Freescale MPXV5004G Integrated silicon pressure sensor on-chip signal conditioned, temperature compensated and calibrated Datasheet

Freescale Semiconductor
Technical Data
MPXV5004G
Rev 10, 01/2007
Integrated Silicon Pressure Sensor
On-Chip Signal Conditioned,
Temperature Compensated and
Calibrated
MPXV5004G
SERIES
The MPXV5004G series piezoresistive transducer is a state-of-the-art
monolithic silicon pressure sensor designed for a wide range of applications, but
particularly those employing a microcontroller or microprocessor with A/D inputs.
This sensor combines a highly sensitive implanted strain gauge with advanced
micromachining techniques, thin-film metallization, and bipolar processing to
provide an accurate, high level analog output signal that is proportional to the
applied pressure.
Features
• Temperature Compensated over 10° to 60°C
• Available in Gauge Surface Mount (SMT) or Through-Hole (DIP)
Configurations
• Durable Thermoplastic (PPS) Package
INTEGRATED
PRESSURE SENSOR
0 TO 3.92 kPA
(0 TO 400 mm H2O)
1.0 TO 4.9 V OUTPUT
SMALL OUTLINE PACKAGES
THROUGH-HOLE
J
Typical Applications
•
•
Washing Machine Water Level
Ideally Suited for Microprocessor or Microcontroller-Based Systems
ORDERING
Device
Type
ThroughHole
Surface
Mount
INFORMATION(1)
Case
No.
MPXV Series
Order No.
Packing
Options
Device
Marking
482B
MPXV5004G7U
Rails
MPXV5004G
482C
MPXV5004GC7U
Rails
MPXV5004G
482
MPXV5004G6U
Rails
MPXV5004G
482
MPXV5004G6T1
Tape & Reel
MPXV5004G
482A
MPXV5004GC6U
Rails
MPXV5004G
482A
MPXV5004GC6T1
Tape & Reel
MPXV5004G
1351
MPXV5004DP
Trays
MPXV5004G
1368
MPXV5004GVP
Trays
MPXV5004G
1369
MPXV5004GP
Trays
MPXV5004G
MPXV5004G7U
CASE 482B-03
MPXV5004GC7U
CASE 482C-03
PIN NUMBERS(1)
1
N/C
5
N/C
2
VS
6
N/C
3
GND
7
N/C
4
VOUT
8
N/C
1. Pins 1, 5, 6, 7, and 8 are internal device
connections. Do not connect to external
circuitry or ground. Pin 1 is noted by the
notch in the lead.
1. MPXV5004G series pressure sensors are available in the basic element package or
with a pressure port. Two packing options are offered for the surface mount
configuration.
SMALL OUTLINE PACKAGES
SURFACE MOUNT
MPXV5004G6U
CASE 482-01
MPXV5004GC6U
CASE 482A-01
MPXV5004DP
CASE 1351-01
© Freescale Semiconductor, Inc., 2007. All rights reserved.
MPXV5004GVP
CASE 1368-01
MPXV5004GP
CASE 1369-01
VS
Gain Stage #2
and
Ground
Reference
Shift Circuitry
Thin Film
Temperature
Compensation
and Calibration
Circuitry
Sensing
Element
GND
VOUT
Pins 1, 5, 6, 7, and 8 are NO CONNECTS
for small outline package device.
Figure 1. Fully Integrated Pressure Sensor Schematic
Table 1. Maximum Ratings
(1)
Rating
Symbol
Value
Unit
Maximum Pressure (P1 > P2)
PMAX
16
kPa
Storage Temperature
TSTG
–30 to +100
°C
TA
0 to +85
°C
Operating Temperature
1. Exposure beyond the specified limits may cause permanent damage or degradation to the device.
Table 2. Operating Characteristics (VS = 5.0 VDC, TA = 25°C unless otherwise noted, P1 > P2)
Characteristic
Symbol
Min
Typ
Max
Units
Pressure Range
POP
0
—
3.92
400
kPa
mm H2O
Supply Voltage(1)
VS
4.75
5.0
5.25
VDC
IS
—
—
10
mAdc
Supply Current
Span at 306 mm H2O (3 kPa)
(2)
VFSS
—
3.0
—
V
Offset(3) (4)
VOFF
0.75
1.0
1.25
V
Sensitivity
V/P
—
1.0
9.8
—
V/kPa
mV/mm H2O
—
—
—
—
—
—
±1.5
±2.5
%VFSS
%VFSS
Accuracy(4) (5)
0 to 100 mm H2O (10 to 60°C)
100 to 400 mm H2O (10 to 60°C)
1. Device is ratiometric within this specified excitation range.
2. Span is defined as the algebraic difference between the output voltage at specified pressure and the output voltage at the minimum rated
pressure.
3. Offset (Voff) is defined as the output voltage at the minimum rated pressure.
4. Accuracy (error budget) consists of the following:
• Linearity:
Output deviation from a straight line relationship with pressure over the specified pressure range.
• Temperature Hysteresis:Output deviation at any temperature within the operating temperature range, after the temperature is cycled to
and from the minimum or maximum operating temperature points, with zero differential pressure applied.
• Pressure Hysteresis:
Output deviation at any pressure within the specified range, when this pressure is cycled to and from the
minimum or maximum rated pressure, at 25°C.
• Offset Stability:
Output deviation, after 1000 temperature cycles, –30 to 100°C, and 1.5 million pressure cycles, with minimum
rated pressure applied.
• TcSpan:
Output deviation over the temperature range of 10 to 60°C, relative to 25°C.
• TcOffset:
Output deviation with minimum rated pressure applied, over the temperature range of 10 to 60°C, relative to 25°C.
• Variation from Nominal: The variation from nominal values, for Offset or Full Scale Span, as a percent of VFSS, at 25°C.
5. Auto Zero at Factory Installation: Due to the sensitivity of the MPXV5004G, external mechanical stresses and mounting position can affect
the zero pressure output reading. Autozeroing is defined as storing the zero pressure output reading and subtracting this from the device's
output during normal operations. Reference AN1636 for specific information. The specified accuracy assumes a maximum temperature
change of ± 5°C between autozero and measurement.
MPXV5004G
2
Sensors
Freescale Semiconductor
ON-CHIP TEMPERATURE COMPENSATION, CALIBRATION AND SIGNAL CONDITIONING
The performance over temperature is achieved by
integrating the shear-stress strain gauge, temperature
compensation, calibration and signal conditioning circuitry
onto a single monolithic chip.
Figure 2 illustrates the gauge configuration in the basic
chip carrier (Case 482). A fluorosilicone gel isolates the die
surface and wire bonds from the environment, while allowing
the pressure signal to be transmitted to the silicon diaphragm.
The MPXV5004G series sensor operating characteristics
are based on use of dry air as pressure media. Media, other
than dry air, may have adverse effects on sensor
performance and long-term reliability. Internal reliability and
qualification test for dry air, and other media, are available
Fluorosilicone
Gel Die Coat
from the factory. Contact the factory for information regarding
media tolerance in your application.
Figure 3 shows the recommended decoupling circuit for
interfacing the output of the MPXV5004G to the A/D input of
the microprocessor or microcontroller. Proper decoupling of
the power supply is recommended.
Figure 4 shows the sensor output signal relative to
pressure input. Typical, minimum and maximum output
curves are shown for operation over a temperature range of
10°C to 60°C using the decoupling circuit shown in Figure 3
The output will saturate outside of the specified pressure
range.
Stainless
Steel Cap
Die
P1
Thermoplastic
Case
Wire Bond
Lead Frame
P2
Die Bond
Differential Sensing
Element
Figure 2. Cross-Sectional Diagram (Not to Scale)
5.0
+5 V
Vout
OUTPUT
4.0
IPS
1.0 µF
0.01 µF
GND
470 pF
Output (V)
Vs
TRANSFER FUNCTION:
Vout = VS*[(0.2*P) + 0.2] ± 2.5% VFSS
VS = 5.0 V ± 0.25 Vdc
TEMP = 10 to 60°C
3.0
Typical
Max
2.0
Min
1.0
2 kPa
200 mm H2O
Figure 3. Recommended Power Supply Decoupling and
Output Filtering.
(For additional output filtering, please refer to Application
Note AN1646.)
4 kPa
400 mm H2O
Figure 4. Output versus Pressure Differential
at ±2.5% VFSS
(See Note 5 in Operating Characteristics)
MPXV5004G
Sensors
Freescale Semiconductor
3
PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE
Freescale Semiconductor designates the two sides of the
pressure sensor as the Pressure (P1) side and the Vacuum
(P2) side. The Pressure (P1) side is the side containing
silicone gel which isolates the die from the environment. The
Part Number
Freescale Semiconductor pressure sensor is designed to
operate with positive differential pressure applied, P1 > P2.
The Pressure (P1) side may be identified by using the
table below.
Case Type
MPXV5004GC6U/T1
Side with Port Attached
482A
MPXV5004G6U/T1
Pressure (P1) Side Identifier
Stainless Steel Cap
482
MPXV5004GC7U
482C
Side with Port Attached
MPXV5004G7U
482B
Stainless Steel Cap
MPXV5004GP
1369
Side with Port Attached
MPXV5004DP
1351
Side with Port Marking
MPXV5004GVP
1368
Stainless Steel Cap
INFORMATION FOR USING THE SMALL OUTLINE PACKAGE (CASE 482)
MINIMUM RECOMMENDED FOOTPRINT FOR SURFACE
MOUNTED APPLICATIONS
Surface mount board layout is a critical portion of the total
design. The footprint for the surface mount packages must be
the correct size to ensure proper solder connection interface
between the board and the package. With the correct
footprint, the packages will self align when subjected to a
solder reflow process. It is always recommended to design
boards with a solder mask layer to avoid bridging and
shorting between solder pads.
0.100 TYP 8X
2.54
0.660
16.76
0.060 TYP 8X
1.52
0.300
7.62
0.100 TYP 8X
2.54
inch
mm
SCALE 2:1
Figure 5. SOP Footprint (Case 482)
MPXV5004G
4
Sensors
Freescale Semiconductor
PACKAGE DIMENSIONS
-A-
D 8 PL
0.25 (0.010)
4
5
M
T B
S
A
S
NOTES:
1. DIMENSIONING AND TOLERANCING PER ANSI
Y14.5M, 1982.
2. CONTROLLING DIMENSION: INCH.
3. DIMENSION A AND B DO NOT INCLUDE MOLD
PROTRUSION.
4. MAXIMUM MOLD PROTRUSION 0.15 (0.006).
5. ALL VERTICAL SURFACES 5˚ TYPICAL DRAFT.
-BG
8
1
S
N
H
C
J
-TSEATING
PLANE
PIN 1 IDENTIFIER
K
M
DIM
A
B
C
D
G
H
J
K
M
N
S
INCHES
MIN
MAX
0.415 0.425
0.415 0.425
0.212 0.230
0.038 0.042
0.100 BSC
0.002 0.010
0.009 0.011
0.061 0.071
0˚
7˚
0.405 0.415
0.709 0.725
MILLIMETERS
MIN
MAX
10.54
10.79
10.54
10.79
5.38
5.84
0.96
1.07
2.54 BSC
0.05
0.25
0.23
0.28
1.55
1.80
0˚
7˚
10.29
10.54
18.01
18.41
CASE 482-01
ISSUE O
SMALL OUTLINE PACKAGE
SURFACE MOUNT
-A-
D
4
0.25 (0.010)
5
N
8 PL
M
T B
S
A
S
NOTES:
1. DIMENSIONING AND TOLERANCING PER ANSI
Y14.5M, 1982.
2. CONTROLLING DIMENSION: INCH.
3. DIMENSION A AND B DO NOT INCLUDE MOLD
PROTRUSION.
4. MAXIMUM MOLD PROTRUSION 0.15 (0.006).
5. ALL VERTICAL SURFACES 5˚ TYPICAL DRAFT.
-BG
8
1
S
W
V
C
H
J
-TK
M
PIN 1 IDENTIFIER
DIM
A
B
C
D
G
H
J
K
M
N
S
V
W
INCHES
MIN
MAX
0.415 0.425
0.415 0.425
0.500 0.520
0.038 0.042
0.100 BSC
0.002 0.010
0.009 0.011
0.061 0.071
0˚
7˚
0.444 0.448
0.709 0.725
0.245 0.255
0.115 0.125
MILLIMETERS
MIN
MAX
10.54
10.79
10.54
10.79
12.70
13.21
0.96
1.07
2.54 BSC
0.05
0.25
0.23
0.28
1.55
1.80
0˚
7˚
11.28
11.38
18.01
18.41
6.22
6.48
2.92
3.17
SEATING
PLANE
CASE 482A-01
ISSUE A
SMALL OUTLINE PACKAGE
SURFACE MOUNT
MPXV5004G
Sensors
Freescale Semiconductor
5
PACKAGE DIMENSIONS
-ANOTES:
1. DIMENSIONING AND TOLERANCING PER
ANSI Y14.5M, 1982.
2. CONTROLLING DIMENSION: INCH.
3. DIMENSION A AND B DO NOT INCLUDE
MOLD PROTRUSION.
4. MAXIMUM MOLD PROTRUSION 0.15 (0.006).
5. ALL VERTICAL SURFACES 5˚ TYPICAL DRAFT.
6. DIMENSION S TO CENTER OF LEAD WHEN
FORMED PARALLEL.
4
5
-BG
8
1
0.25 (0.010)
M
T B
D 8 PL
S
A
S
DETAIL X
S
PIN 1 IDENTIFIER
N
C
-T-
SEATING
PLANE
DIM
A
B
C
D
G
J
K
M
N
S
INCHES
MILLIMETERS
MIN
MAX MIN
MAX
0.415
0.425 10.54
10.79
0.415
0.425 10.54
10.79
0.210
0.220
5.33
5.59
0.026
0.034
0.66
0.864
0.100 BSC
2.54 BSC
0.009
0.011
0.23
0.28
0.100
0.120
2.54
3.05
0˚
15˚
0˚
15˚
0.405
0.415 10.29
10.54
0.540
0.560 13.72
14.22
K
M
J
DETAIL X
CASE 482B-03
ISSUE B
SMALL OUTLINE PACKAGE
THROUGH-HOLE
NOTES:
1. DIMENSIONING AND TOLERANCING PER
ANSI Y14.5M, 1982.
2. CONTROLLING DIMENSION: INCH.
3. DIMENSION A AND B DO NOT INCLUDE
MOLD PROTRUSION.
4. MAXIMUM MOLD PROTRUSION 0.15 (0.006).
5. ALL VERTICAL SURFACES 5˚ TYPICAL DRAFT.
6. DIMENSION S TO CENTER OF LEAD WHEN
FORMED PARALLEL.
-A4
5
N
-BG
0.25 (0.010)
8
1
M
T B
D 8 PL
S
A
S
DIM
A
B
C
D
G
J
K
M
N
S
V
W
DETAIL X
S
W
V
PIN 1
IDENTIFIER
C
-T-
INCHES
MILLIMETERS
MAX
MAX MIN
MIN
10.79
0.425 10.54
0.415
10.79
0.425 10.54
0.415
13.21
0.520 12.70
0.500
0.864
0.66
0.034
0.026
0.100 BSC
2.54 BSC
0.28
0.23
0.011
0.009
3.05
2.54
0.120
0.100
15˚
0˚
15˚
0˚
11.38
0.448 11.28
0.444
14.22
0.560 13.72
0.540
6.48
6.22
0.255
0.245
3.17
2.92
0.125
0.115
SEATING
PLANE
K
M
J
DETAIL X
CASE 482C-03
ISSUE B
SMALL OUTLINE PACKAGE
THROUGH-HOLE
MPXV5004G
6
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Freescale Semiconductor
PACKAGE DIMENSIONS
PAGE 1 OF 2
CASE 1351-01
ISSUE A
SMALL OUTLINE PACKAGE
SURFACE MOUNT
MPXV5004G
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Freescale Semiconductor
7
PACKAGE DIMENSIONS
PAGE 2 OF 2
CASE 1351-01
ISSUE A
SMALL OUTLINE PACKAGE
MPXV5004G
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PACKAGE DIMENSIONS
PAGE 1 OF 3
CASE 1368-01
ISSUE B
SMALL OUTLINE PACKAGE
SURFACE MOUNT
MPXV5004G
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PACKAGE DIMENSIONS
PAGE 2 OF 3
CASE 1368-01
ISSUE B
SMALL OUTLINE PACKAGE
SURFACE MOUNT
MPXV5004G
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PACKAGE DIMENSIONS
PAGE 3 OF 3
CASE 1368-01
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SURFACE MOUNT
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PACKAGE DIMENSIONS
PAGE 1 OF 2
CASE 1369-01
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SMALL OUTLINE PACKAGE
MPXV5004G
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PACKAGE DIMENSIONS
PAGE 2 OF 2
CASE 1369-01
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SMALL OUTLINE PACKAGE
MPXV5004G
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13
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MPXV5004G
Rev. 10
01/2007
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