IMAGE SENSOR InGaAs linear image sensor G9211 to G9214/G9205 to G9208 series Near infrared image sensors (0.9 to 1.67 µm / 2.55 µm) G9211 to G9214/G9205 to G9208 series InGaAs linear image sensors are specifically designed for near infrared multichannel spectrophotometry. These linear image sensors consist of an InGaAs photodiode array, a charge amplifier array, an offset compensation circuit, a shift register and a timing generator formed on a CMOS chip. The charge amplifier array is made up of CMOS transistors connected to each pixel of the InGaAs photodiode array. Signals from each pixel are read out in charge integration mode to achieve high sensitivity and stable operation in the near infrared spectral range. The package is hermetically sealed for high reliability. Signal processing circuits on the CMOS chip allow selecting a feedback capacitance (Cf) of 10 pF or 0.5 pF by using an external voltage input. The image sensor operates over a wide dynamic range when Cf=10 pF and delivers high gain when Cf=0.5 pF. Features Applications l Near infrared multichannel spectrophotometry l Radiation thermometry l Non-destructive inspection l Wide dynamic range l Low noise and low dark current l Selectable gain l Anti-saturation circuit l CDS circuit *1 l Offset compensation circuit l Simple operation (by built-in timing generator) *2 l High resolution: 25 µm pitch (512 ch) l Low cross-talk l 256 ch: 1 video line Related products l InGaAs multichannel detector head C8061-01, C8062-01 l Multichannel detector head controller C7557 512 ch: 2 video lines ■ Selection guide G9211-256S G9212-512S G9213-256S G9214-512S G9205-256W G9206-256W G9207-256W G9208-256W Cooling Number of pixels Pixel pitch (µm) One-stage TE-cooled 256 512 256 512 50 25 50 25 Two-stage TE-cooled 256 50 *1: CDS (Correlated Double Sampling) circuit A major source of noise in charge amplifiers is the reset noise generated when the integration capacitance is reset. A CDS circuit greatly reduces this reset noise by holding the signal immediately after reset to find the noise differential. *2: Timing generator Different signal timings must be properly set in order to operate a shift register. In conventional image sensor operation, external PLDs (Programmable Logic Devices) are used to input the required timing signals. However, G9211 to G9214/G9205 to G9208 series image sensors internally generate all timing signals on the CMOS chip just by supplying CLK and RESET pulses. This makes it simple to set the timings. *3: Percentage of defective pixels If your application requires sensors with no defective pixels, please select G9201 series. Pixel size [µm (H) × µm (V)] 50 25 50 25 × × × × 250 250 500 500 Spectral response range (µm) Defective pixel 0.9 to 1.67 (-10 ° C) 1 % Max. * 3 0.9 0.9 0.9 0.9 50 × 250 to to to to 1.85 2.05 2.25 2.55 (-20 ° C) (-20 ° C) (-20 ° C) (-20 ° C) 5 % Max. ■ Spectral response (Typ.) 1.5 T=25 ˚C T= -10 ˚C T= -20 ˚C PHOTO SENSITIVITY (A/W) Type No. G9207-256W G9208-256W G9206-256W 1.0 G9211 TO G9214 SERIES G9205-256W 0.5 0 0.5 1.0 1.5 2.0 2.5 3.0 WAVELENGTH (µm) KMIRB0022EB 1 InGaAs linear image sensor G9211 to G9214/G9205 to G9208 series ■ Absolute maximum ratings Parameter Clock pulse voltage Operating temperature *4 Storage temperature *4 *4: Non condensation Symbol Vφ Topr Tstg Value 5.5 -40 to +70 -40 to +85 Unit V °C °C ■ Electrical characteristics (Ta=25 °C, Vφ=5 V ) Parameter Symbol Vdd Vref 256 ch I (Vdd) 512 ch I (Vref) Vss INP I (INP) f Supply voltage Supply current Ground Element bias Element bias current Clock frequency Clock pulse voltage high low Vφ tr φ tf φ tpw φ Clock pulse rise/fall times Clock pulse width Reset pulse voltage high low V (RES) tr (RES) tf (RES) tpw (RES) VH VL fV Reset pulse rise/fall times Reset pulse width Video output voltage high low Data rate Min. 4.9 3.5 0.1 Vφ - 0.5 0 Typ. 5.0 1.26 45 90 1 Max. 0 4.5 1 Max. Vφ 0 Max. 5.1 50 100 4.6 4 Vφ + 0.5 0.4 Unit mA V V mA MHz V V 0 20 100 ns 200 Vφ - 0.5 0 Vφ 0 Vφ + 0.5 0.4 ns V V 0 20 100 ns 6000 0 - 4.5 1.26 f/8 - ns V mA V Hz ■ Electrical and optical characteristics (G9211 to G9214 series: T=25 °C, G9205 to G9208 series: T= -20 °C) Parameter Peak sensitivity wavelength Symbol λp G9211 to G9214 series Min. Typ. Max. - 1.55 - G9205 G9206 G9207 G9208 G9205 to G9208 series Min. Typ. Max. 1.75 1.95 2.05 2.3 30 - Saturation charge *5 Qsat 30 RMS noise voltage N 180 300 180 (Readout noise) *6 Photo response non-uniformity PRNU ±5 *5: Vφ=5 V, Cf=10 pF *6: 50 % of saturation, integration time: 10 ms, after dark output subtraction, excluding first and last pixels. *7: 50 % of saturation, integration time: 3 ms, after dark output subtraction, excluding first and last pixels. 300 ±10 *7 Unit µm pC µVrms % Dark current characteristics (T=25 °C) Parameter G9211-256S G9212-512S G9213-256S G9214-512S G9205-256W *5 G9206-256W *5 G9027-256W *5 G9208-256W *5 *5: TD= -20 °C 2 Symbol ID Min. - Typ. 2 1 4 1 15 30 200 500 Max. 10 5 20 5 60 120 800 2000 Unit pA InGaAs linear image sensor G9211 to G9214/G9205 to G9208 series ■ Equivalent circuit q ( ) 1 PIXEL Cf=10 pF Cf=0.5 pF SHIFT REGISTER OFFSET COMPENSATION CDS VIDEO PHOTODIODE AD-TRIG TIMING GENERATOR Vdd INP Vss CLK RESET Vref EXTERNAL INPUT KMIRC0010EB ■ Timing chart CLK (INPUT) RESET (INPUT) INTEGRATION 2 CLOCKS TIME 8 CLOCKS 8 CLOCKS 8 × N CLOCKS (READOUT TIME) 10 CLOCKS MIN. TRIGGER (OUTPUT) VIDEO (OUTPUT) 1 ch (n-1) ch 2 ch ■ Basic circuit connection n ch KMIRC0016EA CLK RESET BUFFER Vref VIDEO Vdd Cf SELECT INP AD-TRIG Vss BUFFER KMIRC0012EA 3 InGaAs linear image sensor G9211 to G9214/G9205 to G9208 series ■ Dimensional outline (unit: mm) 63.5 ± 0.15 53.3 ± 0.15 38.1 ± 0.15 35.6 ± 0.15 15 3.0 ± 0.15 27.2 ± 0.15 20.3 ± 0.15 10.2 ± 0.15 22.9 ± 0.15 25.4 ± 0.15 28 1 2 14 A B ONE-STAGE TE-COOLED 6.15 3.6 6.4 ± 1 1.0 ± 0.2 B A INDEX MARK TWO-STAGE TE-COOLED 7.25 4.5 (28 ×) 2.54 (28 ×) 0.46 KMIRA0011EA ■ Pin connection (top view) 256 PIXELS 512 PIXELS Cf SELECT RESET TE - TE + AD-TRIG Vdd Vss INP CLK THERM THERM CASE RESET-EVEN TE + AD-TRIG-EVEN THERM THERM CASE CLK-EVEN Vref VIDEO Cf SELECT RESET-ODD TE AD-TRIG-ODD Vdd Vss INP CLK-ODD Vref VIDEO-EVEN VIDEO-ODD KMIRC0013EA Terminal name Vdd Vss INP Input/Output Input (CMOS logic compatible) Input (CMOS logic compatible) Input Input Cf SELECT Input CASE THERM - TE+, TE- - AD-TRIG VIDEO Vref Output Output Input CLK RESET Function and recommended connection Clock pulse for operating the CMOS shift register Reset pulse for initializing the feedback capacitance in the charge amplifier formed on the CMOS chip. The width of the reset pulse is integration time. Supply voltage for operating the signal processing circuit on the CMOS chip. Ground for the signal processing circuit on the CMOS chip. Reset voltage for the charge amplifier array on the CMOS chip. Voltage that determines the feedback capacitance (Cf) on the CMOS chip. Cf=10 pF at 0 V, and Cf=0.5 pF at 5 V. This terminal is electrically connected to the package. Thermistor for monitoring temperature inside the package. Power supply terminal for the thermoelectric cooler that cools the photodiode array. No connection for room temperature operation type. Digital signal for AD conversion; positive polarity Analog video signal; positive polarity Reset voltage for the offset compensation circuit at the CMOS chip Information furnished by HAMAMATSU is believed to be reliable. However, no responsibility is assumed for possible inaccuracies or omissions. Specifications are subject to change without notice. No patent rights are granted to any of the circuits described herein. ©2005 Hamamatsu Photonics K.K. HAMAMATSU PHOTONICS K.K., Solid State Division 1126-1 Ichino-cho, Higashi-ku, Hamamatsu City, 435-8558 Japan, Telephone: (81) 53-434-3311, Fax: (81) 53-434-5184, http://www.hamamatsu.com U.S.A.: Hamamatsu Corporation: 360 Foothill Road, P.O.Box 6910, Bridgewater, N.J. 08807-0910, U.S.A., Telephone: (1) 908-231-0960, Fax: (1) 908-231-1218 Germany: Hamamatsu Photonics Deutschland GmbH: Arzbergerstr. 10, D-82211 Herrsching am Ammersee, Germany, Telephone: (49) 08152-3750, Fax: (49) 08152-2658 France: Hamamatsu Photonics France S.A.R.L.: 19, Rue du Saule Trapu, Parc du Moulin de Massy, 91882 Massy Cedex, France, Telephone: 33-(1) 69 53 71 00, Fax: 33-(1) 69 53 71 10 United Kingdom: Hamamatsu Photonics UK Limited: 2 Howard Court, 10 Tewin Road, Welwyn Garden City, Hertfordshire AL7 1BW, United Kingdom, Telephone: (44) 1707-294888, Fax: (44) 1707-325777 North Europe: Hamamatsu Photonics Norden AB: Smidesvägen 12, SE-171 41 Solna, Sweden, Telephone: (46) 8-509-031-00, Fax: (46) 8-509-031-01 Italy: Hamamatsu Photonics Italia S.R.L.: Strada della Moia, 1/E, 20020 Arese, (Milano), Italy, Telephone: (39) 02-935-81-733, Fax: (39) 02-935-81-741 4 Cat. No. KMIR1011E05 May 2005 DN