Freescale Semiconductor Technical Data MPXM2102 Rev 4, 09/2005 100 kPa On-Chip Temperature Compensated & Calibrated Silicon Pressure Sensors MPXM2102 SERIES The MPXM2102 device is a silicon piezoresistive pressure sensors providing a highly accurate and linear voltage output - directly proportional to the applied pressure. The sensor is a single, monolithic silicon diaphragm with the strain gauge and a thin-film resistor network integrated on-chip. The chip is laser trimmed for precise span and offset calibration and temperature compensation. COMPENSATED AND CALIBRATED PRESSURE SENSOR 0 TO 100 kPA (0 TO 14.5 psi) 40 mV FULL SCALE SPAN (TYPICAL) Features • • • • Temperature Compensated Over 0°C to +85°C Available in Easy-to-Use Tape & Reel Ratiometric to Supply Voltage Gauge Ported and Non Ported Options MPAK PACKAGES Typical Applications • • • • • • • Pump/Motor Controllers Robotics Level Indicators Medical Diagnostics Pressure Switching Barometers Altimeters MPXM2102D/A CASE 1320-02 MPXM2102GS/AS CASE 1320A-02 ORDERING INFORMATION Device Type Nonported Ported Options Case No. MPX Series Order No. Gauge 1320 MPXM2102D Gauge 1320 MPXM2102DT1 Absolute 1320 MPXM2102A Absolute 1320 MPXM2102AT1 Gauge, Axial Port 1320A MPXM2102GS Gauge, Axial Port 1320A MPXM2102GST1 Absolute, Axial 1320A MPXM2102AS Port Absolute, Axial 1320A MPXM2102AST1 Port Packing Options Device Marking Pin Number MPXM2102D 1 Gnd 3 VS Tape & Reel MPXM2102D 2 +Vout 4 -Vout Rails Rails MPXM2102A Tape & Reel MPXM2102A Rails MPXM2102G Tape & Reel MPXM2102G Rails MPXM2102A Tape & Reel MPXM2102A © Freescale Semiconductor, Inc., 2005. All rights reserved. Figure 1 shows a block diagram of the internal circuitry on the stand-alone pressure sensor chip. VS 3 Thin Film Temperature Compensation and Calibration Circuitry X-ducer Sensing Element 2 Vout+ 4 V out- 1 GND Figure 1. Temperature Compensated Pressure Sensor Schematic VOLTAGE OUTPUT VERSUS APPLIED DIFFERENTIAL PRESSURE The differential voltage output of the sensor is directly proportional to the differential pressure applied. The output voltage of the differential or gauge sensor increases with increasing pressure applied to the pressure side relative to the vacuum side. Similarly, output voltage increases as increasing vacuum is applied to the vacuum side relative to the pressure side. Table 1. Maximum Ratings(1) Rating Symbol Value Unit Maximum Pressure Pmax 200 kPa Storage Temperature Tstg -40 to +125 °C Operating Temperature TA -40 to +125 °C 1. Exposure beyond the specified limits may cause permanent damage or degradation to the device. MPXM2102 2 Sensors Freescale Semiconductor Table 2. Operating Characteristics (VS = 10 Vdc, TA = 25°C.) Characteristic Symbol Min Typ Max Unit Pressure Range(1) POP 0 — 100 kPa Supply Voltage(2) VS — 10 16 Vdc Supply Current Io — 6.0 - mAdc VFSS 38.5 40 41.5 mV Voff -1.0 -2.0 — — 1.0 2.0 mV ∆V/∆P — 0.4 — mV/kPa — — -0.6 -1.0 — — 0.4 1.0 %VFSS Pressure Hysteresis(5) (0 to 100 kPa) — — ±0.1 — %VFSS Temperature Hysteresis(5) (-40°C to +125°C) — — ±0.5 — %VFSS TCVFSS -2.0 — 2.0 %VFSS TCVoff -1.0 — 1.0 mV Input Impedance Zin 1000 — 2500 Ω Output Impedance Zout 1400 — 3000 Ω Response Time(6) (10% to 90%) tR — 1.0 — ms Warm-Up — — 20 — ms Offset Stability(7) — — ±0.5 — %VFSS Full Scale Span(3) Offset(4) MPXM2102D/G Series MPXM2102A Series Sensitivity Linearity(5) MPXM2102D/G Series MPXM2102A Series Temperature Effect on Full Scale Span(5) Temperature Effect on Offset(5) 1. 1.0 kPa (kiloPascal) equals 0.145 psi. 2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional error due to device self-heating. 3. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure. 4. Offset (Voff) is defined as the output voltage at the minimum rated pressure. 5. Accuracy (error budget) consists of the following: • Linearity: • • • • Output deviation from a straight line relationship with pressure, using end point method, over the specified pressure range. Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to and from the minimum or maximum operating temperature points, with zero differential pressure applied. Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from the minimum or maximum rated pressure, at 25°C. TcSpan: Output deviation at full rated pressure over the temperature range of 0 to 85°C, relative to 25°C. TcOffset: Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85°C, relative to 25°C. 6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure. 7. Offset stability is the product's output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test. MPXM2102 Sensors Freescale Semiconductor 3 “best case” linearity error (lower numerical value), the calculations required are burdensome. Conversely, an end point fit will give the “worst case” error (often more desirable in error budget calculations) and the calculations are more straightforward for the user. The specified pressure sensor linearities are based on the end point straight line method measured at the midrange pressure. LINEARITY Linearity refers to how well a transducer's output follows the equation: Vout = Voff + sensitivity x P over the operating pressure range. There are two basic methods for calculating nonlinearity: (1) end point straight line fit (see Figure 2) or (2) a least squares best line fit. While a least squares fit gives the Least Square Deviation Least Squares Fit Exaggerated Performance Curve Straight Line Deviation Relative Voltage Output Least Square Deviation End Point Straight Line Fit Offset 0 50 100 Pressure (% Fullscale) Figure 2. Linearity Specification Comparison ON-CHIP TEMPERATURE COMPENSATION AND CALIBRATION Figure 3 shows the minimum, maximum and typical output characteristics of the MPXM2120 series at 25°C. The output VS = 10 Vdc TA = 25°C 40 35 TYP 30 Output (mVdc) is directly proportional to the differential pressure and is essentially a straight line. A silicone gel isolates the die surface and wire bonds from the environment, while allowing the pressure signal to be transmitted to the silicon diaphragm. 25 20 Span Range (TYP) MAX 15 10 MIN 5 kPa PSI 0 -5 0 25 3.62 50 7.25 75 10.87 100 14.5 Offset (TYP) Figure 3. Output versus Pressure Differential MPXM2102 4 Sensors Freescale Semiconductor PACKAGE DIMENSIONS PAGE 1 OF 2 CASE 1320-02 ISSUE B MPXM2102 Sensors Freescale Semiconductor 5 PACKAGE DIMENSIONS PAGE 2 OF 2 CASE 1320-02 ISSUE B MPXM2102 6 Sensors Freescale Semiconductor PACKAGE DIMENSIONS PIN 4 PIN 1 PAGE 1 OF 2 CASE 1320A-02 ISSUE A MPXM2102 Sensors Freescale Semiconductor 7 PACKAGE DIMENSIONS PAGE 2 OF 2 CASE 1320A-02 ISSUE A MPXM2102 8 Sensors Freescale Semiconductor How to Reach Us: Home Page: www.freescale.com E-mail: [email protected] USA/Europe or Locations Not Listed: Freescale Semiconductor Technical Information Center, CH370 1300 N. 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