Sensortechnics LDES050BF6S Digital low differential pressure sensor Datasheet

LDE Series
Digital low differential pressure sensors
FEATURES
· Pressure ranges from 25 to 500 Pa (0.1 to 2 inH2O)
· Pressure sensor based on thermal micro-flow
measurement
· High flow impedance
→ very low flow-through leakage
→ high immunity to dust and humidity
→ no loss in sensitivity using long tubing
· Calibrated and temperature compensated
· Unique offset autozeroing feature ensuring
superb long-term stability
· Offset accuracy better than 0.2 %FS
· Total accuracy better than 0.5 %FS typical
· On-chip temperature sensor
· Analog output and digital SPI interface
· RoHS and REACH compliant
· Quality Management System according to
EN ISO 13485 and EN ISO 9001
MEDIA COMPATIBILITY
Air and other non-corrosive gases
SPECIFICATIONS
Maximum ratings
Supply voltage VS
LDE...3...
2.70 ... 3.60 VDC
LDE...6...
4.75 ... 5.25 VDC
Output current
1 mA
Lead specifications
Average preheating temperature gradient 2.5 K/s
Soak time
ca. 3 min
Time above 217 °C
50 s
Time above 230 °C
40 s
Time above 250 °C
15 s
Peak temperature
260 °C
Cooling temperature gradient
-3.5 K/s
Temperature ranges
Compensated
0 ... +70 °C
Operating
-20 ... +80 °C
Storage
-40 ... +80 °C
Humidity limits (non-condensing)
97 %RH
20 g
Vibration1
2
Mechanical shock
500 g
ELECTRICAL CONNECTION3
Top-down view
10 9 8 7 6
Pin
1
2
3
4
5
6
7
8
9
10
1 2 3 4 5
Function
Reserved
VS
GND
Vout
Vout
S C LK
MOSI
MISO
/CS
Reserved
There are three use cases that will change
the manner in which the LDE sensor is
connected in-circuit. For detailed pin
connections see page 12.
Specification notes:
1. Sweep 20 to 2000 Hz, 8 min, 4 cycles per axis, MIL-STD-883, Method 2007.
2. 5 shocks, 3 axes, MIL-STD-883E, Method 2002.4.
3. The maximum voltage applied to pin 1 and pins 6 through 10 should not exceed VS+0.3 V.
E / 11815 / E
1/13
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LDE Series
Digital low differential pressure sensors
PRESSURE SENSOR CHARACTERISTICS
Part no.
Operating pressure
LDES025U...
0...25 Pa
/ 0...0.25 mbar
(0.1 inH2O)
LDES050U...
0...50 Pa
/ 0...0.5 mbar
(0.2 inH2O)
LDES100U...
0...100 Pa
/ 0...1 mbar
(0.4 inH2O)
LDES250U...
0...250 Pa
/ 0...2.5 mbar
(1 inH2O)
LDES500U...
0...500 Pa
/ 0...5 mbar
(2 inH2O)
LDES025B...
0...±25 Pa
/ 0...±0.25 mbar (±0.1 inH2O)
LDES050B...
0...±50 Pa
/ 0...±0.5 mbar
LDES100B...
0...±100 Pa / 0...±1 mbar
(±0.4 inH2O)
LDES250B...
0...±250 Pa / 0...±2.5 mbar
(±1 inH2O)
LDES500B...
0...±500 Pa / 0...±5 mbar
(±2 inH2O)
Proof pressure4 Burst pressure4
2 bar
(30 psi)
5 bar
(75 psi)
(±0.2 inH2O)
GAS CORRECTION FACTORS5
Gas type
Dry air
Oxygen (O2)
Nitrogen (N2)
Argon (Ar)
Carbon dioxide (CO2)
Correction factor
1.0
1.07
0.97
0.98
0.56
Specification notes:
4. The max. common mode pressure is 5 bar.
5. For example with a LDES500... sensor measuring CO2 gas, at full-scale output the actual pressure will be 500 Pa x 0.56 = 280 Pa.
∆Peff = ∆Psensor × gas correction factor
E / 11815 / E
∆Peff
= True differential pressure
∆Psensor = Differential pressure as indicated by output voltage
2/13
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LDE Series
Digital low differential pressure sensors
PERFORMANCE CHARACTERISTICS6
LDE...6...
(VS=5.0 VDC, TA=20 °C, PAbs=1 bara, calibrated in air, output signals analog and digital are non-ratiometric to VS)
all 25 Pa and 50 Pa devices
Characteristics
Min.
Noise level (RMS)
Offset warm-up shift
Offset long term stability7
Offset repeatability
Span repeatability10, 11
Current consumption (no load)8
Response time (t63)
Power-on time
Typ.
Max.
±0.01
±0.05
±0.01
±0.25
7
5
Unit
Pa
less than noise
±0.1
8
Pa/year
Pa
% of reading
mA
ms
25
Digital output
Characteristics
Scale factor (digital output)9
Zero pressure offset accuracy10
Span accuracy10, 11
Thermal effects
Offset
Span
Min.
0...25 / 0...±25 Pa
0...50 / 0...±50 Pa
5...55
0...70
5...55
0...70
Typ.
1200
600
±0.1
±0.4
Max.
Unit
counts/Pa
%FSS
% of reading
±1
±2
±0.2
±0.75
±0.2
±0.4
±1.75
±2.75
Min.
Typ.
Max.
Unit
0.49
0.50
4.50
±0.4
0.51
°C
°C
°C
°C
%FSS
% of reading
Analog output (unidirectional devices)
Characteristics
Zero pressure offset
Full scale output
Span accuracy10, 11
Thermal effects
Offset
Span
5...55
0...70
5...55
0...70
±1.25
±2
±0.75
±15
±30
±2
±2.75
Min.
Typ.
Max.
2.49
2.50
4.50
0.50
±0.4
2.51
°C
°C
°C
°C
V
% of reading
mV
% of reading
Analog output (bidirectional devices)
Characteristics
Zero pressure offset
Output
Span accuracy10, 11
Thermal effects
at max. specified pressure
at min. specified pressure
Offset
Span
E / 11815 / E
5...55
0...70
5...55
0...70
°C
°C
°C
°C
±1.25
±2
Unit
V
±0.75
±15
±30
±2
±2.75
% of reading
mV
% of reading
3/13
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LDE Series
Digital low differential pressure sensors
PERFORMANCE CHARACTERISTICS6
LDE...6...
(VS=5.0 VDC, TA=20 °C, PAbs=1 bara, calibrated in air, output signals analog and digital are non-ratiometric to VS)
all 100 Pa, 250 Pa and 500 Pa devices
Characteristics
Min.
Noise level (RMS)
Offset warm-up shift
Offset long term stability7
Offset repeatability12
Span repeatability10, 11
Current consumption (no load)8
Response time (t63)
Power-on time
Typ.
Max.
±0.01
±0.05
±0.02
±0.25
7
5
Unit
%FSS
less than noise
±0.1
8
%FSS/year
Pa
% of reading
mA
ms
25
Digital output
Characteristics
Scale factor (digital output)9
Min.
0...100 / 0...±100 Pa
0...250 / 0...±250 Pa
0...500 / 0...±500 Pa
Zero pressure offset accuracy10
Span accuracy10, 11
Thermal effects
Offset
5...55
0...70
Span
5...55
0...70
Typ.
300
120
60
±0.05
±0.4
Max.
Unit
counts/Pa
%FSS
% of reading
±1
±2
±0.1
±0.75
±0.1
±0.2
±1.75
±2.75
Min.
Typ.
Max.
Unit
0.49
0.50
4.50
±0.4
0.51
°C
°C
°C
°C
%FSS
% of reading
Analog output (unidirectional devices)
Characteristics
Zero pressure offset
Full scale output
Span accuracy10, 11
Thermal effects
Offset
Span
5...55
0...70
5...55
0...70
±1
±2
±0.75
±10
±12
±1.75
±2.75
Min.
Typ.
Max.
2.49
2.50
4.50
0.50
±0.4
2.51
°C
°C
°C
°C
V
% of reading
mV
% of reading
Analog output (bidirectional devices)
Characteristics
Zero pressure offset
Output
Span accuracy10, 11
Thermal effects
at max. specified pressure
at min. specified pressure
Offset
Span
E / 11815 / E
5...55
0...70
5...55
0...70
°C
°C
°C
°C
±1
±2
Unit
V
±0.75
±10
±12
±1.75
±2.75
% of reading
mV
% of reading
4/13
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LDE Series
Digital low differential pressure sensors
PERFORMANCE CHARACTERISTICS6
LDE...3...
(VS=3.0 VDC, TA=20 °C, PAbs=1 bara, calibrated in air, output signals analog and digital are non-ratiometric to VS)
all 25 Pa and 50 Pa devices
Characteristics
Min.
Noise level (RMS)
Offset warm-up shift
Offset long term stability7
Offset repeatability
Span repeatability10, 11
Current consumption (no load)8
Response time (t63)
Power-on time
Typ.
Max.
±0.01
±0.05
±0.01
±0.25
14
5
Unit
Pa
less than noise
±0.1
16
Pa/year
Pa
% of reading
mA
ms
25
Digital output
Characteristics
Scale factor (digital output)9
Zero pressure offset accuracy10
Span accuracy10, 11
Thermal effects
Offset
Span
Min.
0...25 / 0...±25 Pa
0...50 / 0...±50 Pa
5...55
0...70
5...55
0...70
Typ.
1200
600
±0.1
±0.4
Max.
Unit
counts/Pa
%FSS
% of reading
±1
±2
±0.2
±0.75
±0.2
±0.4
±1.75
±2.75
Min.
Typ.
Max.
Unit
0.29
0.30
2.70
±0.4
0.31
°C
°C
°C
°C
%FSS
% of reading
Analog output (unidirectional devices)
Characteristics
Zero pressure offset
Full scale output
Span accuracy10, 11
Thermal effects
Offset
Span
5...55
0...70
5...55
0...70
±1.25
±2
±0.75
±15
±30
±2
±2.75
Min.
Typ.
Max.
1.49
1.50
2.70
0.30
±0.4
1.51
°C
°C
°C
°C
V
% of reading
mV
% of reading
Analog output (bidirectional devices)
Characteristics
Zero pressure offset
Output
Span accuracy10, 11
Thermal effects
at max. specified pressure
at min. specified pressure
Offset
Span
E / 11815 / E
5...55
0...70
5...55
0...70
°C
°C
°C
°C
±1.25
±2
Unit
V
±0.75
±15
±30
±2
±2.75
% of reading
mV
% of reading
5/13
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LDE Series
Digital low differential pressure sensors
PERFORMANCE CHARACTERISTICS6
LDE...3...
(VS=3.0 VDC, TA=20 °C, PAbs=1 bara, calibrated in air, output signals analog and digital are non-ratiometric to VS)
all 100 Pa, 250 Pa and 500 Pa devices
Characteristics
Min.
Noise level (RMS)
Offset warm-up shift
Offset long term stability7
Offset repeatability12
Span repeatability10, 11
Current consumption (no load)8
Response time (t63)
Power-on time
Typ.
Max.
±0.01
±0.05
±0.02
±0.25
14
5
Unit
%FSS
less than noise
±0.1
16
%FSS/year
Pa
% of reading
mA
ms
25
Digital output
Characteristics
Scale factor (digital output)9
Min.
0...100 / 0...±100 Pa
0...250 / 0...±250 Pa
0...500 / 0...±500 Pa
Zero pressure offset accuracy10
Span accuracy10, 11
Thermal effects
Offset
5...55
0...70
Span
5...55
0...70
Typ.
300
120
60
±0.05
±0.4
Max.
Unit
counts/Pa
%FSS
% of reading
±1
±2
±0.1
±0.75
±0.1
±0.2
±1.75
±2.75
Min.
Typ.
Max.
Unit
0.29
0.30
2.70
±0.4
0.31
°C
°C
°C
°C
%FSS
% of reading
Analog output (unidirectional devices)
Characteristics
Zero pressure offset
Full scale output
Span accuracy10, 11
Thermal effects
Offset
Span
5...55
0...70
5...55
0...70
±1
±2
±0.75
±10
±12
±1.75
±2.75
Min.
Typ.
Max.
1.49
1.50
2.70
0.30
±0.4
1.51
°C
°C
°C
°C
V
% of reading
mV
% of reading
Analog output (bidirectional devices)
Characteristics
Zero pressure offset
Output
Span accuracy10, 11
Thermal effects
at max. specified pressure
at min. specified pressure
Offset
Span
E / 11815 / E
5...55
0...70
5...55
0...70
°C
°C
°C
°C
±1
±2
Unit
V
±0.75
±10
±12
±1.75
±2.75
% of reading
mV
% of reading
6/13
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LDE Series
Digital low differential pressure sensors
PERFORMANCE CHARACTERISTICS
Temperature sensor
Characteristics
Scale factor (digital output)
Non-linearity
Hysteresis
Min.
Typ.
95
±0.5
±0.1
Max.
Unit
counts/°C
%FS
Total accuracy13
Fig. 1: Typical total accuracy plot of 16 LDE 50 Pa sensors @ 25 °C (typical total accuracy better than 0.5 %FS)
Offset long term stability
Fig. 2: Offset long term stability for LDE 250 Pa sensors after 10 000 hours @ 85°C powered, equivalent to over
43.5 years @ 25 °C (better than ±2 mV / ±0.125 Pa)
E / 11815 / E
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LDE Series
Digital low differential pressure sensors
SPI - SERIAL PERIPHERAL INTERFACE
Note: It is important to adhere to the communication protocol in order to avoid damage to the sensor.
There are, however, some cases where it may be
helpful to use 33Ω series resistors at both ends of the
SPI lines, as shown in Figure 3. Signal quality may be
further improved by the addition of a buffer as shown in
Figure 4. These cases include multiple slave devices
on the same bus segment, using a master device
with limited driving capability and long SPI bus lines.
Introduction
The LDE serial interface is a high-speed synchronous
data input and output communication port. The serial
interface operates using a standard 4-wire SPI bus.
The LDE device runs in SPI mode 0, which requires the
clock line SCLK to idle low (CPOL = 0), and for data to
be sampled on the leading clock edge (CPHA = 0).
Figure 5 illustrates this mode of operation.
If these series resistors are used, they must be
physically placed as close as possible to the pins of
the master and slave devices.
Care should be taken to ensure that the sensor is
properly connected to the master microcontroller.
Refer to the manufacturer's datasheet for more
information regarding physical connections.
Signal control
Application circuit
The serial interface is enabled by asserting /CS low.
The serial input clock, SCLK, is gated internally to
begin accepting the input data at MOSI, or sending
the output data on MISO. When /CS rises, the data
clocked into MOSI is loaded into an internal register.
The use of pull-up resistors is generally unnecessary
for SPI as most master devices are configured for
push-pull mode. If pull-up resistors are required for
use with 3 V LDE devices, however, they should be
greater than 50 kΩ.
MOSI
33
33
MOSI
MISO
33
33
MISO
SCLK
33
33
SCLK
/CS
33
33
/CS
33
33
MOSI
33
33
MISO
33
33
SCLK
33
33
/CS
Sensor
Fig. 3: Resistors at both ends of the SPI lines
MOSI
33
MISO
33
/OE
Sensor
/OE
SCLK
33
/CS
33
/OE
/OE
Fig. 4: Addition of a buffer
E / 11815 / E
8/13
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LDE Series
Digital low differential pressure sensors
SPI - SERIAL PERIPHERAL INTERFACE
Note: It is important to adhere to the communication protocol in order to avoid damage to the sensor.
Data read – pressure
When powered on, the sensor begins to continuously
measure pressure. To initiate data transfer from the
sensor, the following three unique bytes must be written
sequentially, MSB first, to the MOSI pin (see Figure 5):
Step Hexadecimal Binary
Description
1
0x2D
B00101101 Poll current pressure measurement
2
0x14
B00010100 Send result to data register
3
0x98
B10011000 Read data register
The entire 16 bit content of the LDE register is then
read out on the MISO pin, MSB first, by applying 16
successive clock pulses to SCLK with /CS asserted
low. Note that the value of the LSB is held at zero for
internal signal processing purposes. This is below the
noise threshold of the sensor and thus its fixed value
does not affect sensor performance and accuracy.
From the digital sensor output the actual pressure
value can be calculated as follows:
pressure [Pa ] =
digital output [counts ]
 counts 
scale factor 

 Pa 
Step 1
For example, for a ±250 Pa sensor (LDES250B...)
with a scale factor of 120 a digital output of 30 000
counts (7530’h) calculates to a positive pressure of
250 Pa. Similarly, a digital output of -30 000 counts
(8AD0’h) calculates to a negative pressure of -250 Pa.
Data read – temperature
The on-chip temperature sensor changes 95 counts/°C
over the operating range. The temperature data format
is 15-bit plus sign in two’s complement format. To
read temperature, use the following sequence:
Step Hexadecimal Binary
Description
1
0x24
B00100010 Poll current temperature measurement
2
0x14
B00010100 Send result to data register
3
0x98
B10011000 Read data register
From the digital sensor output, the actual temperature
can be calculated as follows:
TS - TS0 [counts]
+ T0 [°C]
temperature [°C] =
scale factorTS[counts/°C]
where
TS is the actual sensor readout;
TS0 is the sensor readout at known temperature T014;
Scale factorTS = 95 counts/°C
Step 2
/CS
SCLK
(CPOL=0)
(CPHA=0)
MOSI
0
0
1
0
1
1
0
1
0
0
0
1
0
1
0
0
MISO
Step 3
Data from sensor
/CS
SCLK
(CPOL=0)
(CPHA=0)
MOSI
1
0
0
1
1
0
0
0
MSB
MISO
15 14 13 12 11 10
LSB
9
8
7
6
5
4
3
2
1
0
Fig. 5: SPI data transfer
E / 11815 / E
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LDE Series
Digital low differential pressure sensors
Interface specification
Parameter
Symbol
fECLK
External clock frequency
External master clock input low time
External master clock input high time
SCLK setup to falling edge /CS
/CS falling edge to SCLK rising edge setup time
/CS idle time
SCLK falling edge to data valid delay
Data valid to SCLK rising edge setup time
Data valid to SCLK rising edge hold time
SCLK high pulse width
SCLK low pulse width
/CS rising edge to SCLK rising edge hold time
/CS falling edge to output enable
/CS rising edge to output disable
LDE...6... (5 V supply)
Maximum output load capacitance
CLOAD
VIH
VIL
VOH
Output voltage, logic LOW
VOL
CLOAD
VIH
VIL
VOH
VOL
Input voltage, logic HIGH
Input voltage, logic LOW
Output voltage, logic HIGH
Output voltage, logic LOW
Min.
Min.
Max.
fECLKIN LO tECLK=1/fECLK
fECLKIN HI tECLK=1/fECLK
tSC
tCSS
tCSI
fCLK=4 MHz
tDO
CLOAD=15 pF
tDS
tDH
tCH
tCL
tCSH
tDV
CLOAD=15 pF
tTR
CLOAD=15 pF
Input voltage, logic HIGH
Input voltage, logic LOW
Output voltage, logic HIGH
LDE...3... (3 V supply)15
Maximum output load capacitance
Conditions
VCKSEL=0
Typ.
Max.
0.2
5
40
40
30
30
1.5
Unit
MHz
60
60
%tECLK
ns
µs
80
30
30
100
100
30
ns
25
25
RLOAD=∞,
phase margin >55°
200
0.8×VS
RLOAD=∞
RLOAD =2 kΩ
RLOAD=∞
RLOAD =2 kΩ
pF
VS+0.3
0.2×VS
VS-0.1
VS-0.15
V
0.5
0.2
RLOAD =1 kΩ
15
0.65×VS
IO=-20 µA
IO=20 µA
pF
VS+0.3
0.35×VS
VS-0.4
V
0.4
tCSI
/CS
tSC
tCSS
tCL
tCSH
tCH
SCLK
tDS
tDH
MOSI
tDV
tDO
tTR
MISO
Fig. 5: Timing diagram
E / 11815 / E
10/13
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LDE Series
Digital low differential pressure sensors
OUTLINE DRAWING
LDE...E... (SMD, 2 ports same side)
17.70
12.70
±0.15
5.60
±0.2
0.25
High pressure port
10 9 8 7 6
3.0
13.85 15.22
18.03
Ø 2.20
17.53
10.70
±0.15
5.0
6.26
1 2 3 4 5
1.43
5.08
2.54
3.10
±0.2
0.51
1.27
1.60
±0.2
5.60
dimensions in mm
all tolerances ±0.1 mm
unless otherwise noted
2.50
LDE...F... (DIP, 2 ports same side)
17.70
12.70
±0.15
5.60
±0.2
High pressure port
10 9 8 7 6
3.0
0.25
14.97
18.03
Ø 2.20
17.53
10.70
±0.15
5.0
6.26
1 2 3 4 5
7.85
8.95
±0.5
15.65
16.05
10.16
2.54
0.46
3.10
±0.2
1.60
±0.2
5.60
2.50
E / 11815 / E
dimensions in mm
all tolerances ±0.1 mm
unless otherwise noted
11/13
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LDE Series
Digital low differential pressure sensors
OUTLINE DRAWING
Sensor PCB footprint
dimensions in mm
all tolerances ±0.1 mm
unless otherwise noted
ELECTRICAL CONNECTION3
There are three use cases that will change the manner in which the LDE series device is connected in-circuit:
Case 1: Reading of pressure measurement as a digital (SPI) signal;
Case 2: Reading of pressure measurement as an analog (voltage) signal; and
Case 3: Pin-to-pin compatible drop-in replacement for LBA series devices (5 V LDE devices only).
The connections for each such use case must be made as indicated below.
Connection
Pin
Function
C a se 1 :
Digital signal output
C a se 2 :
Analog signal output
1
2
3
4
5
6
7
8
9
10
Reserved
VS
GND
Vout
Vout
S C LK
MOSI
MISO
/CS
Reserved
NC
+5 V / +3 V
GND
NC
NC
Master device SCLK
Master device MOSI
Master device MISO
Master device (/CS)
NC
NC
+5 V / +3 V
GND
E / 11815 / E
C a se 3 :
LBA drop-in replacement
(5 V LDE only)
GND
+5 V
GND
High-impedance analog input High-impedance analog input
(e.g. op-amp, ADC)
(e.g. op-amp, ADC)
GND
GND
GND
VS
NC
GND
GND
GND
GND
GND
12/13
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LDE Series
Digital low differential pressure sensors
Specification notes:
6. The sensor is calibrated with a common mode pressure of 1 bar absolute. Due to the mass flow based measuring principle,
variations in absolute common mode pressure need to be compensated according to the following formula:
∆Peff = ∆Psensor ×
∆Peff
= True differential pressure
∆Psensor = Differential pressure as indicated by output voltage
Pabs
= Current absolute common mode pressure
1 bara
Pabs
7.
8.
9.
10.
Figure based on accelerated lifetime test of 10 000 hours at 85 °C biased burn-in.
Please contact First Sensor for low power options.
The digital output signal is a signed, two's complement integer. Negative pressures will result in a negative output.
Zero pressure offset accuracy and span accuracy are uncorrelated uncertainties. They can be added according to the
principles of error propagation.
11. Span accuracy below 10 % of full scale is limited by the intrinsic noise of the sensor.
12. Typical value for 250 Pa sensors.
13. Total accuracy is the combined error from offset and span calibration, non-linearity, repeatability and pressure hysteresis.
14. To be defined by user. The results show deviation in °C from the offset calibrated temperature
15. For correct operation of LDE…3... devices, the device driving the SPI bus must have a minimum drive capability of ±2 mA.
ORDERING INFORMATION
Series Pressure range
Options
LD E
S 025
S 050
S 100
Calibration
25 Pa B Bidirectional
U Unidirectional
50 P a
Housing
Output
(0.1 inH2O)
E SMT, 2 ports 3 non-ratiometric,
same side
3 V supply
(0.2 inH2O)
F DIP, 2 ports
same side
6 non-ratiometric,
5 V supply
F
6
Grade
S High
100 P a
(0.4 inH2O)
S 250
250 P a
(1 inH2O)
S 500
500 P a
(2 inH2O)
Example:
LD E
S 250
B
S
First Sensor reserves the right to make changes to any products herein.
First Sensor does not assume any liability arising out of the application
or use of any product or circuit described herein, neither does it convey
any license under its patent rights nor the rights of others.
E / 11815 / E
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