Small, Low Power, 3-Axis ±16 g Accelerometer ADXL326 FEATURES GENERAL DESCRIPTION 3-axis sensing Small, low profile package 4 mm × 4 mm × 1.45 mm LFCSP Low power: 350 μA typical Single-supply operation: 1.8 V to 3.6 V 10,000 g shock survival Excellent temperature stability Bandwidth adjustment with a single capacitor per axis RoHS/WEEE lead-free compliant The ADXL326 is a small, low power, complete 3-axis accelerometer with signal conditioned voltage outputs. The product measures acceleration with a minimum full-scale range of ±16 g. It can measure the static acceleration of gravity in tiltsensing applications, as well as dynamic acceleration, resulting from motion, shock, or vibration. The user selects the bandwidth of the accelerometer using the CX, CY, and CZ capacitors at the XOUT, YOUT, and ZOUT pins. Bandwidths can be selected to suit the application with a range of 0.5 Hz to 1600 Hz for X and Y axes and a range of 0.5 Hz to 550 Hz for the Z axis. APPLICATIONS The ADXL326 is available in a small, low profile, 4 mm × 4 mm × 1.45 mm, 16-lead, plastic lead frame chip scale package (LFCSP_LQ). Cost-sensitive, low power, motion- and tilt-sensing applications Mobile devices Gaming systems Disk drive protection Image stabilization Sports and health devices FUNCTIONAL BLOCK DIAGRAM +3V VS ADXL326 OUTPUT AMP XOUT CX 3-AXIS SENSOR CDC ~32kΩ AC AMP DEMOD OUTPUT AMP ~32kΩ YOUT CY OUTPUT AMP ~32kΩ ZOUT CZ ST 07948-001 COM Figure 1. Rev. 0 Information furnished by Analog Devices is believed to be accurate and reliable. However, no responsibility is assumed by Analog Devices for its use, nor for any infringements of patents or other rights of third parties that may result from its use. Specifications subject to change without notice. No license is granted by implication or otherwise under any patent or patent rights of Analog Devices. Trademarks and registered trademarks are the property of their respective owners. One Technology Way, P.O. Box 9106, Norwood, MA 02062-9106, U.S.A. Tel: 781.329.4700 www.analog.com Fax: 781.461.3113 ©2009 Analog Devices, Inc. All rights reserved. ADXL326 TABLE OF CONTENTS Features .............................................................................................. 1 Performance ................................................................................ 10 Applications ....................................................................................... 1 Applications Information .............................................................. 11 General Description ......................................................................... 1 Power Supply Decoupling ......................................................... 11 Functional Block Diagram .............................................................. 1 Setting the Bandwidth Using CX, CY, and CZ .......................... 11 Revision History ............................................................................... 2 Self Test ........................................................................................ 11 Specifications..................................................................................... 3 Absolute Maximum Ratings............................................................ 4 Design Trade-Offs for Selecting Filter Characteristics: The Noise/BW Trade-Off .................................................................. 11 ESD Caution .................................................................................. 4 Use with Operating Voltages Other Than 3 V .......................... 11 Pin Configuration and Function Descriptions ............................. 5 Axes of Acceleration Sensitivity ............................................... 12 Typical Performance Characteristics ............................................. 6 Layout and Design Recommendations ................................... 13 Theory of Operation ...................................................................... 10 Outline Dimensions ....................................................................... 14 Mechanical Sensor...................................................................... 10 Ordering Guide .......................................................................... 14 REVISION HISTORY 8/09—Revision 0: Initial Version Rev. 0 | Page 2 of 16 ADXL326 SPECIFICATIONS TA = 25°C, VS = 3 V, CX = CY = CZ = 0.1 μF, acceleration = 0 g, unless otherwise noted. All minimum and maximum specifications are guaranteed. Typical specifications are not guaranteed. Table 1. Parameter SENSOR INPUT Measurement Range Nonlinearity Package Alignment Error Interaxis Alignment Error Cross Axis Sensitivity 1 SENSITIVITY (RATIOMETRIC) 2 Sensitivity at XOUT, YOUT, ZOUT Sensitivity Change Due to Temperature 3 ZERO g BIAS LEVEL (RATIOMETRIC) 0 g Voltage at XOUT, YOUT 0 g Voltage at ZOUT 0 g Offset vs. Temperature NOISE PERFORMANCE Noise Density XOUT, YOUT, ZOUT FREQUENCY RESPONSE 4 Bandwidth XOUT, YOUT 5 Bandwidth ZOUT5 RFILT Tolerance Sensor Resonant Frequency SELF TEST 6 Logic Input Low Logic Input High ST Actuation Current Output Change at XOUT Output Change at YOUT Output Change at ZOUT OUTPUT AMPLIFIER Output Swing Low Output Swing High POWER SUPPLY Operating Voltage Range Supply Current Turn-On Time 7 TEMPERATURE Operating Temperature Range Conditions Each axis Min Typ ±16 ±19 ±0.3 ±1 ±0.1 ±1 Each axis VS = 3 V VS = 3 V 51 57 ±0.01 63 mV/g %/°C VS = 3 V VS = 3 V 1.35 1.2 1.5 1.5 ±1 1.65 1.8 V V mg/°C Percent of full scale No external filter No external filter Self test 0 to 1 Self test 0 to 1 Self test 0 to 1 −29 +29 +29 No load No load Max g % Degrees Degrees % 300 μg/√Hz rms 1600 550 32 ± 15% 5.5 Hz Hz kΩ kHz +0.6 +2.4 +60 −62 +62 +105 V V μA mV mV mV −114 +114 +190 0.1 2.8 1.8 VS = 3 V No external filter 1 V V 3.6 V μA ms +85 °C 350 1 −40 Unit Defined as coupling between any two axes. Sensitivity is essentially ratiometric to VS. Defined as the output change from ambient-to-maximum temperature or ambient-to-minimum temperature. 4 Actual frequency response controlled by user-supplied external filter capacitors (CX, CY, CZ). 5 Bandwidth with external capacitors = 1/(2 × π × 32 kΩ × C). For CX, CY = 0.003 μF, bandwidth = 1.6 kHz. For CZ = 0.01 μF, bandwidth = 500 Hz. For CX, CY, CZ = 10 μF, bandwidth = 0.5 Hz. 6 Self test response changes cubically with VS. 7 Turn-on time is dependent on CX, CY, CZ and is approximately 160 × CX or CY or CZ + 1 ms, where CX, CY, CZ are in μF. 2 3 Rev. 0 | Page 3 of 16 ADXL326 ABSOLUTE MAXIMUM RATINGS Table 2. Parameter Acceleration (Any Axis, Unpowered) Acceleration (Any Axis, Powered) VS All Other Pins Output Short-Circuit Duration (Any Pin to Common) Temperature Range (Powered) Temperature Range (Storage) Rating 10,000 g 10,000 g −0.3 V to +3.6 V (COM − 0.3 V) to (VS + 0.3 V) Indefinite Stresses above those listed under Absolute Maximum Ratings may cause permanent damage to the device. This is a stress rating only; functional operation of the device at these or any other conditions above those indicated in the operational section of this specification is not implied. Exposure to absolute maximum rating conditions for extended periods may affect device reliability. −55°C to +125°C −65°C to +150°C ESD CAUTION Rev. 0 | Page 4 of 16 ADXL326 ST 2 NC 15 14 13 ADXL326 TOP VIEW (Not to Scale) 12 XOUT 11 NC 10 YOUT +Y +Z +X 5 6 7 8 ZOUT 9 COM NC 4 COM 3 COM COM NC NC = NO CONNECT 07948-003 1 VS 16 NC VS NC PIN CONFIGURATION AND FUNCTION DESCRIPTIONS Figure 2. Pin Configuration Table 3. Pin Function Descriptions Pin No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 EP Mnemonic NC ST COM NC COM COM COM ZOUT NC YOUT NC XOUT NC VS VS NC Exposed pad Description No Connect (or Optionally Ground) Self Test Common No Connect Common Common Common Z Channel Output No Connect (or Optionally Ground) Y Channel Output No Connect X Channel Output No Connect Supply Voltage (1.8 V to 3.6 V) Supply Voltage (1.8 V to 3.6 V) No Connect Not internally connected. Solder for mechanical integrity. Rev. 0 | Page 5 of 16 ADXL326 TYPICAL PERFORMANCE CHARACTERISTICS N > 1000 for all typical performance plots, unless otherwise noted. 40 90 80 30 60 POPULATION (%) POPULATION (%) 70 50 40 30 20 10 20 1.48 1.49 1.50 1.51 1.52 1.53 1.54 OUTPUT (V) 0 –62 –60 –58 –56 –54 –52 –50 07948-008 1.47 66 07948-009 1.46 07948-005 0 104 07948-010 10 VOLTAGE (mV) Figure 6. X-Axis Self Test Response at 25°C, VS = 3 V Figure 3. X-Axis Zero g Bias at 25°C, VS = 3 V 100 40 90 80 30 POPULATION (%) POPULATION (%) 70 60 50 40 30 20 10 20 10 1.46 1.47 1.48 1.49 1.50 1.51 1.52 1.53 1.54 OUTPUT (V) 0 07948-006 0 52 54 56 58 60 62 64 VOLTAGE (mV) Figure 4. Y-Axis Zero g Bias at 25°C, VS = 3 V Figure 7. Y-Axis Self Test Response at 25°C, VS = 3 V 80 30 70 POPULATION (%) 50 40 30 20 10 20 10 0 1.46 1.47 1.48 1.49 1.50 1.51 1.52 1.53 OUTPUT (V) 1.54 0 07948-007 POPULATION (%) 60 90 92 94 96 98 100 102 VOLTAGE (mV) Figure 5. Z-Axis Zero g Bias at 25°C, VS = 3 V Figure 8. Z-Axis Self Test Response at 25°C, VS = 3 V Rev. 0 | Page 6 of 16 ADXL326 1.53 65 60 55 1.52 50 45 40 OUTPUT (V) POPULATION (%) N=8 35 30 25 1.51 1.50 20 15 1.49 10 –2.5 –2.0 –1.5 –1.0 –0.5 0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 TEMPERATURE COEFFICIENT (mg/°C) 1.48 –40 –30 –20 –10 07948-011 0 0 10 20 30 40 50 60 70 80 90 100 TEMPERATURE (°C) 07948-014 5 Figure 12. X-Axis Zero g Bias vs. Temperature, Eight Parts Soldered to PCB Figure 9. X-Axis Zero g Bias Temperature Coefficient, VS = 3 V 1.53 70 N=8 60 1.52 OUTPUT (V) POPULATION (%) 50 40 30 1.51 1.50 20 1.49 –2.5 –2.0 –1.5 –1.0 –0.5 0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 TEMPERATURE COEFFICIENT (mg/°C) 1.48 –40 –30 –20 –10 07948-012 0 Figure 10. Y-Axis Zero g Bias Temperature Coefficient, VS = 3 V 0 10 20 30 40 50 60 70 80 90 100 TEMPERATURE (°C) 07948-015 10 Figure 13. Y-Axis Zero g Bias vs. Temperature, Eight Parts Soldered to PCB 30 1.530 N=8 1.525 1.520 1.515 OUTPUT (V) 20 15 10 1.510 1.505 1.500 1.495 1.490 5 0 –2.5 –2.0 –1.5 –1.0 –0.5 0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 TEMPERATURE COEFFICIENT (mg/°C) Figure 11. Z-Axis Zero g Bias Temperature Coefficient, VS = 3 V 1.480 –40 –30 –20 –10 0 10 20 30 40 50 TEMPERATURE (°C) 60 70 80 90 100 07948-016 1.485 07948-013 POPULATION (%) 25 Figure 14. Z-Axis Zero g Bias vs. Temperature, Eight Parts Soldered to PCB Rev. 0 | Page 7 of 16 ADXL326 35 N=8 0.061 30 SENSITIVITY (V/g) POPULATION (%) 25 20 15 0.059 0.057 0.055 10 0.053 0.055 0.056 0.057 0.058 0.059 0.060 0.061 SENSITIVITY (V/g) 0.051 –40 –30 –20 –10 0 10 20 30 40 50 60 70 80 90 100 07948-020 0.054 90 100 07948-021 0.053 07948-017 0 90 100 07948-022 5 TEMPERATURE (°C) Figure 18. X-Axis Sensitivity vs. Temperature, Eight Parts Soldered to PCB, VS = 3 V Figure 15. X-Axis Sensitivity at 25°C, VS = 3 V 55 N=8 50 0.061 45 SENSITIVITY (V/g) POPULATION (%) 40 35 30 25 20 0.059 0.057 0.055 15 0.053 10 5 0.053 0.054 0.055 0.056 0.057 0.058 0.059 0.060 0.061 SENSITIVITY (V/g) 0.051 –40 –30 –20 –10 07948-018 0 10 20 30 40 50 60 70 80 TEMPERATURE (°C) Figure 16. Y-Axis Sensitivity at 25°C, VS = 3 V Figure 19. Y-Axis Sensitivity vs. Temperature, Eight Parts Soldered to PCB, VS = 3 V 40 N=8 0.061 35 30 SENSITIVITY (V/g) 0.059 25 20 15 0.057 0.055 10 0.053 5 0 0.053 0.054 0.055 0.056 0.057 0.058 0.059 0.060 SENSITIVITY (V/g) 0.061 0.051 –40 –30 –20 –10 07948-019 POPULATION (%) 0 0 10 20 30 40 50 60 70 80 TEMPERATURE (°C) Figure 20. Z-Axis Sensitivity vs. Temperature, Eight Parts Soldered to PCB, VS = 3 V Figure 17. Z-Axis Sensitivity at 25°C, VS = 3 V Rev. 0 | Page 8 of 16 ADXL326 600 CH4: ZOUT, 500mV/DIV 500 400 CH2: X OUT, 500mV/DIV 4 300 3 200 2 CH1: POWER, 2V/DIV 1 OUTPUTS ARE OFFSET FOR CLARITY 0 1.5 2.0 2.5 3.0 3.5 4.0 SUPPLY (V) TIME (1ms/DIV) Figure 22. Typical Turn-On Time, VS = 3 V, CX = CY = CZ = 0.0047 μF Figure 21. Typical Current Consumption vs. Supply Voltage Rev. 0 | Page 9 of 16 07948-024 100 07948-023 CURRENT (µA) CH3: Y OUT, 500mV/DIV ADXL326 THEORY OF OPERATION The ADXL326 is a complete 3-axis acceleration measurement system. The ADXL326 has a measurement range of ±16 g minimum. It contains a polysilicon surface micromachined sensor and signal conditioning circuitry to implement an openloop acceleration measurement architecture. The output signals are analog voltages that are proportional to acceleration. The accelerometer can measure the static acceleration of gravity in tilt sensing applications, as well as dynamic acceleration, resulting from motion, shock, or vibration. MECHANICAL SENSOR The sensor is a polysilicon surface micromachined structure built on top of a silicon wafer. Polysilicon springs suspend the structure over the surface of the wafer and provide a resistance against acceleration forces. Deflection of the structure is measured using a differential capacitor that consists of independent fixed plates and plates attached to the moving mass. The fixed plates are driven by 180° out-of-phase square waves. Acceleration deflects the moving mass and unbalances the differential capacitor resulting in a sensor output whose amplitude is proportional to acceleration. Phase-sensitive demodulation techniques are then used to determine the magnitude and direction of the acceleration. Rather than using additional temperature compensation circuitry, innovative design techniques ensure that high performance is builtin to the ADXL326. As a result, there is neither quantization error nor nonmonotonic behavior, and temperature hysteresis is very low (typically <3 mg over the −25°C to +70°C temperature range). The ADXL326 uses a single structure for sensing the X, Y, and Z axes. As a result, the three axes sense directions are highly orthogonal with little cross-axis sensitivity. Mechanical misalignment of the sensor die to the package is the chief source of cross-axis sensitivity. Mechanical misalignment can, of course, be calibrated out at the system level. PERFORMANCE The demodulator output is amplified and brought off-chip through a 32 kΩ resistor. The user then sets the signal bandwidth of the device by adding a capacitor. This filtering improves measurement resolution and helps prevent aliasing. Rev. 0 | Page 10 of 16 ADXL326 APPLICATIONS INFORMATION POWER SUPPLY DECOUPLING For most applications, a single 0.1 μF capacitor, CDC, placed close to the ADXL326 supply pins adequately decouples the accelerometer from noise on the power supply. However, in applications where noise is present at the 50 kHz internal clock frequency (or any harmonic thereof), additional care in power supply bypassing is required because this noise can cause errors in acceleration measurement. If additional decoupling is needed, a 100 Ω (or smaller) resistor or ferrite bead can be inserted in the supply line. Additionally, a larger bulk bypass capacitor (1 μF or greater) can be added in parallel to CDC. Ensure that the connection from the ADXL326 ground to the power supply ground is low impedance because noise transmitted through ground has a similar effect as noise transmitted through VS. SETTING THE BANDWIDTH USING CX, CY, AND CZ The ADXL326 has provisions for band limiting the XOUT, YOUT, and ZOUT pins. Capacitors must be added at these pins to implement low-pass filtering for antialiasing and noise reduction. The 3 dB bandwidth equation is f−3 dB = 1/(2π(32 kΩ) × C(X, Y, Z)) DESIGN TRADE-OFFS FOR SELECTING FILTER CHARACTERISTICS: THE NOISE/BW TRADE-OFF The selected accelerometer bandwidth ultimately determines the measurement resolution (smallest detectable acceleration). Filtering can be used to lower the noise floor to improve the resolution of the accelerometer. Resolution is dependent on the analog filter bandwidth at XOUT, YOUT, and ZOUT. The output of the ADXL326 has a typical bandwidth greater than 500 Hz. The user must filter the signal at this point to limit aliasing errors. The analog bandwidth must be no more than half the analog-to-digital sampling frequency to minimize aliasing. The analog bandwidth can be further decreased to reduce noise and improve resolution. The ADXL326 noise has the characteristics of white Gaussian noise, which contributes equally at all frequencies and is described in terms of μg/√Hz (the noise is proportional to the square root of the accelerometer bandwidth). The user should limit bandwidth to the lowest frequency needed by the application to maximize the resolution and dynamic range of the accelerometer. With the single-pole roll-off characteristic, the typical noise of the ADXL326 is determined by rms Noise = Noise Density × ( BW × 1.6 ) or more simply f–3 dB = 5 μF/C(X, Y, Z) The tolerance of the internal resistor (RFILT) typically varies as much as ±15% of its nominal value (32 kΩ), and the bandwidth varies accordingly. A minimum capacitance of 0.0047 μF for CX, CY, and CZ is recommended in all cases. Often, the peak value of the noise is desired. Peak-to-peak noise can only be estimated by statistical methods. Table 5 is useful for estimating the probabilities of exceeding various peak values, given the rms value. Table 5. Estimation of Peak-to-Peak Noise Table 4. Filter Capacitor Selection, CX, CY, and CZ Bandwidth (Hz) 1 10 50 100 200 500 Capacitor (μF) 4.7 0.47 0.10 0.05 0.027 0.01 Peak-to-Peak Value 2 × rms 4 × rms 6 × rms 8 × rms % of Time That Noise Exceeds Nominal Peak-to-Peak Value 32 4.6 0.27 0.006 USE WITH OPERATING VOLTAGES OTHER THAN 3 V SELF TEST The ST pin controls the self test feature. When this pin is set to VS, an electrostatic force is exerted on the accelerometer beam. The resulting movement of the beam allows the user to test whether the accelerometer is functional. The typical change in output is −1.08 g (corresponding to −62 mV) in the X axis, +1.08 g (+62 mV) on the Y axis, and +1.83 g (+105 mV) on the Z axis. This ST pin can be left open circuit or connected to common (COM) in normal use. Never expose the ST pin to voltages greater than VS + 0.3 V. If this cannot be guaranteed due to the system design (for instance, there are multiple supply voltages), then a low VF clamping diode between ST and VS is recommended. The ADXL326 is tested and specified at VS = 3 V; however, it can be powered with VS as low as 1.8 V or as high as 3.6 V. Note that some performance parameters change as the supply voltage is varied. The ADXL326 output is ratiometric; therefore, the output sensitivity (or scale factor) varies proportionally to the supply voltage. At VS = 3.6 V, the output sensitivity is typically 68 mV/g. At VS = 2 V, the output sensitivity is typically 38 mV/g. The zero g bias output is also ratiometric; therefore, the zero g output is nominally equal to VS/2 at all supply voltages. The output noise is not ratiometric but is absolute in volts; therefore, the noise density decreases as the supply voltage increases. This is because the scale factor (mV/g) increases while the noise voltage remains constant. At VS = 3.6 V, the X- and Yaxis noise density is typically 120 μg/√Hz, while at VS = 2 V, the X- and Y-axis noise density is typically 270 μg/√Hz. Rev. 0 | Page 11 of 16 ADXL326 Self test response in g is roughly proportional to the square of the supply voltage. However, when ratiometricity of sensitivity is factored in with supply voltage, the self test response in volts is roughly proportional to the cube of the supply voltage. AXES OF ACCELERATION SENSITIVITY AZ For example, at VS = 3.6 V, the self test response for the ADXL326 is approximately −107 mV for the X axis, +107 mV for the Y axis, and +181 mV for the Z axis. At VS = 2 V, the self test response is approximately −18 mV for the X axis, +18 mV for the Y axis, and −31 mV for the Z axis. AY AX 07948-025 TOP The supply current decreases as the supply voltage decreases. Typical current consumption at VS = 3.6 V is 375 μA, and typical current consumption at VS = 2 V is 200 μA. Figure 23. Axes of Acceleration Sensitivity (Corresponding Output Voltage Increases When Accelerated Along the Sensitive Axis) XOUT = –1g YOUT = 0g ZOUT = 0g TOP GRAVITY TOP TOP XOUT = 0g YOUT = –1g ZOUT = 0g TOP XOUT = 1g YOUT = 0g ZOUT = 0g TOP XOUT = 0g YOUT = 0g ZOUT = 1g Figure 24. Output Response vs. Orientation to Gravity Rev. 0 | Page 12 of 16 XOUT = 0g YOUT = 0g ZOUT = –1g 07948-026 XOUT = 0g YOUT = 1g ZOUT = 0g ADXL326 LAYOUT AND DESIGN RECOMMENDATIONS The recommended soldering profile is shown in Figure 25, followed by a description of the profile features in Table 6. The recommended PCB layout or solder land drawing is shown in Figure 26. CRITICAL ZONE TL TO TP tP TP tL TSMAX TSMIN tS RAMP-DOWN PREHEAT 07948-002 TEMPERATURE RAMP-UP TL t25°C TO PEAK TIME Figure 25. Recommended Soldering Profile Table 6. Recommended Soldering Profile Profile Feature Average Ramp Rate (TL to TP) Preheat Minimum Temperature (TSMIN) Maximum Temperature (TSMAX) Time (TSMIN to TSMAX), tS TSMAX to TL Ramp-Up Rate Time Maintained Above Liquidous (TL) Liquidous Temperature (TL) Time (tL) Peak Temperature (TP) Time Within 5°C of Actual Peak Temperature (tP) Ramp-Down Rate Time 25°C to Peak Temperature 0.50 MAX Sn63/Pb37 3°C/sec maximum Pb-Free 3°C/sec maximum 100°C 150°C 60 sec to 120 sec 150°C 200°C 60 sec to 180 sec 3°C/sec maximum 3°C/sec maximum 183°C 60 sec to 150 sec 240°C + 0°C/−5°C 10 sec to 30 sec 6°C/sec maximum 6 minutes maximum 217°C 60 sec to 150 sec 260°C + 0°C/−5°C 20 sec to 40 sec 6°C/sec maximum 8 minutes maximum 4 0.65 0.325 0.35 MAX 0.65 4 1.95 0.325 CENTER PAD IS NOT INTERNALLY CONNECTED BUT SHOULD BE SOLDERED FOR MECHANICAL INTEGRITY DIMENSIONS SHOWN IN MILLIMETERS Figure 26. Recommended PCB Layout Rev. 0 | Page 13 of 16 07948-004 1.95 ADXL326 OUTLINE DIMENSIONS 0.20 MIN PIN 1 INDICATOR 0.20 MIN 13 4.15 4.00 SQ 3.85 0.65 BSC TOP VIEW 12 9 0.55 0.50 0.45 4 SEATING PLANE 2.43 1.75 SQ 1.08 5 1.95 BSC 0.05 MAX 0.02 NOM 0.35 0.30 0.25 1 (BOTTOM VIEW) 8 1.50 1.45 1.40 16 EXPOSED PAD FOR PROPER CONNECTION OF THE EXPOSED PAD, REFER TO THE PIN CONFIGURATION AND FUNCTION DESCRIPTIONS SECTION OF THIS DATA SHEET. COPLANARITY 0.05 *STACKED DIE WITH GLASS SEAL. 112008-A PIN 1 INDICATOR Figure 27. 16-Lead Lead Frame Chip Scale Package [LFCSP_LQ] 4 mm × 4 mm Body, 1.45 mm Thick Quad (CP-16-5a*) Dimensions shown in millimeters ORDERING GUIDE Model ADXL326BCPZ 1 ADXL326BCPZ–RL1 ADXL326BCPZ–RL71 EVAL-ADXL326Z1 1 Measurement Range ±16 g ±16 g ±16 g Specified Voltage 3V 3V 3V Temperature Range −40°C to +85°C −40°C to +85°C −40°C to +85°C Z = RoHS Compliant Part. Rev. 0 | Page 14 of 16 Package Description 16-Lead LFCSP_LQ 16-Lead LFCSP_LQ 16-Lead LFCSP_LQ Evaluation Board Package Option CP-16-5a CP-16-5a CP-16-5a ADXL326 NOTES Rev. 0 | Page 15 of 16 ADXL326 NOTES Analog Devices offers specific products designated for automotive applications; please consult your local Analog Devices sales representative for details. Standard products sold by Analog Devices are not designed, intended, or approved for use in life support, implantable medical devices, transportation, nuclear, safety, or other equipment where malfunction of the product can reasonably be expected to result in personal injury, death, severe property damage, or severe environmental harm. Buyer uses or sells standard products for use in the above critical applications at Buyer's own risk and Buyer agrees to defend, indemnify, and hold harmless Analog Devices from any and all damages, claims, suits, or expenses resulting from such unintended use. ©2009 Analog Devices, Inc. All rights reserved. Trademarks and registered trademarks are the property of their respective owners. D07948-0-8/09(0) Rev. 0 | Page 16 of 16