Intersema MS7901-A 0.2 Pressure sensor die (0-1 bar) Datasheet

MS7901
PRESSURE SENSOR DIE (0-1 BAR)
• 0 to 100 kPa range (1 bar or 14.5 PSI)
• Absolute/differential pressure sensors
• RoHS-compatible & Pb-free1
DESCRIPTION
The sensor element of the MS7901 consists of a silicon micro-machined membrane. Implanted resistors make
use of the piezo-resistive effect to sense the membrane deflection and transform it in an electrical signal. This
sensor, which has outstanding linearity and span values, is available in various configurations. The absolute
pressure sensor employs a sealed vacuum reference cavity underneath the membrane. The Pyrex glass wafer
used for this sealing has a thickness of 0.2 mm (MS7901-A_0.2) or 0.5 mm (MS7901-A_0.5). There are two
gauge versions available: one with a drilled Pyrex glass (MS7901-D) and the other without Pyrex glass
(MS7901-S).
FEATURES
•
•
•
Uncompensated pressure sensor die
Output span 150mV @ 5V
Temperature range -40°…+125°C
•
•
•
Linearity 0.05% (typical)
Very small die size 1.78 x 1.78 mm (MS7901-A)
Low cost, high reliability
•
•
Barometers, altimeters
Variometers
APPLICATION
•
•
Absolute pressure sensor systems
Differential/gauge pressure sensor systems
ELECTRICAL CONNECTIONS
Positive output for pressure applied topside
Vs+ / EPI
Vs+ : Supply voltage of Wheatstone bridge
Epi : Connection of epitaxial layer (membrane)
Out- : Negative output
Out+ : Positive output
Out-
Out+
GND1 : Ground
GND2 : Ground
R5+
R6+
R5-
R5+ : Reference Resistor 5: positive access
R5 and R6 are
placed on bulk
GND1 GND2
R6-
R5- : Reference Resistor 5: negative access
R6+ : Reference Resistor 6: positive access
R6- : Reference Resistor 6: negative access
1
The European RoHS directive 2002/95/EC (Restriction of the use of certain Hazardous Substances in electrical and electronic equipment)
bans the use of lead, mercury, cadmium, hexavalent chromium and polybrominated biphenyls (PBB) or polybrominated diphenyl ethers
(PBDE).
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BOND PAD CONFIGURATION
Vs+/Epi
OutMS7901
Important remarks:
R5+
R6+
R5-
R6-
As the sensing elements are diffused resistances, the voltage
applied on the ground pads (GND1 and GND2) has to be lower
than the voltage applied on supply voltage pad (Vs+).
The epitaxial layer is connected to the Vs+ pin under the pad.
Out+
GND1
GND2
LAYOUT (Absolute sensors)
MS7901-A_0.2
MS7901-A_0.5
Pad opening in passivation is 100 µm
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LAYOUT (Gauge sensors)
MS7901-D
MS7901-S
Pad opening in passivation is 100 µm
FULL SCALE PRESSURE
kPa
bar
mbar
PSI
atm
mm Hg
m H2O
Inches H2O
100
1
1000
14.5
0.987
750
10.197
401
ABSOLUTE MAXIMUM RATINGS
Parameter
Supply voltage
Storage temperature
Pressure overload
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Symbol
VS+
TS
Conditions
Min
Max
Unit
-40
20
+150
5
V
C
Bar
o
Ta = 25 C
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ELECTRICAL CHARACTERISTICS
(Reference conditions: Supply Voltage VS+ = 5 Vdc; Ambient Temperature Ta = 25°C )
Parameter
Min
Operating Pressure Range
Typ
Max
Unit
Notes
0
1
Bar
Operating Temperature Range
-40
125
°C
Bridge Resistance
3.0
3.4
3.8
KΩ
Full-scale span (FS)
120
150
180
mV
Zero Pressure Offset
-40
0
40
mV
± 0.05
± 0.2
+ 2800
- 1900
+ 3300
- 2300
+ 80
ppm/°C
ppm/°C
µV/°C
Pressure Hysteresis
± 0.05
± 0.15
% FS
4
Repeatability
± 0.05
± 0.15
% FS
5
0.3
% FS
6
Linearity
Temperature Coefficient of Resistance
Span
Offset
+ 2400
- 1500
- 80
Temperature Hysteresis
% FS
1
2
3, 1
NOTES
1)
2)
3)
4)
Reference Resistors R5 and R6 have the same specifications as the bridge resistances.
Deviation at one half full-scale pressure from the least squares best line fit over pressure range (0 to 1 bar).
Slope of the endpoint straight line from 25°C to 60°C.
Output deviation at any pressure within the specified range, when this pressure is cycled to and from the minimum or
maximum rated pressure, at 25°C.
5) Same as 3) after 10 pressure cycles
6) Maximum difference in offset after one thermal cycle from -40°C to +125°C.
PICKING TOOLS
The MS7901 sensors have a sensitive membrane size of 0.74 x 0.74 mm and outer dimensions of
1.78 x 1.78 mm (MS7901-A_0.2, MS7901-A_0.5 and MS7901-D) and 1.8 x 1.8 mm (MS7901-S). The pick and
place tool has to be of a soft material such as rubber (Hardness 78-97 Shore A). Its external size must fit the
sensor and the vacuum cavity must be as large as the membrane itself. Successful tests have been made with
specific SPT tools, see SPT drawing and references below.
Ensure that the ejection pins do not touch the membrane for gauge versions.
SPT references
External dimension
Internal dimensions
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RTR-A1-060x060
TL & TW: 0.06 inch /1.52 mm
∅H: 0.035 inch / 0.89 mm
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ORDERING INFORMATION
Product Code
Type
Product
Art.-Nr.
MS7901-A_0.2
Absolute
1 bar Pressure Sensors 0.2 mm Pyrex sawn on b/f
790125022
MS7901-A_0.5
Absolute
1 bar Pressure Sensors 0.5 mm Pyrex sawn on b/f
790125021
MS7901-D
Differential
1 bar Pressure Sensors sawn on b/f
790125121
MS7901-S
Differential
1 bar Pressure Sensors no pyrex sawn on b/f
790125221
The MS7901 dice are supplied sawn on blue foil, mounted on plastic rings.
FACTORY CONTACTS
Intersema Sensoric SA
Ch. Chapons-des-Prés 11
CH-2022 BEVAIX
SWITZERLAND
Tel. 032 847 9550
Tel. Int. +41 32 847 9550
Telefax +41 32 847 9569
e-mail:
http://www.intersema.ch
NOTICE
Intersema reserves the right to make changes to the products contained in this data sheet in order to improve the design or performance
and to supply the best possible products. Intersema assumes no responsibility for the use of any circuits shown in this data sheet, conveys
no license under any patent or other rights unless otherwise specified in this data sheet, and makes no claim that the circuits are free from
patent infringement. Applications for any devices shown in this data sheet are for illustration only and Intersema makes no claim or
warranty that such applications will be suitable for the use specified without further testing or modification.
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