MEMS Airflow Sensor
D6F-10A, -20A, -50A
Compact, intelligent sensor featuring
MEMS technology for precision mass
airflow measurement
• Precision mass airflow up to 50 slpm
• Stable output across full scale
• Horizontal mounting feature with *NBR ‘O’ ring option
• Compact size 78 (L) x 30 (W) x 30 (H) mm
• Low power consumption
* NBR material recommended for all applications including
medical and food processing
Application Examples
• Industrial processes
• Medical Respirators and Ventilators
• MiG and TiG welding systems
• Anesthesia Delivery
• Mass flow controllers
• Scientific / test equipment
• Fuel cell controls
Ordering Information
Model
Case
Applicable Gas
Flow Range
Notes
D6F-10A5
Thermoplastic resin / Aluminum alloy
Air, N2O, O2
0 – 10 LPM
Built-in orifice, Right-angle Connect
D6F-20A5
Thermoplastic resin / Aluminum alloy
Air, N2O, O2
0 – 20 LPM
Built-in orifice, Right-angle Connect
D6F-50A5
Thermoplastic resin / Aluminum alloy
Air, N2O, O2
0 – 50 LPM
Built-in orifice, Right-angle Connect
D6F-10A6
Thermoplastic resin / Aluminum alloy
Air, N2O, O2
0 – 10 LPM
Built-in orifice, Straight Connect
D6F-20A6
Thermoplastic resin / Aluminum alloy
Air, N2O, O2
0 – 20 LPM
Built-in orifice, Straight Connect
D6F-50A6
Thermoplastic resin / Aluminum alloy
Air, N2O, O2
0 – 50 LPM
Built-in orifice, Straight Connect
D6F-Cable1
Optional (recommended)
■ Rating
Absolute maximum rating
Item
Term
Ratings
Unit
Power-supply voltage
VCC
26.4
VDC
Output voltage
VOUT
6
VDC
MEMS Airflow Sensor
D6F-10A, -20A, -50A
1
■ Electrical Performance
Recommended operation condition and DC characteristic
Item
Term
Condition
MIN
TYP
MAX
Unit
Power-supply voltage
VCC
—
10.8
—
26.4
VDC
Operating temperature
TOPR
—
-10
—
60
°C
Maximum output voltage
VOH
VCC = 12VDC to 24VDC
IOH = 0.5mA
5
—
5.7
VDC
Minimum output voltage
VOL
VCC = 12VDC to 24VDC
IOL = -0.5mA
0
—
1
VDC
■ Basic Performance
0 to 50 min. (Normal). L/min (Normal) volumetric flow rate at 0° C, 101 3kPa.
Measurement condition: Power-supply voltage 12 ±0.1VDC, ambient temperature 25 ±2° C and ambient air humidity 25 to 75% RH.
D6F-10A
Flow Rate L/min (normal)
0
2
4
6
8
10
Output Voltage (VDC)
1.00 ±0.12
1.75 ±0.12
2.60 ±0.12
3.45 ±0.12
4.25 ±0.12
5.00 ±0.12
D6F-20A
Flow Rate L/min (normal)
0
4
8
12
16
20
Output Voltage (VDC)
1.00 ±0.12
1.93 ±0.12
2.87 ±0.12
3.70 ±0.12
4.41 ±0.12
5.00 ±0.12
D6F-50A
Flow Rate L/min (normal)
0
10
20
30
40
50
Output Voltage (VDC)
1.00 ±0.12
2.45 ±0.12
3.51 ±0.12
4.20 ±0.12
4.66 ±0.12
5.00 ±0.12
■ Characteristics
Degree of Protection
IP40
Applicable Gas
Air
Electrical Connection
Connector (3 wire)
Output Signal
Analog, 1-5VDC (load resistance 10kohm min)
Current Consumption
Max 15mA (no load, VCC = 12 to 24 VDC, V SS = GND = 0V, 25° C)
Repeat Accuracy
+/- 3% FSD max, 25° C
Insulation Resistance
20Mohm min. (500VDC between lead terminals and case)
Dielectric Strength
500VAC, 50/60Hz for 1 minute (leakage current typ. <1mA) between lead terminals
Withstand Pressure
500 kPa
Operating Temperature
-10 to +60° C (with no ice or dew condensation)
Operating Humidity
85%RH max. (with no ice or dew condensation)
Storage Temperature
-40 to +80° C (with no ice or dew condensation)
Storage Humidity
85%RH max. (with no ice or dew condensation)
Weight
About 103 grams
Optional: Versions for N2O and O2 also available. For Ar + CO2, He, and He + O2, please consult factory.
2
MEMS Airflow Sensor D6F-10A,
-20A, -50A
Installation: D6F-10A5-000, D6F-20A5-000, D6F-50A5-000
Recommendation for right-angle connection
Tighten screw with 0.59Nm or less torque. Use M3 pan head screw.
Please seal to INLET and OUTLET with the ‘O’ ring etc. Please
install the product as shown below.
Recommended ‘O’ ring for sealing inlet and outlet orifice
Material: NBR70 (recommended)
Example part number: JASO part number: CO 0003
Alternative manufacturers with similar DO and W dimensions may be
used
■ Precautions
1. Avoid use in excessively dirty, wet environments
2. Do not use in the presence of flammable gases (e.g. hydrogen,
methane, ethane) and liquefied petroleum gas. In addition, do not
use with corrosive gases (e.g. chlorine, sulphur, acids, alkalis,
etc.).
3. Install in the direction of the arrow indicated.
4. For best results (optimum accuracy), mount horizontally.
5. Use four suitable M3 screws for mounting. Do not exceed a fixing
torque of 0.59 Nm.
6. Do not modify D6F- in any way.
7. Do not place any object in or close to the inlet and outlet orifices.
8. Do not use the sensor in any of the following environments:
• a location that receives radiant heat from the sun or apparatus
12.D6F- is a precision component. Keep in original packaging and
remove only when ready for installation. Damage may occur if
subjected to excessive force (e.g. dropped or kicked). Any item
suspected to be damaged should be discarded.
13.Immediately following installation, a qualified person should perform checks to ensure safe, satisfactory operation.
• a place where intense light may radiate down
• places where corrosive gas, especially sulphur and ammonia
gases are present
• where fast changing temperatures occur
• locations prone to freezing, high humidity, condensation
• places where large magnitudes of vibration or shock could occur
9. Noise countermeasures: VERY IMPORTANT: Take suitable precautions to minimize the effects and potential for induced electrical noise. Install away from apparatus that generates strong high
frequencies, surges and spikes. Take particular care to install
away from AC power transformers, live mains power lines and
high power magnetic circuits. Attach a surge suppressor and a
noise filter to the peripheral equipment.
10.Ensure good grounding is achieved by grounding the GND terminal to the peripheral equipment’s main ground frame connection
and its associated regulated power supply.
11.Do not make a direct solder connection to the integral terminals. It
is recommended you use the optional cable ‘D6F-CABLE1’ for
attachment and to ensure correct connection.
MEMS Airflow Sensor
D6F-10A, -20A, -50A
3
Dimensions: D6F-10A5-000, D6F-20A5-000, D6F-50A5-000
All dimensions are shown in millimeters.
■ D6F-Cable1 (Optional)
4
MEMS Airflow Sensor D6F-10A,
-20A, -50A
■ D6F-10A6-000, D6F-20A6-000, and D6F-50A6-000
MEMS Airflow Sensor
D6F-10A, -20A, -50A
5
Omron Electronic Components, LLC
Terms and Conditions of Sales
I. GENERAL
1. Definitions: The words used herein are defined as follows.
(a) Terms:
These terms and conditions
(b) Seller:
Omron Electronic Components LLC and its subsidiaries
(c) Buyer:
The buyer of Products, including any end user in section III through VI
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purchase order or other documents which are inconsistent with, or in addition to, these
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legal rate, whichever is less, on any balance not paid within the stated terms.
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unshipped portion of Products sold hereunder and stop any Products in transit until
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handling and extra charges apply to special conditions.
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occurring before delivery to the carrier must be presented in detail in writing to Seller
within 30 days of receipt of shipment.
III. PRECAUTIONS
1. Suitability: IT IS THE BUYER’S SOLE RESPOINSIBILITY TO ENSURE THAT ANY
OMRON PRODUCT IS FIT AND SUFFICIENT FOR USE IN A MOTORIZED VEHICLE
APPLICATION. BUYER SHALL BE SOLELY RESPONSIBLE FOR DETERMINING
APPROPRIATENESS OF THE PARTICULAR PRODUCT WITH RESPECT TO THE
BUYER’S APPLICATION INCLUDING (A) ELECTRICAL OR ELECTRONIC
COMPONENTS, (B) CIRCUITS, (C) SYSTEM ASSEMBLIES, (D) END PRODUCT, (E)
SYSTEM, (F) MATERIALS OR SUBSTANCES OR (G) OPERATING ENVIRONMENT.
Buyer acknowledges that it alone has determined that the Products will meet their
requirements of the intended use in all cases. Buyer must know and observe all
prohibitions of use applicable to the Product/s.
2. Use with Attention: The followings are some examples of applications for which
particular attention must be given. This is not intended to be an exhaustive list of all
possible use of any Product, nor to imply that any use listed may be suitable for any
Product:
(a) Outdoor use, use involving potential chemical contamination or electrical
interference.
(b) Use in consumer Products or any use in significant quantities.
6
MEMS Airflow Sensor D6F-10A,
(c) Energy control systems, combustion systems, railroad systems, aviation systems,
medical equipment, amusement machines, vehicles, safety equipment, and
installations subject to separate industry or government regulations.
(d) Systems, machines, and equipment that could present a risk to life or property.
3. Prohibited Use: NEVER USE THE PRODUCT FOR AN APPLICATION INVOLVING
SERIOUS RISK TO LIFE OR PROPERTY WITHOUT ENSURING THAT THE SYSTEM
AS A WHOLE HAS BEEN DESIGNED TO ADDRESS THE RISKS, AND THAT THE
PRODUCT IS PROPERLY RATED AND INSTALLED FOR THE INTENDED USE
WITHIN THE OVERALL EQUIPMENT OR SYSTEM.
4. Motorized Vehicle Application: USE OF ANY PRODUCT/S FOR A MOTORIZED
VEHICLE APPLICATION MUST BE EXPRESSLY STATED IN THE SPECIFICATION BY
SELLER.
5. Programmable Products: Seller shall not be responsible for the Buyer's programming of
a programmable Product.
IV. WARRANTY AND LIMITATION
1. Warranty: Seller's exclusive warranty is that the Products will be free from defects in
materials and workmanship for a period of twelve months from the date of sale by Seller
(or such other period expressed in writing by Seller). SELLER MAKES NO WARRANTY
OR REPRESENTATION, EXPRESS OR IMPLIED, ABOUT ALL OTHER WARRANTIES,
NON-INFRINGEMENT, MERCHANTABILITY OR FITNESS FOR A PARTICULAR
PURPOSE OF THE PRODUCTS.
2. Buyer Remedy: Seller's sole obligation hereunder shall be to replace (in the form
originally shipped with Buyer responsible for labor charges for removal or replacement
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amount equal to the purchase price of the Product; provided that there shall be no
liability for Seller or its affiliates unless Seller's analysis confirms that the Products were
handled, stored, installed and maintained and not subject to contamination, abuse,
misuse or inappropriate modification. Return of any Products by Buyer must be
approved in writing by Seller before shipment.
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SPECIAL, INDIRECT, INCIDENTAL OR CONSEQUENTIAL DAMAGES, LOSS OF
PROFITS OR PRODUCTION OR COMMERCIAL LOSS IN ANY WAY CONNECTED
WITH THE PRODUCTS, WHETHER SUCH CLAIM IS BASED IN CONTRACT,
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THE PRODUCT ON WHICH LIABILITY IS ASSERTED.
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omissions under these Terms or in any way with respect to the Products.
V. INFORMATION; ETC.
1. Intellectual Property: The intellectual property embodied in the Products is the exclusive
property of Seller and its affiliates and Buyer shall not attempt to duplicate it in any way
without the written permission of Seller. Buyer (at its own expense) shall indemnify and
hold harmless Seller and defend or settle any action brought against Seller to the extent
that it is based on a claim that any Product made to Buyer specifications infringed
intellectual property rights of another party.
2. Property; Confidentiality: Notwithstanding any charges to Buyer for engineering or
tooling, all engineering and tooling shall remain the exclusive property of Seller. All
information and materials supplied by Seller to Buyer relating to the Products are
confidential and proprietary, and Buyer shall limit distribution thereof to its trusted
employees and strictly prevent disclosure to any third party.
3. Performance Data: Performance data is provided as a guide in determining suitability
and does not constitute a warranty. It may represent the result of Seller's test conditions,
and the users must correlate it to actual application requirements.
4. Change In Specifications: Product specifications and description may be changed at any
time based on improvements or other reasons. It is Seller’s practice to change part
numbers when published ratings or features are changed, or when significant
engineering changes are made. However, some specifications of the Product may be
changed without any notice.
5. Errors And Omissions: The information on Seller’s website or in other documentation
has been carefully checked and is believed to be accurate; however, no responsibility is
assumed for clerical, typographical or proofreading errors or omissions.
6. Export Controls: Buyer shall comply with all applicable laws, regulations and licenses
regarding (a) export of the Products or information provided by Seller; (b) sale of
Products to forbidden or other proscribed persons or organizations; (c)disclosure to
non-citizens of regulated technology or information.
VI. MISCELLANEOUS
1. Waiver: No failure or delay by Seller in exercising any right and no course of dealing
between Buyer and Seller shall operate as a waiver of rights by Seller.
2. Assignment: Buyer may not assign its rights hereunder without Seller's written consent.
3. Law: These Terms are governed by Illinois law (without regard to conflict of laws). Federal
and state courts in Illinois have exclusive jurisdiction for any dispute hereunder.
4. Amendment: These Terms constitute the entire agreement between Buyer and Seller
relating to the Products, and no provision may be changed or waived unless in writing
signed by the parties.
5. Severability: If any provision hereof is rendered ineffective or invalid, such provision shall
not invalidate any other provision.
-20A, -50A
Certain Precautions on Specifications and Use
1. Suitability for Use. Seller shall not be responsible for conformity with any standards, codes or regulations which apply to the combination of the Product in
Buyer's application or use of the Product. At Buyer's request, Seller will provide applicable third party certification documents identifying ratings and limitations of use which apply to the Product. This information by itself is not
sufficient for a complete determination of the suitability of the Product in combination with the end product, machine, system, or other application or use.
Buyer shall be solely responsible for determining appropriateness of the particular Product with respect to Buyer's application, product or system. Buyer
shall take application responsibility in all cases but the following is a nonexhaustive list of applications for which particular attention must be given:
(i) Outdoor use, uses involving potential chemical contamination or electrical
interference, or conditions or uses not described in this document.
(ii) Energy control systems, combustion systems, railroad systems, aviation
systems, medical equipment, amusement machines, vehicles, safety
equipment, and installations subject to separate industry or government
regulations.
(iii) Use in consumer products or any use in significant quantities.
(iv) Systems, machines and equipment that could present a risk to life or
property. Please know and observe all prohibitions of use applicable to this
product.
NEVER USE THE PRODUCT FOR AN APPLICATION INVOLVING SERIOUS
RISK TO LIFE OR PROPERTY WITHOUT ENSURING THAT THE SYSTEM
AS A WHOLE HAS BEEN DESIGNED TO ADDRESS THE RISKS, AND THAT
THE OMRON PRODUCT IS PROPERLY RATED AND INSTALLED FOR THE
INTENDED USE WITHIN THE OVERALL EQUIPMENT OR SYSTEM.
2. Programmable Products. Seller shall not be responsible for the user's
programming of a programmable product, or any consequence thereof.
3. Performance Data. Performance data given in this publication is provided as
a guide for the user in determining suitability and does not constitute a warranty. It may represent the result of Seller's test conditions, and the users must
correlate it to actual application requirements. Actual performance is subject to
Seller's Warranty and Limitations of Liability.
4. Change in Specifications. Product specifications and accessories may be
changed at any time based on improvements and other reasons. It is our practice to change part numbers when published ratings or features are changed,
or when significant construction changes are made. However, some specifications of the Product may be changed without any notice. When in doubt, special part numbers may be assigned to fix or establish key specifications for
your application. Please consult with your Seller representative at any time to
confirm actual specifications of purchased Product.
5. Errors and Omissions. The information in this publication has been carefully
checked and is believed to be accurate; however, no responsibility is assumed
for clerical, typographical or proofreading errors, or omissions.
6. RoHS Compliance. Where indicated, our products currently comply, to the
best of our knowledge as of the date of this publication, with the requirements
of the European Union's Directive on the Restriction of certain Hazardous
Substances ("RoHS"), although the requirements of RoHS do not take effect
until July 2006. These requirements may be subject to change. Please consult
our website for current information.
MEMS Airflow Sensor
D6F-10A, -20A, -50A
7
Complete “Terms and Conditions of Sale” for product purchase and use are on Omron’s website
at http://www.components.omron.com – under the “About Us” tab, in the Legal Matters section.
ALL DIMENSIONS SHOWN ARE IN MILLIMETERS.
To convert millimeters into inches, multiply by 0.03937. To convert grams into ounces, multiply by 0.03527.
OMRON ON-LINE
OMRON ELECTRONIC
COMPONENTS LLC
Global - http://www.omron.com
USA - http://www.components.omron.com
55 E. Commerce Drive, Suite B
Schaumburg, IL 60173
847-882-2288
Cat. No. J01C-E-01
8
01/07
Specifications subject to change without notice
MEMS Airflow Sensor D6F-10A,
-20A, -50A
Printed in USA