QFET ! " # ! ! ! $ ! % % % % % % &' '()**+,-* ./Ω0+-&*+ 12)* 3 12.)3 &**4! 5!!$" ! " ! " " " ! ! + 5 + 2-.673 )** + &' ' ( 2-&**73 5 8 + ;+ < 5 < !$ 8 /& ( 69 : ( ±)* + 8(! < :** = (! &' ' ( ,!(! < 8>,!!$ 8 2 -.673? &' 9 '6 ) &) = +$ @ &'9 & &A 66B&6* @ @$7 7 )** 7 8 2-.673 "!.67 , C &$A6 ,θ , = ,θ , = (" ? ,θ , = (" * A6 7@ '* 7@ :. 6 7@ !" )** + D+ D> + +-*+5-.6*µ( ∆D+ $∆ D> + 5-.6*µ(, .67 * )' +$7 +-)**++-*+ & µ( +-.'*+-&.67 5 E;+ &* µ( 5 ;D1> +-)*++-*+ &** ( 5 ;D1> ,! +-)*++-*+ &** ( )* 6* + * .) * ./ Ω /6 + ;+ +-+5-.6*µ( , , +-&*+5-9 .( +-6*+5-9 .( 5 &*6* &):* .** .:* +-.6++-*+ -& *F# ,! .) )* .. 66 , G ; G ; G ; +-.'*+5-&' '( +-&*+ +-&6*+5-&' '( ,-.6Ω &'6 )** '6 &** 9* &6* )* '* 96 &) 5 C &' ' ( 5 C8 +-*+5-&' '( + 69 : ( + &6 + ,!,! .** G ,!,! &6 µ +-*+5-&' '( 5$-&**($µ !" #$%#&##'(# )*#+,-./.Ω, 0 , -1 //-1µ. 2.0 " !" //µ3%(%( 4 5 %6 # ! ! " # ' %#& Ω ! " #$ ! # !$% 0 ( # " -.! #$ / #$ $% &'&'&(% &)&#& *+, µ µ -.&'/ ! " ()*$$"&+ ',)*$$ #$ ! " # $ % & ' " ! " ! ! ''##$ ! # 01&$ /9 //8 . 70 //8 30 70 #- "!# 01&$ 30 7 ) 30 :/4 33 70 70 /4 2$3"!# 01&$ 30 300 -0 -0 300 33 300 -0 3 7 33 3 30 33 4. 5# 01&$ 30 ! 03 " 7 70 33 !" ########################## ; 03 33 4.50 ±0.20 9.90 ±0.20 +0.10 2.00 ±0.10 (0.75) 3° ~ 0° 0.80 ±0.10 1.27 ±0.10 2.54 TYP 2.54 ±0.30 15.30 ±0.30 0.10 ±0.15 2.40 ±0.20 4.90 ±0.20 9.20 ±0.20 1.30 –0.05 1.20 ±0.20 (0.40) 1.40 ±0.20 +0.10 0.50 –0.05 2.54 TYP 4.90 ±0.20 (2XR0.45) 9.20 ±0.20 10.00 ±0.20 (7.20) (1.75) 10.00 ±0.20 (8.00) (4.40) 15.30 ±0.30 0.80 ±0.10 4.50 ±0.20 (0.40) 9.90 ±0.20 +0.10 MAX13.40 9.20 ±0.20 (1.46) 1.20 ±0.20 1.30 –0.05 0.80 ±0.10 2.54 TYP 2.54 TYP 10.08 ±0.20 1.47 ±0.10 MAX 3.00 (0.94) 13.08 ±0.20 ) 5° (4 1.27 ±0.10 +0.10 0.50 –0.05 2.40 ±0.20 10.00 ±0.20 > # " C!> . H ! " #$%&H '( ') '* +$% $+,% - . (5,F51<5I,,<<,+<F<,5;F(J<F(;<@5FII,F<,5<(K 8,I F<,<5 58,+< ,<15(D515K I5 , <5; (5,F51 < (I< (K 15(D515K (,55; I F< (8815(5 , I< (K 8,I , 5,I5 <,5D< F<,<5L <5F<,<5+<K(K15<<I<,58(<,5;F,F<,5;FF<, (5,F51 8,I (,< (IF,5E< , I< ( ,55(1 8< 5 15< I88, <+5< , K< @5FI F< <M8,< @,5< (88,+(1 (5,F51 <5I, 5<,(5(1 ( N & 1!! 23 " 2"3 23 ! " " " C O . ( ! " "C !! #"$% "&% & $ (! 5 !5 ! 8 8 "" !> ! 5 8 !> ! " 5 8 " "