CPI CPW2870P5-01 Gen 2.5 series dc sputtering power supply Datasheet

GEN 2.5 SERIES
DC SPUTTERING
POWER SUPPLY
CPW2870L5-01, M5-01, P5-01
6kW, 12kW, 24 kW
200/208 VAC
DESCRIPTION
In the 1980s, CPI Canada pioneered Resonant Power Conversion Technology (Resmode) for high power processing.
This method offers unique advantages in sputtering systems in the areas of wide load range (without tap changing),
reliability (using an inherently short-circuit proof, rugged power chain), highest efficiency with zero switching losses
and wide control range (from < 1% to full power).
CPI has continued to evolve this technology into many different models. When it comes to Watts/lbs (weight),
Watts/$ (price), and proven field reliability, CPI is unmatched in the industry.
6kW & 12kW – 200/208 VAC (shown)
SPECIFICATIONS
Input power requirements:
Efficiency:
180 - 229 VAC
50/60Hz, 4 wire
3 phase + gnd
> 90%
Cooling: Forced air:
T ambient = 45C max. at full power
through
Input/ Output interlocks for safe operation
Protection:
Over temperature
Over-current, over-voltage, over-power
Input undervoltage
Input/ Output Power connections are hard wired
cable strain reliefs.
MODELS
Power setting:
Ignition voltage:
Output voltage:
Output Current:
Weight (approx):
User Interface:
CPW2870L5-01
CPW2870M5-01 CPW2870P5-01
6kW/2.5kW/600W
12kW/6kW/3kW
1500V
1500V
1000V max
900V max
10A max
25A max
50 lbs
67 lbs
Remote analog control and sensing
24kW/12kW/6kW
1500V
900V max
50A max
134 lbs (master & slave)
OPTIONS
Arc Suppression Device:
Can accommodate a 25A (or 50A) single arc suppression unit.
Arc Counter:
Reads output signal from Arc Suppression Device.
PRODUCT ADVANTAGES
Fast Delivery time:
Typically 2 to 4 weeks for unforecasted units
JIT for scheduled production
Wide load range:
1000V & 10A, 900V & 25A, 900V & 50A to cover many different processes
running at different powers, different materials and argon pressures without tap
changes.
Product Complaint:
IEC 950, UL 1950, CSA 950
Designed to meet NEC, NFPA 79, S2-93
Reliability designed in:
Extensive worst case analysis design reviews
Based on continuous duty cycle
Uses established technology with proven reliability record of >400,000
hours MTBF.
Reliability built in and tested:
E.S.S. (Environmental Stress Screening) on 100% production
• Random frequency vibration along 3 axis (20 grms)
• Rapid temperature change (25°C/ min)
ISO 9001
Communications & Power Industries Canada Inc.
45 River Drive
Georgetown, Ontario, Canada L7G 2J4
Tel: (905) 877-0161 Fax: (905) 877-5327
Email: marketing @ cmp.cpii.com www.cpii.com/cmp
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