Freescale Semiconductor, Inc. Order this document by MPX2050/D SEMICONDUCTOR TECHNICAL DATA ARCHIVED BY FREESCALE SEMICONDUCTOR, INC. 2005 "# !" " !!# ! ! The MPX2050 series device is a silicon piezoresistive pressure sensors providing a highly accurate and linear voltage output — directly proportional to the applied pressure. The sensor is a single, monolithic silicon diaphragm with the strain gauge and a thin–film resistor network integrated on–chip. The chip is laser trimmed for precise span and offset calibration and temperature compensation. 0 to 50 kPa (0 to 7.25 psi) 40 mV FULL SCALE SPAN (TYPICAL) Features • Unique Silicon Shear Stress Strain Gauge ARCHIVED BY FREESCALE SEMICONDUCTOR, INC. 2005 Freescale Semiconductor, Inc... • Temperature Compensated Over 0°C to +85°C • Easy to Use Chip Carrier Package Options • Ratiometric to Supply Voltage • Differential and Gauge Options MPX2050D CASE 344 • ±0.25% Linearity (MPX2050) Application Examples • Pump/Motor Controllers • Robotics • Level Indicators • Medical Diagnostics • Pressure Switching • Non–Invasive Blood Pressure Measurement MPX2050GP CASE 344B Figure 1 shows a block diagram of the internal circuitry on the stand–alone pressure sensor chip. )& '! ' #%'(% " #!&'"! ! %'"! %('%, &!&! !' )243 )243 MPX2050DP CASE 344C ! Figure 1. Temperature Compensated Pressure Sensor Schematic VOLTAGE OUTPUT versus APPLIED DIFFERENTIAL PRESSURE The differential voltage output of the sensor is directly proportional to the differential pressure applied. The output voltage of the differential or gauge sensor increases with increasing pressure applied to the pressure side (P1) relative to the vacuum side (P2). Similarly, output voltage increases as increasing vacuum is applied to the vacuum side (P2) relative to the pressure side (P1). MPX2050GSX CASE 344F PIN NUMBER 1 Gnd 3 VS 2 +Vout 4 –Vout NOTE: Pin 1 is noted by the notch in the lead. REV 8 Motorola Sensor Device Data Motorola, Inc. 2002 For More Information On This Product, Go to: www.freescale.com 1 Freescale Semiconductor, Inc. MAXIMUM RATINGS(NOTE) ARCHIVED BY FREESCALE SEMICONDUCTOR, INC. 2005 Rating Symbol Value Unit Maximum Pressure (P1 > P2) Pmax 200 kPa Storage Temperature Tstg –40 to +125 °C Operating Temperature TA –40 to +125 °C NOTE: Exposure beyond the specified limits may cause permanent damage or degradation to the device. OPERATING CHARACTERISTICS (VS = 10 Vdc, TA = 25°C unless otherwise noted, P1 > P2) Characteristic Pressure Supply Range(1) Voltage(2) Min Typ Max Unit POP 0 — 50 kPa VS — 10 16 Vdc Io — 6.0 — mAdc Full Scale Span(3) MPX2050 VFSS 38.5 40 41.5 mV Offset(4) MPX2050 Voff –1.0 — 1.0 mV ∆V/∆P — 0.8 — mV/kPa — –0.25 — 0.25 %VFSS — — ±0.1 — %VFSS Sensitivity ARCHIVED BY FREESCALE SEMICONDUCTOR, INC. 2005 Freescale Semiconductor, Inc... Supply Current Symbol Linearity(5) Pressure MPX2050 Hysteresis(5) (0 to 50 kPa) — — ±0.5 — %VFSS TCVFSS –1.0 — 1.0 %VFSS TCVoff –1.0 — 1.0 mV Input Impedance Zin 1000 — 2500 Ω Output Impedance Zout 1400 — 3000 Ω tR — 1.0 — ms — — 20 — ms — — ±0.5 — %VFSS Temperature Hysteresis(5) (–40°C to +125°C) Temperature Effect on Full Scale Span(5) Temperature Effect on Offset(5) Response Time(6) Warm–Up Offset Stability(7) (10% to 90%) NOTES: 1. 1.0 kPa (kiloPascal) equals 0.145 psi. 2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional error due to device self–heating. 3. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure. 4. Offset (Voff) is defined as the output voltage at the minimum rated pressure. 5. Accuracy (error budget) consists of the following: • Linearity: Output deviation from a straight line relationship with pressure, using end point method, over the specified pressure range. • Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to and from the minimum or maximum operating temperature points, with zero differential pressure applied. • Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from the minimum or maximum rated pressure, at 25°C. • TcSpan: Output deviation at full rated pressure over the temperature range of 0 to 85°C, relative to 25°C. • TcOffset: Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85°C, relative to 25°C. 6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure. 7. Offset stability is the product’s output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test. 2 For More Information On This Product, Go to: www.freescale.com Motorola Sensor Device Data Freescale Semiconductor, Inc. ARCHIVED BY FREESCALE SEMICONDUCTOR, INC. 2005 &' &$(%& ' %'))"'"('#(' LINEARITY Linearity refers to how well a transducer’s output follows the equation: Vout = Voff + sensitivity x P over the operating pressure range. There are two basic methods for calculating nonlinearity: (1) end point straight line fit (see Figure 2) or (2) a least squares best line fit. While a least squares fit gives the “best case” linearity error (lower numerical value), the calculations required are burdensome. Conversely, an end point fit will give the “worst case” error (often more desirable in error budget calculations) and the calculations are more straightforward for the user. Motorola’s specified pressure sensor linearities are based on the end point straight line method measured at the midrange pressure. +%' #%"% ! (%) &' &$(% )'"! &'%' ! )'"! ! #"!' &'%' ! ' #%&&(% (& Figure 2. Linearity Specification Comparison ON–CHIP TEMPERATURE COMPENSATION and CALIBRATION Figure 3 shows the minimum, maximum and typical output characteristics of the MPX2050 series at 25°C. The output is directly proportional to the differential pressure and is essentially a straight line. "('#('1)/. ARCHIVED BY FREESCALE SEMICONDUCTOR, INC. 2005 Freescale Semiconductor, Inc... "&' )& )/. ' ° #+ # # ',# &#! %! ',# + 0##& 5 "&' ',# Figure 3. Output versus Pressure Differential Figure 4 illustrates the differential or gauge configuration in the basic chip carrier (Case 344). A silicone gel isolates the die surface and wire bonds from the environment, while allowing the pressure signal to be transmitted to the silicon diaphragm. The MPX2050 series pressure sensor operating charac- Motorola Sensor Device Data &"! "' &'!&& &' ' ")% ÉÉÉÉÉÉÉÉÉÉÉ ÉÉÉÉÉÉÉÉÉÉÉ ÉÉÉÉÉÉÉÉÉÉÉ ÉÉÉÉÉÉÉÉÉÉÉ ÉÉÉÉÉÉÉÉÉÉÉ # #"+, & *% "! ! The effects of temperature on Full–Scale Span and Offset are very small and are shown under Operating Characteristics. % # %') "! Figure 4. Cross–Sectional Diagram (not to scale) teristics and internal reliability and qualification tests are based on use of dry air as the pressure media. Media other than dry air may have adverse effects on sensor performance and long term reliability. Contact the factory for information regarding media compatibility in your application. For More Information On This Product, Go to: www.freescale.com 3 Freescale Semiconductor, Inc. ARCHIVED BY FREESCALE SEMICONDUCTOR, INC. 2005 PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE Motorola designates the two sides of the pressure sensor as the Pressure (P1) side and the Vacuum (P2) side. The Pressure (P1) side is the side containing the silicone gel which isolates the die. The Motorola MPX pressure sensor is Part Number designed to operate with positive differential pressure applied, P1 > P2. The Pressure (P1) side may be identified by using the table below: Case Type Pressure (P1) Side Identifier MPX2050D 344 Stainless Steel Cap MPX2050DP 344C Side with Part Marking MPX2050GP 344B Side with Port Attached MPX2050GSX 344F Side with Port Attached MPX2050 series pressure sensors are available in differential and gauge configurations. Devices are available in the basic element package or with pressure port fittings which provide printed circuit board mounting ease and barbed hose pressure connections. ARCHIVED BY FREESCALE SEMICONDUCTOR, INC. 2005 Freescale Semiconductor, Inc... ORDERING INFORMATION MPX Series Device Type Options Case Type Order Number Device Marking Basic Element Differential 344 MPX2050D MPX2050D Ported Elements Differential, Dual Port 344C MPX2050DP MPX2050DP Gauge 344B MPX2050GP MPX2050GP Gauge Axial PC Mount 344F MPX2050GSX MPX2050D 4 For More Information On This Product, Go to: www.freescale.com Motorola Sensor Device Data Freescale Semiconductor, Inc. ARCHIVED BY FREESCALE SEMICONDUCTOR, INC. 2005 PACKAGE DIMENSIONS C R M B –A– Z N PIN 1 L –T– J ARCHIVED BY FREESCALE SEMICONDUCTOR, INC. 2005 Y 4 PL Freescale Semiconductor, Inc... F G F D ' DAMBAR TRIM ZONE: THIS IS INCLUDED WITHIN DIM. “F” 8 PL &', #! %"(! "('#(' &(##, "('#(' !"'& !&"!! ! '"%!! #% & , "!'%"! !&"! ! !&"! & !(&) " ' " &'"# %! " &'"# %! !"' '" + &', #! ) &(##, &(##, %"(! & !" & !" &', #! ! )"(' )& )"(' CASE 344–15 ISSUE Z !"'& !&"!! ! '"%!! #% !& , "!'%"! !&"! ! –A– –T– U L R H N PORT #1 POSITIVE PRESSURE (P1) –Q– B PIN 1 K –P– J ' $ S & F C G D 4 PL ' & & $ & & & & & &', #! %"(! "('#(' &(##, "('#(' CASE 344B–01 ISSUE B Motorola Sensor Device Data For More Information On This Product, Go to: www.freescale.com 5 Freescale Semiconductor, Inc. ARCHIVED BY FREESCALE SEMICONDUCTOR, INC. 2005 PACKAGE DIMENSIONS — CONTINUED PORT #1 R !"'& !&"!! ! '"%!! #% !& , "!'%"! !&"! ! –A– U V W L H PORT #2 N PORT #1 POSITIVE PRESSURE (P1) PORT #2 VACUUM (P2) –Q– B PIN 1 –P– –T– –T– ' $ & G D 4 PL C ARCHIVED BY FREESCALE SEMICONDUCTOR, INC. 2005 S F J Freescale Semiconductor, Inc... K ' & & $ & & & & & &', #! %"(! "('#(' &(##, "('#(' CASE 344C–01 ISSUE B –T– C A E –Q– U N V !"'& !&"!! ! '"%!! #% !& , "!'%"! !&"! ! B R PORT #1 POSITIVE PRESSURE (P1) PIN 1 –P– ' $ S K J F & & G D 4 PL ' # & $ & &', #! %"(! ) "(' ) &(##, ) "(' CASE 344F–01 ISSUE B 6 For More Information On This Product, Go to: www.freescale.com Motorola Sensor Device Data Freescale Semiconductor, Inc. ARCHIVED BY FREESCALE SEMICONDUCTOR, INC. 2005 ARCHIVED BY FREESCALE SEMICONDUCTOR, INC. 2005 Freescale Semiconductor, Inc... NOTES Motorola Sensor Device Data For More Information On This Product, Go to: www.freescale.com 7 ARCHIVED BY FREESCALE SEMICONDUCTOR, INC. 2005 Freescale Semiconductor, Inc... Freescale Semiconductor, Inc. ARCHIVED BY FREESCALE SEMICONDUCTOR, INC. 2005 Motorola reserves the right to make changes without further notice to any products herein. Motorola makes no warranty, representation or guarantee regarding the suitability of its products for any particular purpose, nor does Motorola assume any liability arising out of the application or use of any product or circuit, and specifically disclaims any and all liability, including without limitation consequential or incidental damages. “Typical” parameters can and do vary in different applications and actual performance may vary over time. All operating parameters, including “Typicals” must be validated for each customer application by customer’s technical experts. Motorola does not convey any license under its patent rights nor the rights of others. Motorola products are not designed, intended, or authorized for use as components in systems intended for surgical implant into the body, or other applications intended to support or sustain life, or for any other application in which the failure of the Motorola product could create a situation where personal injury or death may occur. Should Buyer purchase or use Motorola products for any such unintended or unauthorized application, Buyer shall indemnify and hold Motorola and its officers, employees, subsidiaries, affiliates, and distributors harmless against all claims, costs, damages, and expenses, and reasonable attorney fees arising out of, directly or indirectly, any claim of personal injury or death associated with such unintended or unauthorized use, even if such claim alleges that Motorola was negligent regarding the design or manufacture of the part. Motorola and the Stylized M Logo are registered trademarks of Motorola, Inc. Motorola, Inc. is an Equal Opportunity/Affirmative Action Employer. MOTOROLA and the Stylized M Logo are registered in the US Patent & Trademark Office. All other product or service names are the property of their respective owners. Motorola, Inc. 2002. How to reach us: USA/EUROPE/Locations Not Listed: Motorola Literature Distribution; P.O. Box 5405, Denver, Colorado 80217. 1–303–675–2140 or 1–800–441–2447 JAPAN: Motorola Japan Ltd.; SPS, Technical Information Center, 3–20–1, Minami–Azabu. Minato–ku, Tokyo 106–8573 Japan. 81–3–3440–3569 ASIA/PACIFIC: Motorola Semiconductors H.K. Ltd.; Silicon Harbour Centre, 2 Dai King Street, Tai Po Industrial Estate, Tai Po, N.T., Hong Kong. 852–26668334 Technical Information Center: 1–800–521–6274 HOME PAGE: http://www.motorola.com/semiconductors/ 8 ◊For More Information On This Product, Go to: www.freescale.com Motorola Sensor Device Data MPX2050/D