Single-Axis, High-g, iMEMS® Accelerometers ADXL78 FEATURES GENERAL DESCRIPTION Complete acceleration measurement system on a single monolithic IC Available in ±35 g, ±50 g, or ±70 g output full-scale ranges Full differential sensor and circuitry for high resistance to EMI/RFI Environmentally robust packaging Complete mechanical and electrical self-test on digital command Output ratiometric to supply Sensitive axes in the plane of the chip High linearity (0.2% of full scale) Frequency response down to dc Low noise Low power consumption (1.3 mA) Tight sensitivity tolerance and 0 g offset capability Largest available prefilter clipping headroom 400 Hz, 2-pole Bessel filter Single-supply operation Compatible with Sn/Pb and Pb-free solder processes Qualified for automotive applications The ADXL78 is a low power, complete single-axis accelerometer with signal conditioned voltage outputs that are on a single monolithic IC. This product measures acceleration with a fullscale range of ±35 g, ±50 g, or ±70 g (minimum). It can also measure both dynamic acceleration (vibration) and static acceleration (gravity). The ADXL78 is the fourth-generation surface micromachined iMEMS® accelerometer from ADI with enhanced performance and lower cost. Designed for use in front and side impact airbag applications, this product also provides a complete costeffective solution useful for a wide variety of other applications. The ADXL78 is temperature stable and accurate over the automotive temperature range, with a self-test feature that fully exercises all the mechanical and electrical elements of the sensor with a digital signal applied to a single pin. The ADXL78 is available in a 5 mm × 5 mm × 2 mm, 8-terminal ceramic LCC package. APPLICATIONS Vibration monitoring and control Vehicle collision sensing Shock detection FUNCTIONAL BLOCK DIAGRAM VS ADXL78 TIMING GENERATOR VDD VDD2 DIFFERENTIAL SENSOR SELF-TEST DEMOD AMP 400Hz BESSEL FILTER XOUT 05368-001 EXC Figure 1. Rev. B Information furnished by Analog Devices is believed to be accurate and reliable. However, no responsibility is assumed by Analog Devices for its use, nor for any infringements of patents or other rights of third parties that may result from its use. Specifications subject to change without notice. No license is granted by implication or otherwise under any patent or patent rights of Analog Devices. Trademarks and registered trademarks are the property of their respective owners. One Technology Way, P.O. Box 9106, Norwood, MA 02062-9106, U.S.A. Tel: 781.329.4700 www.analog.com Fax: 781.461.3113 ©2010 Analog Devices, Inc. All rights reserved. ADXL78 TABLE OF CONTENTS Features .............................................................................................. 1 Applications........................................................................................8 Applications ....................................................................................... 1 Power Supply Decoupling ............................................................8 General Description ......................................................................... 1 Self-Test ..........................................................................................8 Functional Block Diagram .............................................................. 1 Clock Frequency Supply Response .............................................8 Specifications..................................................................................... 3 Signal Distortion ...........................................................................8 Absolute Maximum Ratings............................................................ 4 Outline Dimensions ..........................................................................9 ESD Caution .................................................................................. 4 ADXL78 Ordering Guide .............................................................9 Pin Configuration and Function Descriptions ............................. 5 Automotive Products ....................................................................9 Theory of Operation ........................................................................ 7 REVISION HISTORY 7/10—Rev. A to Rev. B Updated Format ................................................................. Universal Change to Features Section ............................................................. 1 Updated Outline Dimensions ......................................................... 9 Changes to Ordering Guide ............................................................ 9 Added Automotive Products Section ............................................ 9 5/05—Rev. 0 to Rev. A Rev. B | Page 2 of 12 ADXL78 SPECIFICATIONS 1 At TA = −40°C to +105°C, 5.0 V dc ± 5%, acceleration = 0 g, unless otherwise noted. Table 1. Parameter SENSOR Output Full-Scale Range Nonlinearity Package Alignment Error Cross-Axis Sensitivity Resonant Frequency Sensitivity, Ratiometric (Over Temperature) OFFSET Zero-g Output Voltage (Over Temperature) 2 NOISE Noise Density Clock Noise FREQUENCY RESPONSE −3 dB Frequency −3 dB Frequency Drift SELF-TEST Output Change (Cube vs. VDD) 3 Logic Input High Logic Input Low Input Resistance OUTPUT AMPLIFIER Output Voltage Swing Capacitive Load Drive PREFILTER HEADROOM CFSR @ 400 kHz POWER SUPPLY (VDD) Functional Range Quiescent Supply Current TEMPERATURE RANGE Conditions Model No. AD22279 Min Typ Max Model No. AD22280 Min Typ Max Model No. AD22281 Min Typ Max IOUT ≤ ±100 μA 37 55 70 0.2 1 −5 VDD = 5 V, 100 Hz 52.25 VOUT − VDD/2, VDD = 5 V −200 +5 24 55 1.1 10 Hz − 400 Hz, 5V 2 0.2 1 −5 57.75 36.1 +200 −150 3 2 +5 24 38 1.4 5 0.2 1 −5 39.9 25.65 +150 −150 3 1.8 5 28.35 g % Degree % kHz mV/g +150 mV 3.5 mg/√Hz 2 +5 24 27 Unit 5 mV p-p 2-pole Bessel 360 400 2 440 360 400 2 440 360 400 2 440 Hz Hz VDD = 5 V 440 550 660 304 380 456 216 270 324 mV VDD = 5 V VDD = 5 V Pull-down resistor to GND 3.5 1 V V kΩ 25°C to TMIN or TMAX IOUT = ±400 μA 3.5 3.5 1 30 50 0.25 1000 1 30 VDD − 0.25 0.25 1000 280 5 4.75 3.5 VDD = 5 V 1.3 −40 50 30 VDD − 0.25 0.25 1000 400 4 5.25 6 2 +105 4.75 3.5 1.3 −40 1 All minimum and maximum specifications are guaranteed. Typical specifications are not guaranteed. Zero g output is ratiometric. 3 Self-test output at VDD = (Self-Test Output at 5 V) × (VDD/5 V)3. 2 Rev. B | Page 3 of 12 50 VDD − 0.25 560 3 5.25 6 2 +105 4.75 3.5 1.3 −40 5.25 6 2 +105 V pF g V/V V V mA °C ADXL78 ABSOLUTE MAXIMUM RATINGS Table 2. Parameter Acceleration (Any Axis, Unpowered) Acceleration (Any Axis, Powered) VS All Other Pins Output Short-Circuit Duration (Any Pin to Common) Operating Temperature Range Storage Temperature Rating 4000 g 4000 g −0.3 V to +7.0 V (COM − 0.3 V) to (VS + 0.3 V) Indefinite −65°C to +150°C −65°C to +150°C Stresses above those listed under Absolute Maximum Ratings may cause permanent damage to the device. This is a stress rating only; functional operation of the device at these or any other conditions above those indicated in the operational section of this specification is not implied. Exposure to absolute maximum rating conditions for extended periods may affect device reliability. ESD CAUTION Rev. B | Page 4 of 12 ADXL78 PIN CONFIGURATION AND FUNCTION DESCRIPTIONS VDD2 8 NC 1 7 VDD ADXL78 NC 2 6 XOUT TOP VIEW (Not to Scale) COM 3 5 NC 05368-002 4 ST NC = NO CONNECT Figure 2. Pin Configuration Table 3. Pin Function Descriptions Pin No. 1 2 3 4 5 6 7 8 Mnemonic NC NC COM ST NC XOUT VDD VDD2 Description Do Not Connect Do Not Connect Common Self-Test Do Not Connect X Channel Output 3.5 V to 6 V 3.5 V to 6 V Rev. B | Page 5 of 12 ADXL78 CRITICAL ZONE TL TO TP tP TP TEMPERATURE RAMP-UP TL tL TSMAX TSMIN tS RAMP-DOWN 05368-003 PREHEAT t25°C TO PEAK TIME Figure 3. Recommended Soldering Profile Table 4. Recommended Soldering Profile Profile Feature AVERAGE RAMP RATE (TL TO TP) PREHEAT Minimum Temperature (TSMIN) Maximum Temperature (TSMAX) TIME (TSMIN TO TSMAX), tS TSMAX TO TL Ramp-Up Rate TIME MAINTAINED ABOVE LIQUIDOUS (TL) Liquidous Temperature (TL) Time (tL) PEAK TEMPERATURE (TP) TIME WITHIN 5°C OF ACTUAL PEAK TEMPERATURE (tP) RAMP-DOWN RATE TIME 25°C TO PEAK TEMPERATURE Sn63/Pb37 3°C/s max Pb-Free 3°C/s max 100°C 150°C 60 s − 120 s 150°C 200°C 60 s − 150 s 3°C/s 3°C/s 183°C 60 s − 150 s 240°C + 0°C/−5°C 10 s − 30 s 6°C/s max 6 min max 217°C 60 s − 150 s 260°C + 0°C/−5°C 20 s − 40 s 6°C/s max 8 min max PIN 8 XXXXX XXXX XOUT = 2.462V 22280 XXXXX XXXX 22280 XOUT = 2.500V 22280 XXXXX XXXX XOUT = 2.538V XOUT = 2.500V EARTH'S SURFACE Figure 4. Output Response vs. Orientation Rev. B | Page 6 of 12 05368-004 XOUT = 2.500V XXXXX XXXX 22280 ADXL78 THEORY OF OPERATION Complementary 400 kHz square waves drive the fixed plates. Electrical feedback adjusts the amplitudes of the square waves such that the ac signal on the moving plates is 0. The feedback signal is linearly proportional to the applied acceleration. This unique feedback technique ensures that there is no net electrostatic force applied to the sensor. The differential feedback control signal is also applied to the input of the filter, where it is filtered and converted to a single-ended signal. Rev. B | Page 7 of 12 MOVABLE FRAME PLATE CAPACITORS UNIT SENSING CELL FIXED PLATES UNIT FORCING CELL MOVING PLATE ANCHOR Figure 5. Simplified View of Sensor Under Acceleration 05368-005 Figure 5 is a simplified view of one of the differential sensor elements. Each sensor includes several differential capacitor unit cells. Each cell is composed of fixed plates attached to the substrate and movable plates attached to the frame. Displacement of the frame changes the differential capacitance, which is measured by the on-chip circuitry. ANCHOR ACCELERATION The ADXL78 provides a fully differential sensor structure and circuit path, resulting in the industry’s highest resistance to EMI/RFI effects. This latest generation uses electrical feedback with zero-force feedback for improved accuracy and stability. The sensor resonant frequency is significantly higher than the signal bandwidth set by the on-chip filter, avoiding the signal analysis problems caused by resonant peaks near the signal bandwidth. ADXL78 APPLICATIONS POWER SUPPLY DECOUPLING For most applications, a single 0.1 μF capacitor, CDC, adequately decouples the accelerometer from noise on the power supply. However, in some cases, particularly where noise is present at the 400 kHz internal clock frequency (or any harmonic thereof), noise on the supply can cause interference on the ADXL78’s output. If additional decoupling is needed, a 50 Ω (or smaller) resistor or ferrite bead can be inserted in the supply line. Additionally, a larger bulk bypass capacitor (in the 1 μF to 4.7 μF range) can be added in parallel to CDC. SELF-TEST The fixed fingers in the forcing cells are normally kept at the same potential as that of the movable frame. When the self-test digital input is activated, the voltage on the fixed fingers on one side of the moving plate in the forcing cells is changed. This creates an attractive electrostatic force, which causes the frame to move toward those fixed fingers. The entire signal channel is active; therefore, the sensor displacement causes a change in VOUT. The ADXL78 self-test function is a comprehensive method of verifying the operation of the accelerometer. Because electrostatic force is independent of the polarity of the voltage across capacitor plates, a positive voltage is applied in half of the forcing cells, and its complement in the other half of the forcing cells. Activating self-test causes a step function force to be applied to the sensor, while the capacitive coupling term is canceled. The ADXL78 has improved self-test functionality, including excellent transient response and high speed switching capabilities. Arbitrary force waveforms can be applied to the sensor by modulating the self-test input, such as test signals to measure the system frequency response or even crash signals to verify algorithms within the limits of the self-test swing. The ST pin should never be exposed to voltages greater than VS + 0.3 V. If this cannot be guaranteed due to the system design (for instance, if there are multiple supply voltages), then a low VF clamping diode between ST and VS is recommended. CLOCK FREQUENCY SUPPLY RESPONSE In any clocked system, power supply noise near the clock frequency may have consequences at other frequencies. An internal clock typically controls the sensor excitation and the signal demodulator for micromachined accelerometers. If the power supply contains high frequency spikes, they may be demodulated and interpreted as an acceleration signal. A signal appears as the difference between the noise frequency and the demodulator frequency. If the power supply spikes are 100 Hz away from the demodulator clock, there is an output term at 100 Hz. If the power supply clock is at exactly the same frequency as the accelerometer clock, the term appears as an offset. If the difference frequency is outside of the signal bandwidth, the filter attenuates it. However, both the power supply clock and the accelerometer clock may vary with time or temperature, which can cause the interference signal to appear in the output filter bandwidth. The ADXL78 addresses this issue in two ways. First, the high clock frequency eases the task of choosing a power supply clock frequency such that the difference between it and the accelerometer clock remains well outside of the filter bandwidth. Second, the ADXL78 is the only micromachined accelerometer to have a fully differential signal path, including differential sensors. The differential sensors eliminate most of the power supply noise before it reaches the demodulator. Good high frequency supply bypassing, such as a ceramic capacitor close to the supply pins, also minimizes the amount of interference. The clock frequency supply response (CFSR) is the ratio of the response at VOUT to the noise on the power supply near the accelerometer clock frequency. A CFSR of 3 means that the signal at VOUT is 3× the amplitude of an excitation signal at VDD near the accelerometer internal clock frequency. This is analogous to the power supply response, except that the stimulus and the response are at different frequencies. The ADXL78’s CFSR is 10× better than a typical single-ended accelerometer system. SIGNAL DISTORTION Signals from crashes and other events may contain high amplitude, high frequency components. These components contain very little useful information and are reduced by the 2-pole Bessel filter at the output of the accelerometer. However, if the signal saturates at any point, the accelerometer output does not look like a filtered version of the acceleration signal. The signal may saturate anywhere before the filter. For example, if the resonant frequency of the sensor is low, the displacement per unit acceleration is high. The sensor may reach the mechanical limit of travel if the applied acceleration is high enough. This can be remedied by locating the accelerometer where it does not see high values of acceleration, and by using a higher resonant frequency sensor such as the ADXL78. Also, the electronics may saturate in an overload condition between the sensor output and the filter input. Ensuring that the internal circuit nodes operate linearly to at least several times the full-scale acceleration value can minimize electrical saturation. The ADXL78’s circuits are linear to approximately 8× full scale. Rev. B | Page 8 of 12 ADXL78 OUTLINE DIMENSIONS 0.087 0.078 0.069 0.020 0.015 0.010 (R 4 PLCS) 7 0.180 0.177 SQ 0.174 0.028 0.020 DIA 0.012 1 0.106 0.100 0.094 0.075 REF R 0.008 (8 PLCS) 0.008 0.006 0.004 TOP VIEW R 0.008 (4 PLCS) 0.054 0.050 0.046 (PLATING OPTION 1, SEE DETAIL A FOR OPTION 2) 5 3 BOTTOM VIEW 0.077 0.070 0.063 0.019 SQ DETAIL A (OPTION 2) 05-21-2010-D 0.203 0.197 SQ 0.193 0.030 0.025 0.020 Figure 6. 8-Terminal Ceramic Leadless Chip Carrier [LCC] (E-8-1) Dimensions shown in inches ADXL78 ORDERING GUIDE Model 1, 2, 3 AD22279-A-R2 AD22279-A ADW22279ZC ADW22279ZC-RL7 AD22280-R2 AD22280 ADW22280ZC ADW22280ZC-RL7 AD22281-R2 AD22281 ADW22281ZC ADW22281ZC-RL7 1 2 3 Parts per Reel 250 3,000 3,000 250 250 3,000 3,000 250 250 3,000 3,000 250 Measurement Range ±35 g ±35 g ±35 g ±35 g ±50 g ±50 g ±50 g ±50 g ±70 g ±70 g ±70 g ±70 g Specified Voltage (V) 5 5 5 5 5 5 5 5 5 5 5 5 Temperature Range −40°C to +105°C −40°C to +105°C −40°C to +105°C −40°C to +105°C −40°C to +105°C −40°C to +105°C −40°C to +105°C −40°C to +105°C −40°C to +105°C −40°C to +105°C −40°C to +105°C −40°C to +105°C Package Description 8-Terminal Ceramic Leadless Chip Carrier 8-Terminal Ceramic Leadless Chip Carrier 8-Terminal Ceramic Leadless Chip Carrier 8-Terminal Ceramic Leadless Chip Carrier 8-Terminal Ceramic Leadless Chip Carrier 8-Terminal Ceramic Leadless Chip Carrier 8-Terminal Ceramic Leadless Chip Carrier 8-Terminal Ceramic Leadless Chip Carrier 8-Terminal Ceramic Leadless Chip Carrier 8-Terminal Ceramic Leadless Chip Carrier 8-Terminal Ceramic Leadless Chip Carrier 8-Terminal Ceramic Leadless Chip Carrier Package Option E-8-1 E-8-1 E-8-1 E-8-1 E-8-1 E-8-1 E-8-1 E-8-1 E-8-1 E-8-1 E-8-1 E-8-1 All models are on tape and reel and are RoHS compliant parts. Z = RoHS Compliant Part. W = Qualified for Automotive Applications. AUTOMOTIVE PRODUCTS The ADW22279, ADW22280, and ADW22281 models are available with controlled manufacturing to support the quality and reliability requirements of automotive applications. Note that these automotive models may have specifications that differ from the commercial models; therefore, designers should review the Specifications section of this data sheet carefully. Only the automotive grade products shown are available for use in automotive applications. Contact your local Analog Devices account representative for specific Automotive Reliability reports for these models. Rev. B | Page 9 of 12 ADXL78 NOTES Rev. B | Page 10 of 12 ADXL78 NOTES Rev. B | Page 11 of 12 ADXL78 NOTES ©2010 Analog Devices, Inc. All rights reserved. Trademarks and registered trademarks are the property of their respective owners. D05368-0-7/10(B) Rev. B | Page 12 of 12