Sensortechnics AWM43300V Mass flow sensor for gas Datasheet

AWM43000 Series
Mass flow sensor for gases
FEATURES
· Ranges 0...1000 sccm1 and 0...6 slpm2
· Actual mass flow sensing
· 1...5 V output
· Manifold mount/o-ring sealed
SERVICE
To be used with dry gases only
The AWM series is NOT designed for liquid
flow and will be damaged by liquid flow through
the sensor
SPECIFICATIONS
ELECTRICAL CONNECTION
Maximum ratings
Supply voltage3
8 to 15 V
typ. 10 ±0.01 V
Power consumption
AWM43300V
AWM43600V
60 mW
75 mW
Output load
NPN (Sinking)
PNP (Sourcing)
10 mA
20 mA
P1
P2
1 2 3
Temperature limits
Operating
Storage
-25 to 85°C
-40 to 90°C
Mechanical shock
100 g (5 drops, 6 axes)
Pin 1: Vout
Pin 2: +V s
Pin 3: GND
Note:
1
sccm denotes standard cubic centimeters per minute, 1000 sccm = 1 slpm
2
slpm denotes standard liters per minute, which is a flow measurement referenced to standard conditions of 0°C, 1 bar, 50% RH.
3
Output voltage is ratiometric to supply voltage
November 2004 / 625
1/4
www.sensortechnics.com
AWM43000 Series
Mass flow sensor for gases
FLOW SENSOR CHARACTERISTICS4
VS = 10 ±0.01 V, TA = 25°C
Part no.
Flow range
(full scale)
Max. flow
ch an g e5
Output voltage
@ trim point
AWM43300V
1000 sccm1
5.0 l/sec
5 ±0.15 V @ 1000 sccm1
AWM43600V
6 SLPM2
5.0 l/sec
5 ±0.15 V @ 6 SLPM2
PERFORMANCE CHARACTERISTICS
VS = 10 ±0.01 V, TA = 25°C
Characteristics
Zero offset
Min.
Typ.
Max.
Unit
0.95
1.0
1.05
V
Repeatability and hysteresis
AWM43300V
±0.5
(combined)
AWM43600V
±1.0
Ratiometricity error3
Temperature effects6
% reading
±0.3
Offset
-25 to 85 °C
Span
-25 to 25 °C
±0.025
V
AWM43300V
-5.0
AWM43600V
-6.0
AWM43300V
6.0
AWM43600V
6.0
% reading
25 to 85 °C
Response time
Common mode pressure
1.0
3.0
AWM43300V
150
AWM43600V
25
ms
p si
Notes:
1
sccm denotes standard cubic centimeters per minute, 1000 sccm = 1 slpm
2
SLPM denotes standard liters per minute, which is a flow measurement referenced to standard conditions of 0°C, 1 bar, 50% RH.
3
Output voltage is ratiometric to supply voltage
4
A 5 micron filter is recommended for all devices.
5
Maximum allowable rate of flow change to prevent damage.
6
Shift is relative to 25 °C.
2/4
November 2004 / 625
www.sensortechnics.com
AWM43000 Series
Mass flow sensor for gases
OUTPUT FLOW VS
INTERCHANGEABILITY
OUTPUT CURVES
VS = 10 ±0.01 V, TA = 25°C
GAS CORRECTION FACTORS7
Gas type
Helium (He)
Hydrogen (H2)
Argon (Ar)
Nitrogen (N2)
Oxygen (O2)
Ai r
Nitric oxide (NO)
Carbon monoxide (CO)
Methane (CH4)
Ammonia (NH3)
Nitrous oxide (N2O)
Nitrogen dioxide (NO2)
Carbon dioxide (CO2)
Correction factor (approx.)
0.58
0.78,9
0.95
1.0
1.0
1.0
1.0
1.0
1.1
1.1
1.35
1.35
1.35
Notes:
7
Gas correction factors are referenced to nitrogen (N2) as calibration gas type. Approximate gas correction factors are provided
as guidelines only. Individual gas types may perform differently at temperature extremes and varying flow rates.
8
When sensing Hydrogen (H2) or Helium (He) it may be necessary to power the mass flow sensor using increased supply voltage:
Hydrogen typ. 12 V, Helium typ. 15 V
9
Hydrogen (H2) flow measurement requires the use of a special sensor. These devices provide normal operation when sensing
hydrogen flow and are designated with an "H" at the end of the order number.
November 2004 / 625
3/4
www.sensortechnics.com
AWM43000 Series
Mass flow sensor for gases
30.5
(1.20)
OUTLINE DRAWING
27.7
(1.09)
14.0
(0.55)
32.2
(1.19)
3 2 1
7.62
(0.30)
2.5
(0.10)
0.64
(0.025)
34.0
(1.34)
17.3
(0.68)
3.0
(0.12)
4.8
(0.19)
10.9 8.4
(0.43) (0.33)
Ø 6.2
(Ø 0.24)
Ø 3.0
(Ø 0.12)
Ø 3.51
(Ø 0.138)
2.54
(0.10)
7.9
(0.31)
12.7
(0.50)
mass: approx. 11 g
P2
P1
Ø 2.0
(Ø 0.08)
1 2 3
Pin 1: Vout
Pin 2: +V s
Pin 3: GND
dimensions in mm (inches)
ORDERING INFORMATION
Flow range
Dry gas
Hydrogen gas9
1 0 0 0 sccm
AWM43300V
AWM43300VH
6 S LP M
AWM43600V
---
Note:
9
Hydrogen (H2) flow measurement requires the use of a special sensor. These devices provide normal operation when sensing
hydrogen flow and are designated with an "H" at the end of the order number.
Sensortechnics reserves the right to make changes to any products herein. Sensortechnics does not assume any liability arising out of the
application or use of any product or circuit described herein, neither does it convey any license under its patent rights nor the rights of others.
4/4
November 2004 / 625
www.sensortechnics.com
Similar pages