Keysight B1506A Power device analyzer for circuit design Datasheet

Keysight Technologies
B1506A Power Device Analyzer
for Circuit Design
Data Sheet
Introduction
Evaluate all device parameters under a wide range of operating conditions
to improve power electronics circuit design performance
–– Measures all IV parameters (Ron, BV, Leakage, Vth, Vsat, etc.)
–– Measure transistor input, output and reverse transfer capacitances (Ciss, Coss, Crss, Cies, Coes,
Cres, Rg) at high bias voltages
–– Qg curve measurement for Nch MOSFETs and IGBTs
–– Power loss (conduction, driving and switching) evaluation
–– Menu driven user interface specially designed for circuit designers (Easy Test Navigator - ETN)
–– Quick and automatic device datasheet generation
–– Data sheet characterization mode supports quick and easy evaluations of data sheet parameters
–– Wide operation I/V (1500A, 3kV)Thermal test (−50 to +250 °C)
–– Oscilloscope View provides visual verification of pulsed measurement waveforms
–– Covers typical semiconductor devices and electronic components used in high power circuits
The B1506A Power Device Analyzer for Circuit Design is a complete solution that can help power
electronic circuit designers maximize the value of their power electronics products by enabling them to
select the correct power semiconductor devices and components for their applications. It can evaluate
all relevant device parameters under a wide range of operating conditions, including IV parameters
such as breakdown voltage and on-resistance, as well as three terminal FET capacitances, gate charge
and power loss.
The B1506A has a wide range of capabilities that help it identify substandard semiconductor devices
and components under actual circuit operating conditions, including a wide voltage and current range
(3 kV and 1500 A), a wide temperature measurement range (-50 to +250 °C), fast pulsing capability,
and sub-nA level current measurement capability. Its unique software interface , Easy Test Navigator,
presents the user with a familiar device data sheet format that makes it easy to characterize semiconductor devices and components without going through any formal training. Integrated switching
circuitry within the test fixture supports fully automated testing, with the ability to automatically change
between both high voltage and high current testing as well as between IV and CV measurements. In
addition, a unique plug-in style device test fixture socket adapter eliminates cable connection and other
human-related errors. The B1506A also supports the complete automation of thermal characterization.
This can be accomplished through the integrated Thermostream control. Since the DUT is in close
proximity to the B1506A’s measurement resources, the large parasitics caused by cable extensions
leading to a temperature chamber do not exist. For this reason, oscillation free ultra-high currents of up
to 1500 A can be accurately evaluated at both low and high temperature.
The B1506A’s capabilities revolutionize power electronics circuit design by both helping to maximize end
product value and accelerating product development cycles.
03 | Keysight | B1506A Power Device Analyzer for Circuit Design - Data Sheet
Specification Conditions
The measurement and output accuracy are specified under the conditions listed below.
Note: The SMU measurement and output accuracy are specified at the output terminals
in the test fixture except for capacitance measurement that is specified at the output
terminals of the MFCMU.
1.
2.
3.
4.
Temperature: 23 ±5 °C
Humidity: 20 to 70%, No condensation
Self-calibration after a 40 minute warm-up is required.
Ambient temperature change less than ±1 °C after self-calibration execution.
(Note: This does not apply to the MFCMU).
5. Measurement made within one hour after self-calibration execution.
(Note: This does not apply to the MFCMU).
6. Calibration period: 1 year
7. SMU integration time setting: 10 PLC (1 nA to 1 A range, voltage range),
200 μs (20 A range) Averaging of high-speed ADC: 128 samples per 1 PLC
8. SMU filter: ON for MPSMU
9. The accuracy of the drain output current measurement specification is not
guaranteed until 20 seconds after a voltage change.
Operating Conditions
The B1506A has to be used under the conditions listed below.
Temperature: +5 to +40 °C
Humidity: 20 to 70%, No condensation
When used with Thermostream and the air temperature is more than +20 °C
Temperature: +20 to +30 °C
Humidity: 20% to 70%, No condensation
When used with Thermostream and the air temperature is less than +20 °C
Temperature: +20 to +30 °C
Humidity: 20 to 50%, No condensation
When used with Thermal plate
Temperature: +5 to +30 °C
Humidity: 20 to 70%, No condensation
04 | Keysight | B1506A Power Device Analyzer for Circuit Design - Data Sheet
Key Specifications of B1506A
Collector/Drain
channel
Maximum output
Voltage
Current
Minimum Resolution (Source)
Minimum Resolution (Measurement)
Gate channel
Maxium output
Voltage
Current
Minimum Resolution (Source)
Minimum Resolution (Measurement)
Capacitance
Max bias
measurement
(H21/H51/H71 only)
Frequency range
Gate
Collector/Drain
Pulsed
DC
Voltage
Current
Voltage
Current
Pulsed
DC
Voltage
Current
Voltage
Current
B1506A-H20/H21
±3000 V
±20 A
±1 A
200 nV
100 fA
200 nV
10 fA
B1506A-H50/H51
B1506A-H70/H71
±3000 V
±3000 V
±500 A
±1500 A
±100 mA
25 μV
100 fA
500 nV
10 fA
±100 V
±1 A
±100 mA
200 nV
500 fA
200 nV
10 fA
±100 V
±3000 V
1 kHz to 1 MHz
100 fF to 1μF
Capacitance range
Measurement Parameters
Characteristics
Static characteristics
Gate charge characteristics3
Capacitance characteristics3
Power loss3
Category
Threshold voltage
Transfer Characteristics
On resistance
Gate leakage current
Output leakage current
Output Characteristics
Breakdown voltage
Gate Charge
Gate Resistance
Device Capacitance
Parameters
Vgs(th),Vge(th)
Id-Vgs, Ic-Vge, gfs
Rds-on. Vce(sat)
Igss, Iges
Idss, Ices
Id-Vds, Ic-Vce
BVds, BVces
Qg, Qg(th), Qgs, Qgd, Qsw, Qsync, Qoss for Nch MOSFETs and IGBTs
Rg
Ciss, Coss, Crss, Cgs, Cgd, Cies, Coes, Cres
Driving loss/Switching loss1
Conduction loss at specified duty cycle2
1. Driving loss and switching loss are calculated by measured Qg characteristics, Vth and Rg at specified frequency.
2. Conduction loss are calculated from measured Rds-on and peak current.
3. B1506A-H21/H51/H71 only
Supported Power Devices and Electronics Components
MOSFETs, IGBTs, Diodes, Inductors, Capacitors, Shunt R, Resistors, Connectors, Cable, Relays, Photo couplers, Solid state relays
05 | Keysight | B1506A Power Device Analyzer for Circuit Design - Data Sheet
Operation Range
IV functionality
Operation range
Collector/drain voltage
±3000 V
Collector/drain current
±1500 A (B1506A-H70/H71)
±500 A (B1506A-H50/H51)
±20 A (B1506A-H20/H21)
Gate
±30 V/±1 A (pulse): MCSMU
±100 V/±100 mA: MPSMU
CV functionality1
Operation range
Gate DC bias voltage
±100 V
Collector/drain DC bias voltage
±3000 V
Frequency
1 kHz to 1 MHz
Capacitance
100 fF to 1 μF
Gate charge functionality1
Operation range
Qg, Qgd, Qd
1 nC to 100 μC
VDD
0 to +3000 V
ID
0 to 1500 A
Gate drive
-30 to 30 V
1.
B1506A-H21/H51/H71 only
06 | Keysight | B1506A Power Device Analyzer for Circuit Design - Data Sheet
Current/Voltage Measurement Specifications
Gate/base step
generator specification
Gate/Base step generator IV Operating range is defined as the combination of MCSMU
and MPSMU modules. The following graph shows entire IV operating range of gate/base
step generator for B1506A.
Refer to the section for each module later in this document for detailed specification of
each module.
log Current (A)
1
MCSMU
100 m
40 m
20 m
MPSMU
log Voltage (V)
-20 m
-40 m
-100 m
-1
-100
-40 -30 -20
-10
10
20 30 40
100
Gate/Base step generator measurement and output range
Drain/collector supply
specification
B1506A-H20/H21
Drain/Collector Supply IV Operating range for B1506A-H21 is defined as the combination of HCSMU, MPSMU and HVSMU modules. The following graph shows entire IV
operating range of drain/collector supply for B1506A-H20/H21.
Refer to the section for each module later in this document for detailed specification of
each module.
log Current (A)
20
HCSMU
1
100 m
20 m
8m
4m
MPSMU
HVSMU
1m
log Voltage (V)
-1 m
-4 m
-8 m
-20 m
-100 m
-1
-20
-3 k -1.5 k
-100 -40 -20
IV operating range for B1506A-H20/H21
20
40
100
1.5 k 3 k
07 | Keysight | B1506A Power Device Analyzer for Circuit Design - Data Sheet
Drain/collector supply
specification (continued)
B1506A-H50/H51
Drain/Collector Supply IV Operating range for B1506A-H51 is defined as the combination of UHCU, MPSMU and HVSMU modules. The following graph shows entire IV
operating range of drain/collector supply for B1506A-H50/H51.
Refer to the section for each module later in this document for detailed specification of
each module.
log Current (A)
500
UHC
MPSMU
HVSMU
100 m
40 m
20 m
8m
4m
1m
log Voltage (V)
-1 m
-4 m
-8 m
-20 m
-40 m
-100 m
-500
-3 k -1.5 k
-100 -40 -20
20 40
1.5 k 3 k
100
IV operating range for B1506A-H50/H51
B1506A-H70/H71
Drain/Collector Supply IV Operating range for B1506A-H71 is defined as the combination of UHCU, MPSMU and HVSMU modules. The following graph shows entire IV
operating range of drain/collector supply for B1506A-H70/H71.
Refer to the section for each module later in this document for detailed specification of
each module.
log Current (A)
1500
UHC
MPSMU
HVSMU
100 m
40 m
20 m
8m
4m
1m
log Voltage (V)
-1 m
-4 m
-8 m
-20 m
-40 m
-100 m
-1500
-3 k -1.5 k
-100 -40 -20
IV operating range for B1506A-H70/H71
20 40
100
1.5 k 3 k
08 | Keysight | B1506A Power Device Analyzer for Circuit Design - Data Sheet
Capacitance Measurement Specifications
Capacitance measurement of B1506A-H21/H51/H71 is provided with the combination of MFCMU module in the B1506A mainframe
and built-in device capacitance selector in the B1506A test fixture.
DC bias characteristics
100 kΩ at SMU bias output resistance
Voltage drop compensation function is available.
Bypass capacitance in the capacitance selector
Capacitance
Withstand voltage
Drain to Source Terminal
1 μF
±3000V
Gate to Source Terminal
1 μF
±100V
Measurement accuracy for 2-terminal device (Supplemental characteristics)
Condition
AC level: 30 mV rms
Dx < = 0.1
(Dx: Measurement value of D)
Measurement accuracy for 2-terminal device
1.E-06
1.E-07
The noise level depends on
setting parameters and the
device under test.
C measuremet value (F)
1.E-08
1.E-09
Long integration times and/or
large signal levels can reduce
the noise level.
1.E-10
1.E-11
1.E-12
1.E-13
Error 3%
Error 5%
1.E-14
Error 10%
Error 20%
1.E-15
1.E+03
1.E+04
1.E+05
1.E+06
frequency (Hz)
Output terminals for 2-terminal device
Collector/drain
Emitter/source
Base/gate
Force
Open
Open
Open
Sense
High
High
Open
Force
Open
Open
Open
Sense
Low
Open
Low
High
Open
Low
High
Low
Open
Open
Open
09 | Keysight | B1506A Power Device Analyzer for Circuit Design - Data Sheet
Measurement accuracy for 3-terminal device (Supplemental characteristics)
Condition
AC level: 30 mV rms, Dx < = 0.1 (Dx: Measurement value of D)
Cgs measurement accuracy 3-terminal
Cgs:Cds:Cgd= 1:1:1
1.E-06
1.E-07
Cgs measuremet value (F)
1.E-08
1.E-09
1.E-10
Error 3%
Error 5%
1.E-11
Error 10%
Error 20%
1.E-12
1.E-13
1.E-14
1.E-15
1000
10000
100000
1000000
Frequency (Hz)
Cgs measurement accuracy 3-terminal
Cgs:Cds:Cgd= 1:0.1:0.01
1.E-06
1.E-07
Cgs measuremet value (F)
1.E-08
1.E-09
1.E-10
Error 3%
1.E-11
Error 5%
1.E-12
Error 10%
Error 20%
1.E-13
1.E-14
1.E-15
1000
10000
Frequency (Hz)
100000
1000000
10 | Keysight | B1506A Power Device Analyzer for Circuit Design - Data Sheet
Measurement accuracy for 3-terminal device (Supplemental characteristics) (continued)
Cds measurement accuracy 3-terminal
Cgs:Cds:Cgd = 1:1:1
1.E-06
1.E-07
Cds measuremet value (F)
1.E-08
1.E-09
Error 3%
1.E-10
Error 5%
Error 10%
1.E-11
Error 20%
1.E-12
1.E-13
1.E-14
1.E-15
1000
10000
100000
1000000
Frequency (Hz)
Cds measurement accuracy 3-terminal
Cgs:Cds:Cgd = 1:0.1:0.01
1.E-06
1.E-07
Cds measuremet value (F)
1.E-08
1.E-09
Error 3%
1.E-10
Error 5%
1.E-11
Error 10%
Error 20%
1.E-12
1.E-13
1.E-14
1.E-15
1000
10000
100000
Frequency (Hz)
1000000
11 | Keysight | B1506A Power Device Analyzer for Circuit Design - Data Sheet
Measurement accuracy for 3-terminal device (Supplemental characteristics) (continued)
Cgd measurement accuracy 3-terminal
Cgs:Cds:Cgd = 1:1:1
1.E-06
1.E-07
Cgd measuremet value (F)
1.E-08
1.E-09
Error 3%
1.E-10
Error 5%
Error 10%
1.E-11
Error 20%
1.E-12
1.E-13
1.E-14
1.E-15
1000
10000
100000
1000000
Frequency (Hz)
Cgd measurement accuracy 3-terminal
Cgs:Cds:Cgd = 1:0.1:0.01
1.E-06
1.E-07
Cgd measuremet value (F)
1.E-08
1.E-09
Error 3%
Error 5%
1.E-10
Error 10%
1.E-11
Error 20%
1.E-12
1.E-13
1.E-14
1.E-15
1000
10000
Frequency (Hz)
100000
1000000
12 | Keysight | B1506A Power Device Analyzer for Circuit Design - Data Sheet
Measurement accuracy for 3-terminal device (Supplemental characteristics) (continued)
Ciss measurement accuracy 3-terminal
Cgs:Cds:Cgd = 1:1:1
1.E-06
1.E-07
Ciss measuremet value (F)
1.E-08
1.E-09
Error 3%
1.E-10
Error 5%
Error 10%
1.E-11
Error 20%
1.E-12
1.E-13
1.E-14
1.E-15
1000
10000
100000
1000000
Frequency (Hz)
Ciss measurement accuracy 3-terminal
Cgs:Cds:Cgd = 1:0.1:0.01
1.E-06
1.E-07
Ciss measuremet value (F)
1.E-08
1.E-09
Error 3%
1.E-10
Error 5%
Error 10%
1.E-11
Error 20%
1.E-12
1.E-13
1.E-14
1.E-15
1000
10000
Frequency (Hz)
100000
1000000
13 | Keysight | B1506A Power Device Analyzer for Circuit Design - Data Sheet
Measurement accuracy for 3-terminal device (Supplemental characteristics) (continued)
Coss measurement accuracy 3-terminal
Cgs:Cds:Cgd = 1:1:1
1.E-06
1.E-07
Coss measuremet value (F)
1.E-08
1.E-09
Error 3%
1.E-10
Error 5%
Error 10%
1.E-11
Error 20%
1.E-12
1.E-13
1.E-14
1.E-15
1000
10000
100000
1000000
Frequency (Hz)
Coss measurement accuracy 3-terminal
Cgs:Cds:Cgd = 1:0.1:0.01
1.E-06
1.E-07
Coss measuremet value (F)
1.E-08
1.E-09
Error 3%
1.E-10
Error 5%
Error 10%
1.E-11
Error 20%
1.E-12
1.E-13
1.E-14
1.E-15
1000
10000
Frequency (Hz)
100000
1000000
14 | Keysight | B1506A Power Device Analyzer for Circuit Design - Data Sheet
Output terminals for 3-terminal device
Parameter name
Collector/drain
Emitter/source
Base/gate
Coss
Cds
Crss
Cgs
Ciss /Rg
Force
Open
Open
Open
Open
Open
Sense
High
High
High
ACG
Low
Force
Open
Open
Open
Open
Open
Sense
Low
Low
ACG
Low
Low
High
Low
ACG
Low
High
High
Low
Open
Open
Open
Open
Open
Definition of 3-terminal device capacitances
Symbol
Description
Cgs
Capacitace between Base/Gate terminal and Emitter/Source terminal
Cds
Capacitace between Collector/Drain terminal and Emitter/Source terminal
Cgd
Capacitace between Base/Gate terminal and Collector/Drain terminal
Crss
Capacitace between Base/Gate terminal and Collector/Drain terminal
Ciss
Capacitace between Base/Gate terminal and Emitter/Source terminal and capacitance between Base/Gate terminal
and Collector/Drain terminal
Coss
Capacitace between Collector/Drain terminal and Emitter/Source terminal and capacitance between Base/Gate
terminal and Emitter/Source terminal
15 | Keysight | B1506A Power Device Analyzer for Circuit Design - Data Sheet
Gate Charge Measurement Specifications
B1506A-H21/H51/H71 can perform gate charge characteristics for Nch MOSFETs and IGBTs by using gate charge socket
adapter, that is included in B1506A as an accessory. Both resistor and transistor are supported as drain/collector current
control device.
Temperature dependency measurement using Thermostream or Thermal plate is not supported.
Vgs(V)
Qg
Vgs
Qg: Gate charge
Qgs: Gate-source charge
Qgs1: Gate charge at threshold
Qgs2: Gate charge from threshold to onset of plateau
Qgd: Gate-drain charge
Vgs
pleteau
Vth
Qgs1
Qgs2
Qgs
Qgate(C)
Qgd
Measurement parameters
B1506A-H21
Measurement parameter
1 nC to 100 µC
Min resolution
10 pC
Vds (Vce) @ high voltage
0 V to +3000 V
Resolution
Resolution
3 mV / 6 µs
100 µV/2 µs
−30V to +30V
V/T resolution
I/T resolution
−60 V to 60 V
Not support
Vgs (Vge)
Id (Ic)
B1506A-H71
Measurable range
Qg
Vds(Vce) @ high current
B1506A-H51
40 uV/2 us
0 to 20 A
0 to 500 A
2 mA/2 µs
Ig
10 nA to 1 A
I/T resolution
10 pA/2 µs
0 to 1500 A
16 | Keysight | B1506A Power Device Analyzer for Circuit Design - Data Sheet
Setting parameters
B1506A-H21
B1506A-H51
Setting parameter
Setting range
Vds (Vce) @ high voltage
0 V to +3000 V
Resolution
B1506A-H71
3 mV/6 us
Vds(Vce) @ high current
−20 to 20 V
−60 to 60 V
Resolution
20 μV/2 μs
100 µV/2 µs
Id max
20 A
450 A
Gate drive Vgs(Vge)
−30 to +30 V
Resolution
40 µV
Gate control current Ig
1 µA to 1 A
Resolution
0.1 µA
Current regulator
control voltage
−30 to +30 V
Resolution
On time
Resolution
Target device
1100 A
40 µV
50 to 950 µs
50 to 450 µs
2 µs
Nch MOSFET and IGBT TO packeged device
Nch MOSFET and IGBT module device
17 | Keysight | B1506A Power Device Analyzer for Circuit Design - Data Sheet
UHC (Ultra High Current) Specifications
Voltage range, resolution, and accuracy
Voltage range
Setting resolution
±60 V
200 µV
Measure resolution
100 µV
Setting accuracy 1.2,3
±(% + mV)
Measure accuracy 1,3
±(% + mV)
±(0.2 + 10)
±(0.2 + 10)
1. ±(% of reading value + fixed offset in mV)
2. Setting accuracy is defined at open load.
3. Accuracy is defined 1ms pulse width at 500A range and 500 μs pulse width at 1500A range.
Current range, resolution, and accuracy1
Current range
Setting resolution
Measure resolution
Setting accuracy 2,3
±(% + A + A)
Measure accuracy 2,3
±(% + A + A)
±500 A
1 mA
500 µA
±(0.6 + 0.3 + 0.01*Vo)
±(0.6 + 0.3 + 0.01*Vo)
±1500 A
4 mA
2 mA
±(0.8 + 0.9 + 0.02*Vo)
±(0.8 + 0.9 + 0.02*Vo)
1.
Maximum voltage compliance in current pulse mode is 63 V. Over 400 A at 500 A range and over 1200 A at 1500 A range are
supplemental characteristics.
2. Accuracy is defined with 1ms pulse width at 500 A range and with 500 μs pulse width at 1500 A range.
3. ±(% of reading value + fixed offset in A + proportional offset in A), Vo is the Output Voltage.
UHCU Pulse width and resolution
Current range
Voltage pulse width
Current pulse width
Resolution
Pulse period1
500 A
10 μsec – 1 msec
10 μsec – 1 msec
2 μsec
Duty ≤ 0.4%
1500 A
10 μsec – 500 μsec
10 μsec – 500 μsec
2 μsec
Duty ≤ 0.1%
1.
At continuous maximum current output, the output current may be reduced due to insufficient charging time.
UHC measurement and output range
Output peak power
Current range
±500 A
±1500 A
Peak power
7.5 kW
22.5 kW
Current (A)
1500
I = (60 - V)/ 0.04
Other functionality
Fiilter
Filter can be used for UHC output in current
mode at 500 A range.
I = (60 - V)/ 0.12
500
Voltage (V)
-60
Supplemental characteristics
60
-500
I = (-60 - V)/ 0.12
UHCU output resistance
Output range
Nominal value
500 A
120 mΩ
1500 A
40 mΩ
Measurement and output
range for 1500 A range
Measurement and output
range for 500 A range
I = (-60 - V)/ 0.04
-1500
The UHCU output is only available in pulsed mode.
In the equations in the above diagram, ‘I’ stands for current, ‘V’ for Voltage.
The maximum current is defined when the output terminals are shorted. Also, the
maximum current is limited by the residual resistance of the test leads and by the DUT
impedance.
18 | Keysight | B1506A Power Device Analyzer for Circuit Design - Data Sheet
HCSMU Drain Output Specifications
Voltage range, resolution, and accuracy
Voltage
range
±0.2 V
±2 V
±20 V
±40 V
1.
Force
resolution
200 nV
2 µV
20 µV
40 µV
Measure
resolution
200 nV
2 µV
20 µV
40 µV
Force accuracy 1
±(% + mV + mV)
±(0.06 + 0.6 + Io x 0.05)
±(0.06 + 0.6 + Io x 0.5)
±(0.06 + 3 + Io x 5)
±(0.06 + 3 + Io x 10)
Measure accuracy 1
(% + mV + mV)
±(0.06 + 0.6 + Io x 0.05)
±(0.06 + 0.6 + Io x 0.5)
±(0.06 + 3 + Io x 5)
±(0.06 + 3 + Io x 10)
Maximum
current
20 A
20 A
20 A
1A
±(% of reading value + fixed offset in mV + proportional offset in mV). Note: Io is the output current in A.
Current range, resolution, and accuracy
Current
range
±10 µA
±100 µA
±1 mA
±10 mA
±100 mA
±1 A
Force
resolution
10 pA
100 pA
1 nA
10 nA
100 nA
1 µA
Measure
resolution
10 pA
100 pA
1 nA
10 nA
100 nA
1 µA
Force accuracy 1
(% + A + A)
±(0.06 + 1E-8 + Vo x 3E-9)
±(0.06 + 2E-8 + Vo x 3E-9)
±(0.06 + 2E-7 + Vo x 1E-8)
±(0.06 + 2E-6 + Vo x 1E-7)
±(0.06 + 2E-5 + Vo x 1E-6)
±(0.4 + 2E-4 + Vo x 1E-5)
Measure accuracy 1
(% + A + A)
±(0.06 + 1E-8 + Vo x 3E-9)
±(0.06 + 2E-8 + Vo x 3E-9)
±(0.06 + 2E-7 + Vo x 1E-8)
±(0.06 + 2E-6 + Vo x 1E-7)
±(0.06 + 2E-5 + Vo x 1E-6)
±(0.4 + 2E-4 + Vo x 1E-5)
Maximum
voltage
40 V
40 V
40 V
40 V
40 V
40 V
±20 A 2
20 µA
20 µA
±(0.4 + 2E-3 + Vo x 1E-4)
±(0.4 + 2E-3 + Vo x 1E-4)
20 V
1. ±(% of reading value + fixed offset in A + proportional offset in A), Vo is the output voltage in V.
2. Pulse mode only. The maximum value of the base current during pulsing is ±100 mA.
Power consumption
HCSMU measurement and output range
Voltage range
Power
0.2 V
40 x Ic (W)
2V
40 x Ic (W)
40 V
40 x Ic (W)
Where Ic is the current compliance setting.
For pulse current, Ic = (duty) x Ipulse
DC and pulse
20
Current source mode:
Voltage
Power
compliance
Vc ≤ 0.2
40 x Io (W)
0.2 < Vc ≤ 2
40 x Io (W)
2 < Vc ≤ 40
40 x Io (W)
Where Vc is the voltage compliance
setting and Io is output current. For
pulse current, Io = (duty) x Ipulse
Pulse only
Current (A)
Voltage source mode:
1
-40
-20
20
-1
-20
40
Voltage (V)
19 | Keysight | B1506A Power Device Analyzer for Circuit Design - Data Sheet
HVSMU Drain Output Specifications
Voltage range, resolution, and accuracy
Voltage
range
±200 V
±500 V
±1500 V
±3000 V
1.
Force
resolution
200 µV
500 µV
1.5 mV
3 mV
Measure
resolution
200 µV
500 µV
1.5 mV
3 mV
Force accuracy 1
±(% + mV)
±(0.03 + 40)
±(0.03 + 100)
±(0.03 + 300)
±(0.03 + 600)
Measure accuracy 1
±(% + mV)
±(0.03 + 40)
±(0.03 + 100)
±(0.03 + 300)
±(0.03 + 600)
Maximum
current
8 mA
8 mA
8 mA
4 mA
Force accuracy 1
±(% + A + A)
±(0.1 + 1E-9 + Vo x 3E-11) 4
±(0.05 + 1E-9 + Vo x 3E-11) 4
±(0.05 + 1E-9 + Vo x 3E-11) 4
±(0.04 + 2E-9 + Vo x 3E-11) 4
±(0.03 + 3E-9 + Vo x 3E-9)
±(0.03 + 6E-8 + Vo x 3E-9)
±(0.03 + 2E-7 + Vo x 3E-9)
Measure accuracy 1
±(% + A + A)
±(0.1 + 1E-9 + Vo x 3E-11) 4
±(0.05 + 1E-9 + Vo x 3E-11) 4
±(0.05 + 1E-9 + Vo x 3E-11) 4
±(0.04 + 2E-9 + Vo x 3E-11) 4
±(0.03 + 3E-9 + Vo x 3E-9)
±(0.03 + 6E-8 + Vo x 3E-9)
±(0.03 + 2E-7 + Vo x 3E-9)
Maximum
voltage
3000 V
3000 V
3000 V
3000 V
3000 V
3000 V
1500 V
1. ±(% of reading value + offset voltage V)
Current range, resolution, and accuracy
Current
range
±10 nA 3
±100 nA 3
±1 µA 3
±10 µA 3
±100 µA
±1 mA
±10 mA
1.
2.
3.
4.
Force
resolution
100 fA
100 fA
1 pA
10 pA
100 pA
1 nA
10 nA
Measure
resolution
100 fA
100 fA
1 pA
10 pA
100 pA
1 nA
10 nA
Minimum
set current 2
1pA
100 pA
100 pA
10 nA
10 nA
100 nA
1 µA
±(%of reading value + fixed offset in A + proportional offset in A), Vo is the output voltage in V.)
Output current needs to be set more than current shown in the table.
Supplemental characteristics
If only the sense line is connected to the DUT and the force line is left open, then the third term of the accuracy equation is Vo x 2E-12.
HVSMU measurement and output range
Power consumption
Voltage source mode:
Current compliance
Current (mA)
Power
Ic ≤ 4m
3000 x Ic (W)
4m < Ic ≤ 8m
1500 x Ic (W)
Where Ic is the current compliance setting.
Current source mode:
Voltage compliance
Power
Vc ≤ 1500
1500 x Io (W)
1500 < Vc ≤ 3000
3000 x Io (W)
Where Vc is the voltage compliance
setting and Io is output current.
8
-3000
-1500
4
1
Voltage (V)
-1
-4
-8
1500
3000
20 | Keysight | B1506A Power Device Analyzer for Circuit Design - Data Sheet
MPSMU Drain Output / Gate Output Specifications
Voltage range, resolution, and accuracy (high resolution ADC)
Voltage
range
±0.5 V
±2 V
±5 V
±20 V
±40 V
±100 V
Force
resolution
25 μV
100 µV
250 μV
1 mV
2 mV
5 mV
Measure
resolution
0.5 μV
2 µV
5 μV
20 µV
40 µV
100 µV
Force accuracy 1
±(% + mV)
±(0.018 + 0.5)
±(0.018 + 0.5)
±(0.018 + 1)
±(0.018 + 3)
±(0.018 + 6)
±(0.018 + 15)
Measure accuracy 1
±(% + mV)
±(0.01 + 0.5)
±(0.01 + 0.5)
±(0.009 + 1)
±(0.009 + 1)
±(0.01 + 1)
±(0.012 + 2.5)
Maximum
current
100 mA
100 mA
100 mA
100 mA
2
2
1. ± (% of reading value + offset value in mV)
2. 100 mA (Vo ≤ 20 V), 50 mA (20 V < Vo ≤ 40 V), 20 mA (40 V < Vo ≤ 100 V), Vo is the output voltage in Volts.
Current range, resolution, and accuracy (high resolution ADC)
Current range
±10 nA 3
±100 nA 3
±1 µA 3
±10 µA
Force
resolution
500 fA
5 pA
50 pA
500 pA
Measure
resolution
10 fA
100 fA
1 pA
10 pA
±100 µA
5 nA
100 pA
±1 mA
50 nA
1 nA
±10 mA
±100 mA
500 nA
5 µA
10 nA
100 nA
1.
2.
3.
4.
5.
Force accuracy 1
±(% + A + A)
±(0.1 + 1E-9 + Vo x 3E-11)
±(0.05 + 1E-9 + Vo x 3E-11)
±(0.05 + 1E-9 + Vo x 3E-11)
±(0.05 + 3E-9 + Vo x 3E-11) 4
±(0.05 + 3E-9 + Vo x 3E-9) 5
±(0.035 + 15E-9 + Vo x 1E-10) 4
±(0.035 + 15E-9 + Vo x 3E-9) 5
±(0.04 + 15E-8 + Vo x 1E-9) 4
±(0.04 + 15E-8 + Vo x 3E-9) 5
±(0.04 + 15E-7 + Vo x 1E-8)
±(0.045 + 15E-6 + Vo x 1E-7)
Measure accuracy 1
±(% + A + A)
±(0.1 + 1E-9 + Vo x 3E-11)
±(0.05 + 1E-9 + Vo x 3E-11)
±(0.05 + 1E-9 + Vo x 3E-11)
±(0.04 + 2E-9 + Vo x 3E-11) 4
±(0.04 + 2E-9 + Vo x 3E-9) 5
±(0.03 + 3E-9 + Vo x 1E-10) 4
±(0.03 + 3E-9 + Vo x 3E-9) 5
±(0.03 + 6E-8 + Vo x 1E-9) 4
±(0.03 + 6E-8 + Vo x 3E-9) 5
±(0.03 + 2E-7 + Vo x 1E-8)
±(0.04 + 6E-6 + Vo x 1E-7)
Maximum
voltage
100 V
100 V
100 V
100 V
100 V
100 V
100 V
2
± (% of reading value + fixed offset in A + proportional offset in A), Vo is the output voltage in V.)
100 V (Io ≤ 20 mA), 40 V (20 mA < Io ≤ 50 mA), 20 V (50 mA < Io ≤ 100 mA), Io is the output current in Amps.
Supplemental characteristics
For Gate Output
For Drain Output
Voltage range, resolution, and accuracy (high speed ADC)
Voltage range
±0.5 V
±2 V
±5 V
±20 V
±40 V
±100 V
Force
resolution
25 μV
100 µV
250 μV
1 mV
2 mV
5 mV
Measure
resolution
25 μV
100 µV
250 μV
1 mV
2 mV
5 mV
Force accuracy 1
±(% + mV)
±(0.018 + 0.5)
±(0.018 + 0.5)
±(0.018 + 1)
±(0.018 + 3)
±(0.018 + 6)
±(0.018 + 15)
Measure accuracy 1
±(% + mV)
±(0.01 + 0.5)
±(0.01 + 0.7)
±(0.01 + 2)
±(0.01 + 4)
±(0.015 + 8)
±(0.02 + 20)
1. ±(% of reading value + offset value in mV). Averaging is 128 samples in 1 PLC.
2. 100 mA (Vo ≤ 20 V), 50 mA (20 V < Vo ≤ 40 V), 20 mA (40 V < Vo ≤ 100 V), Vo is the output voltage in Volts.
Maximum
current
100 mA
100 mA
100 mA
100 mA
2
2
21 | Keysight | B1506A Power Device Analyzer for Circuit Design - Data Sheet
MPSMU Drain Output / Gate Output Specifications
Current range, resolution, and accuracy (high speed ADC)
Current
range
±10 nA 3
±100 nA 3
±1 µA 3
±10 µA
Force
resolution
500 fA
5 pA
50 pA
500 pA
Measure
resolution
500 fA
5 pA
50 pA
500 pA
±100 µA
5 nA
5 nA
±1 mA
50 nA
50 nA
±10 mA
±100 mA
500 nA
5 µA
500 nA
5 µA
1.
2.
3.
4.
5.
Force accuracy 1
±(% + A + A)
±(0.1 + 1E-9 + Vo x 3E-11)
±(0.05 + 1E-9 + Vo x 3E-11)
±(0.05 + 1E-9 + Vo x 3E-11)
±(0.05 + 3E-9 + Vo x 3E-11) 4
±(0.05 + 3E-9 + Vo x 3E-9) 5
±(0.035 + 15E-9 + Vo x 1E-10) 4
±(0.035 + 15E-9 + Vo x 3E-9) 5
±(0.04 + 15E-8 + Vo x 1E-9) 4
±(0.04 + 15E-8 + Vo x 3E-9) 5
±(0.04 + 15E-7 + Vo x 1E-8)
±(0.045 + 15E-6 + Vo x 1E-7)
Measure accuracy 1
±(% + A + A)
±(0.25 + 1E-9 + Vo x 3E-11)
±(0.1 + 1E-9 + Vo x 3E-11)
±(0.1 + 1E-9 + Vo x 3E-11)
±(0.05 + 2E-9 + Vo x 3E-11) 4
±(0.05 + 2E-9 + Vo x 3E-9) 5
±(0.05 + 2E-8 + Vo x 1E-10) 4
±(0.05 + 2E-8 + Vo x 3E-9) 5
±(0.04 + 2E-7 + Vo x 1E-9) 4
±(0.04 + 2E-7 + Vo x 3E-9) 5
±(0.04 + 2E-6 + Vo x 1E-8)
±(0.1 + 2E-5 + Vo x 1E-7)
Maximum
voltage
100 V
100 V
100 V
100 V
100 V
100 V
100 V
2
±(%of reading value + fixed offset in A + proportional offset in A), Vo is the output voltage in V.)
100 V (Io ≤ 20 mA), 40 V (20 mA < Io ≤ 50 mA), 20 V (50 mA < Io ≤ 100 mA), Io is the output current in Amps.
Supplemental characteristics
For Gate Output
For Drain Output
MPSMU measurement and output range
Power consumption
Voltage source mode:
Current ( mA)
100
Voltage range
Power
0.5 V
20 x Ic (W)
2V
20 x Ic (W)
5V
20 x Ic (W)
20 V
20 x Ic (W)
40 V
40 x Ic (W)
100 V
100 x Ic (W)
Where Ic is the current compliance setting.
Current source mode:
Voltage compliance
Vc ≤ 20
20 < Vc ≤ 40
40 < Vc ≤ 100
Power
20 x Io (W)
40 x Io (W)
100 x Io (W)
Where Vc is the voltage compliance setting
and Io is output current.
50
20
-100
-40 -20
20
-20
-50
-100
40
100
Voltage (V)
22 | Keysight | B1506A Power Device Analyzer for Circuit Design - Data Sheet
MCSMU Gate Output/AUX Output Specifications
Voltage range, resolution, and accuracy
Voltage
range
±0.2 V
±2 V
±20 V
±40 V2
Force
resolution
200 nV
2 µV
20 µV
40 µV
Measure
resolution
200 nV
2 µV
20 µV
40 µV
Force accuracy 1
±(% + mV)
±(0.06 + 0.14)
±(0.06 + 0.6)
±(0.06 + 3)
±(0.06 + 3)
Measure accuracy 1
(% + mV)
±(0.06 + 0.14)
±(0.06 + 0.6)
±(0.06 + 3)
±(0.06 + 3)
Maximum
current
1A
1A
1A
1A
Force accuracy 1
(% + A + A)
±(0.06 + 1E-8 + Vo x 1E-10)
±(0.06 + 2E-8 + Vo x 1E-9)
±(0.06 + 2E-7 + Vo x 1E-8)
±(0.06 + 2E-6 + Vo x 1E-7)
±(0.06 + 2E-5 + Vo x 1E-6)
±(0.4 + 2E-4 + Vo x 1E-5)
Measure accuracy 1
(% + A + A)
±(0.06 + 1E-8 + Vo x 1E-10)
±(0.06 + 2E-8 + Vo x 1E-9)
±(0.06 + 2E-7 + Vo x 1E-8)
±(0.06 + 2E-6 + Vo x 1E-7)
±(0.06 + 2E-5 + Vo x 1E-6)
±(0.4 + 2E-4 + Vo x 1E-5)
Maximum
voltage
30 V
30 V
30 V
30 V
30 V
30 V
1. ±(% of reading value + fixed offset in mV).
2. Maximum output voltage is 30 V
Current range, resolution, and accuracy
Current
range
±10 µA
±100 µA
±1 mA
±10 mA
±100 mA
±1 A2
Force
resolution
10 pA
100 pA
1 nA
10 nA
100 nA
1 µA
Measure
resolution
10 pA
100 pA
1 nA
10 nA
100 nA
1 µA
1. ±(% of reading value + fixed offset in A + proportional offset in A), Vo is the output voltage in V.
2. Pulse mode only. The maximum value of the base current during pulsing is ±50 mA.
Power consumption
MCSMU measurement and output range
Voltage source mode:
Voltage range
Power
0.2 V
40 x Ic (W)
2V
40 x Ic (W)
40 V
40 x Ic (W)
Where Ic is the current compliance setting.
Pulse only
Current (A)
DC and pulse
1
Current source mode:
Voltage compliance Power
Vc ≤ 0.2
40 x Io (W)
0.2 < Vc ≤ 2
40 x Io (W)
2 < Vc ≤ 40
40 x Io (W)
Where Vc is the voltage compliance
setting and Io is output current.
0.1
-30
-0.1
-1
Voltage (V)
30
23 | Keysight | B1506A Power Device Analyzer for Circuit Design - Data Sheet
SMU Other Specifications
SMU source measurement mode
SMU pulse measurement
For MPSMU:
VFIM, IFVM
For HCSMU, MCSMU and HVSMU:
VFIM, VFVM, IFVM, IFIM
Pulse width, period, and delay:
For MPSMU:
Pulse width: 500 µs to 2 s
Pulse width resolution: 100 µs
Pulse period: 5 ms to 5 s
Period ≥ delay + width + 2 ms (when
delay + width ≤ 100 ms)
Period ≥ delay + width + 10 ms (when
delay + width > 100 ms)
Pulse period resolution: 100 µs
Pulse delay: 0 s
Voltage/current compliance
(limiting)
The SMU can limit output voltage or current to prevent damaging the device under
test.
Voltage:
0 V to ±100 V (MPSMU)
0 V to ±40 V (HCSMU)
0 V to ±30 V (MCSMU)
0 V to ±3000 V (HVSMU)
Current:
±10 pA to ±100 mA (MPSMU)
±10 nA to ±20 A (HCSMU)
±10 nA to ±1 A (MCSMU)
±10 pA to ±8 mA (HVSMU)
Compliance accuracy:
Same as the current or voltage set
accuracy.
Power compliance
For MPSMU:
Power: 0.001 W to 2 W
Resolution: 0.001 W
For HCSMU:
Power: 0.001 W to 40 W (DC)
0.001 W to 400 W (Pulse)
Resolution: 0.001 W
For MCSMU:
Power: 0.001 W to 3 W (DC)
0.001 W to 30 W (Pulse)
Resolution: 0.001 W”
For HVSMU:
No power compliance
For HCSMU:
Pulse width:
50 µs to 1 ms (20 A range)
50 µs to 2 s (10 µA to 1 A range)
Pulse width resolution: 2 µs
Pulse period: 5 ms to 5 s
Pulse period resolution: 100 µs
Pulse duty:
For 20 A range: ≤ 1%
For 10 µA to 1 A range
Period ≥ delay + width + 2 ms (when
delay + width ≤ 100 ms)
Period ≥ delay + width + 10 ms
(when delay + width > 100 ms)
Pulse delay: 0 to (Period–width)
For MCSMU:
Pulse width:
10 μs to 100 ms (1 A range)
10 μs to 2 s (10 μA to 100 mA
range)
Pulse width resolution: 2 μs
Pulse period: 5 ms to 5 s
Pulse period resolution: 100 μs
Pulse duty:
For 1 A range: ≤ 5%
For 10 μA to 100m A range
Period ≥ delay + width + 2 ms
(when delay + width ≤ 100 ms)
Period ≥ delay + width + 10 ms
(when delay + width > 100 ms)
Pulse delay: 0 to (Period–width)
For HVSMU:
Pulse width: 500 µs to 2 s
Pulse width resolution: 6 µs
Pulse period: 5 ms to 5 s
Period ≥ delay + width + 2 ms
(when delay + width ≤ 100 ms)
Period ≥ delay + width + 10 ms
(when delay + width > 100 ms)
Pulse period resolution: 100 µs
Pulse delay: 0 to (Period – width)
Pulse output limitation:
When the pulse voltage is more
than 1500 volts, the peak and
base of pulse should be same
polarities.
Pulse measurement delay:
6 µs to (Period – pulse
measurement time – 2 m) s,
6 µs resolution
24 | Keysight | B1506A Power Device Analyzer for Circuit Design - Data Sheet
Supplemental Characteristics
Current compliance setting
accuracy (for opposite polarity):
For MPSMU:
For 1 pA to 10 nA ranges:
V/I setting accuracy ±12% of range
For 100 nA to 100 mA ranges:
V/I setting accuracy ±2.5% of range
For HCSMU and MCSMU:
For 10 µA to 1 A ranges:
V/I setting accuracy ±2.5% of range
For 20 A range (HCSMU):
V/I setting accuracy ±0.6% of range
For HVSMU:
For 10 nA to 10 nA ranges:
V/I setting accuracy ±12% of range
For 100 nA to 10 mA ranges:
V/I setting accuracy ±2.5% of range
SMU pulse setting accuracy
(fixed measurement range):
For MPSMU:
Width: ±0.5% ± 50 µs
Period: ±0.5% ± 100 µs
For HCSMU and MCSMU:
Width: ±0.1% ± 2 µs
Period: ±0.1% ± 100 µs
For HVSMU:
Width: ±0.1% ± 6 µs
Period: ±0.5% ± 100 µs
Minimum pulse measurement
time:
16 µs (MPSMU)
2 µs (HCSMU and MCSMU)
6 µs (HVSMU)
25 | Keysight | B1506A Power Device Analyzer for Circuit Design - Data Sheet
MFCMU (multi frequency capacitance measurement unit) module specifications
Measurement functions
Measurement parameters:
Cp-G, Cp-D, Cp-Q, Cp-Rp, Cs-Rs, Cs-D,
Cs-Q, Lp-G, Lp-D, Lp-Q, Lp-Rp, Ls-Rs,
Ls-D, Ls-Q, R-X, G-B, Z-θ, Y-θ
Ranging:
Auto and fixed
Measurement terminal:
Four-terminal pair configuration, four
BNC (female) connectors
Test signal
Frequency:
Range: 1 kHz to 5 MHz
Resolution: 1 mHz (minimum)
Accuracy: ±0.008%
Output signal level:
Range: 10 mVrms to 250 mVrms
Resolution: 1 mVrms
Accuracy:
±(10.0% + 1 mVrms) at the
measurement port of the MFCMU
±(15.0% + 1 mVrms)
Output impedance: 50 Ω, typical
Signal level monitor:
Range: 10 mVrms to 250 mVrms
Accuracy:
±(10.0% of reading + 1 mVrms) at the
measurement port of the MFCMU
±(15.0% + 1 mVrms)
DC bias function
DC bias:
Range: 0 to ±25 V
Resolution: 1 mV
Accuracy: ±(0.5% + 5.0 mV)
at the measurement port
Maximum DC bias
current (supplemental
characteristics):
Impedance
measurement
range
50 Ω
100 Ω
300 Ω
1 kΩ
3 kΩ
10 kΩ
30 kΩ
100 kΩ
300 kΩ
Maximum DC bias
current
10 mA
10 mA
10 mA
1 mA
1 mA
100 µA
100 µA
10 µA
10 µA
Output impedance: 50 Ω, typical
Sweep characteristics
Available sweep parameters:
Oscillator level, DC bias voltage,
frequency
Sweep type: linear, log
Sweep mode: single, double
Sweep direction: up, down
Number of measurement points:
Maximum 1001 points
Measurement accuracy
The following parameters are used to
express the impedance measurement
accuracy at the measurement port of the
MFCMU.
ZX: Impedance measurement value (Ω)
DX: Measurement value of D
E = EP’ + (ZS’/|ZX| + YO’|ZX|) x 100 (%)
EP’ = EPOSC + EP (%)
YO’ = YOSC + YO (S)
ZS’ = ZOSC + ZS (Ω)
|Z| accuracy
±E (%)
θ accuracy
±E/100 (rad)
C accuracy
at DX ≤ 0.1
±E (%)
at DX > 0.1
±E x √(1+DX2)(%)
D accuracy
at DX ≤ 0.1
±E/100
at DX > 0.1
±E x (1 + DX)/100
G accuracy
at DX ≤ 0.1
±E/ DX (%)
at DX > 0.1
±E x √(1+DX2)/DX (%)
Note: measurement accuracy is specified
under the following conditions:
Temperature: 23 ±5 °C
Integration time: 1 PLC
26 | Keysight | B1506A Power Device Analyzer for Circuit Design - Data Sheet
MFCMU (multi frequency capacitance measurement unit) module specifications
(continued)
Parameters EPOSC ZOSC
Oscillator level
125 mV < VOSC ≤ 250 mV
64 mV < VOSC ≤ 125 mV
32 mV < VOSC ≤ 64 mV
VOSC ≤ 32 mV
EPOSC (%)
0.03 x (250/ VOSC – 1)
0.03 x (125/ VOSC – 1)
0.03 x (64/ VOSC – 1)
0.03 x (32/ VOSC – 1)
ZOSC (mΩ)
5 x (250/VOSC – 1)
5 x (125/VOSC – 1)
5 x (64/VOSC – 1)
5 x (64/VOSC – 1)
YOSC (nS)
1 x (125/ VOSC – 0.5)
2 x (125/ VOSC – 0.5)
2 x (125/ VOSC – 0.5)
20 x (125/ VOSC – 0.5)
YO (nS)
1.5
3.0
3.0
30.0
VOSC is oscillator level in mV.
Parameters YOSC YO EP ZS
Frequency
1 kHz ≤ f ≤ 200 kHz
200 kHz < f ≤ 1 MHz
1 MHz < f ≤ 2 MHz
2 MHz < f
EP (%)
0.095
0.095
0.28
0.28
Z S (mΩ)
5.0
5.0
5.0
5.0
f is frequency in Hz.
VOSC is oscillator level in mV.
Example of calculated C/G measurement accuracy
Frequency
5 MHz
1 MHz
100 kHz
10 kHz
1 kHz
1.
Measured
capacitance
1 pF
10 pF
100 pF
1 nF
1 pF
10 pF
100 pF
1 nF
10 pF
100 pF
1 nF
10 nF
100 pF
1 nF
10 nF
100 nF
100 pF
1 nF
10 nF
100 nF
C accuracy 1
±0.61%
±0.32%
±0.29%
±0.32%
±0.26%
±0.11%
±0.10%
±0.10%
±0.18%
±0.11%
±0.10%
±0.10%
±0.18%
±0.11%
±0.10%
±0.10%
±0.92%
±0.18%
±0.11%
±0.10%
Measured
conductance
≤ 3 µS
≤ 31 µS
≤ 314 µS
≤ 3 mS
≤ 628 nS
≤ 6 µS
≤ 63 µS
≤ 628 µS
≤ 628 nS
≤ 6 µS
≤ 63 µS
≤ 628 µS
≤ 628 nS
≤ 6 µS
≤ 63 µS
≤ 628 µS
≤ 63 nS
≤ 628 nS
≤ 6 µS
≤ 63 µS
G accuracy 1
±192 nS
±990 nS
±9 µS
±99 µS
±16 nS
±71 nS
±624 nS
±7 µS
±11 nS
±66 nS
±619 nS
±7 µS
±11 nS
±66 nS
±619 nS
±7 µS
±6 nS
±11 nS
±66 nS
±619 nS
The capacitance and conductance measurement accuracy is specified under the following conditions:
DX ≤ 0.1
Integration time: 1 PLC
Test signal level: 30 mVrms
At four-terminal pair port of MFCMU
27 | Keysight | B1506A Power Device Analyzer for Circuit Design - Data Sheet
Test Fixture Specification
There are 3 types of test fixtures available
for B1506A depending on the selected
option.
Functionality
Fixture capability
Current expander capability (H51/H71)
Selector capability
This allows the user to switch the output
between the HVSMU, MPSMU and UHCU
or HCSMU.
Thermocouple input: 2ea
Two K-type thermocouple inputs
Temperature range: −50 to 300 °C.
Thermocouple reading accuracy
Temperature range
Accuracy
0°C <= T < 100° C
+/-2°C
T>= 100° C
+/-5°C
T< 0° C
+/-5°C
Other terminals/indicators
Power indicator: 1ea.
High voltage indicator: 1ea.
Measurement mode indicator:
IV mode: 1ea.
CV mode: 1ea.
Interlock terminal: 1ea.
Earth terminal: 1ea.
Wrist strap terminal: 1ea.
Software Interfaces
The B1506A is equipped with Easy Test
Navigator, a soft­ware suite for power
device charac­terization (hereafter referred
to as Easy Test Navigator). It supports various types of measurements and provides
with easy-to-use and simple operation.
The Easy Test Navigator GUI can be
accessed via its front panel 15-inch touch
screen, softkeys and rotary knob, as well
as through an optional USB keyboard and
mouse. Measurement setups and data
can be stored on the B1506A’s HDD, and
they can be exported to external storage. The B1506A also supports Keysight
Technologies, Inc. EasyEXPERT software,
a well-proven software interface for the
B1500A and B1505A.
B1506A Easy Test Navigator
Key features:
–– Dedicate software for;
–– Datasheet characterization
–– I/V characteristics measurement
–– Three-terminal device capacitance
measurement
–– Gate charge measurement
–– Thermal monitor/control
–– Device power loss calculation
–– Ready-to-use measurement templates
for typical power device characteristics measurements
–– Ability to automatically accumulate
measurement data on the HDD in
exportable formats
Easy Test Navigator palette:
The Easy Test Navigator Palette
provides a complete list of the B1506A’s
measurement software and also allows
this software to be launched. The Easy
Test Navigator Palette is displayed in
full-screen mode after powering up the
B1506A. The Easy Test Navigator Palette
can be minimized to access the Windows
desktop.
Datasheet characterization
software:
The datasheet characterization software
provides:
–– A simple operating environment
that can measure a range of device
parameters and characteristics using
a familiar datasheet-like format
–– The ability to input measurement
conditions in a datasheet-like
format
–– The ability to specify graphical
limits on sweep measurements
–– Display measured parameters and
characteristics in a datasheet-like
format
–– The ability to compare measurement results with expected values
–– Minimal software learning curve for
device characterization using the
pre-defined measurement templates
–– The ability to effectively generate new
datasheet specifications for operating conditions not covered on the
manufacturer’s datasheet
IV measurement software:
I/V Measurement Software provides:
–– Voltage/current sweep/spot
measurements
–– DC/pulse outputs
–– Linear/log sweep with both single
(one-way) and double (round-trip)
capability for the primary sweep
source (similar to the collector supply
of a conventional curve tracer)
–– Linear/list sweep capability for
the secondary sweep source (corresponding to the step generator of a
conventional curve tracer)
–– The ability to assign the primary
sweep source or the secondary sweep
source to either the collector/drain
terminal or to the base/gate terminal.
–– Intuitive and interactive sweep/spot
measurement operation using rotary
knob.
–– Pre-defined templates for
typical MOSFET, IGBT and Diode I/V
measurements.
28 | Keysight | B1506A Power Device Analyzer for Circuit Design - Data Sheet
Software Interfaces (continued)
Oscilloscope view:
I/V Measurement Software supports the
pulse mode Oscilloscope View function for
the HCSMU, MCSMU, HVSMU and UHCU
modules.
Oscilloscope View provides:
–– Voltage and current waveform monitoring for the measurement
channels of all supported modules
Capacitance measurement
software:
Capacitance measurement software
provides:
–– Automated measurement circuit
configuration for three-terminal
device capacitance measurement
(e.g. Ciss, Coss and Crss), with no
need to manually modify any device
connections
–– With DC bias (sweep) control up to
3kV for Collector/Drain terminal
–– With DC bias (sweep) control up to
100V for Base/Collector terminal
–– Automated correction for every
measurement path
–– Stable measurements even if the
low-side load capacitance changes
due to a bias change (load adaptive
gain-phase compensation)
–– Cancellation of the residual inductance measurement error on the AC
guard path of three-terminal device
capacitance measurements
–– Pre-defined templates for typical
capacitance measurements of both
enhancement and depletion type
MOSFETs, IGBTs and Diodes
Gate charge measurement
software:
Thermal monitor/control
software:
Keysight EasyEXPERT software
Key features:
Thermal monitor/control software
provides;
–– Thermometer indication
–– Thermal profile with measurement
triggers
–– Optional control of Thermal Plate
–– Ready-to-use application test library
–– Multiple measurement modes (application test, classic test, tracer test,
oscilloscope view and quick test)
–– Multiple measurement functions (spot,
sweep, time sampling, C-V, C-f, C-t,
etc.)
–– Data display, analysis and arithmetic
functions
–– Workspace and data management
–– External instrument control
–– Multiple programming methods
(EasyEXPERT remote control and
FLEX GPIB control)
–– Multiple interface (USB, LAN, GPIB
and digital I/O)
Power loss calculation software:
Power loss calculation software provides:
–– Calculation of power loss at a switching device for:
–– Hard switching mode
–– Soft switching mode
–– Device characteristics parameter
input for:
–– Gate resistance
–– On resistance
–– Gate charge
–– Gate switching charge
–– Equivalent output capacitance
energy related
–– Equivalent output capacitance time
related
–– Parameter input assist from related
measurement data with;
–– Display of source measurement data
–– Switching condition parameter input
–– Support of parameter sweep for
one parameter
–– Power loss calculation results of;
–– Total power loss
–– Conductive power loss
–– Driving power loss
–– Switching power loss (inductive
load, resistive load)
–– Graph representation of loss
components for optional parameter sweep
Key features:
EasyEXPERT comes with over 40 application tests conveniently organized by device
type, application, and technology.
Operation mode:
–– Application test mode
–– Classic test mode
–– Tracer test mode
–– Quick test mode
Measurement mode:
–– V measurement
–– Spot
–– Staircase sweep
–– Pulsed spot
–– Pulsed sweep
–– Staircase sweep with pulsed bias
–– Sampling
–– Multi-channel sweep
–– Multi-channel pulsed sweep
–– List sweep
–– Linear search1
–– Binary search1
–– C measurement
–– Spot C
–– CV (DC bias) sweep
–– Pulsed spot C
–– Pulsed sweep CV
–– C-t sampling
–– C-f sweep
–– CV (AC level) sweep
–– Quasi-Static CV (QSCV)
Gate charge measurement Software
provides;
–– Support for both constant current
load mode and resistive load mode
–– Correction of for parasitic capacitance
and residual resistance for in the gate
path
–– Monitoring of gate and drain/collector
voltage/ and current waveforms during the device turn-on periodphase
–– JESD24-2 compliant Qg curve, line
fitting and parameter extraction
1.
Supported only by FLEX commands.
29 | Keysight | B1506A Power Device Analyzer for Circuit Design - Data Sheet
Software Interfaces (continued)
Common specification for
software interfaces
Other measurement
characteristics
Data display, analysis and
arithmetic functions
Sweep measurement
Measurement control
Single, repeat, append, and stop
Data Display
X-Y graph plot
SMU setting capabilities
Limited auto ranging, voltage/current
compliance, power compliance, automatic
sweep abort functions, self-test, and selfcalibration
X-axis and up to eight Y-axes, linear and
log scale, real time graph plotting. X-Y
graph plot can be printed or stored as
image data to clip board or mass storage
device. (File type: bmp, gif, png, emf)
Scale:
Auto scale and zoom
Marker:
Marker to min/max, interpolation, direct
marker, and marker skip
Number of steps: 1 to 10001 (SMU), 1 to
1001 (CMU)
Sweep mode: Linear or logarithmic (log)
Sweep direction: Single or double sweep
Hold time:
0 to 655.35 s, 10 ms resolution
Delay time:
0 to 65.535 s, 100 μs resolution
0 to 655.35 s, 100 μs resolution (CV (AC level) sweep, C-f sweep)
Step delay time:
0 to 1 s, 100 μs resolution
Step output trigger delay time:
0 to (delay time) s, 100 μs resolution
Step measurement trigger delay time:
0 to 65.535 s, 100 μs resolution
Sampling (time domain)
measurement 1
Displays the time sampled voltage/current
data (by SMU) versus time.
Sampling channels: Up to 10
Sampling mode: Linear, logarithmic (log)
Sampling points:
For linear sampling:
1 to 100,001/(number of channels)
For log sampling:
1 to 1+ (number of data for 11 decades)
Sampling interval range:
100 μs to 2ms, 10μs resolution
2 ms to 65.535 s, 1 ms resolution
For < 2ms, the interval is ≥ 100 μs
+20 μs x (num. of channels – 1)
Hold time, initial wait time:
-90 ms to -100 μs, 100 μs resolution
0 to 655.35 s, 10 ms resolution
Measurement time resolution: 100 μs
1.
Supported only by EasyEXPERT and FLEX
commands.
Standby mode1
SMUs in “Standby” remain programmed to
their specified output value even as other
units are reset for the next measurement.
Bias hold function1
This function allows you to keep a source
active between measurements. The source
module will apply the specified bias
between measurements when running
classic tests inside an application test,
in quick test mode, or during a repeated
measurement. The function ceases as soon
as these conditions end or when a measurement that does not use this function is
started.
Current offset cancel
This function subtracts the offset current
from the current measurement raw data,
and returns the result as the measurement
data. This function is used to compensate
the error factor (offset current) caused by
the measurement path such as the measurement cables, manipulators, or probe
card.
Time stamp1
The B1506A supports a time stamp function utilizing an internal quartz clock.
Resolution: 100 μs
1. Supported only by EasyEXPERT and FLEX
commands.
Cursor:
Direct cursor
Line:
Two lines, normal mode, grad mode,
tangent mode, and regression mode
Overlay graph comparison:
Graphical plots can be overlaid.
List display
Measurement data and calculated user
function data are listed in conjunction
with sweep step number or time domain
sampling step number. Up to 20 data
sets can be displayed.
Data variable display
Up to 20 user-defined parameters can be
displayed on the graphics screen.
30 | Keysight | B1506A Power Device Analyzer for Circuit Design - Data Sheet
Software Interfaces (continued)
Automatic analysis function
On a graphics plot, the markers and lines
can be automatically located using the
auto analysis setup. Parameters can be
automatically determined using automatic
analysis, user function, and read out functions.
Analysis functions
Up to 20 user-defined analysis functions
can be defined using arithmetic expressions. Measured data, pre-defined variables,
and read out functions can be used in the
computation. The results can be displayed
on the LCD.
Read out functions
The read out functions are built-in
functions for reading various values related
to the marker, cursor, or line.
Arithmetic functions
User functions
Up to 20 user-defined functions can be
defined using arithmetic expressions.
Measured data and pre-defined variables
can be used in the computation. The results
can be displayed on the LCD.
Physical constants
Keyboard constants are stored in memory as
follows:
q: Electron charge, 1.602177E-19 C
k: Boltzmann’s constant, 1.380658E-23
ε (e): Dielectric constant of vacuum,
8.854188E-12
Engineering units
The following unit symbols are also available on the keyboard:
a (10-18), f (10-15), p (10-12), n (10-9),
u or μ (10-6), m (10-3), k (103), M (106),
G (109), T (1012) , P (1015)
Recommended GPIB I/F
Interface
B1506A
PCI
USB
USB
√1
√2
√2
GPIB-USB-HS USB
√2
Keysight
82350B
82357A
82357A
National Instrument
1. An 82350B card is highly recommended because of stability and speed.
2. USB GPIB interfaces might cause serial poll error intermittently due to the intrinsic communication
scheme differences. It is reported that using an even GPIB address sometimes significantly
decreases the chance of the error. The NI GPIB-USB-HS is recommended for stability, and the
Keysight 82357B is recommended for speed.
Arithmetic operators
+, -, *, /, ^, abs (absolute value),
at (arc tangent), avg (averaging), cond
(conditional evaluation), delta, diff (differential), exp (exponent), integ (integration),
lgt (logarithm, base 10), log (logarithm,
base e), mavg (moving average), max,
min, sqrt, trigonometric function, inverse
trigonometric function, and so on.
1.
In case of some supplemental characteristics, humidity range is defined as 20 to 50% RH
31 | Keysight | B1506A Power Device Analyzer for Circuit Design - Data Sheet
General Specifications
Altitude
Operating: 0 m to 2,000 m (6,561 ft)
Storage: 0 m to 4,600 m (15,092 ft)
Power requirement
ac Voltage: 90 V to 264 V
Line Frequency: 47 Hz to 63 Hz
Maximum volt-amps (VA)
B1506A mainframe: 900 VA
B1506A tesf fixture: 130VA (H21), 470 VA
(H51/H71),
Acoustic Noise Emission
Lpa < 55dB
Certification
CE, cCSAus, RCM, KC
Dimensions
B1506A mainframe:
420 mm W x 330 mm H x 575 mm D
B1506A test fixture:
420 mm W x 360 mm H x 575 mm D
B1506A-T01 Thermal Test Enclosure:
Outer dimension:
370 mm W x 340 mm H x 315 mm D
Inner dimension:
280 mm W x 130 mm H x 180 mm D
Weight
B1506A mainframe
H21: 34.5 kg
H51/H71: 35 kg
Lwa:73dB (Worst Case mode)
B1506A test fixture
H21: 22 kg
H51/H71: 33.5 kg
About measurement accuracy
Furnished accessories
Lwa:55dB (Operating mode)
RF electromagnetic field and SMU
measurement accuracy: SMU voltage
and current measurement accuracy can
be affected by RF electromagnetic field
strengths greater than 3 V/m in the
frequency range of 80 MHz to 1 GHz. The
extent of this effect depends upon how the
instrument is positioned and shielded.
Induced RF field noise and SMU
measurement accuracy:
SMU voltage and current measurement
accuracy can be affected by
induced RF field noise strengths
greater than 3 Vrms in the frequency
range of 150 kHz to 80 MHz. The
extent of this effect depends upon
how the instrument is positioned and
shielded.
Regulatory compliance
EMC:
IEC 61326-1 / EN 61326-1
Canada: ICES/NMB-001
AS/NZS CISPR 11
Safety:
IEC61010-1 / EN 61010-1
CAN/CSA-C22.2 No. 61010-1
Measurement cables and adapter
System cable, 1 ea.
CMU cable, 1 ea
Digital I/O cable, 1 ea.
Blank Silicon Plate, 1 ea.
3-pin Inline Package Socket Module, 1 ea
Curve Tracer Test Adapter Socket Module, 1ea
Thermocouple (high temperature resistant, 75
cm), 2 ea.
200 mm high current cable, 2 ea.
300 mm high current cable, 2 ea.
200 mm normal cable, 8 ea.
300 mm normal cable, 6 ea.
Banana pin adapter, 18 ea.
Mini alligator clip, 14 ea.
Large clip, 4 ea.
For B1506A-H21/51/71 only
Universal Socket Module, 1 ea.
Gate Charge Socket Adapter, 1 ea.
Keyboard, 1 ea.
Mouse, 1 ea.
Stylus pen, 1 ea.
Power cable, 2 ea.
Manual & Software CD-ROM, 1 ea.
Disk set for Keysight
4155B/4155C/4156B/4156C
firmware update, 1 set
32 | Keysight | B1506A Power Device Analyzer for Circuit Design - Data Sheet
Ordering Information
Model number
Option
B1506A
Description
Power Device Analyzer for Circuit Design
H20
Option H20 - 20 A/3 kV/Thermal Fixture Package
H21
Option H21 - 20 A/3 kV/C-V/Gate Charge/Thermal Fixture Package
H50
Option H50 - 500 A/3 kV/Thermal Fixture Package
H51
Option H51 - 500 A/3 kV/C-V/Gate Charge/Thermal Fixture Package
H70
Option H70 - 1500 A/3 kV/Thermal Fixture Package
H71
Option H71 - 1500 A/3 kV/C-V/Gate Charge/Thermal Fixture Package
Thermal Test Option
T01
Thermal Test Enclosure (Thermostream Compatible)
Documentation
0B0
Download the Product Manual from the Keysight website
ABA
English User’s Guide
ABJ
Japanese User’s Guide
Calibration
Documentation
UK6
Commercial calibration certification with test data
A6J
ANSI Z540-1-1994 Calibration
Drive Option
DR1
B1506AU
Replace a build-in DVD-R with a read-only DVD drive
Upgrade kit for B1506A
Current Upgrade
005
20 A to 500 A Current Upgrade Option
015
500 A to 1500 A Current Upgrade Option
105
20A to 500A Current Upgrade for B1506A-H20
115
500A to 1500A Current Upgrade for B1506A-H50
CV and Qg Upgrade
021
Add CV and Qg to B1506A-H20
051
Add CV and Qg to B1506A-H50
071
Add CV and Qg to B1506A-H70
Accessory
T01
Thermal Test Enclosure (Thermostream Compatible)
F02
Blank Silicon Plate
F10
3-pin Inline Package Socket Module
F11
Universal Socket Module
F13
Curve Tracer Test Adapter Socket Module
F14
Gate Charge Socket Adapter
Note: Both Thermostream and Thermal plate (HP289 with GP-IB control) are sold and supported by inTEST corporation.
* B1506AU Opt F11 Universal Socket Module contains a universal socket module, test wire for thermal test (2m), ultra-high current
test wire for thermal test (2m), lag connector x 20, lag connector for ultra-high current test wire x 6, and screws.
33 | Keysight | B1506A Power Device Analyzer for Circuit Design - Data Sheet
If you need more measurement capabilities, the best choice is Keysight precision SMU products.
Keysight B2900 Precision Instrument Family
www.keysight.com/find/b2900a
Keysight B1500A Semiconductor Device Analyzer
www.keysight.com/find/B1500A
Keysight B1505A Power Device Analyzer/Curve Tracer (1500 A/10 kV)
www.keysight.com/find/B1505A
34 | Keysight | B1506A Power Device Analyzer for Circuit Design - Data Sheet
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© Keysight Technologies, 2014 - 2016
Published in USA, June 23, 2016
5991-4441EN
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