MLX90807/90808 Integrated Relative and Absolute Pressure Sensors Features and Benefits Application Examples Compact monolithic (single die) solution Absolute and Relative pressure sensors for different ranges Fully programmable through the connector with OTP memory Fully automotive compliant (overvoltage, reverse voltage, broken tracks and broken membrane diagnostics) Fully automotive qualified beyond AEC-Q100 requirements Rail-to-Rail ratiometric analog output proportional to the applied pressure Automotive applications: • • • • • • Engine management: MAP/TMAP, Barometers Fuel management: Fuel vapour, Fuel delivery, CNG/LPG Braking systems: brake boosters Oil pressure: engine, transmission Filter control HVAC systems Home appliance applications: • • Washing machines, Dish washers, Boilers Home HVAC systems Medical applications • • Respirators Blood pressure monitoring Ordering Code Product Code MLX90807 MLX90807 MLX90807 MLX90807 MLX90807 MLX90808 MLX90808 MLX90808 MLX90808 Temperature Code L L L L L L L L L Legend: Product Code: Temperature Code: Package Code: Option Code: Package Code UF UF UF UF UF UF UF UF UF Option Code AAA-000 CAA-001 CBA-002 CCA-003 CDA-004 CAA-001 CBA-002 CCA-003 CDA-004 Packing Form Code WB WB WB WB WB WB WB WB WB MLX90808=>absolute pressure sensor, MLX90807=>relative pressure sensor L for Temperature Range -40°C to 150°C UF for Die on Foil MLX90807LUF-AAA-000 = 0.06 – 0.14 Bar Full Span MLX90807LUF-CAA-001 = 0.4 – 2 Bar Full Span MLX90807LUF-CBA-002 = 2 – 8 Bar Full Span MLX90807LUF-CCA-003 = 8 – 15 Bar Full Span MLX90807LUF-CDA-004 = 15 – 45 Bar Full Span MLX90808LUF-CAA-001 = 0.6 – 3 Bar Full Span MLX90808LUF-CBA-002 = 3 – 8 Bar Full Span MLX90808LUF-CCA-003 = 8 – 15 Bar Full Span MLX90808LUF-CDA-004 = 15 – 45 Bar Full Span Packing Form: WB for Waferbox Ordering example: MLX90320LFR-BBA-000-RE Rev 003 3901090808 Page 1 of 7 Data Sheet Feb/12 MLX90807/90808 Integrated Relative and Absolute Pressure Sensors General Description 1 Functional Diagram The MLX90807 and MLX90808 are fully integrated relative and absolute pressure sensors respectively. They are realized with state of the art compatible CMOS and MEMS technologies. Piezoresistors in a wheatstone bridge configuration are implanted on the edges of a silicon membrane and transform the stress induced by the pressure on the membrane into an electrical signal. An analog chain interacting with a digital core performs the conditioning of the piezoresistors electrical signal. By writing calibration settings in the chip memory an uniform transfer function is obtained over pressure and temperature Rev 003 3901090808 Page 2 of 7 Data Sheet Feb/12 MLX90807/90808 Integrated Relative and Absolute Pressure Sensors Sensor 2 Absolute Maximum Ratings atings Parameter Symb ol Supply Voltage (overvoltage) VDD Supply Voltage (operating) VDD Supply Current, IDD with VDD = 16 V IDD Output Voltage, Vout Vout Supply current with output shorted to 0V .. 16V IDD Supply Current limit, reverse polarity IDD Programming Temperature Range (ZAP cells) cells TP Operating Temperature Range TA Storage Temperature Range TS Burst Pressure (versions AA-0 CA-1, CB-2, CC-3) Front side exposed Min Value Max Value Units -14 4.5 16 5.5 25 16 100 160 100 150 150 5x the maximum full scale of that version V V mA V mA mA °C °C °C -0.5 -20 -40 - 50 Burst Pressure (versions CD-4) Front side exposed ESD Sensitivity (AEC Q100 002) Table 1: Absolute maximum ratings 3x the maximum full scale of that version -2 2 kV Exceeding the absolute maximum ratings may cause permanent damage. Exposure to absolute absolute-maximumrated conditions for extended periods may affect device reliability. 3 Die Information Die front side description. Rev 003 3901090808 Page 3 of 7 Data Sheet Feb/12 MLX90807/90808 Integrated Relative and Absolute Pressure Sensor Sensors Pad Name Vdd3 Pad Function / Description Supply pad SE1, SE2, MOW Test pads OUT Analog output pad Vss Ground pad, 2 pads are available but only one has to be connected Table 2:: Pad definitions and descriptions Die back side description (only valid for the 90807, there is no opening at the back side of o the 90808). The internal square represents available for the die attach. Dimensions a b in um MLX90807-0 3830 3830 MLX90807-1 3830 3830 -2 -3 -4 MLX90808-1 3830 3830 MLX90808 -2 3830 3830 -3 -4 Rev 003 3901090808 the back side opening of the 90807. The The dimensions c,d,e, f show the space c d e f g h thickness 900 1150 900 1150 900 1150 900 1150 2000 1500 2000 1500 550 550 NA NA NA NA NA NA NA NA NA NA NA NA 570 580 Page 4 of 7 Data Sheet Feb/12 MLX90807/90808 Integrated Relative and Absolute Pressure Sensors For more information on how the product is delivered, how to perform the assembly of the product and how the product has been qualified to meet the most stringent automotive quality requirements consult your local sales representative and ask for access to the following documents: Pressure Sensors Assembly guidelines Pressure Sensors Shipping information Qualifying MEMS based Pressure Sensors 4.General Electrical Specifications o o DC Operating Parameters TA = -40 C to 150 C, VDD = 5V (unless otherwise specified) Parameter Supply Voltage Supply Current Output Load Resistance Output Capacitive Load Low Clamping level (versions CA-1, CB-2, CC3, CD-4) Symbol Min Typ Vdd 4.5 5 Idd 4 7 Rload 4.47 CLoad 2 47 5 High Clamping level(versions CA-1, CB-2, CC-3, CD-4) Low Clamping level (version AA-0) High Clamping level (version AA-0) Linearity error Vout -0.3 Ratiometricity error -0.3 Output hysteresis vs temperature -0.3 93 95 % Vdd 6.5 8.5 % Vdd 91 93.5 % Vdd 0.3 % FSO % FSO Noise (versions CA-1, CB2, CC-3, CD-4) Power-up time Response time 10% / 90% Trp 10 – 90 Table 3: Electrical specifications Parameter Min Output when sensor is broken Output when Vdd is broken Output when Vss is broken 96 Table 4: Diagnostic features Max Units 5.5 V 10 mA 100 kOhm 100 nF 7 % Vdd Typ 0.1 0.3 0.1 0.3 % FSO 2 mVrms 5 1.5 ms ms Max Units 2 % Vdd 4 % Vdd % Vdd For more information on the electrical specifications please contact your local sales representative and ask for the document Pressure Sensors Error Budget. Rev 003 3901090808 Page 5 of 7 Data Sheet Feb/12 MLX90807/90808 Integrated Relative and Absolute Pressure Sensors 5. General Description This chip integrates a pressure sensor and the associated signal conditioning on the same die. The supply voltage VDD directly supplies the pressure sensor. The pressure sensing element consists of a square diaphragm realized in the silicon chip by backside etching. Due to its small thickness this diaphragm reacts to a pressure difference at both of its side by cambering. The internal strain increases, in particular at the border of the diaphragm. Here, the piezoresistive elements have been implanted into the silicon diaphragm, which act as transducer. Four resistors are placed in a Wheatstone-bridge configuration at the four borders of the square diaphragm. A chopped instrumentation stage amplifies the differential output signal of the sensor. The gain of this amplifier can be adjusted with 3 bits. After the input stage, there is a 3 bit programmable coarse offset which is followed by a differential to single-ended conversion. The reference voltage for this stage is generated by a 10 bit DAC and varies linearly with temperature in order to perform the offset and offset drift compensation. A digital hardware multiplier calculates this compensation. The temperature signal, serving as input for this multiplier, is generated from the ADC of the output signal of the internal temperature sensor. The chopped signal is demodulated with a switched capacitor stage. The buffered output serves as reference for a 10 bit DAC to perform the span and span drift compensation. The DAC is controlled by the digital part. Finally the signal is given out by a class AB rail-to-rail amplifier capable of sourcing and sinking large currents. A calibration of the transfer function using 3 temperature points and 2-point pressure points per temperature can be performed to achieve an error less than ±1% over the complete pressure and temperature range (the output error is referred to the output span). PTC (Programming Through Connector) protocol is used to perform calibration. The programming of the sensor chip is carried out via the analog connections (i.e. supply, ground, signal out). No additional pins are necessary for calibration. Melexis delivers all required hardware and software to perform the calibration of the MLX90807 and MLX90808. For more information on how to perform the calibration of the MLX90807/90808 consult the following documents: AN PTC 90807 Multi Sensor Calibration Board AN Advanced Calibration 90807 90808 Software User Manual MLX90807 PTC04 6. Application Information Only 3 pins are used in the application (Vdd, Vss, Out). Calibration and Programming is made through the application pins. Only a capacitor on the supply and output lines are necessary. Rev 003 3901090808 Page 6 of 7 Data Sheet Feb/12 MLX90807/90808 Integrated Relative and Absolute Pressure Sensors 7. Disclaimer Devices sold by Melexis are covered by the warranty and patent indemnification provisions appearing in its Term of Sale. Melexis makes no warranty, express, statutory, implied, or by description regarding the information set forth herein or regarding the freedom of the described devices from patent infringement. Melexis reserves the right to change specifications and prices at any time and without notice. Therefore, prior to designing this product into a system, it is necessary to check with Melexis for current information. This product is intended for use in normal commercial applications. Applications requiring extended temperature range, unusual environmental requirements, or high reliability applications, such as military, medical lifesupport or life-sustaining equipment are specifically not recommended without additional processing by Melexis for each application. The information furnished by Melexis is believed to be correct and accurate. However, Melexis shall not be liable to recipient or any third party for any damages, including but not limited to personal injury, property damage, loss of profits, loss of use, interrupt of business or indirect, special incidental or consequential damages, of any kind, in connection with or arising out of the furnishing, performance or use of the technical data herein. No obligation or liability to recipient or any third party shall arise or flow out of Melexis’ rendering of technical or other services. © 2012 Melexis NV. All rights reserved. For the latest version of this document, go to our website at www.melexis.com Or for additional information contact Melexis Direct: Europe, Africa, Asia: Phone: +32 1367 0495 E-mail: [email protected] America: Phone: +1 248 306 5400 E-mail: [email protected] ISO/TS 16949 and ISO14001 Certified Rev 003 3901090808 Page 7 of 7 Data Sheet Feb/12