Freescale MPX5100 Integrated silicon pressure sensor on-chip signal conditioned, temperature compensated and calibrated Datasheet

Freescale Semiconductor
Technical Data
MPX5100
Rev 10, 05/2005
Integrated Silicon Pressure Sensor
On-Chip Signal Conditioned,
Temperature Compensated, and
Calibrated
The MPX5100 series piezoresistive transducer is a state-of-the-art monolithic
silicon pressure sensor designed for a wide range of applications, but particularly
those employing a microcontroller or microprocessor with A/D inputs. This
patented, single element transducer combines advanced micromachining
techniques, thin-film metallization, and bipolar processing to provide an accurate,
high level analog output signal that is proportional to the applied pressure.
MPX5100/MPXV5100
SERIES
INTEGRATED PRESSURE SENSOR
0 to 100 kpa (0 to 14.5 psi)
15 to 115 kPa
(2.2 to 16.7 psi)
0.2 to 4.7 V Output
SMALL OUTLINE PACKAGES
Features
•
•
•
•
•
•
2.5% Maximum Error over 0° to 85°C
Ideally suited for Microprocessor or Microcontroller-Based Systems
Patented Silicon Shear Stress Strain Gauge
Available in Absolute, Differential and Gauge Configurations
Durable Epoxy Unibody Element
Easy-to-Use Chip Carrier Option
MPXV5100GC6U
CASE 482A-01
Typical Applications
•
•
•
•
MPXV5100DP
CASE 1351-01
Patient Monitoring
Process Control
Pump/Motor Control
Pressure witching
S
PIN NUMBER(1)
ORDERING INFORMATION
Device
Type
Options
Case
No.
MPX Series Order
Device Marking
Number
UNIBODY PACKAGE (MPX5100 SERIES)
Basic
Absolute
Elements Differential
Ported
Differential Dual Ports
Elements Absolute, Single Port
Gauge, Single Port
MPXV5100GC7U
CASE 482C-03
867
MPX5100A
MPX5100A
867
MPX5100D
MPX5100D
MPX5100DP
MPX5100DP
867C
867B
MPX5100AP
1
2
N/C
VS
5
6
N/C
N/C
3
4
GND
VOUT
7
8
N/C
N/C
1. Pins 1, 5, 6, 7, and 8 are internal device
connections. Do not connect to external
circuitry or ground. Pin1 is noted by the
notch in the lead.
PIN NUMBER(1)
MPX5100AP
1
VOUT
4
N/C
2
3
GND
VS
5
6
N/C
N/C
867B
MPX5100GP
MPX5100GP
Gauge, Axial PC Mount
867F
MPX5100GSX
MPX5100D
Gauge, Axial Port, SMT
482A
MPXV5100GC6U
MPXV5100G
Gauge, Axial Port, DIP
482C
MPX5V100GC7U
MPXV5100G
Gauge, Dual Port, SMT
1351
MPXV5100DP
MPXV5100
1. Pins 4, 5, and 6 are internal device
connections. Do not connect to external
circuitry or ground. Pin 1 is noted by the
notch in the lead.
UNIBODY PACKAGES
MPX5100A/D
CASE 867-08
MPX5100AP/GP
CASE 867B-04
© Freescale Semiconductor, Inc., 2005. All rights reserved.
MPX5100DP
CASE 867C-05
MPX5100GSX
CASE 867F-03
VS
Thin Film
Temperature
Compensation
and Gain
Stage # 1
Sensing
Element
GND
Gain Stage # 2
and Ground
Reference
Shift Circuitry
VOUT
Pins 1 and 5 through 8 are NO CONNECTS for small outline packages
Pins 4, 5, and 6 are NO CONNECTS for unibody packages
Figure 1. Fully Integrated Pressure Sensor Schematic
TABLE 1. Maximum Ratings
(1)
Symbol
Value
Unit
Maximum Pressure (P1 > P2)
Rating
PMAX
400
kPa
Storage Temperature
TSTG
-40° to +125°C
°C
TA
-40° to +125°C
°C
Operating Temperature
1. Exposure beyond the specified limits may cause permanent damage or degradation to the device.
TABLE 2. Operating Characteristics (VS = 5.0 VDC, TA = 25°C unless otherwise noted, P1 > P2. Decoupling circuit shown in
Figure 4 required to meet electrical specifications.)
Characteristic
Symbol
POP
(1)
Pressure Range
Gauge, Differential: MPX5100D/MPX5100G/MPXV5100G
Absolute: MPX5100A
Min
Typ
Max
0
15
—
—
100
115
Unit
kPa
Supply Voltage(2)
VS
4.75
5.0
5.25
VDC
Supply Current
IO
—
7.0
10
mAdc
(0 to 85°C)
VOFF
0.088
0.20
0.313
VDC
Full Scale Output(4)
@ VS = 5.0 V
Differential and Absolute (0 to 85°C)
VFSO
4.587
4.700
4.813
VDC
Full Scale Span(5)
@ VS = 5.0 V
Differential and Absolute (0 to 85°C)
VFSS
—
4.500
—
VDC
—
—
—
±2.5
%VFSS
V/P
—
45
—
mV/kPa
tR
—
1.0
—
ms
IO+
—
0.1
—
mAdc
—
—
20
—
ms
—
—
±0.5
—
%VFSS
Minimum Pressure Offset(3)
@ VS = 5.0 V
Accuracy(6)
Sensitivity
Response Time
(7)
Output Source Current at Full Scale Output
Warm-Up Time
(8)
(9)
Offset Stability
1.
2.
3.
4.
5.
0.1 kPa (kiloPascal) equals 0.145 psi.
Device is ratiometric within this specified excitation range.
Offset (VOFF) is defined as the output voltage at the minimum rated pressure.
Full Scale Output (VFSO) is defined as the output voltage at the maximum or full rated pressure.
Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
minimum rated pressure.
6. Accuracy (error budget) consists of the following:
• Linearity:
Output deviation from a straight line relationship with pressure over the specified pressure range.
• Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to
and from the minimum or maximum operating temperature points, with zero differential pressure applied.
• Pressure Hysteresis:
Output deviation at any pressure within the specified range, when this pressure is cycled to and from minimum
or maximum rated pressure at 25°C.
• TcSpan:
Output deviation over the temperature range of 0° to 85°C, relative to 25°C.
• TcOffset:
Output deviation with minimum pressure applied over the temperature range of 0° to 85°C, relative to 25°C.
• Variation from Nominal: The variation from nominal values, for Offset or Full Scale Span, as a percent of VFSS at 25°C.
MPX5100
2
Sensors
Freescale Semiconductor
7. Response Time is defined as the time for the incremental changed in the output to go from 10% to 90% of its final value when sugected to
a specified step change in pressure.
8. Warm-Up Time is defined as the time required for the product to meet the specified output voltage after the Pressure has been stabilized.
9. Offset Stability is the product’s output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.
Fluorosilicone
Gel Die Coat
Die
Output Voltabe (V)
3
Span Range (Typ)
Vout = VS*(0.009*P+0.04)
± (Pressure Error * Temperature Factor * 0.009 * VS
VS = 5.0 V ± 0.25 Vdc
PE = 2.5
TM = 1
TEMP = 0 to 85°C
4
MAX
2
TYP
1
110
100
90
80
70
60
50
40
30
20
10
0
0
MIN
Pressure (kPa)
(Typ)
Offset
Figure 2. Output Vs. Pressure Differential
Stainless Steel
Metal Cover
Fluorosilicone Gel
Die Coat
Epoxy Plastic
Case
Wire Bond
Lead Frame
5
Output Range (Typ)
ON-CHIP TEMPERATURE COMPENSATION, CALIBRATION AND SIGNAL CONDITIONING
Figure 2 shows the sensor output signal relative to
pressure input. Typical, minimum, and maximum output
curves are shown for operation over a temperature range of
0× to 85×C using the decoupling circuit shown in Figure 4.
The output will saturate outside of the specified pressure
range.
Figure 3 illustrates both the Differential/Gauge and the
Absolute Sensing Chip in the basic chip carrier (Case 867). A
fluorosilicone gel isolates the die surface and wire bonds from
the environment, while allowing the pressure signal to be
transmitted to the sensor diaphragm.
The MPX5100 series pressure sensor operating
characteristics, and internal reliability and qualification tests
are based on use of dry air as the pressure media. Media,
other than dry air, may have adverse effects on sensor
performance and long-term reliability. Contact the factory for
information regarding media compatibility in your application.
Die
Epoxy Plastic
Case
Wire Bond
Die Bond
Lead Frame
Differential/Gauge Element
Stainless Steel
Metal Cover
Die Bond
Absolute Element
Figure 3. Cross Sectional Diagrams (Not to Scale)
Figure 4 shows the recommended decoupling circuit for
interfacing the output of the integrated sensor to the A/D input
of a microprocessor or microcontroller. Proper decoupling of
the power supply is recommended.
+5.0 V
VOUT
OUTPUT
Vs
IPS
1.0 µF
0.01 µF
GND
470 pF
Figure 4. Recommended Power Supply Decoupling and Output Filtering
(For additional output filtering, please refer to Application Note AN1646.)
MPX5100
Sensors
Freescale Semiconductor
3
Transfer Function (MPX5100D, MPX5100G, MPXV5100G
Nominal Transfer Value: VOUT = VS (P x 0.009 + 0.04)
± (Pressure Error x Temp. Mult. x 0.009 x VS)
VS = 5.0 V ±5% P kPa
Temperature Error Multiplier
MPX5100D/MPX5100G/MPXV5100G Series
Break Points
Temp
4.0
Multiplier
- 40
0 to 85°C
+125°
3.0
3
1
3
2.0
1.0
0.0
-40
-20
0
20
40
60
Temperature in °C
80
100
120
140
Note: The Temperature Multiplier is a linear response from 0° to -40°C and from 85° to 125°C.
Pressure Error Band
MPX5100D/MPX5100G/MPXV5100G Series
Error Limits for Pressure
3.0
Error (kPa)
2.0
1.0
0.0
0
20
40
60
80
100
120
Pressure in kPa
-1.0
-2.0
-3.0
Pressure
Error (max)
0 to 100 kPa
± 2.5 kPa
MPX5100
4
Sensors
Freescale Semiconductor
Transfer Function (MPX5100A)
Nominal Transfer Value: VOUT = VS (P x 0.009 + 0.095)
± (Pressure Error x Temp. Mult. x 0.009 x VS)
VS = 5.0 V ±5% P kPa
Temperature Error Multiplier
MPX5100A Series
Break Points
Temp
Multiplier
4.0
- 40
0 to 85°C
+125°
3.0
3
1
3
2.0
1.0
0.0
-40
-20
0
20
40
60
80
100
120
130
140
Temperature in °C
Note: The Temperature Multiplier is a linear response from 0° to -40°C and from 85° to 125°C.
Pressure Error Band
MPX5100A Series
Error Limits for Pressure
3.0
Error (kPa)
2.0
1.0
0.0
0
20
40
60
80
100
130
Pressure in kPa
-1.0
-2.0
-3.0
Pressure
Error (max)
15 to 115 kPa
± 2.5 kPa
MPX5100
Sensors
Freescale Semiconductor
5
PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE
Freescale designates the two sides of the pressure sensor
as the Pressure (P1) side and the Vacuum (P2) side. The
Pressure (P1) side is the side containing fluoro silicone gel
which protects the die from harsh media. The MPX pressure
sensor is designed to operate with positive differential
pressure applied, P1 > P2.
The Pressure (P1) side may be identified by using Table 3
below.
TABLE 3. PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE
Part Number
MPX5100A, MPX5100D
Case Type
867
Pressure (P1) Side Identifier
Stainless Steel Cap
MPX5100DP
867C
Side with Part Marking
MPX5100AP, MPX5100GP
867B
Side with Port Attached
MPX5100GSX
867F
Side with Port Attached
MPXV5100GC6U
482A
Side with Port Attached
MPXV5100GC7U
482C
Side with Port Attached
MPXV5100DP
1351
Side with Part Marking
INFORMATION FOR USING THE SMALL OUTLINE PACKAGE
MINIMUM RECOMMENDED FOOTPRINT FOR SURFACE MOUNTED APPLICATIONS
Surface mount board layout is a critical portion of the total
footprint, the packages will self align when subjected to a
design. The footprint for the surface mount packages must be
solder reflow process. It is always recommended to design
the correct size to ensure proper solder connection interface
boards with a solder mask layer to avoid bridging and
between the board and the package. With the correct
shorting between solder
Figure 5. Small Outline Package Footprint
MPX5100
6
Sensors
Freescale Semiconductor
PACKAGE DIMENSIONS
-A-
D
5
N
8 PL
4
0.25 (0.010)
M
T B
A
S
S
NOTES:
1. DIMENSIONING AND TOLERANCING PER ANSI
Y14.5M, 1982.
2. CONTROLLING DIMENSION: INCH.
3. DIMENSION A AND B DO NOT INCLUDE MOLD
PROTRUSION.
4. MAXIMUM MOLD PROTRUSION 0.15 (0.006).
5. ALL VERTICAL SURFACES 5˚ TYPICAL DRAFT.
-BG
8
1
S
DIM
A
B
C
D
G
H
J
K
M
N
S
V
W
W
V
C
H
J
-T-
MILLIMETERS
MIN
MAX
10.54
10.79
10.54
10.79
12.70
13.21
0.96
1.07
2.54 BSC
0.05
0.25
0.23
0.28
1.55
1.80
0˚
7˚
11.28
11.38
18.01
18.41
6.22
6.48
2.92
3.17
SEATING
PLANE
PIN 1 IDENTIFIER
M
K
INCHES
MIN
MAX
0.415 0.425
0.415 0.425
0.500 0.520
0.038 0.042
0.100 BSC
0.002 0.010
0.009 0.011
0.061 0.071
0˚
7˚
0.444 0.448
0.709 0.725
0.245 0.255
0.115 0.125
CASE 482A-01
ISSUE A
SMALL OUTLINE PACKAGE
NOTES:
1. DIMENSIONING AND TOLERANCING PER
ANSI Y14.5M, 1982.
2. CONTROLLING DIMENSION: INCH.
3. DIMENSION A AND B DO NOT INCLUDE
MOLD PROTRUSION.
4. MAXIMUM MOLD PROTRUSION 0.15 (0.006).
5. ALL VERTICAL SURFACES 5˚ TYPICAL DRAFT.
6. DIMENSION S TO CENTER OF LEAD WHEN
FORMED PARALLEL.
-A4
5
N
-BG
8
0.25 (0.010)
1
M
T B
D 8 PL
S
A
S
DIM
A
B
C
D
G
J
K
M
N
S
V
W
DETAIL X
S
W
V
PIN 1
IDENTIFIER
C
-TK
INCHES
MILLIMETERS
MAX
MAX MIN
MIN
10.79
0.425 10.54
0.415
10.79
0.425 10.54
0.415
13.21
0.520 12.70
0.500
0.864
0.66
0.034
0.026
0.100 BSC
2.54 BSC
0.28
0.23
0.011
0.009
3.05
2.54
0.120
0.100
15˚
0˚
15˚
0˚
11.38
0.448 11.28
0.444
14.22
0.560 13.72
0.540
6.48
6.22
0.255
0.245
3.17
2.92
0.125
0.115
SEATING
PLANE
M
J
DETAIL X
CASE 482C-03
ISSUE B
SMALL OUTLINE PACKAGE
MPX5100
Sensors
Freescale Semiconductor
7
PACKAGE DIMENSIONS
C
NOTES:
1. DIMENSIONING AND TOLERANCING PER
ANSI Y14.5M, 1982.
2. CONTROLLING DIMENSION: INCH.
3. DIMENSION -A- IS INCLUSIVE OF THE MOLD
STOP RING. MOLD STOP RING NOT TO EXCEED
16.00 (0.630).
R
POSITIVE PRESSURE
(P1)
M
B
-AN
PIN 1
SEATING
PLANE
1
2
3
4
5
DIM
A
B
C
D
F
G
J
L
M
N
R
S
L
6
-T-
J
S
G
F
STYLE 1:
PIN 1.
2.
3.
4.
5.
6.
D 6 PL
0.136 (0.005)
STYLE 2:
PIN 1.
2.
3.
4.
5.
6.
VOUT
GROUND
VCC
V1
V2
VEX
M
T A
M
STYLE 3:
PIN 1.
2.
3.
4.
5.
6.
OPEN
GROUND
-VOUT
VSUPPLY
+VOUT
OPEN
INCHES
MILLIMETERS
MAX
MIN
MAX MIN
16.00
0.595
0.630 15.11
13.56
0.514
0.534 13.06
5.59
0.200
0.220
5.08
0.84
0.027
0.033
0.68
1.63
0.048
0.064
1.22
0.100 BSC
2.54 BSC
0.40
0.014
0.016
0.36
18.42
0.695
0.725 17.65
30˚ NOM
30˚ NOM
12.57
0.475
0.495 12.07
11.43
0.430
0.450 10.92
0.090
0.105
2.29
2.66
OPEN
GROUND
+VOUT
+VSUPPLY
-VOUT
OPEN
CASE 867-08
ISSUE N
UNIBODY PACKAGE
T
A
U
L
V
SEATING PLANE
R
NOTES:
1. DIMENSIONS ARE IN MILLIMETERS.
2. DIMENSIONING AND TOLERANCING PER
ASME Y14.5M, 1994.
DIM
A
B
C
D
F
G
J
K
L
N
P
Q
R
S
U
V
Q
N
Q
B
1
P
J
0.25
M
T Q
3 4
5
6
K
PIN 1
P
C
2
S
G
M
F
6X
D
0.173
M
T P
S
Q
S
MILLIMETERS
MAX
MIN
29.85
29.08
18.16
17.4
8.26
7.75
0.84
0.68
1.63
1.22
2.54 BSC
0.41
0.36
18.42
17.65
7.62
7.37
11.18
10.67
4.04
3.89
4.04
3.89
6.35
5.84
6.1
5.59
23.11 BSC
4.93
4.62
STYLE 1:
PIN 1.
2.
3.
4.
5.
6.
VOUT
GROUND
VCC
V1
V2
VEX
CASE 867B-04
ISSUE F
UNIBODY PACKAGE
MPX5100
8
Sensors
Freescale Semiconductor
PACKAGE DIMENSIONS
P
0.25 (0.010)
M
T Q
-A-
M
U
W
X
R
PORT #1
POSITIVE
PRESSURE
(P1)
NOTES:
1. DIMENSIONING AND TOLERANCING PER
ASME Y14.5M, 1994.
2. CONTROLLING DIMENSION: INCH.
L
V
PORT #2 VACUUM (P2)
PORT #1 POSITIVE
PRESSURE (P1)
N
-Q-
PORT #2
VACUUM
(P2)
B
PIN 1
1
2
3
4
5
K
6
C
SEATING
PLANE
-T-
S
SEATING
PLANE
-T-
D 6 PL
0.13 (0.005)
G
J
F
M
A
DIM
A
B
C
D
F
G
J
K
L
N
P
Q
R
S
U
V
W
X
INCHES
MIN
MAX
1.145
1.175
0.685
0.715
0.405
0.435
0.027
0.033
0.048
0.064
0.100 BSC
0.014
0.016
0.695
0.725
0.290
0.300
0.420
0.440
0.153
0.159
0.153
0.159
0.063
0.083
0.220
0.240
0.910 BSC
0.182
0.194
0.310
0.330
0.248
0.278
STYLE 1:
PIN 1.
2.
3.
4.
5.
6.
M
MILLIMETERS
MIN
MAX
29.08
29.85
17.40
18.16
10.29
11.05
0.68
0.84
1.22
1.63
2.54 BSC
0.36
0.41
17.65
18.42
7.37
7.62
10.67
11.18
3.89
4.04
3.89
4.04
1.60
2.11
5.59
6.10
23.11 BSC
4.62
4.93
7.87
8.38
6.30
7.06
VOUT
GROUND
VCC
V1
V2
VEX
CASE 867C-05
ISSUE F
UNIBODY PACKAGE
-T-
C
A
E
-Q-
U
N
V
B
R
PIN 1
PORT #1
POSITIVE
PRESSURE
(P1)
-P0.25 (0.010)
M
T Q
6
M
5
4
3
2
1
S
K
J
0.13 (0.005)
M
T P
S
D 6 PL
Q S
G
F
NOTES:
1. DIMENSIONING AND TOLERANCING PER
ANSI Y14.5M, 1982.
2. CONTROLLING DIMENSION: INCH.
DIM
A
B
C
D
E
F
G
J
K
N
P
Q
R
S
U
V
INCHES
MILLIMETERS
MAX
MIN
MIN MAX
28.45
27.43
1.080 1.120
19.30
18.80
0.740 0.760
16.51
16.00
0.630 0.650
0.84
0.68
0.027 0.033
4.57
4.06
0.160 0.180
1.63
1.22
0.048 0.064
0.100 BSC
2.54 BSC
0.41
0.36
0.014 0.016
6.10
5.59
0.220 0.240
2.03
1.78
0.070 0.080
4.06
3.81
0.150 0.160
4.06
3.81
0.150 0.160
11.68
11.18
0.440 0.460
18.42
17.65
0.695 0.725
21.84
21.34
0.840 0.860
4.93
4.62
0.182 0.194
STYLE 1:
PIN 1.
2.
3.
4.
5.
6.
VOUT
GROUND
VCC
V1
V2
VEX
CASE 867F-03
ISSUE D
UNIBODY PACKAGE
MPX5100
Sensors
Freescale Semiconductor
9
PACKAGE DIMENSIONS
2 PLACES 4 TIPS
0.006 (0.15) C A B
E
A
GAGE
PLANE
e
5
4
e/2
θ
.014 (0.35)
L
D
DETAIL G
8
1
b
0.004 (0.1)
8X
F
M
C A B
E1
B
N
STYLE 1:
PIN 1.
2.
3.
4.
5.
6.
7.
8.
GND
+Vout
Vs
-Vout
N/C
N/C
N/C
N/C
STYLE 2:
PIN 1.
2.
3.
4.
5.
6.
7.
8.
N/C
Vs
GND
Vout
N/C
N/C
N/C
N/C
∅T
M
A
P
A1
8X
0.004 (0.1)
K
DETAIL G
C
SEATING
PLANE
NOTES:
1. CONTROLLING DIMENSION: INCH.
2. INTERPRET DIMENSIONS AND TOLERANCES PER
ASME Y14.5M, 1994.
3. DIMENSIONS "D" AND "E1" DO NOT INCLUDE
MOLD FLASH OR PROTRUSIONS. MOLD FLASH OR
PROTRUSIONS SHALL NOT EXCEED 0.006 (0.152)
PER SIDE.
4. DIMENSION "b" DOES NOT INCLUDE DAMBAR
PROTRUSION. ALLOWABLE DAMBAR
PROTRUSION SHALL BE 0.008 (0.203) MAXIMUM.
DIM
A
A1
b
D
E
E1
e
F
K
L
M
N
P
T
θ
INCHES
MILLIMETERS
MIN
MAX
MIN MAX
0.370
0.390
9.39
9.91
0.002
0.010
0.05
0.25
0.038
0.042
0.96
1.07
0.465
0.485
11.81 12.32
0.680
0.700
17.27 17.78
0.465
0.485
11.81 12.32
0.100 BSC
2.54 BSC
0.240
0.260
6.10
6.60
0.115
0.135
2.92
3.43
0.040
0.060
1.02
1.52
0.270
0.290
6.86
7.37
0.160
0.180
4.06
4.57
0.009
0.011
0.23
0.28
0.110
0.130
2.79
3.30
0˚
7˚
0˚
7˚
CASE 1351-01
ISSUE O
SMALL OUTLINE PACKAGE
MPX5100
10
Sensors
Freescale Semiconductor
NOTES
MPX5100
Sensors
Freescale Semiconductor
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