameters and Range
All specifications apply over a 5 °C to 40 °C range (unless
otherwise stated) and 30 minutes after the instrument has
been turned on.
Measurement parameters
Specification (spec.)
Warranted performance. Specifications include
guardbands to account for the expected statistical
performance distribution, measurement uncertainties, and
changes in performance due to environmental conditions.
Supplemental information is intended to provide
information useful in applying the instrument, but that is
not covered by the product warranty. The information is
denoted as typical, or nominal.
Typical (typ.)
Expected performance of an average unit which does not
include guardbands. It is not covered by the product
warranty.
Nominal (nom.)
A general, descriptive term that does not imply a level of
performance. It is not covered by the product warranty.
2
Impedance parameters:
|Z|, |Y|, Ls, Lp, Cs, Cp, Rs(R), Rp, X, G, B, D, Q, θz,
θy, |Γ|, Γx, Γy, θγ
Material parameters (option E4991A-002):
(see “Option E4991A-002 material measurement (typical)”
on page 17)
Permittivity parameters: |εr|, εr', εr", tanδ
Permeability parameters: |μr|, μr', μr", tanδ
Measurement range
Measurement range (|Z|):
130 mΩ to 20 kΩ.
(Frequency = 1 MHz,
Point averaging factor ≥ 8,
Oscillator level = –3 dBm; = –13 dBm; or = –23 dBm,
Measurement accuracy ≤ ±10%,
Calibration is performed within 23 °C ±5 °C,
Measurement is performed within ±5 °C of
calibration temperature)
Source Characteristics
DC Bias (Option E4991A-001)
Frequency
DC voltage bias
Range: 1 MHz to 3 GHz
Range: 0 to ±40 V
Resolution: 1 mHz
Resolution: 1 mV
Accuracy:
without Option E4991A-1D5:
±10 ppm (23 °C ±5 °C)
±20 ppm (5 °C to 40 °C)
with Option E4991A-1D5:
±1 ppm (5 °C to 40 °C)
Accuracy:
±{0.1% + 6 mV + (Idc[mA] x 20 Ω)[mV]}
(23 °C ±5 °C)
±{0.2% + 12 mV + (Idc[mA] x 40 Ω)[mV]}
(5 °C to 40 °C)
Stability:
with Option E4991A-1D5:
±0.5 ppm/year (5 °C to 40 °C)(typical)
DC current bias
Oscillator level
Accuracy:
±{0.2%+20 µA+ (Vdc[V] /10 kΩ)[mA]}
(23 °C ±5 °C)
±{0.4% +40 µA+ (Vdc[V] /5 kΩ)[mA]}
(5 °C to 40 °C)
Range:
Power (when 50 Ω load is connected to test port):
–40 dBm to 1 dBm (frequency ≤ 1 GHz)
–40 dBm to 0 dBm (frequency > 1 GHz1)
Current (when short is connected to test port):
0.0894 mArms to 10 mArms (frequency ≤ 1 GHz)
0.0894 mArms to 8.94 mArms (frequency > 1 GHz1)
Voltage (when open is connected to test port):
4.47 mVrms to 502 mVrms (frequency ≤ 1 GHz)
4.47 mVrms to 447 mVrms (frequency > 1 GHz1)
Resolution: 0.1 dB2
Accuracy:
(Power, when 50 Ω load is connected to test port)
Frequency ≤ 1 GHz:
±2 dB (23 °C ±5 °C)
±4 dB (5 °C to 40 °C)
Frequency > 1 GHz:
±3 dB (23 °C ±5 °C)
±5 dB (5 °C to 40 °C)
with Option E4991A-010:
Frequency ≤ 1 GHz
±3.5 dB (23 °C ± 5 °C)
±5.5 dB (5 °C to 40 °C)
Frequency > 1 GHz
±5.6 dB (23 °C ± 5 °C)
±7.6 dB (5 °C to 40 °C)
Range: 100 µA to 50 mA, –100 µA to –50 mA
Resolution: 10 µA
DC bias monitor
Monitor parameters: Voltage and current
Voltage monitor accuracy:
±{0.5% + 15 mV + (Idc[mA] x 2 Ω)[mV]}
(23 °C ±5 °C, typical)
±{1.0% + 30 mV + (Idc[mA] x 4 Ω)[mV]}
(5 °C to 40 °C, typical)
Current monitor accuracy:
±{0.5% + 30 µA + (Vdc[V] / 40 k Ω)[mA]}
(23 °C ±5 °C, typical)
±{1.0% + 60 µA + (Vdc[V] / 20 k Ω)[mA]}
(5 °C to 40 °C, typical)
Output impedance
Output impedance: 50 Ω (nominal)
1. It is possible to set more than 0 dBm (447 mV, 8.94 mA) oscillator
level at frequency > 1 GHz. However, the characteristics at this
setting are not guaranteed.
2. When the unit is set at mV or mA, the entered value is rounded
to 0.1 dB resolution.
3
Probe Station Connection Kit
(Option E4991A-010)
Measurement Accuracy
Oscillator level
Temperature: 23 °C ±5 °C
Power accuracy:
Frequency ≤ 1 GHz:
±5.5 dB (5 °C to 40 °C)
Frequency > 1 GHz:
±7.6 dB (5 °C to 40 °C)
Accuracy-specified plane: 7-mm connector of test head
Sweep Characteristics
|Z|, |Y|:
±(Ea + Eb) [%]
(see Figures 1 through 4
for examples of
calculated accuracy)
Sweep parameters:
Frequency, oscillator level (power, voltage,
current), DC bias voltage, DC bias current
θ:
±
Sweep range setup: Start/stop or center/span
L, C, X, B:
± (Ea + Eb) x √(1 + Dx2) [%]
R, G:
± (Ea + Eb) x √(1 + Qx2) [%]
Conditions for defining accuracy
Accuracy defined measurement points:
Same points at which the calibration is done.
Accuracy when open/short/load
calibration is performed
Sweep conditions
Sweep directions:
Oscillator level, DC bias (voltage and current): up sweep,
down sweep
Other parameters sweep: up sweep
Number of measurement points: 2 to 801
Delay time:
Types: point delay, sweep delay, segment delay
Range: 0 to 30 sec
Resolution: 1 msec
Segment sweep
Available setup parameters for each segment:
Sweep frequency range, number of measurement
points, point averaging factor, oscillator level
(power, voltage, or current), DC bias (voltage or
current), DC bias limit (current limit for voltage
bias, voltage limit for current bias)
Number of segments: 1 to 16
Sweep span types: Frequency base or order base
4
D:
at Dx tan
Ea + Eb
100
(1 + Dx2 )tan
<1
at Dx ≤ 0.1
Q:
at Qx tan
at
±
1
±
Ea + Eb
<1
100
10
≥ Qx ≥ 10
Ea + Eb
Dx tan
Ea + Eb
100
Ea + Eb
100
Ea + Eb
100
(1 + Qx2 )tan
±
1
±Qx2
±
Sweep mode: Continuous, single
±
Sweep types:
Frequency sweep: linear, log, segment
Other parameters sweep: linear, log
(Ea + Eb)
[rad]
100
Qx tan
Ea + Eb
100
Ea + Eb
100
Ea + Eb
100
Accuracy when open/short/load/low-loss
capacitor calibration is performed
(Point averaging factor ≥ 8, typical)
|Z|, |Y|:
±(Ea + Eb) [%]
θ:
±
L, C, X, B:
± √(Ea + Eb)2 + (Ec Dx)2 [%]
R, G:
± √(Ea + Eb)2 + (Ec Qx )2 [%]
Ec
100
<1
at Dx ≤ 0.1
Q:
at Qx tan
at
±
1
±
Ec
<1
100
10
≥ Qx ≥ 10
Ec
Eb = ±
Ec
100
Ec
Dx tan
100
Ec
100
(1 + Qx2 )tan
±
±
at Dx tan
(1 + Dx2 )tan
±
D:
Ec
[rad]
100
1
±Qx2
Qx tan
at oscillator level < –33 dBm:
±1 [%] (1 MHz ≤ Frequency ≤ 100 MHz)
±1.2 [%] (100 MHz < Frequency ≤ 500 MHz)
±1.2 [%] (500 MHz < Frequency ≤ 1 GHz)
±2.5 [%] (1 GHz < Frequency ≤ 1.8 GHz)
±5 [%] (1.8 GHz < Frequency ≤ 3 GHz)
Ec
100
Ec
100
Ec
100
(See Figure 5)
Definition of each parameter
Dx = Measurement value of D
Qx = Measurement value of Q
Ea = (Within ±5 °C from the calibration temperature.
Measurement accuracy applies when the calibration is performed at 23 °C ±5 °C. When the calibration is performed
beyond 23 °C ±5 °C, measurement error doubles.)
at oscillator level ≥ –33 dBm:
±0.65 [%] (1 MHz ≤ Frequency ≤ 100 MHz)
±0.8 [%] (100 MHz < Frequency ≤ 500 MHz)
±1.2 [%] (500 MHz < Frequency ≤ 1 GHz)
±2.5 [%] (1 GHz < Frequency ≤ 1.8 GHz)
±5 [%] (1.8 GHz < Frequency ≤ 3 GHz)
Zs
+Yo• Zx × 100 [%]
Zx
(|Zx|: measurement value of |Z|)
0.08 × F
Ec = ± 0.06 + 1000 [%]
(F: frequency [MHz], typical)
Zs = (Within ±5 °C from the calibration temperature.
Measurement accuracy applies when the calibration is performed at 23 °C ±5 °C. When the calibration is performed
beyond 23 °C ±5 °C, the measurement accuracy decreases
to half that described.
F: frequency [MHz].)
at oscillator level = –3 dBm, –13 dBm, or –23 dBm:
±(13 + 0.5 × F) [mΩ] (averaging factor ≥ 8)
±(25 + 0.5 × F) [mΩ] (averaging factor ≤ 7)
at oscillator level ≥ –33 dBm
±(25 + 0.5 × F) [mΩ] (averaging factor ≥ 8)
±(50 + 0.5 × F) [mΩ] (averaging factor ≤ 7)
at oscillator level < –33 dBm
±(50 + 0.5 × F) [mΩ] (averaging factor ≥ 8)
±(100 + 0.5 × F) [mΩ] (averaging factor ≤ 7)
Yo = (Within ±5 °C from the calibration temperature.
Measurement accuracy applies when the calibration is performed at 23 °C ±5 °C. When the calibration is performed
beyond 23 °C ±5 °C, the measurement accuracy decreases
to half that described. F: frequency [MHz].)
at oscillator level = –3 dBm, –13 dBm, –23 dBm:
±(5 + 0.1 × F) [µS] (averaging factor ≥ 8)
±(10 + 0.1 × F) [µS] (averaging factor ≤ 7)
at oscillator level ≥ –33 dBm:
±(10 + 0.1 × F) [µS] (averaging factor ≥ 8)
±(30 + 0.1 × F) [µS] (averaging factor ≤ 7)
at oscillator level < –33 dBm
±(20 + 0.1 × F) [µS] (averaging factor ≥ 8)
±(60 + 0.1 × F) [µS] (averaging factor ≤ 7)
5
Measurement Accuracy (continued)
Calculated impedance measurement accuracy
Figure 1. |Z|, |Y| Measurement accuracy when open/short/load
calibration is performed. Oscillator level = –23 dBm, –13 dBm, –3 dBm.
Point averaging factor ≥ 8 within ±5 °C from the calibration temperature.
Figure 2. |Z|, |Y| Measurement accuracy when open/short/load
calibration is performed. Oscillator level ≥ –33 dBm. Point averaging
factor ≥ 8 within ±5 °C from the calibration temperature.
6
Figure 3. |Z|, |Y| Measurement accuracy when open/short/load
calibration is performed. Oscillator level ≥ –33 dBm. Point averaging
factor ≤ 7 within ±5 °C from the calibration temperature.
Figure 4. |Z|, |Y| Measurement accuracy when open/short/load
calibration is performed. Oscillator level < –33 dBm within ±5 °C from
the calibration temperature.
Measurement Support Functions
Error correction
Figure 5. Q Measurement accuracy when open/short/load/low-loss
capacitor calibration is performed (typical).
Available calibration and compensation
Open/short/load calibration:
Connect open, short, and load standards to the
desired reference plane and measure each kind
of calibration data. The reference plane is called
the calibration reference plane.
Low-loss capacitor calibration:
Connect the dedicated standard (low-loss
capacitor) to the calibration reference plane
and measure the calibration data.
Port extension compensation (fixture selection):
When a device is connected to a terminal that is
extended from the calibration reference plane,
set the electrical length between the calibration
plane and the device contact. Select the model
number of the registered test fixtures in the
E4991A’s setup toolbar or enter the electrical
length for the user’s test fixture.
Open/short compensation:
When a device is connected to a terminal that
is extended from the calibration reference plane, make
open and/or short states at the device contact and
measure each kind of compensation data.
Calibration/compensation data measurement point
User-defined point mode:
Obtain calibration/compensation data at
the same frequency and power points as used
in actual device measurement, which are
determined by the sweep setups. Each set of
calibration/compensation data is applied to each
measurement at the same point. If measurement
points (frequency and/or power) are changed
by altering the sweep setups, calibration/
compensation data become invalid and calibration
or compensation data acquisition is again required.
7
Measurement Support Functions (continued)
Fixed frequency and fixed power point mode:
Obtain calibration/compensation data at fixed
frequency and power points covering the entire
frequency and power range of the E4991A. In
device measurement, calibration or compensation
is applied to each measurement point by using
interpolation. Even if the measurement points
(frequency and/or power) are changed by
altering the sweep setups, you don’t need to
retake the calibration or compensation data.
Fixed frequency and user-defined power point mode:
Obtain calibration/compensation data at fixed
frequency points covering the entire frequency
range of the E4991A and at the same power
points as used in actual device measurement
which are determined by the sweep setups.
Only if the power points are changed, calibration/
compensation data become invalid and
calibration or compensation data acquisition
is again required.
Trigger
Trigger mode:
Internal, external (external trigger input
connector), bus (GPIB), manual (front key)
Averaging
Types:
Sweep-to-sweep averaging, point averaging
Setting range:
Sweep-to-sweep averaging: 1 to 999 (integer)
Point averaging: 1 to 100 (integer)
Display
LCD display :
Type/size: color LCD, 8.4 inch (21.3 cm)
Resolution: 640 (horizontal) × 480 (vertical)
Number of traces:
Data trace: 3 scalar traces + 2 complex traces
(maximum)
Memory trace: 3 scalar traces + 2 complex traces
(maximum)
Trace data math:
Data – memory, data/memory (for complex
parameters), delta% (for scalar parameters), offset
Format:
For scalar parameters: linear Y-axis, log Y-axis
For complex parameters: Z, Y: polar, complex; Γ: polar,
complex, Smith, admittance
Other display functions:
Split/overlay display (for scalar parameters),
phase expansion
8
Marker
Interface
Number of markers:
Main marker: one for each trace (marker 1)
Sub marker: seven for each trace (marker 2 to marker 8)
Reference marker: one for each trace (marker R)
GPIB
Marker search:
Search type: maximum, minimum, target, peak
Search track: performs search with each sweep
Standard conformity: IEEE 488.1-1987, IEEE 488.2-1987
Available functions (function code)1:
SH1, AH1, T6, TE0, L4, LE0, SR1, RL0, PP0, DT1, DC1, C0, E2
Numerical data transfer format: ASCII
Other functions:
Marker continuous mode, marker coupled mode,
marker list, marker statistics
Protocol: IEEE 488.2-1987
Equivalent circuit analysis
Interface standard: IEEE 1284 Centronics
Circuit models:
3-component model (4 models),
4-component model (1 model)
Analysis types:
Equivalent circuit parameters calculation,
frequency characteristics simulation
Printer parallel port
Connector type: 25-pin D-sub connector, female
LAN interface
Standard conformity:
10 Base-T or 100 Base-TX (automatically
switched), Ethertwist, RJ45 connector
Protocol: TCP/IP
Limit marker test
Functions: FTP
Number of markers for limit test:
9 (marker R, marker 1 to 8)
USB Port
Setup parameters for each marker:
Stimulus value, upper limit, and lower limit
Interface standard: USB 1.1
Mass storage
Available functions:
Provides connection to printers and USB/GPIB Interface.
Built-in flexible disk drive:
3.5 inch, 720 KByte or 1.44 MByte, DOS format
Connector type: Standard USB A, female
Hard disk drive: 2 GByte (minimum)
Stored data:
State (binary), measurement data (binary, ASCII or CITI
file), display graphics (bmp, jpg), VBA program (binary)
1. Refer to the standard for the meaning of each function code.
9
Measurement Terminal
(At Test Head)
Rear Panel Connectors
Connector type: 7-mm connector
Frequency: 10 MHz ±10 ppm (typical)
External reference signal input connector
Level: 0 dBm to +6 dBm (typical)
Input impedance: 50 Ω (nominal)
Connector type: BNC, female
Internal reference signal output connector
Frequency: 10 MHz (nominal)
Accuracy of frequency:
Same as frequency accuracy described in
“Frequency” on page 3
Level: +2 dBm (nominal)
Output impedance: 50 Ω (nominal)
Connector type: BNC, female
High stability frequency reference
output connector (Option E4991A-1D5)
Frequency: 10 MHz (nominal)
Accuracy of frequency:
Same as frequency accuracy described in
“Frequency” on page 3
Level: +2 dBm (nominal)
Output impedance: 50 Ω (nominal)
Connector type: BNC, female
10
External trigger input connector
General Characteristics
Level:
LOW threshold voltage: 0.5 V
HIGH threshold voltage: 2.1 V
Input level range: 0 V to +5 V
Environment conditions
Pulse width (Tp):
≥ 2 µsec (typical). See Figure 6 for definition of Tp.
Temperature: 5 °C to 40 °C
Polarity: Positive or negative (selective)
Connector type: BNC, female
Tp
Tp
Tp
5V
5V
OV
OV
Postive trigger signal
Figure 6. Definition of pulse width (Tp)
Tp
Operating condition
Humidity:
(at wet bulb temperature ≤ 29 °C, without condensation)
Flexible disk drive non-operating condition:
15% to 90% RH
Flexible disk drive operating condition:
20% to 80% RH
Altitude: 0 m to 2,000 m (0 feet to 6,561 feet)
Negative trigger signal
Vibration: 0.5 G maximum, 5 Hz to 500 Hz
Warm-up time: 30 minutes
Non-operating storage condition
Temperature: –20 °C to +60 °C
Humidity:
(at wet bulb temperature ≤ 45 °C, without condensation)
15% to 90% RH
Altitude: 0 m to 4,572 m (0 feet to 15,000 feet)
Vibration: 1 G maximum, 5 Hz to 500 Hz
11
General Characteristics (continued)
Other Specifications
Safety
EMC
European Council Directive 89/336/EEC
IEC 61326-1:1997+A1
CISPR 11:1990 / EN 55011:1991 Group 1, Class A
IEC 61000-4-2:1995 / EN 61000-4-2:1995
4 kV CD / 4 kV AD
IEC 61000-4-3:1995 / EN 61000-4-3:1996
3 V/m, 80-1000 MHz, 80% AM
IEC 61000-4-4:1995 / EN 61000-4-4:1995
1 kV power / 0.5 kV Signal
IEC 61000-4-5:1995 / EN 61000-4-5:1995
0.5 kV Normal / 1 kV Common
IEC 61000-4-6:1996 / EN 61000-4-6:1996
3 V, 0.15-80 MHz, 80% AM
IEC 61000-4-11:1994 / EN 61000-4-11:1994
100% 1cycle
Note: When tested at 3 V/m according to
EN 61000-4-3:1996, the measurement accuracy
will be within specifications over the full immunity test
frequency range of 80 MHz to 1000 MHz except when the
analyzer frequency is identical to the transmitted interference signal test frequency.
AS/NZS 2064.1/2 Group 1, Class A
12
European Council Directive 73/23/EEC
IEC 61010-1:1990+A1+A2 / EN 61010-1:1993+A2
INSTALLATION CATEGORY II, POLLUTION
DEGREE 2
INDOOR USE
IEC60825-1:1994 CLASS 1 LED PRODUCT
CAN/CSA C22.2 No. 1010.1-92
Power requirements
90 V to 132 V, or 198 V to 264 V (automatically switched),
47 Hz to 63 Hz, 350 VA maximum
Weight
Main unit: 17 kg (nominal)
Test head: 1 kg (nominal)
Dimensions
Main unit: See Figure 7 through Figure 9
Test head: See Figure 10
Option E4991A-007 test head dimensions: See Figure 11
Option E4991A-010 test head dimensions: See Figure 12
425.6
E4991A
1M Hz - 3 G Hz
RF Im pedanc e/M aterial A naly z er
MEASUREMENT
ENTRY / NAVIGATION
Trace
Meas/
Format
7
8
9
G /n
S c a le
Display
4
5
6
M /μ
Marker
Marker
Fctn
1
2
3
k /m
+/-
Enter
STIMULUS
0
Start/
Stop
Sweep
Source
Cal/
Compen
Trigger
Trigger
Setup
.
Click
Cancel/
Close
OK/
Apply
221.6
A gilent
Menu
SYSTEM
System
Utility
Save/
Recall
Preset
TEST HEAD INTERFACE
A v o id s t a t ic d is c h a r g e
PORT 1
PORT 2
27.5
RF OUT
58.8
40.6
62.5
Figure 7. Main unit dimensions (front view, in millimeters, nominal)
426.2
107.8
179.8
214.4
27.7
30.0 30.3
Figure 8. Main unit dimensions (rear view, in millimeters, nominal)
389.7
23.4
221.6
214.4
32.0
12.8
18.0
17.3
21.0
Figure 9. Main unit dimensions (side view, in millimeters, nominal)
13
40.0
General Characteristics (continued)
40.6
58.8
30.3
52.0
92.1
134.5
162.9
64.3
160.0
Figure 10. Test head dimensions (in millimeters, nominal)
Figure 11. Option E4991A-007 test head dimensions (in millimeters, nominal)
14
41.7
General Characteristics (continued)
111
32.1
62.9
40.4
52
38
19.3
67.9
56.4
5.9
22
19
121
Figure 12. Option E4991A-010 test head dimensions (in millimeters, nominal)
15
Furnished accessories
Model/option number
Description
Agilent E4991A
Agilent E4991A impedance/material analyzer (main unit)
Test head
Agilent 16195B 7-mm calibration kit
Torque wrench
E4991A recovery disk
Power cable
CD-ROM (English/Japanese PDF manuals) 1
1. The CD-ROM includes an operation manual, an installation and quick start guide,
and a programming manual. A service manual is not included.
16
Quantity
1
1
1
1
1
1
1
Option E4491A-002 Material Measurement (Typical)
Measurement parameter
Typical accuracy of permittivity parameters:
Permittivity parameters: |εr|, εr', εr", tanδ
Permeability parameters: |µr|, µr', µr", tanδ
εr' accuracy
Frequency range
± 5 + 10 +
Using with Agilent 16453A: 1 MHz to 1 GHz (typical)
=
∆ε'rm
:
ε'rm
0.1 t
ε'rm
+
+ 0.25
t
f ε'rm
Using with Agilent 16454A: 1 MHz to 1 GHz (typical)
Measurement accuracy
Conditions for defining accuracy:
Calibration:
Open, short, and load calibration at the test port
(7-mm connector)
Calibration temperature:
Calibration is performed at an environmental
temperature within the range of 23 °C ± 5 °C.
Measurement error doubles when calibration
temperature is below 18 °C or above 28 °C.
Temperature:
Temperature deviation: within ±5 ˚C from the
calibration temperature
Environment temperature: Measurement accuracy
applies when the calibration is performed at
23 °C ±5 °C. When the calibration is below
18 °C or above 23 °C, measurement error doubles.
Measurement frequency points:
Same as calibration points
Oscillator level: Same as the level set at calibration
Point averaging factor: ≥ 8
Electrode pressure setting of 16453A: maximum
100
1–
13
f √ε'rm
2
[%]
(at tanδ < 0.1)
Loss tangent accuracy of εr (= ∆tanδ):
±(Ea + Eb) (at tanδ < 0.1)
•
where,
Ea
=
at Frequency ≤ 1 GHz:
0.002 +
0.001 t
•
+ 0.004f +
f
ε'rm
0.1
13
1–
f √ε'rm
2
∆ε'rm 1
0.002
ε'rm • 100 + ε'rm t tanδ
Eb
=
f
= Measurement frequency [GHz]
t
= Thickness of MUT (material under test) [mm]
ε'rm
= Measured value of ε'r
tanδ = Measured value of dielectric loss tangent
17
Typical accuracy of permeability parameters:
µr' accuracy
=
4+
∆µ' rm
:
µ' rm
0.02
25
15
+ Fµ'rm 1 +
×
f
Fµ'rm
Fµ'rm
2
f 2 [%]
(at tanδ < 0.1)
•
Loss tangent accuracy of µr (= ∆tanδ):
±(Ea + Eb ) (at tanδ < 0.1)
where,
Ea = 0.002 +
Eb =
f
0.001
+ 0.004 f
Fµ'rm f
∆µrm' tanδ
•
µ'rm
100
h
= Measurement frequency [GHz]
c
= hln [mm]
b
= Height of MUT (material under test) [mm]
b
= Inner diameter of MUT (material under test) [mm]
c
= Outer diameter of MUT (material under test) [mm]
F
µ'rm = Measured value of µ'r
tanδ = Measured value of loss tangent
18
Option E4491A-002 Material Measurement (typical) (continued)
Examples of calculated permittivity
measurement accuracy
Figure 13. Permittivity accuracy (
∆ε'r
) vs. frequency (at t = 0.3 mm, typical)
ε'r
∆ε'
Figure 14. Permittivity accuracy ( r ) vs. frequency (at t = 1 mm, typical)
ε'r
Figure 15. Permittivity accuracy (
∆ε'r
) vs. frequency (at t = 3 mm, typical)
ε'r
19
Figure 16. Dielectric loss tangent (tanδ) accuracy vs. frequency
(at t = 0.3 mm, typical)1
Figure 19. Permittivity (ε'r) vs. frequency (at t = 0.3 mm, typical)
Figure 17. Dielectric loss tangent (tanδ) accuracy vs. frequency
(at t = 1 mm, typical)1
Figure 20. Permittivity (ε'r) vs. frequency (at t = 1 mm, typical)
Figure 18. Dielectric loss tangent (tanδ) accuracy vs. frequency
(at t = 3 mm, typical)1
Figure 21. Permittivity (ε'r) vs. frequency (at t = 3 mm, typical)
1. This graph shows only frequency dependence of Ea to simplify it.
The typical accuracy of tanδ is defined as Ea + Eb; refer to “Typical
accuracy of permittivity parameters” on page 17.
20
Option E4991A-002 Material Measurement (typical) (continued)
Examples of calculated permeability
measurement accuracy
Figure 22. Permeability accuracy (
∆µ'r
) vs. frequency (at F = 0.5, typical)
µ'r
∆µ'r
Figure 23. Permeability accuracy (
vs. frequency (at F = 3, typical)
µ'r )
Figure 24. Permeability accuracy (
∆µ'r
) vs. frequency (at F = 10, typical)
µ'r
21
Figure 25. Permeability loss tangent (tanδ) accuracy vs. frequency
(at F = 0.5, typical)1
Figure 28. Permeability (µ'r ) vs. frequency (at F = 0.5, typical)
Figure 26. Permeability loss tangent (tanδ) accuracy vs. frequency
(at F = 3, typical)1
Figure 29. Permeability (µ'r ) vs. frequency (at F = 3, typical)
Figure 27. Permeability loss tangent (tanδ) accuracy vs. frequency
(at F = 10, typical)1
Figure 30. Permeability (µ'r ) vs. frequency (at F = 10, typical)
1. This graph shows only frequency dependence of Ea to simplify it.
The typical accuracy of tanδ is defined as Ea + Eb; refer to “Typical
accuracy of permeability parameters” on page 18.
22
Option E4991A-007 Temperature Characteristic Test Kit
Impedance, admittance and phase angle accuracy:
This section contains specifications and supplemental
information for the E4991A Option E4991A-007. Except
for the contents in this section, the E4991A standard
specifications and supplemental information are applied.
|Z|, |Y|
± (Ea + Eb ) [%]
(see Figure 31 through Figure 34 for
calculated accuracy)
Operation temperature
θ
±
Range:
–55 °C to +150 °C (at the test port of the high
temperature cable)
Source characteristics
Frequency
100
[rad]
where,
Ea = at oscillator level ≥ –33 dBm:
±0.8 [%] (1 MHz ≤ ƒ ≤ 100 MHz)
±1 [%] (100 MHz < ƒ ≤ 500 MHz)
±1.2 [%] (500 MHz < ƒ ≤ 1 GHz)
±2.5 [%] (1 GHz < ƒ ≤ 1.8 GHz)
±5 [%] (1.8 GHz < ƒ ≤ 3 GHz)
at oscillator level < –33 dBm:
±1.2 [%] (1 MHz ≤ ƒ ≤ 100 MHz)
±1.5 [%] (100 MHz < ƒ ≤ 500 MHz)
±1.5 [%] (500 MHz < ƒ ≤ 1 GHz)
±2.5 [%] (1 GHz < ƒ ≤ 1.8 GHz)
±5 [%] (1.8 GHz < ƒ ≤ 3 GHz)
(Where, ƒ is frequency)
Range: 1 MHz to 3 GHz
Oscillator level
Source power accuracy at the test port of the high
temperature cable:
Frequency ≤ 1 GHz:
+2 dB/–4 dB (23 °C ±5 °C)
+4 dB/–6 dB (5 °C to 40 °C)
Frequency > 1 GHz:
+3 dB/–6 dB (23 °C ±5 °C)
+5 dB/–8 dB (5 °C to 40 °C)
(Ea + Eb )
Eb
=
±
Zs
+ Yo × |Zx| × 100 [%]
|Zx|
Where,
|Zx|= Absolute value of impedance
Measurement accuracy (at 23 °C ±5 °C)
Zs
Conditions 1
The measurement accuracy is specified when the
following conditions are met:
Calibration: open, short and load calibration is completed
at the test port (7-mm connector) of the high
temperature cable
Calibration temperature: calibration is performed at an
environmental temperature within the range of 23 °C
±5 °C. Measurement error doubles when calibration
temperature is below 18 °C or above 28 °C.
Measurement temperature range: within ±5 °C of
calibration temperature
Measurement plane: same as calibration plane
Oscillator level: same as the level set at calibration
= At oscillator level = –3 dBm, –13 dBm, or –23 dBm:
± (30 + 0.5 × F) [mΩ] (point averaging factor ≥ 8)
± (40 + 0.5 × F) [mΩ] (point averaging factor ≤ 7)
At oscillator level ≥ –33 dBm:
± (35 + 0.5 × F) [mΩ] (point averaging factor ≥ 8)
± (70 + 0.5 × F) [mΩ] (point averaging factor ≤ 7)
At oscillator level < –33 dBm:
± (50 + 0.5 × F) [mΩ] (point averaging factor ≥ 8)
± (150 + 0.5 × F) [mΩ] (point averaging factor ≤ 7)
(Where, F is frequency in MHz)
Yo
= At oscillator level = –3 dBm, –13 dBm, –23 dBm:
± (12 + 0.1 × F) [µS] (point averaging factor ≥ 8)
± (20 + 0.1 × F) [µS] (point averaging factor ≤ 7)
At oscillator level ≥ –33 dBm:
± (15 + 0.1 × F) [µS] (point averaging factor ≥ 8)
± (40 + 0.1 × F) [µS] (point averaging factor ≤ 7)
At oscillator level < –33 dBm:
± (35 + 0.1 × F) [µS] (point averaging factor ≥ 8)
± (80 + 0.1 × F) [µS] (point averaging factor ≤ 7)
1. The high temperature cable must be kept at the same position
throughout calibration and measurement.
(Where, F is frequency in MHz)
23
Calculated Impedance/Admittance Measurement Accuracy
24
Figure 31.|Z|, |Y| measurement accuracy when open/short/load
calibration is performed. Oscillator level = –23 dBm, –13 dBm, –3 dBm.
Point averaging factor ≥ 8 within ±5 °C of calibration temperature.
Figure 33.|Z|, |Y| measurement accuracy when open/short/load
calibration is performed. Oscillator level ≥ –33 dBm. Point averaging
factor ≤ 7 within ±5 °C of calibration temperature.
Figure 32.|Z|, |Y| measurement accuracy when open/short/load
calibration is performed. Oscillator level ≥ –33 dBm. Point averaging
factor ≥ 8 within ±5 °C of calibration temperature.
Figure 34.|Z|, |Y| measurement accuracy when open/short/load
calibration is performed. Oscillator level < –33 dBm. Point averaging factor
≥ 8 within ±5 °C of calibration temperature.
Typical Effects of Temperature Change on Measurement Accuracy
When the temperature at the test port (7-mm connector)
of the high temperature cable changes from the calibration
temperature, typical measurement accuracy involving
temperature dependence effects (errors) is applied. The
typical measurement accuracy is represented by the sum
of error due to temperature coefficients (Ea´, Yo´and Zs´),
hysteresis error (Eah , Yoh and Zsh) and the specified accuracy.
Conditions
The typical measurement accuracy is applied when the
following conditions are met:
Conditions of Ea’, Zs’ and Yo’:
Measurement temperature: –55 °C to 5 °C or 40 °C to
150 °C at test port. For 5 °C to 40 °C, Ea´, Yo´ and Zs´ are
0 (neglected).
Temperature change: ≥ 5 °C from calibration
temperature when the temperature compensation is off.
≥ 20 °C from calibration temperature when
the temperature compensation is set to on.
Calibration temperature: 23 °C ±5 °C
Calibration mode: user calibration
Temperature compensation: temperature
compensation data is acquired at the same
temperature points as measurement temperatures.
Conditions of Eah, Zsh and Yoh:
Measurement temperature: –55 °C to 150 °C at
the test port
Calibration temperature: 23 °C ±5 °C
Calibration mode: user calibration
25
Typical measurement accuracy (involving temperature
dependence effects)1:
|Z|, |Y|: ± (Ea + Eb + Ec + Ed) [%]
θ
: ±
(Ea + Eb + Ec + Ed)
[rad]
100
Where,
Ec
=
Ea´ × ∆T + Eah
Ed
=
±
Zs´× ∆T + Zsh
+ (Yo´× ∆T + Yoh ) × |Zx| × 100 [%]
|Zx|
Where,
|Zx|
=
Absolute value of measured impedance
Figure 35. Typical frequency characteristics of temperature
coefficient, (Ec+Ed)/∆T, when |Zx|= 10 Ω and 250 Ω,
E ah= Z sh= Yoh= 0 are assumed 2.
Here, Ea´, Zs´ and Yo´ are given by the following equations:
Without temperature compensation
With temperature compensation
1 MHz ≤ ƒ < 500 MHz
500 MHz ≤ ƒ ≤ 3 GHz
Ea´
0.006 + 0.015 × ƒ [%/°C]
0.006 + 0.015 × ƒ [%/°C] 0.006 + 0.015 × ƒ [%/°C]
Zs´
1 + 10 × ƒ [mΩ/°C]
1 + 10 × ƒ [mΩ/°C]
5 + 2 × ƒ [mΩ/°C]
Yo´
0.3 + 3 × ƒ [µS/°C]
0.3 + 3 × ƒ [µS/°C]
1.5 + 0.6 × ƒ [µS/°C]
ƒ
=
Measurement frequency in GHz
Eah, Zsh and Yoh are given by following equations:
Eah
=
Ea´ × ∆Tmax × 0.3 [%]
Zsh
=
Zs´ × ∆Tmax × 0.3 [mΩ]
Yoh
=
Yo´ × ∆Tmax × 0.3 [µS]
∆T
=
Difference of measurement temperature-from calibration temperature
∆Tmax =
Maximum temperature change (°C) at the test port from calibration
temperature after the calibration is performed.
1. See graphs in Figure 35 for the calculated values of (Ec+Ed)
exclusive of the hysteresis errors Eah, Zsh and Yoh, when
measured impedance is 10 Ω and 250 Ω.
2. Read the value of ∆|Z|%/°C at the material measurement
frequency and multiply it by ∆T to derive the value of (Ec+Ed)
when Eah= Yoh= Zsh= 0.
26
Typical Material Measurement Accuracy When Using
Options E4991A-002 and E4991A-007
Material measurement accuracy contains the permittivity
and permeability measurement accuracy when the E4991A
with Option E4991A-002 and E4991A-007 is used with the
16453A or 16454A test fixture.
Measurement parameter
Permittivity parameters: |εr|, ε'r , ε", tanδ
Typical permittivity measurement accuracy1:
εr´ accuracy
± 5 + 10 +
Eε =
∆ε´rm
ε´rm
:
0.5
t
εŕm
×
+ 0.25 ×
+
f
t
ε ŕm
100
|
1–
Permeability parameters: |µr|, µ'r , µ", tanδ
Frequency
[%] (at tanδ < 0.1)
Use with Agilent 16453A: 1 MHz to 1 GHz (typical)
Loss tangent accuracy of εr (= ∆tanδ) :
Use with Agilent 16454A: 1 MHz to 1 GHz (typical)
|
± (Ea + Eb ) (at tanδ < 0.1)
where,
Range: –55 °C to +150 °C
(at the test port of the high temperature cable)
Ea
Conditions
The measurement accuracy is specified when the
following conditions are met:
Calibration: Open, short and load calibration is completed
at the test port (7-mm connector) of the high
temperature cable
Calibration temperature: Calibration is performed at an
environmental temperature within the range of 23 °C
±5 °C. Measurement error doubles when calibration
temperature is below 18 °C or above 28 °C.
Measurement temperature range: Within ±5 °C of
calibration temperature
Measurement frequency points: Same as calibration
points (User Cal)
Oscillator level: Same as the level set at calibration
Point averaging factor: ≥ 8
2
.
Operation temperature
Typical material measurement accuracy
(at 23 °C ±150 °C)
13
f √ε´rm
=
at Frequency ≤ 1 GHz
0.002 +
0.0025
t
×
+ (0.008 × f ) +
f
ε´rm
∆ε´rm
×
0.1
|
1–
13
f √ε´rm
|
1
0.002
+ ε´rm
× tanδ
100
t
Eb
=
f
= Measurement frequency [GHz]
t
= Thickness of MUT (material under test) [mm]
ε´rm
2
ε´rm = Measured value of ε´r
tanδ =
Measured value of dielectric loss tangent
1. The accuracy applies when the electrode pressure of the 16453A is set to maximum.
27
Typical permeability measurement accuracy:
µr´ accuracy
Eµ =
4+
∆µ´rm
µ´rm
:
0.02
25
15
×
+ F × µ´rm × 1 +
f
F × µ´rm
F × µ´rm
[%] (at tanδ < 0.1)
.
Loss tangent accuracy of µr (= ∆tanδ) :
± (Ea + Eb ) (at tanδ < 0.1)
where,
= 0.002 +
Eb
=
f
= Measurement frequency [GHz]
F
= hln
h
= Height of MUT (material under test) [mm]
b
= Inner diameter of MUT [mm]
c
= Outer diameter of MUT [mm]
µ´rm
= Measured value of µ´r
tanδ =
28
0.005
+ 0.004 × f
F × µ´rm × f
Ea
tanδ
∆µ ´rm
×
µ´rm
100
c
[mm]
b
Measured value of loss tangent
2
× f2
Examples of Calculated Permittivity Measurement Accuracy
∆ε'
Figure 36. Permittivity accuracy ( r ) vs. frequency,
ε'r
(at t = 0.3 mm typical)
Figure 37. Permittivity accuracy (
(at t = 1 mm, typical)
∆ε'r
) vs. frequency
ε'r
Figure 38. Permittivity accuracy (
(at t = 3 mm, typical)
∆ε'r
) vs. frequency
ε'r
Figure 39. Dielectric loss tangent (tanδ) accuracy vs. frequency
(at t = 0.3 mm, typical)1
Figure 40. Dielectric loss tangent (tanδ) accuracy vs. frequency
(at t = 1 mm, typical)1
Figure 41. Dielectric loss tangent (tanδ) accuracy vs. frequency
(at t = 3 mm, typical)1
1. This graph shows only frequency dependence of Ea for
simplification. The typical accuracy of tanδ is defined as Ea + Eb;
refer to “Typical permittivity measurement accuracy” on page 27.
29
Examples of Calculated Permittivity Measurement Accuracy (continued)
Figure 42. Permittivity (ε'r) vs. frequency (at t = 0.3 mm, typical)
Figure 43. Permittivity (ε'r) vs. frequency (at t = 1 mm, typical)
Figure 44. Permittivity (ε'r) vs. frequency (at t = 3 mm, typical)
30
Examples of Calculated Permeability Measurement Accuracy
Figure 45. Permeability accuracy (
∆µ'r
vs. frequency (at F = 0.5, typical)
µ'r )
Figure 46. Permeability accuracy (
∆µ'r
vs. frequency (at F = 3, typical)
µ'r
Figure 47. Permeability accuracy (
∆µ'r
vs. frequency (at F = 10, typical)
µ'r )
)
Figure 48. Permeability loss tangent (tanδ) accuracy vs. frequency
(at F = 0.5, typical)1
Figure 49. Permeability loss tangent (tanδ) accuracy vs. frequency
(at F = 3, typical)1
Figure 50. Permeability loss tangent (tanδ) accuracy vs. Frequency
(at F = 10, typical)1
1. This graph shows only frequency dependence of Ea for
simplification. The typical accuracy of tanδ is defined as Ea + Eb;
refer to “Typical permeability measurement accuracy” on page 28.
31
Examples of Calculated Permeability Measurement Accuracy (continued)
Figure 51. Permeability (µ'r ) vs. frequency (at F = 0.5, typical)
Figure 52. Permeability (µ'r ) vs. frequency (at F = 3, typical)
Figure 53. Permeability (µ'r ) vs. frequency (at F = 10, typical)
32
Typical Effects of Temperature Change on Permittivity Measurement Accuracy
When the temperature at the test port (7-mm connector)
of the high temperature cable changes more than 5 °C
from the calibration temperature, the typical permittivity
measurement accuracy involving temperature dependence
effects (errors) is applied. The typical permittivity accuracy
is represented by the sum of error due to temperature
coefficient (Tc), hysteresis error (Tc× ∆Tmax) and the
accuracy at 23 °C ± 5 °C.
Typical accuracy of permittivity parameters:
εr´ accuracy =
∆ε´rm
:
ε´rm
± (Eε + Ef + Eg) [%]
.
Loss tangent accuracy of ε (= ∆tanδ) :
±
(Eε + Ef + Eg )
100
where,
Eε = Permittivity measurement accuracy at 23 °C ± 5 °C
Ef
= Tc × ∆T
Eg = Tc × ∆Tmax × 0.3
Tc = K1 + K2 + K3
See Figure 54 through Figure 56 for the calculated value of Tc
without temperature compensation
K1 = 1 × 10-6 × (60 + 150 × ƒ)
K
2
=
3 × 10-6 × (1 + 10 × ƒ) ×
ε´rm
1
×
t
1–
+10 × ƒ
f
2
fo
K3 =
1
5 × 10-3 × (0.3 + 3 × ƒ) ×
ε´rm
t
1
×
1–
f
2
+10 × ƒ
fo
33
Typical accuracy of permittivity parameters (continued):
with temperature compensation
K1
= 1 × 10-6 × (60 + 150 × ƒ)
K2
= 1 MHz ≤ f < 500 MHz
3 × 10-6 × (1 + 10 × ƒ) ×
ε´rm
t
1
×
1–
+10
׃
2
f
fo
500 MHz ≤ ƒ ≤ 1 GHz
3 × 10-6 × (5 + 2 × ƒ) ×
ε´rm
t
1
×
1–
K3
+10
2
f
׃
fo
= 1 MHz ≤ ƒ < 500 MHz
1
5 × 10-3 × (0.3 + 3 × ƒ) ×
εŕm
t
1
×
f
1–
2
+10 × ƒ
fo
500 MHz ≤ ƒ ≤ 1 GHz
1
5 × 10-3 × (1.5 + 0.6 × ƒ) ×
εŕm
t
1
×
1–
f
2
+10 × ƒ
fo
ƒ
ƒo
= Measurement frequency [GHz]
13
=
[GHz]
√ ε´r
t
= Thickness of MUT (material under test) [mm]
ε´rm
= Measured value of ε´r
∆T
= Difference of measurement temperature from calibration temperature
∆Tmax = Maximum temperature change (°C) at test port from calibration
temperature after the calibration is performed.
34
Figure 54. Typical frequency characteristics of temperature coefficient
of ε'r (Thickness = 0.3 mm)
Figure 55. Typical frequency characteristics of temperature coefficient
of ε'r (Thickness = 1 mm)
Figure 56. Typical frequency characteristics of temperature coefficient
of ε'r (Thickness = 3 mm)
35
Typical Effects of Temperature Change on Permeability Measurement Accuracy
When the temperature at the test port (7-mm connector)
of the high temperature cable changes more than 5 °C
from the calibration temperature, the typical permeability
measurement accuracy involving temperature dependence
effects (errors) is applied. The typical permeability
accuracy is represented by the sum of error due to
temperature coefficient (Tc), hysteresis error
(Tc × ∆Tmax) and the accuracy at 23 °C ±5 °C.
Typical accuracy of permeability parameters:
µ r´ accuracy
=
∆µ´rm
µ´rm
:
± (Eµ + Eh + Ei ) [%]
.
Loss tangent accuracy of µr (= ∆tanδ) :
±
(Eµ + Eh + Ei )
100
where,
Eµ
=
Permeability measurement accuracy
at 23 °C ± 5 °C
Eh
=
Tc × ∆T
Ei
=
Tc × ∆Tmax × 0.3
Tc
=
K4 + K5 + K6
See Figure 57 through Figure 59 for the
calculated value of Tc
without temperature compensation
K4
=
K5
=
1 × 10-6 × (60 + 150 × ƒ)
|1 – 0.01 × {F × (µ´rm – 1) + 10} × ƒ2|
1 × 10-2 × (1 + 10 × ƒ) ×
K6
{F × (µ´rm –1) + 20} × ƒ
=
2 × 10-6 × (0.3 + 3 × ƒ) ×
{F × (µ´rm – 1) + 20} × ƒ
|1 – 0.01 × {F × (µ´rm –1) + 10} × ƒ2|
with temperature compensation
K4
=
K5
=
1 × 10-6 × (60 + 150 × ƒ)
1 MHz ≤ ƒ < 500 MHz
1 × 10-2 × (1 + 10 × ƒ) ×
|1 – 0.01 × {F × (µ´rm – 1) +10} × ƒ2|
{F × (µ´rm – 1) + 20} × ƒ
500 MHz ≤ ƒ ≤ 1 GHz
1 × 10-2 × (5 + 2 × ƒ) ×
36
|1 – 0.01 × {F × (µ´rm – 1) +10} × ƒ2|
{F × (µ´rm – 1) + 20} × ƒ
Typical accuracy of permeability parameters (continued):
K6
= 1 MHz ≤ ƒ < 500 MHz
2 × 10-6 × (0.3 + 3 × ƒ) ×
{F × (µ´rm – 1) + 20} × ƒ
|1 – 0.01 × {F × (µ´rm – 1) +10} × ƒ2|
500 MHz ≤ ƒ ≤ 1 GHz
2 × 10-6 × (1.5 + 0.6 × ƒ) ×
{F × (µ´rm –1) + 20} × ƒ
|1 – 0.01 × {F × (µ´rm –1) +10} × ƒ2|
ƒ
= Measurement frequency [GHz]
F
= hln c [mm]
b
h
= Height of MUT (material under test) [mm]
b
= Inner diameter of MUT [mm]
c
= Outer diameter of MUT [mm]
µ´
= Measured value of µ´r
∆T
= Difference of measurement temperature from
calibration temperature
∆Tmax = Maximum temperature change (°C) at test
port from calibration temperature after the
calibration is performed.
37
Figure 57. Typical frequency characteristics of temperature coefficient
of µ'r (at F = 0.5)
Figure 58. Typical frequency characteristics of temperature coefficient
of µ'r (at F = 3)
Figure 59. Typical frequency characteristics of temperature coefficient
of µ'r (at F = 10)
38
39
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