MS52XX SMD Pressure Sensor SPECIFICATIONS 1, and 12 bar absolute pressure range Uncompensated Piezoresistive silicon micromachined sensor Surface mount 7.6 x 7.6 mm Low-noise, high-sensitivity, high-linearity The MS52XX SMD pressure sensor series is designed for pressure systems with the highest demands on resolution and accuracy. The device consists of a silicon micromachined pressure sensor die mounted on a 7.6 x 7.6 mm ceramic carrier protected by a metal cap. The MS52XX can be delivered in a highly-sensitive version giving a maximal output voltage or in a highly-linear version giving a linear output voltage directly proportional to the applied pressure. Full scale pressure High Sensitivity Version Full Product scale code span 1 bar MS5201-AN 240 mV Linearity ±0.20 % FS 12 bar SENSOR SOLUTIONS /// MS52XX 09/2015 High Linearity Versions Full Product scale code span Linearity MS5201-BN 150 mV ±0.05 % FS MS5212-BM 150 mV ±0.05 % FS Page 1 MS52XX SMD Pressure Sensor FEATURES Low-cost SMD ceramic package High-reliability, low-drift -40 °C to +125 °C operation range Optional: Gel protection against humidity and water APPLICATIONS Absolute pressure sensor systems High resolution altimeters, variometers Barometers Engine controls Tire pressure PIN CONFIGURATION SENSOR SOLUTIONS /// MS52XX 09/2015 Page 2 MS52XX SMD Pressure Sensor PIN DESCRIPTION Pin Name OUTGND VS+ OUT+ Pin No 1 2 3 4 Function Negative output voltage of Wheatstone bridge Ground Supply voltage of Wheatstone bridge Positive output voltage of Wheatstone bridge ABSOLUTE MAXIMUM RATINGS Parameter Supply voltage Storage temperature Overpressure MS5201-AN MS5201-BN MS5212-BM SENSOR SOLUTIONS /// MS52XX Symbol VS+ TS Conditions Ta = 25 °C P Ta = 25 °C Min -40 - 09/2015 Max 20 +125 5 10 30 Unit V °C bar Page 3 MS52XX SMD Pressure Sensor ELECTRICAL CHARACTERISTICS HIGH SENSITIVITY VERSION MS5201-AN Parameter Operating pressure range Full-scale span (FS) Sensitivity Linearity Operating temperature range Zero pressure offset Pressure hysteresis Temperature hysteresis Repeatability Bridge resistance Temperature coefficient of resistance Temperature coefficient of span Temperature coefficient of offset Min 0 190 190 -40 -40 3.0 +2'400 -1'500 -80 Typ 240 240 ±0.15 0 0.3 3.4 2'900 -1'900 - Max 1 290 290 ±0.4 125 40 ±0.20 0.8 ±0.20 3.8 +3'300 -2'300 +80 (Vs+ = 5 V; Ta = 25 °C) Unit Notes bar mV mV/bar % FS 1, 6 °C mV % FS 2, 6 % FS 3, 6 % FS 4, 6 kΩ ppm/°C 5, 6 ppm/°C 5, 6 µV/°C 5, 6 NOTES 1) Deviation at one half full-scale pressure from the least squares best line fit over pressure range. 2) Maximum difference of output voltage after 1 pressure cycle at any pressure within the operating pressure range. 3) Maximum difference in offset after one thermal cycle from -40°C to +125°C. 4) Same as 2) after 10 pressure cycles. 5) Slope of the end-point straight line from 25°C to 60°C. 6) Not 100% tested. SENSOR SOLUTIONS /// MS52XX 09/2015 Page 4 MS52XX SMD Pressure Sensor ELECTRICAL CHARACTERISTICS (CONT.) HIGH LINEARITY VERSIONS MS5201-BN MS5212-BM All Ranges Parameter Operating pressure range Full-scale span (FS) Sensitivity Linearity Operating pressure range Full-scale span (FS) Sensitivity Linearity Operating temperature range Zero pressure offset Pressure hysteresis Temperature hysteresis Repeatability Bridge resistance Temperature coefficient of resistance Temperature coefficient of span Temperature coefficient of offset Min 0 120 120 0 120 10 -40 -40 3.0 +2'400 -1'500 -80 Typ 150 150 ±0.05 150 12.5 ±0.15 0 0.3 3.4 2'900 -1'900 - Max 1 180 180 ±0.20 12 180 15 ±0.20 125 40 ±0.20 0.8 ±0.20 3.8 +3'300 -2'300 +80 (Vs+ = 5 V; Ta = 25 °C) Unit Notes bar mV mV/bar % FS 1, 6 bar mV mV/bar % FS 1, 6 °C mV % FS 2, 6 % FS 3, 6 % FS 4, 6, 7 kΩ ppm/°C 5, 6 ppm/°C 5, 6 µV/°C 5, 6 NOTES 1) Deviation at one half full-scale pressure from the least squares best line fit over pressure range. 2) Maximum difference of output voltage after 1 pressure cycle at any pressure within the operating pressure range. 3) Maximum difference in offset after one thermal cycle from -40°C to +125°C. 4) Same as 2) after 10 pressure cycles. 5) Slope of the end-point straight line from 25°C to 60°C. 6) Not 100% tested. 7) MS5212-BM: Max. 0.3% FS. SENSOR SOLUTIONS /// MS52XX 09/2015 Page 5 MS52XX SMD Pressure Sensor APPLICATION INFORMATION GENERAL The MS52XX is a miniaturized absolute pressure sensor series that has been designed for surface mounting applications. Its main advantages are the high reliability of the semiconductor sensor and a design which makes it suitable for applications requiring small-scale and cost-efficient solutions. The sensor element of the MS52XX consists of a micromachined silicone membrane with borosilicate glass waferbonded under vacuum to the back-side for reference pressure. Implanted resistors make use of the piezo-resistive effect to sense pressure applied to the membrane. The sensor is mounted in a special process allowing best-offset stability making the part suitable for direct PCB assembly. Typical applications for this miniaturized pressure sensor MS52XX are altitude measurements and the measurement of atmospheric reference pressure in medical and industrial equipment as well as in automotive and industrial applications, consumer electronics and pneumatics. Full Scale Pressure 1 bar 12 bar High Sensitivity Version (MS5201-AN) Variometer, altimeter, barometer High Linearity Versions (MS5201-BN and MS5212-BM) High end altimeter, medical instrumentation Pneumatic brake LIGHT SENSITIVITY The MS52XX is sensitive to sunlight, especially to infrared light sources. This is due to the strong photo effect of silicon. As the effect is reversible there will be no damage, but the user has to take care that in the final product the sensor must not be exposed to direct light during operation. This can be achieved for instance by placing mechanical shielding with holes in such way that light cannot go through. CONNECTION TO PCB The package outline of the module allows the use of a flexible PCB to connect it. This can be important for applications in watches and other special devices, and will also reduce mechanical stress on the device. For applications subjected to mechanical shock, it is recommended to enhance the mechanical reliability of the solder junctions by covering the rim or the corners of MS52XX ceramic substrate with glue or Globtop-like material. SOLDERING Please refer to the application note AN808 for all soldering issues. CLEANING The MS52XX has been manufactured under cleanroom conditions. Each device has been inspected for the homogeneity and the cleanness of the silicone gel. It is therefore recommended to assemble the sensor under class 10’000 or better conditions. Should this not be possible, it is recommended to protect the sensor opening during assembly from entering particles and dust. To avoid cleaning of the PCB, solder paste of type “no-clean” shall be used. Cleaning may damage the sensor. SENSOR SOLUTIONS /// MS52XX 09/2015 Page 6 MS52XX SMD Pressure Sensor PACKAGE OUTLINES Device package outlines of MS5201-AN and MS5201-BN (Metal cap with nickel finish, gel protection of bonding wires) SENSOR SOLUTIONS /// MS52XX 09/2015 Page 7 MS52XX SMD Pressure Sensor PACKAGE OUTLINES (CONT.) Device package outlines of MS5212-BM (Stainless steel cap, with or without gel protection of bonding wires) SENSOR SOLUTIONS /// MS52XX 09/2015 Page 8 MS52XX SMD Pressure Sensor RECOMMENDED PAD LAYOUT Recommended pad layout for soldering of the MS52XX on a printed circuit board SHIPPING PACKAGE Tape and reel SENSOR SOLUTIONS /// MS52XX 09/2015 Page 9 MS52XX SMD Pressure Sensor PACKAGE (CONT.) Tube SENSOR SOLUTIONS /// MS52XX 09/2015 Page 10 MS52XX SMD Pressure Sensor ORDERING INFORMATION Product code MS5201-AN MS5201-BN MS5212-BM transparent gel MS5212-BM white gel MS5212-BM white gel Product Art. No Package Pressure sensor 1 bar, High sensitivity Pressure sensor 1 bar, High linearity Pressure sensor 12 bar, High linearity 325201002-00 SMD hybrid with solder bumps, Metal cap with nickel finish, drop of gel on sensor, no gel protection of the bonding wires 325201000-00 325212001-00 325212002-00 SMD hybrid with solder bumps, Stainless steel cap, Gel protection of sensor and bonding wires Comments Delivery Form Tube Tube Same sensor for both articles, only the gel protection changes 325212002-50 Tube Tube Tape and reel . NORTH AMERICA EUROPE ASIA Measurement Specialties, Inc., a TE Connectivity Company 45738 Northport Loop West Fremont, CA 94538 Tel: +1 800 767 1888 Fax: +1 510 498 1578 e-mail: [email protected] Website: www.meas-spec.com Measurement Specialties (Europe), Ltd., a TE Connectivity Company Switzerland Sàrl Ch. Chapons-des-Prés 11 CH-2022 Bevaix Measurement Specialties (China), Ltd., a TE Connectivity Company No. 26 Langshan Road Shenzhen High-Tech Park (North) Nanshan District, Shenzhen, 518057 China Tel: +86 755 3330 5088 Fax: +86 755 3330 5099 e-mail: [email protected] Website: www.meas-spec.com Tel: +41 32 847 9550 Fax: + 41 32 847 9569 e-mail: [email protected] Website: www.meas-spec.com TE.com/sensorsolutions Measurement Specialties, Inc., a TE Connectivity company. Measurement Specialties, TE Connectivity, TE Connectivity (logo) and EVERY CONNECTION COUNTS are trademarks. All other logos, products and/or company names referred to herein might be trademarks of their respective owners. The information given herein, including drawings, illustrations and schematics which are intended for illustration purposes only, is believed to be reliable. However, TE Connectivity makes no warranties as to its accuracy or completeness and disclaims any liability in connection with its use. TE Connectivity‘s obligations shall only be as set forth in TE Connectivity‘s Standard Terms and Conditions of Sale for this product and in no case will TE Connectivity be liable for any incidental, indirect or consequential damages arising out of the sale, resale, use or misuse of the product. Users of TE Connectivity products should make their own evaluation to determine the suitability of each such product for the specific application. © 2015 TE Connectivity Ltd. family of companies All Rights Reserved. DA52XXYZ_017 000052XX223 ECN1873 SENSOR SOLUTIONS /// MS52XX 09/2015 Page 11