Intersema MS5201-BN Smd pressure sensor Datasheet

MS52XX (RoHS*)
SMD PRESSURE SENSOR
•
•
•
•
•
•
1 and 12 bar absolute pressure range
Uncompensated
Piezoresistive silicon micromachined sensor
Surface mount 7.6 x 7.6 mm
Low noise, high sensitivity, high linearity
RoHS-compatible & Pb-free*
DESCRIPTION
The MS52XX SMD pressure sensor series is designed for pressure sensor systems with highest demands on
resolution and accuracy. The device consists of a silicon micromachined pressure sensor die mounted on a 7.6 x
7.6 mm ceramic carrier protected by a metal cap. The MS52XX can be delivered in a highly sensitive version
giving a maximal output voltage or in a highly linear version giving a linear output voltage directly proportional to
the applied pressure.
High Sensitivity Version
High Linearity Versions
Full Scale
Pressure
Product Code
Full Scale Span / Linearity
Product Code
Full Scale Span / Linearity
1 bar
MS5201-AN
240 mV / ±0.2% FS
MS5201-BN
150 mV / ±0.05% FS
MS5212-BM
150 mV / ±0.05% FS
12 bar
FEATURES
• Low cost SMD ceramic package
• High reliability, low drift
• -40°C to +125 °C operation range
• Optional: Gel protection against humidity and water
APPLICATIONS
• Absolute pressure sensor systems
• High resolution altimeters, variometers
• Barometers
• Engine controls
• Diver’s computers
• Tire pressure
PIN CONFIGURATION
3: VS+
4: OUT+
1: OUT-
2: GND
*
The European RoHS directive 2002/95/EC (Restriction of the use of certain Hazardous Substances in electrical and electronic equipment)
bans the use of lead, mercury, cadmium, hexavalent chromium and polybrominated biphenyls (PBB) or polybrominated diphenyl ethers (PBDE).
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PIN DESCRIPTION
Pin Name
Pin No.
Function
OUT-
1
Negative output voltage of Wheatstone bridge
GND
2
Ground
VS+
3
Supply voltage of Wheatstone bridge
OUT+
4
Positive output voltage of Wheatstone bridge
ABSOLUTE MAXIMUM RATINGS
Parameter
Supply voltage
Storage temperature
Overpressure
MS5201-AN
MS5201-BN
MS5212-BM
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Symbol
Conditions
Min
Max
-40
-
20
+125
5
10
30
o
VS+
TS
Ta = 25 C
P
Ta = 25 oC
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Unit
V
C
o
bar
2
ELECTRICAL CHARACTERISTICS
HIGH SENSITIVITY VERSION
(VS+ = 5 V; Ta = 25°C )
Parameter
Min
Typ
Max
Unit
0
-
1
bar
Full-scale span (FS)
190
240
290
mV
Sensitivity
190
240
290
mV/bar
-
±0.15
±0.4
% FS
Operating temperature range
-40
-
125
°C
Zero pressure offset
-40
0
40
mV
Pressure hysteresis
-
-
±0.20
% FS
2, 6
Temperature hysteresis
-
0.3
0.8
% FS
3, 6
Repeatability
-
-
±0.20
% FS
4, 6
3.0
3.4
3.8
kΩ
+2’400
-1’500
-80
2’900
-1’900
-
+3’300
-2’300
+80
ppm/°C
ppm/°C
µV/°C
Operating pressure range
Linearity
MS5201-AN
Bridge resistance
Temperature coefficient of resistance
Temperature coefficient of span
Temperature coefficient of offset
Notes
1, 6
5, 6
5, 6
5, 6
NOTES
1) Deviation at one half full-scale pressure from the least squares best line fit over pressure range.
2) Maximum difference of output voltage after 1 pressure cycle at any pressure within the operating pressure
range.
3) Maximum difference in offset after one thermal cycle from -40°C to +125°C.
4) Same as 2) after 10 pressure cycles.
5) Slope of the endpoint straight line from 25°C to 60°C.
6) Not 100% tested.
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ELECTRICAL CHARACTERISTICS (CONT.)
HIGH LINEARITY VERSIONS
(VS+ = 5 V; Ta = 25°C )
Parameter
Min
Typ
Max
Unit
0
-
1
bar
Full-scale span (FS)
120
150
180
mV
Sensitivity
120
150
180
mV/bar
Linearity
-
±0.05
±0.2
% FS
Operating pressure range
0
-
12
bar
Full-scale span (FS)
120
150
180
mV
Sensitivity
10
12.5
15
mV/bar
-
±0.05
±0.2
% FS
Operating temperature range
-40
-
125
°C
Zero pressure offset
-40
0
40
mV
Pressure hysteresis
-
-
±0.2
% FS
2, 6
Temperature hysteresis
-
0.3
0.8
% FS
3, 6
Repeatability
-
-
±0.2
% FS
4, 6, 7
3.0
3.4
3.8
kΩ
+2’400
-1’500
-80
2’900
-1’900
-
+3’300
-2’300
+80
ppm/°C
ppm/°C
µV/°C
Operating pressure range
MS5201-BN
MS5212-BM
Linearity
All Ranges
Bridge resistance
Temperature coefficient of resistance
Temperature coefficient of span
Temperature coefficient of offset
Notes
1, 6
1, 6
5, 6
5, 6
5, 6
NOTES
1) Deviation at one half full-scale pressure from the least squares best line fit over pressure range.
2) Maximum difference of output voltage after 1 pressure cycle at any pressure within the operating pressure
range.
3) Maximum difference in offset after one thermal cycle from -40°C to +120°C.
4) Same as 2) after 10 pressure cycles.
5) Slope of the endpoint straight line from 25°C to 60°C.
6) Not 100% tested.
7) MS5212-BM: Max. 0.3% FS.
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APPLICATION INFORMATION
GENERAL
The MS52XX is a miniaturised absolute pressure sensor series that has been designed for surface mounting
applications. Its main advantages are the high reliability of the semiconductor sensor and a design which makes it
suitable for applications requiring small-scale and cost-efficient solutions.
The sensor element of the MS52XX consists of a micromachined silicone membrane with Pyrex glass waferbonded under vacuum to the backside for reference pressure. Implanted resistors make use of the piezoresistive effect to sense pressure applied to the membrane. The sensor is mounted in a special process allowing
best-offset stability making the part suitable for direct PCB assembly.
Typical applications for this miniaturised pressure sensor MS52XX are altitude measurements and the
measurement of atmospheric reference pressure in medical and industrial equipment as well as in automotive and
household applications, consumer electronics and pneumatics.
Full Scale
Pressure
High Sensitivity Version
(MS5201-AN)
High Linearity Versions
(MS5201-BN and MS5212-BM)
1 bar
Variometer, Altimeter, Barometer
High End Altimeter, Medical Instrumentation
12 bar
Pneumatic Brake, Diving Computer
LIGHT SENSITIVITY
The MS52XX is sensitive to sunlight, especially to infrared light sources. This is due to the strong photo effect of
silicon. As the effect is reversible there will be no damage, but the user has to take care that in the final product
the sensor cannot be exposed to direct light during operation. This can be achieved for instance by placing
mechanical parts with holes in such way that light cannot go trough.
CONNECTION TO PCB
The package outline of the module allows the use of a flexible PCB to connect it. This can be important for
applications in watches and other special devices, and will also reduce mechanical stress on the device.
For applications subjected to mechanical shock, it is recommended to enhance the mechanical reliability of the
solder junctions by covering the rim or the corners of MS52XX ceramic substrate with glue or Globtop-like
material.
SOLDERING
Please refer to the application note AN808 for all soldering issues.
CLEANING
The MS52XX has been manufactured under cleanroom conditions. Each device has been inspected for the
homogeneity and the cleanness of the silicone gel. It is therefore recommended to assemble the sensor under
class 10’000 or better conditions. Should this not be possible, it is recommended to protect the sensor opening
during assembly from entering particles and dust. To avoid cleaning of the PCB, solder paste of type “no-clean”
shall be used. Cleaning might damage the sensor.
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PACKAGE OUTLINES
Device package outlines of MS5201-AN and MS5201-BN
(Metal cap with nickel finish, gel protection of bonding wires)
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PACKAGE OUTLINES (CONT.)
Device package outlines of MS5212-BM (Stainless steel cap, no gel protection of bonding wires)
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RECOMMENDED PAD LAYOUT
Recommended pad layout for soldering of the MS52xx on a printed circuit board
ORDERING INFORMATION
Product Code
Product
Art.-Nr.
Package
MS5201-AN
Pressure sensor 1 bar
High sensitivity
325201002
MS5201-BN
Pressure sensor 1 bar
High linearity
325201000
SMD hybrid with solder bumps,
metal cap with nickel finish,
drop of gel on sensor, no gel
protection of the bonding wires
MS5212-BM
transparent gel
MS5212-BM
white gel
Pressure sensor 12 bar
High linearity
325212001
325212002
SMD hybrid with solder bumps,
Stainless steel cap,
Gel protection of sensor and
bonding wires
Comment
Same sensor for
both articles,
Only the gel
protection
changes
FACTORY CONTACTS
Intersema Sensoric SA
Ch. Chapons-des-Prés 11
CH-2022 BEVAIX
SWITZERLAND
Tel. 032 847 9550
Tel. Int. +41 32 847 9550
Telefax +41 32 847 9569
e-mail:
http://www.intersema.ch
NOTICE
Intersema reserves the right to make changes to the products contained in this data sheet in order to improve the design or performance and to
supply the best possible products. Intersema assumes no responsibility for the use of any circuits shown in this data sheet, conveys no license
under any patent or other rights unless otherwise specified in this data sheet, and makes no claim that the circuits are free from patent
infringement. Applications for any devices shown in this data sheet are for illustration only and Intersema makes no claim or warranty that such
applications will be suitable for the use specified without further testing or modification.
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