QFET ! " # ! ! ! ! $ ! % % % % % % % &'()*'+ ,-' './Ω0+-)'+ 1 2 )3* 4 12 )3* 4 )''5 ! 6 !!$ " )&*° 7 8 ! " ! " ! 6 ! + " " + 2-.*94 2-)''94 6 : + ; + < 6 : (! < ,!(! < : >, !!$ : 2-.*94 (! !$ : < )*' + &' ( *' ( ./' ( ±.* + )''' &' ( 33 ?' 33' .. **A)&* = +$ @ @$9 9 3'' 9 "!.*9 , 7 )$/ * = ,θ ,θ , > ,θ , = , = ( " ' B* 9@ ' .B 9@ B' 9@ )*' + ' )* +$9 +-)*'++-'+ ) µ( +-).'+-)*'9 C+ C > + +-'+6-.*'µ( ∆C+ $∆ C > + 6-.*'µ(, 6 D; + .*9 )' µ( 6 ; C1 > +-.*++-'+ )'' ( 6 ; C1 > ,! +-.*++-'+ )'' ( .' B' + ' '.3 ' './ Ω B/ + ; + +-+6-.*'µ( , , +-)'+6-3*( +-B'+6-3*( 6 ,! , G ; G ; G ; +-.*++-'+ -) 'E# B)*' *B'' /B' ))'' )3* )&* ?' )3' +-&*+6-&'( ,-.*Ω +-).'+6-&'( +-)'+ B.' /*' 3B' ?F' .F' *F' )3* )&* .* ?* 6 7 &' ( 6 7 : +-'+6-&'( + ./' ( + )* + ,!, ! )*' G ,!, ! ' ?& µ +-'+6-&'( 6$-)''($µ !" # $%#&##' ( # )*#+,-*.//Ω, 0 , -*.1 **.1µ /2/0 " !" **µ 3%(%( 4 5 % 6 # % & !" # $% Ω !" ! "#$ " #$ & %' $ # - . $* / !" $* &' ()()*( (+(,(-./ µ µ 0 0 "1()23$3 ' ()**% + # &, ()** $* ! " # $ % " ! ! " && $$*" $01% * *9 ** 8 / 70 ** 8 30 70 #. "$01% * 30 7 ) 30 :*4 33 70 70 *4 2* 3 $01% * 30 300 .0 .0 300 33 300 .0 3 7 3 30 33 33 4. " 5 $01% * 30 ! 03 " 7 70 !" ########################## 33 ; 03 33 15.60 ±0.20 18.70 ±0.20 23.40 ±0.20 19.90 ±0.20 1.00 ±0.20 16.50 ±0.30 3.00 ±0.20 +0.15 1.50 –0.05 3.50 ±0.20 2.00 ±0.20 9.60 ±0.20 4.80 ±0.20 3.80 ±0.20 ø3.20 ±0.10 12.76 ±0.20 13.60 ±0.20 13.90 ±0.20 ! 1.40 ±0.20 +0.15 5.45TYP [5.45 ±0.30] 5.45TYP [5.45 ±0.30] 0.60 –0.05 > # " 7 ! > . H ! " #$%&H '( ') +$% $+,% - . '* (6,E61<6I,,<<,+<E<,6;E(J<E(;<@6EII,E<,6<(K :,I E<,<6 6:,+< ,<16(C616K I6 , <6; (6,E61 < (I< (K 16(C616K (,66; I E< (::16(6 , I< (K :,I , 6,I6 <,6C< E<,<6L <6E<,<6+<K(K16<<I<,6:(<,6;E,E<,6;EE<, (6,E61 :,I (,< (IE,6D< , I< ( ,66(1 :< 6 16< I::, <+6< , K< @6EI E< <M:,< @,6< (::,+(1 (6,E61 <6I, 6<,(6(1 ( N ) 1! ! 2 4 " 2"4 2 4 ! " " " 7 8 . ( ! " " 7 ! ! (! ! " 6 : ! #$ 6 " %$ % # !6 ! : "" ! > ! : ! > ! 6 : " "