HP B1530A Agilent b1500a semiconductor device analyzer Datasheet

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Agilent B1500A
Semiconductor Device Analyzer
Technical Overview
Introduction
The Agilent B1500A Semiconductor
Device Analyzer with EasyEXPERT
software is a complete parametric
test solution. It supports all aspects
of parametric test, from basic manual
measurement to test automation across a
wafer in conjunction with a semiautomatic
wafer prober. Because the B1500A utilizes
the Microsoft® Windows® XP Professional
operating system, it integrates easily into
your PC-based work environment. Best of
all, the familiar Windows graphical user
interface (GUI) and convenient online help
menus minimize the need for instrument
training.
Basic Features
• Multi-frequency capacitance measurement unit (MFCMU) available
• PC-based instrument with touch screen
interface; optional USB keyboard and
mouse available
• High-voltage semiconductor pulse
generator unit (HV-SPGU) available
• EasyEXPERT software with over 200
categorized application tests supplied
with the instrument
• Performs current versus voltage (IV)
measurements
• Performs capacitance versus voltage
(CV), capacitance versus time (Ct)
and capacitance versus frequency (Cf)
measurements
• Performs quasi-static CV (QSCV)
measurements
• High voltage pulse forcing up to 40 V
with ALWG and voltage monitor
capabilities.
• Waveform generator/fast measurement
unit (WGFMU) available
• High-resolution, analog-to-digital
converter (ADC) available to all installed
SMUs
• High-speed ADC present on each
installed SMU
• SMU/AUX path switching supported on
the atto-sense and switch unit (ASU)
• SMU/MFCMU switching supported
using SMU CMU unify unit (SCUU) and
guard switch unit (GSWU)
• MFCMU automatically identifies
capacitance measurement accessories
• Performs fast IV measurement synchronized with the applied waveforms for
accurate transient IV or time-domain
measurements
• WGFMU/SMU path switching supported
on the remote-sense and switch unit
(RSU)
• Front-panel Classic Test measurement
modes supported: single-channel sweep,
multi-channel sweep, time sampling,
list sweep, CV sweep and direct control
(GPIB FLEX)
• Self-test, self-calibration, diagnostics
• GUI-based control of the Agilent
B2200A, and B2201A switching matrices
• Modular mainframe with ten module
slots and one 4.2 A ground unit
• Multiple source/monitor unit (SMU)
types available: medium power
(MPSMU), high-power (HPSMU), and
high-resolution (HRSMU)
• GPIB port for instrument control
Specification conditions
This document lists specifications and
supplemental information for the B1500A
and its associated modules. The specifications are the standards against which the
B1500A and its associated modules are
tested. When the B1500A and any of its
associated modules are shipped from the
factory, they meet the specifications. The
“supplemental” information and “typical”
entries in the following specifications are
not warranted, but provide useful information about the functions and performance
of the instrument.
The measurement and output accuracy
are specified at the rear panel connector
terminals when referenced to the Zero
Check terminal. The B1530A WGFMU
measurement and output accuracy are
specified at the output terminal of the RSU.
Accuracy is specified under the following
conditions:
1. Temperature: 23 °C ±5 °C
2. Humidity: 20 % to 60 %
3. After 40 minute warm-up followed by
self-calibration
4. Ambient temperature change less than
±1 °C after self-calibration execution,
not applicable for MFCMU and WGFMU
5. Measurement made within one hour
after self-calibration execution, not
applicable for MFCMU and WGFMU
6. Calibration period: 1 year
7. SMU integration time setting:
1 PLC (1 nA to 1A range, voltage range)
20 PLC (100 pA range)
50 PLC (1 pA to 10 pA range)
Averaging of high-speed ADC:
128 samples per 1 PLC
8. SMU filter: ON (for SMUs)
9. SMU measurement terminal connection:
Kelvin connection
10. WGFMU load capacitance: 25 pF or less
Note: Agilent Technologies is responsible
for removing, installing, and replacing the
B1500A modules. Contact your nearest
Agilent Technologies to install and
calibrate the B1500A modules
B1500A specification
Supported plug-in modules
The B1500A supports ten slots for plug-in modules.
Part
Description
Slots
Range of operation
number
occupied
B1510A High power source/monitor unit (HPSMU)
2
-200 V to 200 V, -1 A to 1 A
B1511A Medium power source/monitor unit (MPSMU)
1
-100 V to 100 V, -100 mA to 100 mA
B1517A High resolution source/monitor unit (HRSMU)
1
-100 V to 100 V, -100 mA to 100 mA
E5288A¹ Atto-sense and switch unit (ASU)
—
-100 V to 100 V, -100 mA to 100 mA
B1520A Multi frequency capacitance measurement unit (MFCMU)
1
1 kHz to 5 MHz
B1525A High voltage semiconductor pulse generator unit (HV-SPGU)
1
±40 V (80 Vp-p)
B1530A Waveform generator/fast measurement unit (WGFMU)
1
PG Mode: -3 V to 3 V, -5 V to 5 V
Fast IV Mode: -3 V to 3 V, -5 V to
5 V, 0 V to 10 V, -10 V to 0 V
Measure
resolution
2 µV, 10 fA
0.5 µV, 10 fA
0.5 µV, 1 fA
0.5 µV, 100 aA
0.035 fFrms²
50 μV
0.014 % of the
range 3
1. This is connected with the B1517A high resolution SMU.
2. Dispersion of measurement values when connecting a DUT 10 pF to the measurement terminals under the measurement condition of frequency
1 MHz, signal level 250 mVac, and measurement time 1 PLC. The display resolution is 0.000001 fF at 1 fF order by 6 digits display.
3. Display resolution
2
Maximum module configuration
The B1500A can contain up to 4 dual-slot
SMUs (HPSMUs) and 2 single-slot SMUs
(MPSMUs and/or HRSMUs); it can contain
up to 10 single-slot SMUs (MPSMUs
and/or HRSMUs); and it can contain any
combination of dual-slot and single-slot
SMUs between these two extremes.
Only one single-slot MFCMU can be
installed per B1500A mainframe. Up to five
single-slot HV-SPGUs can be installed per
mainframe. Up to five single-slot WGFMUs
can be installed per mainframe.
When one or more WGFMU modules are
installed in the B1500A mainframe, the
following table applies. Multiply the values
given below by the number of installed
modules of that type and add the products
together. The sum of the products must be
less than or equal to 59 for the configuration to be permissible.
MPSMU
HRSMU
HPSMU
MFCMU
HV-SPGU
WGFMU
GNDU supplemental information
2
2
14
7
12
10
Load capacitance: 1 µF
Cable resistance:
For IS ≤ 1.6 A: force line R < 1 Ω
For 1.6 A < IS ≤ 2.0 A: force line R < 0.7 Ω
For 2.0 A < IS ≤ 4.2 A: force line R < 0.35 Ω
Maximum voltage between common
and ground
For all cases: sense line R ≤ 10 Ω
Where IS is the current being sunk by
the GNDU.
≤ ±42 V
Ground unit (GNDU) specification
The GNDU is furnished standard with the
B1500A mainframe.
Output voltage: 0 V ±100 µV
Maximum sink current: ±4.2 A
Output terminal/connection:
Triaxial connector, Kelvin (remote sensing)
MPSMU and HRSMU module specifications
Voltage range, resolution, and accuracy (high resolution ADC)
Voltage range
±0.5 V
±2 V
±5 V
±20 V
±40 V
±100 V
Force resolution
25 µV
100 µV
250 µV
1 mV
2 mV
5 mV
Measure resolution
0.5 µV
2 µV
5 µV
20 µV
40 µV
100 µV
Force accuracy¹
±(0.018 % + 150 µV)
±(0.018 % + 400 µV)
±(0.018 % + 750 µV)
±(0.018 % + 3 mV)
±(0.018 % + 6 mV)
±(0.018 % + 15 mV)
Measure accuracy¹
±(0.01 % + 120 µV)
±(0.01 % + 140 µV)
±(0.009 % + 250 µV)
±(0.009 % + 900 µV)
±(0.01 % + 1 mV)
±(0.012 % + 2.5 mV)
Maximum current
100 mA
100 mA
100 mA
100 mA
²
²
1. ± (% of read value + offset voltage V)
2. 100 mA (Vo ≤ 20 V), 50 mA (20 V < Vo ≤ 40 V), 20 mA (40 V < Vo ≤ 100 V), Vo is the output voltage in Volts.
Current range, resolution, and accuracy (high resolution ADC)
SMU type
Current
range
HRSMU w/ ASU ±1 pA
HRSMU
±10 pA
±100 pA
MPSMU
±1 nA
±10 nA
±100 nA
±1 µA
±10 µA
±100 µA
±1 mA
±10 mA
±100 mA
Force
Measure
resolution resolution¹,²
1 fA
100 aA
5 fA
400 aA (with ASU)
1 fA (HRSMU)
5 fA
500 aA (with ASU)
2 fA (HRSMU)
50 fA
10 fA
500 fA
10 fA
5 pA
100 fA
50 pA
1 pA
500 pA
10 pA
5 nA
100 pA
50 nA
1 nA
500 nA
10 nA
5 µA
100 nA
Force accuracy³
Measure accuracy³
±(0.9 %+15 fA)
±(0.46 %+30 fA+10 aA x Vo)
±(0.9 %+12 fA)
±(0.46 %+15 fA+10 aA x Vo)
Maximum
voltage
100 V
100 V
±(0.3 %+100 fA+100 aA x Vo) ±(0.3 %+30 fA+100 aA x Vo)
100 V
±(0.1 %+300 fA+1 fA x Vo)
±(0.1 %+3 pA+10 fA x Vo)
±(0.05 %+30 pA+100 fA x Vo)
±(0.05 %+300 pA+1 pA x Vo)
±(0.05 %+3 nA+10 pA x Vo)
±(0.035 %+15 nA+100 pA x Vo)
±(0.04 %+150 nA+1 nA x Vo)
±(0.04 %+1.5 µA+10 nA x Vo)
±(0.045 %+15 µA+100 nA x Vo)
100 V
100 V
100 V
100 V
100 V
100 V
100 V
100 V
±(0.1 %+200 fA+1 fA x Vo)
±(0.1 %+1 pA+10 fA x Vo)
±(0.05 %+20 pA+100 fA x Vo)
±(0.05 %+100 pA+1 pA x Vo)
±(0.04 %+2 nA+10 pA x Vo)
±(0.03 %+3 nA+100 pA x Vo)
±(0.03 %+60 nA+1 nA x Vo)
±(0.03 %+200 nA+10 nA x Vo)
±(0.04 %+6 µA+100 nA x Vo)
4
1. Specified measurement resolution is limited by fundamental noise limits. Minimum displayed resolution is 1 aA at 1 pA range by 6 digits.
2. Measurements made in the lower ranges can be greatly impacted by vibrations and shocks. These specifications assume an environment free of
these factors.
3. ± (% of read value + offset current (fixed part determined by the output/measurement range + proportional part that is multiplied by Vo))
4. 100 V (Io ≤ 20 mA), 40 V (20 mA < Io ≤ 50 mA), 20 V (50 mA < Io ≤ 100 mA), Io is the output current in Amps.
3
Voltage range, resolution, and accuracy (high speed ADC)
Voltage range
±0.5 V
±2 V
±5 V
±20 V
±40 V
±100 V
Force resolution
25 µV
100 µV
250 µV
1 mV
2 mV
5 mV
Measure resolution
0.5 µV
2 µV
5 µV
20 µV
40 µV
100 µV
Force accuracy¹
±(0.018 % + 150 µV)
±(0.018 % + 400 µV)
±(0.018 % + 750 µV)
±(0.018 % + 3 mV)
±(0.018 % + 6 mV)
±(0.018 % + 15 mV)
Measure accuracy¹
±(0.01 % + 250 µV)
±(0.01 % + 700 µV)
±(0.01 % + 2 mV)
±(0.01 % + 4 mV)
±(0.015 % + 8 mV)
±(0.02 % + 20 mV)
Maximum current
100 mA
100 mA
100 mA
100 mA
²
²
1. ± (% of read value + offset voltage V)
2. 100 mA (Vo ≤ 20 V), 50 mA (20 V < Vo ≤ 40 V), 20 mA (40 V < Vo ≤ 100 V), Vo is the output voltage in Volts.
Current range, resolution, and accuracy (high speed ADC)
SMU type
Current
range
HRSMU w/ ASU ±1 pA
HRSMU
±10 pA
±100 pA
MPSMU
±1 nA
±10 nA
±100 nA
±1 µA
±10 µA
±100 µA
±1 mA
±10 mA
±100 mA
Force
Measure
resolution resolution¹,²
1 fA
100 aA
5 fA
400 aA (with ASU)
1 fA (HRSMU)
5 fA
500 aA (with ASU)
2 fA (HRSMU)
50 fA
10 fA
500 fA
10 fA
5 pA
100 fA
50 pA
1 pA
500 pA
10 pA
5 nA
100 pA
50 nA
1 nA
500 nA
10 nA
5 µA
100 nA
Force accuracy³
Measure accuracy³
±(0.9 %+15 fA)
±(0.46 %+30 fA+10 aA x Vo)
±(1.8 %+12 fA)
±(0.5 %+15 fA+10 aA x Vo)
Maximum
voltage
100 V
100 V
±(0.3 %+100 fA+100 aA x Vo) ±(0.5 %+40 fA+100 aA x Vo)
100 V
±(0.1 %+300 fA+1 fA x Vo)
±(0.1 %+3 pA+10 fA x Vo)
±(0.05 %+30 pA+100 fA x Vo)
±(0.05 %+300 pA+1 pA x Vo)
±(0.05 %+3 nA+10 pA x Vo)
±(0.035 %+15 nA+100 pA x Vo)
±(0.04 %+150 nA+1 nA x Vo)
±(0.04 %+1.5 µA+10 nA x Vo)
±(0.045 %+15 µA+100 nA x Vo)
100 V
100 V
100 V
100 V
100 V
100 V
100 V
100 V
±(0.25 %+300 fA+1 fA x Vo)
±(0.25 %+2 pA+10 fA x Vo)
±(0.1 %+20 pA+100 fA x Vo)
±(0.1 %+200 pA+1 pA x Vo)
±(0.05 %+2 nA+10 pA x Vo)
±(0.05 %+20 nA+100 pA x Vo)
±(0.04 %+200 nA+1 nA x Vo)
±(0.04 %+2 µA+10 nA x Vo)
±(0.1 %+20 µA+100 nA x Vo)
4
1. Specified measurement resolution is limited by fundamental noise limits. Minimum displayed resolution is 1 aA at 1 pA range by 6 digits.
2. Measurements made in the lower ranges can be greatly impacted by vibrations and shocks. These specifications assume an environment free of
these factors.
3. ± (% of read value + offset current (fixed part determined by the output/measurement range + proportional part that is multiplied by Vo))
4. 100 V (Io ≤ 20 mA), 40 V (20 mA < Io ≤ 50 mA), 20 V (50 mA < Io ≤ 100 mA), Io is the output current in Amps.
MPSMU and HRSMU measurement and output range
Power consumption
Voltage source mode
Voltage range
0.5 V
2V
Current (mA)
Power
20 x Ic (W)
20 x Ic (W)
5V
20 x Ic (W)
20 V
20 x Ic (W)
40 V
40 x Ic (W)
100 V
100 x Ic (W)
Where Ic is the current compliance setting.
100
50
20
-100
-40
-20
20
-20
Current source mode
Voltage compliance
Vc ≤ 20
20 < Vc ≤ 40
40 < Vc ≤ 100
Power
20 x Io (W)
40 x Io (W)
100 x Io (W)
Where Vc is the voltage compliance setting
and Io is output current.
4
-50
-100
40
100
Voltage (V)
HPSMU module specifications
Voltage range, resolution, and accuracy (high resolution ADC)
Voltage
range
±2 V
±20 V
±40 V
±100 V
±200 V
Force
resolution
100 µV
1 mV
2 mV
5 mV
10 mV
Measure
resolution
2 µV
20 µV
40 µV
100 µV
200 µV
Force accuracy¹
Measure accuracy¹
±(0.018 % + 400 µV)
±(0.018 % + 3 mV)
±(0.018 % + 6 mV)
±(0.018 % + 15 mV)
±(0.018 % + 30 mV)
±(0.01 % + 140 µV)
±(0.01 % + 140 µV)
±(0.01 % + 1 mV)
±(0.012 % + 2.5 mV)
±(0.014 % + 2.8 mV)
Maximum current
1A
1A
500 mA
125 mA
50 mA
1. ± (% of read value + offset voltage V)
Current range, resolution, and accuracy (high resolution ADC)
Current
range
±1 nA
±10 nA
±100 nA
±1 µA
±10 µA
±100 µA
±1 mA
±10 mA
±100 mA
±1 A
Force
resolution
50 fA
500 fA
5 pA
50 pA
500 pA
5 nA
50 nA
500 nA
5 µA
50 µA
Measure
resolution¹
10 fA
10 fA
100 fA
1 pA
10 pA
100 pA
1 nA
10 nA
100 nA
1 µA
Force accuracy²
Measure accuracy²
±(0.1 %+300 fA+1 fA x Vo)
±(0.1 %+3 pA+10 fA x Vo)
±(0.05 %+30 pA+100 fA x Vo)
±(0.05 %+300 pA+1 pA x Vo)
±(0.05 %+3 nA+10 pA x Vo)
±(0.035 %+15 nA+100 pA x Vo)
±(0.04 %+150 nA+1 nA x Vo)
±(0.04 %+1.5 nA+10 nA x Vo)
±(0.045 %+15 µA+100 nA x Vo)
±(0.4 %+300 µA+1 µA x Vo)
±(0.1 %+300 fA+1 fA x Vo)
±(0.1 %+2.5 pA+10 fA x Vo)
±(0.05 %+25 pA+100 fA x Vo)
±(0.05 %+100 pA+1 pA x Vo)
±(0.04 %+2 nA+10 pA x Vo)
±(0.03 %+3 nA+100 pA x Vo)
±(0.03 %+60 nA+1 nA x Vo)
±(0.03 %+200 nA+10 nA x Vo)
±(0.04 %+6 µA+100 nA x Vo)
±(0.4 %+150 µA+1 µA x Vo)
Maximum voltage
200 V
200 V
200 V
200 V
200 V
200 V
200 V
200 V
³
³
1. Specified measurement resolution is limited by fundamental noise limits.
2. ± (% of read value + offset current (fixed part determined by the output/measurement range + proportional part that is multiplied by Vo))
3. 200 V (Io ≤ 50 mA), 100 V (50 mA < Io ≤ 125 mA), 40 V (125 mA < Io ≤ 500 mA), 20 V (500 mA < Io ≤ 1 A), Io is the output current in Amps.
Voltage range, resolution, and accuracy (high speed ADC)
Voltage
range
±2 V
±20 V
±40 V
±100 V
±200 V
Force
resolution
100 µV
1 mV
2 mV
5 mV
10 mV
Measure
resolution
2 µV
20 µV
40 µV
100 µV
200 µV
Force accuracy¹
Measure accuracy¹
±(0.018 % + 400 µV)
±(0.018 % + 3 mV)
±(0.018 % + 6 mV)
±(0.018 % + 15 mV)
±(0.018 % + 30 mV)
±(0.01 % + 700 µV)
±(0.01 % + 4 mV)
±(0.015 % + 8 mV)
±(0.02 % + 20 mV)
±(0.035 % + 40 mV)
Maximum current
1A
1A
500 mA
125 mA
50 mA
1. ± (% of read value + offset voltage V)
5
Current range, resolution, and accuracy (high speed ADC)
Current
range
±1 nA
±10 nA
±100 nA
±1 µA
±10 µA
±100 µA
±1 mA
±10 mA
±100 mA
±1 A
Force
resolution
50 fA
500 fA
5 pA
50 pA
500 pA
5 nA
50 nA
500 nA
5 µA
50 µA
Measure
resolution¹
10 fA
10 fA
100 fA
1 pA
10 pA
100 pA
1 nA
10 nA
100 nA
1 µA
Force accuracy²
Measure accuracy²
Maximum voltage
±(0.1 %+300 fA+1 fA x Vo)
±(0.1 %+3 pA+10 fA x Vo)
±(0.05 %+30 pA+100 fA x Vo)
±(0.05 %+300 pA+1 pA x Vo)
±(0.05 %+3 nA+10 pA x Vo)
±(0.035 %+15 nA+100 pA x Vo)
±(0.04 %+150 nA+1 nA x Vo)
±(0.04 %+1.5 µA+10 nA x Vo)
±(0.045 %+15 µA+100 nA x Vo)
±(0.4 %+300 µA+1 µA x Vo)
±(0.25 %+300 fA+1 fA x Vo)
±(0.25 %+2 pA+10 fA x Vo)
±(0.1 %+20 pA+100 fA x Vo)
±(0.1 %+200 pA+1 pA x Vo)
±(0.05 %+2 nA+10 pA x Vo)
±(0.05 %+20 nA+100 pA x Vo)
±(0.04 %+200 nA+1 nA x Vo)
±(0.04 %+2 µA+10 nA x Vo)
±(0.1 %+20 µA+100 nA x Vo)
±(0.5 %+300 µA+1 µA x Vo)
200 V
200 V
200 V
200 V
200 V
200 V
200 V
200 V
³
³
1. Specified measurement resolution is limited by fundamental noise limits.
2. ± (% of read value + offset current (fixed part determined by the output/measurement range + proportional part that is multiplied by Vo))
3. 200 V (Io ≤ 50 mA), 100 V (50 mA < Io ≤ 125 mA), 40 V (125 mA < Io ≤ 500 mA), 20 V (500 mA < Io ≤ 1 A), Io is the output current in Amps.
HPSMU measurement and output range
Power consumption
Voltage source mode
Voltage range
2V
20 V
Current (mA)
Power
20 x Ic (W)
20 x Ic (W)
1000
40 V
40 x Ic (W)
100 V
100 x Ic (W)
200 V
200 x Ic (W)
Where Ic is the current compliance setting.
500
125
Current source mode
Voltage compliance
Vc ≤ 20
20 < Vc ≤ 40
Power
20 x Io (W)
40 x Io (W)
40 < Vc ≤ 100
100 x Io (W)
100 < Vc ≤ 200
200 x Io (W)
Where Vc is the voltage compliance
setting and Io is output current.
50
-200
-100
-40
-20
20
-50
-125
-500
-1000
6
40
100
200
Voltage (V)
Output terminal/connection
Supplemental information
Dual triaxial connector, Kelvin (remote
sensing)
Maximum allowable cable resistance
(Kelvin connection):
Voltage/current compliance
(limiting)
The SMU can limit output voltage or
current to prevent damaging the device
under test.
Voltage:
0 V to ±100 V (MPSMU, HRSMU)
0 V to ±200 V (HPSMU)
Current:
±10 fA to ±100 mA (HRSMU with ASU)
±100 fA to ±100 mA (HRSMU)
±1 pA to ±100 mA (MPSMU)
±1 pA to ±1 A (HPSMU)
Compliance accuracy:
Same as the current or voltage set
accuracy.
About measurement accuracy
RF electromagnetic field and SMU
measurement accuracy:
SMU voltage and current measurement accuracy can be affected by RF
electromagnetic field strengths greater
than 3 V/m in the frequency range of
80 MHz to 1 GHz. The extent of this
effect depends upon how the instrument
is positioned and shielded.
Induced RF field noise and SMU
measurement accuracy:
SMU voltage and current measurement
accuracy can be affected by induced RF
field noise strengths greater than 3 Vrms
in the frequency range of 150 kHz to
80 MHz. The extent of this effect
depends upon how the instrument is
positioned and shielded.
Sense: 10 Ω
Force: 10 Ω (≤ 100 mA), 1.5 Ω (>100 mA)
Voltage source output resistance:
(Force line, Non-Kelvin connection)
0.2 Ω (HPSMU)
0.3 Ω (MPSMU, HRSMU)
Voltage measurement input resistance:
≥ 1013 Ω
Current source output resistance:
≥ 1013 Ω (1 nA range)
Current compliance setting accuracy
(for opposite polarity):
For 1 pA to 10 nA ranges:
I setting accuracy ±12 % of range
For 100 nA to 1 A ranges:
I setting accuracy ±2.5 % of range
Maximum capacitive load:
1 pA to 10 nA ranges: 1000 pF
100 nA to 10 mA ranges: 10 nF
100 mA and 1 A ranges: 100 µF
Maximum guard capacitance:
900 pF (HPSMU, MPSMU, HRSMU)
660 pF (HRSMU with ASU)
Maximum shield capacitance:
5000 pF (HPSMU, MPSMU, HRSMU)
3500 pF (HRSMU with ASU)
Maximum guard offset voltage:
±1 mV (HPSMU)
±3 mV (MPSMU, HRSMU)
±4.2 mV (HRSMU with ASU, Iout≤100 µA)
Noise characteristics (filter ON):
Voltage source: 0.01 % of V range (rms.)
Current source: 0.1 % of I range (rms.)
Overshoot (typical, filter ON):
Voltage source: 0.03 % of V range
Current source: 1 % of I range
Pulse width: 500 µsec to 2 s
Range switching transient noise (filter ON):
Voltage ranging: 250 mV
Current ranging: 70 mV
Pulse period: 5 ms to 5 s
Slew rate: 0.2 V/µs (maximum)
Pulse measurement
Period ≥ width + 2 ms
(when width ≤ 100 ms)
Period ≥ width + 10 ms
(when width > 100 ms)
Voltage range, resolution, and
accuracy (high speed ADC)
Voltage Measure
range
resolution
±0.5 V³
25 µV
±2 V
100 µV
±5 V³
250 µV
±20 V
1 mV
±40 V
2 mV
±100 V
5 mV
10 mV
±200 V4
1.
2.
3.
4.
Measure
accuracy¹, ²
±(0.01 % + 250 µV)
±(0.01 % + 700 µV)
±(0.01 % + 2 mV)
±(0.01 % + 4 mV)
±(0.015 % + 8 mV)
±(0.02 % + 20 mV)
±(0.035 % + 40 mV)
± (% of read value + offset voltage V)
Averaging is 128 samples in 1 PLC.
Only for MPSMU and HRSMU.
Only for HPSMU.
Current range, resolution, and
accuracy (high speed ADC)
Current Measure
Measure accuracy3
range
resolution¹, ²
±1 pA4 100 aA
±(1.8 %+12 fA)
1 fA
±(0.5 %+15 fA+10 aA x Vo)
±10 pA5
5
5 fA
±(0.3 %+30 fA+100 aA x Vo)
±100 pA
±1 nA
50 fA
±(0.1 %+300 fA+1 fA x Vo)
±10 nA 500 fA
±(0.1 %+2 pA+10 fA x Vo)
±100 nA
5 pA
±(0.05 %+20 pA+100 fA x Vo)
±1 µA
50 pA
±(0.05 %+200 pA+1 pA x Vo)
±10 µA 500 pA
±(0.04 %+2 nA+10 pA x Vo)
±100 µA
5 nA
±(0.03 %+20 nA+100 pA x Vo)
±1 mA
50 nA
±(0.03 %+200 nA+1 nA x Vo)
±10 mA 500 nA
±(0.03 %+2 µA+10 nA x Vo)
±100 mA
5 µA
±(0.04 %+20 µA+100 nA x Vo)
50 µA
±(0.4 %+300 µA+1 µA x Vo)
±1 A6
1. Specified measurement resolution is limited by
fundamental noise limits. Minimum displayed
resolution is 1 aA at 1 pA range by 6 digits.
2. Measurements made in the lower ranges can
be greatly impacted by vibrations and shocks.
These specifications assume an environment
free of these factors.
3. ± (% of read value + offset current
(fixed part determined by the output/
measurement range + proportional part
that is multiplied by Vo)
4. 1 pA range is for HRSMU with ASU.
5. 10 pA range and 100 pA range is for HRSMU
with or without ASU.
6. Only for HPSMU.
Pulse resolution: 100 µs
SMU pulse setting accuracy
(fixed measurement range,
supplemental information):
Width: 0.5 % + 50 µs
Period: 0.5 % + 100 µs
7
MFCMU (multi frequency capacitance measurement unit) module specifications
Measurement functions
Measurement parameters:
Cp-G, Cp-D, Cp-Q, Cp-Rp, Cs-Rs, Cs-D,
Cs-Q, Lp-G, Lp-D, Lp-Q, Lp-Rp, Ls-Rs,
Ls-D, Ls-Q, R-X, G-B, Z-θ, Y-θ
Ranging:
Auto and fixed
Measurement terminal:
Four-terminal pair configuration, four
BNC (female) connectors
Cable length:
1.5 m or 3 m, automatic identification of
accessories
Maximum DC bias current
(supplemental information)
Impedance range
50 Ω
100 Ω
300 Ω
1 kΩ
3 kΩ
10 kΩ
30 kΩ
100 kΩ
300 kΩ
Maximum DC
bias current
10 mA
10 mA
10 mA
1 mA
1 mA
100 µA
100 µA
10 µA
10 µA
Test signal
Output impedance: 50 Ω, typical
Frequency:
Range: 1 kHz to 5 MHz
Resolution: 1 mHz (minimum)
Accuracy: ±0.008 %
DC bias monitor:
Range: 0 to ±25 V
Output signal level:
Range: 10 mVrms to 250 mVrms
Accuracy (open load):
±(0.2 % of reading + 10.0 mV) at the
measurement port of the MFCMU or the
MFCMU cable (1.5 m or 3.0 m)
Resolution: 1 mVrms
Sweep characteristics
Accuracy:
±(10.0 % + 1 mVrms)
at the measurement port of the MFCMU
Available sweep parameters:
Oscillator level, DC bias voltage,
frequency
Sweep type: linear, log
Sweep mode: single, double
Sweep direction: up, down
Number of measurement points:
Maximum 1001 points
±(15.0 % + 1 mVrms)
at the measurement port of the MFCMU
cable (1.5 m or 3.0 m)
Output impedance: 50 Ω, typical
Signal level monitor:
Range: 10 mVrms to 250 mVrms
Accuracy (open load):
±(10.0 % of reading + 1 mVrms)
at the measurement port of the MFCMU
±(15.0 % of reading + 1 mVrms)
at the measurement port of the MFCMU
cable (1.5 m or 3 m)
Measurement accuracy
The following parameters are used to
express the impedance measurement
accuracy at the measurement port of
the MFCMU or the MFCMU cable
(1.5 m or 3.0 m).
ZX: Impedance measurement value (Ω)
DX: Measurement value of D
DC bias function
E = EP’ + (ZS’/|ZX| + YO’|ZX|) x 100 (%)
DC bias:
Range: 0 to ±25 V
Resolution: 1 mV
Accuracy: ±(0.5 % + 5.0 mV) at the
measurement port of the MFCMU or the
MFCMU cable (1.5 m or 3.0 m)
EP’ = EPL + EPOSC + EP (%)
8
YO’ = YOL + YOSC + YO (S)
ZS’ = ZSL + ZOSC + ZS (Ω)
|Z| accuracy
±E (%)
θ accuracy
±E/100 (rad)
C accuracy
at DX ≤ 0.1
±E (%)
at DX > 0.1
±E x √¯¯¯¯¯¯¯
(1 + DX2) (%)
D accuracy
at DX ≤ 0.1
±E/100
at DX > 0.1
±E x (1 + DX)/100
G accuracy
at DX ≤ 0.1
±E/ DX (%)
at DX > 0.1
±E x √¯¯¯¯¯¯¯
(1 + DX2) /DX (%)
Note: measurement accuracy is specified
under the following conditions:
Temperature: 23 °C ±5 °C
Integration time: 1 PLC or 16 PLC
Parameters EPOSC ZOSC
Oscillator level
EPOSC (%)
ZOSC (mΩ)
125 mV < VOSC ≤ 250 mV
0.03 x (250/ VOSC - 1)
5 x (250/ VOSC - 1)
64 mV < VOSC ≤ 125 mV
0.03 x (125/ VOSC - 1)
5 x (125/ VOSC - 1)
32 mV < VOSC ≤ 64 mV
0.03 x (64/ VOSC - 1)
5 x (64/ VOSC - 1)
VOSC ≤ 32 mV
0.03 x (32/ VOSC - 1)
5 x (64/ VOSC - 1)
Cable length
EPL (%)
YOL (nS)
1.5 m
0.02 + 3 x f/100
750 x f/100
5.0
3m
0.02 + 5 x f/100
1500 x f/100
5.0
VOSC is oscillator level in mV.
Parameters EPL YOL ZSL
ZSL (mΩ)
f is frequency in MHz. If measurement cable is extended, open compensation,
short compensation, and load compensation must be performed.
Parameters YOSC YO EP ZS
Frequency
YOSC (nS)
YO (nS)
EP (%)
ZS (mΩ)
1 kHz ≤ f ≤ 200 kHz
1 x (125/ VOSC – 0.5)
1.5
0.095
5.0
200 kHz < f ≤ 1 MHz
2 x (125/ VOSC – 0.5)
3.0
0.095
5.0
1 MHz < f ≤ 2 MHz
2 x (125/ VOSC – 0.5)
3.0
0.28
5.0
2 MHz < f
20 x (125/ VOSC – 0.5)
30.0
0.28
5.0
f is frequency in Hz.
VOSC is oscillator level in mV.
Example of calculated C/G measurement accuracy
Frequency
5 MHz
1 MHz
100 kHz
10 kHz
1 kHz
Measured
capacitance
1 pF
10 pF
100 pF
1 nF
1 pF
10 pF
100 pF
1 nF
10 pF
100 pF
1 nF
10 nF
100 pF
1 nF
10 nF
100 nF
100 pF
1 nF
10 nF
100 nF
C accuracy¹
±0.61 %
±0.32 %
±0.29 %
±0.32 %
±0.26 %
±0.11 %
±0.10 %
±0.10 %
±0.18 %
±0.11 %
±0.10 %
±0.10 %
±0.18 %
±0.11 %
±0.10 %
±0.10 %
±0.92 %
±0.18 %
±0.11 %
±0.10 %
Measured
conductance
≤ 3 µS
≤ 31 µS
≤ 314 µS
≤ 3 mS
≤ 628 nS
≤ 6 µS
≤ 63 µS
≤ 628 µS
≤ 628 nS
≤ 6 µS
≤ 63 µS
≤ 628 µS
≤ 628 nS
≤ 6 µS
≤ 63 µS
≤ 628 µS
≤ 63 nS
≤ 628 nS
≤ 6 µS
≤ 63 µS
G accuracy¹
±192 nS
±990 nS
±9 µS
±99 µS
±16 nS
±71 nS
±624 nS
±7 µS
±11 nS
±66 nS
±619 nS
±7 µS
±11 nS
±66 nS
±619 nS
±7 µS
±6 nS
±11 nS
±66 nS
±619 nS
1. The capacitance and conductance measurement accuracy is specified under
the following conditions:
DX = 0.1
Integration time: 1 PLC
Test signal level: 30 mVrms
At four-terminal pair port of MFCMU
9
Atto-sense and switch unit
(ASU) specifications
AUX path specification
Maximum voltage
100 V (AUX input to AUX common)
100 V (AUX input to circuit common)
42 V (AUX common to circuit common)
Maximum current
0.5 A (AUX input to force output)
For GSWU
Input:
Control port: for SCUU
Mini pin plug ports: Guard1, Guard2
Output:
LED: Connection status indicator
SCUU supplemental information
SMU path:
Measurement accuracy
Impedance measurement error is given by
adding the following additional error Ee to
the MFCMU measurement error.
Ee = ±(A + ZS/|ZX| + YO|ZX|) x 100 (%)
ZX: Impedance measurement value (Ω)
A: 0.05 % (direct docking) or
0.1 % (indirect docking)
Offset current: < 20 fA
ZS: 500 + 500 x f (mΩ)
ASU supplemental information
Offset voltage: < 100 µV at 300 sec
Band width (at -3 dB)
30 MHz (AUX port)
Closed channel residual resistance:
< 200 mΩ
YO: 1 + 1000 x f/100 (nS)
(direct docking, x2 for indirect docking)
Note: f is frequency in MHz.
Channel isolation resistance: > 1015 Ω
SMU CMU unify unit (SCUU)
and guard switch unit (GSWU)
specifications
The SCUU multiplexes the outputs from
two SMUs (MPSMUs and/or HRSMUs)
and the CMU. The SCUU outputs are two
sets of Kelvin triaxial ports (Force and
Sense). The SCUU also allows the SMUs
to act as DC bias sources in conjunction
with the CMU. Special cables are available
to connect the SMUs and CMU with
the SCUU, and an auto-detect feature
automatically compensates for the cable
length going to the SCUU.
The GSWU contains a relay that automatically opens for IV measurements and
closes for CV measurements, forming a
guard return path to improve CV measurement accuracy.
Supported SMU
MPSMU and HRSMU
For SCUU
Inputs:
Triaxial ports: Force1, Sense1, Force2,
and Sense2
BNC ports: for MFCMU
Control port: for MFCMU
Outputs:
Triaxial ports: Force1/CMUH, Sense1,
Force2/CMUL, and Sense2
Control port: for GSWU
LEDs: SMU/CMU output status indicator
Docking mode:
Direct and indirect mode
10
CMU path:
Test signal
Signal output level additional errors
(CMU bias, open load):
±2 % (direct docking)
±7 % (indirect docking)
Signal output level additional errors
(SMU bias, open load):
±5 % (direct docking, ≥ 10 kHz)
±10 % (indirect docking, ≥ 10 kHz)
Output impedance: 50 Ω, typical
Signal level monitor additional errors
(open load):
±2 % (CMU bias), direct docking
±5 % (SMU bias), direct docking
±7 % (CMU bias), indirect docking
±10 % (SMU bias), indirect docking
DC bias function
DC voltage bias (CMU bias):
Range: 0 to ±25 V
Resolution: 1 mV
Additional errors (for CMU bias):
±100 µV (open load)
DC voltage bias (SMU bias):
Range: 0 to ±100 V
Resolution: 5 mV
Additional errors (for SMU voltage
output accuracy): ±100 µV (open load)
DC bias monitor additional errors (open load):
±20 mV, direct docking
±30 mV, indirect docking
Output impedance:
50 Ω, typical
DC output resistance: 50 Ω (CMU bias),
130 Ω (SMU bias)
When the measurement terminals are
extended by using the measurement cable,
the measurement accuracy is applied to
the data measured after performing the
open/short/load correction at the DUT
side cable end.
Note: The error is specified under the
following conditions:
Temperature: 23 °C ±5 °C
Integration time: 1 PLC or 16 PLC
HV-SPGU (high voltage semiconductor pulse generator unit) module specification
Specifications
Number of output channels:
2 channels per module
Modes: pulse, constant, and freerun
Standard pulse mode:
• Two level pulse
• Three level pulse per one channel
• Pulse period: 30 ns to 10 s
Delay range: 0 s to 9.99 s
Delay resolution: 2.5 ns (minimum)
Output count: 1 to 1,000,000
Voltage monitor minimum sampling
period: 5 μs
Trigger output:
Level: TTL
Timing: Synchronized with pulse period
Trigger width:
Pulse period x 1/2 (pulse period ≤ 10 µs)
Maximum 5 µs (pulse period > 10 µs)
SPGU supplemental information
Pulse width jitter: 0.001 % +150 ps
Pulse/DC output voltage and accuracy
Output voltage (Vout) 50 Ω load
Open load
Accuracy¹
Open load
Amplitude resolution 50 Ω load
Open load
Output connectors
Source impedance
Short circuit current
Overshoot/
pre-shoot/ringing4
Output limit
Frequency range
Pulse period
Width
Minimum
Accuracy
Programmable range
Transition time5
(Tr and Tf)
Resolution
Measurement resolution: 50 μV
Note: Specified at 1 PLC (20 ms = (5 μs
sample + 5 μs interval) x 2000 samples.)
Accuracy
Open/close
Output relay
switching time4
1.
2.
3.
4.
5.
Unless otherwise stated, all specifications assume a 50 Ω termination.
Typical minimum. This is supplemental information.
This is specified at Vamp ≤ 10 V.
The time it takes the open state relay to open or close.
The time from 10 % to 90 % of Vamp which is the amplitude of output pulse.
Pulse waveform
• Define multi-level pulse and multi-pulse
waveform including open state pulse
with ALWG GUI editor
• Sequential pulse waveform from
user-defined pulse waveform
Tperiod
Tdelay
Twidth
Vpeak
90%
90%
Vamp
• 1024 points per one channel
• Programmable timing range:
10 ns to 10 s, 10 ns resolution
2 ns (Tr and Tf ≤ 8 µs)
8 ns (Tr or Tf > 8 µs)
< 15 ns³
20 ns (Vamp ≤ 10 V)
30 ns (Vamp ≤ 20 V)
60 ns (Vamp > 20 V)
–5 % to 5 % + 10 ns (Vamp ≤ 10 V)
–5 % to 5 % + 20 ns (Vamp ≤ 20 V)
< 100 µs
Minimum (typical)
Minimum
Voltage compensation: The HV-SPGU
can measure the impedance of DUT and
adjust the output voltage according to
the DUT impedance.
Arbitrary linear waveform generator
(ALWG) mode:
• Output complex waveform per one
channel of HV-SPGU
0.1 Hz to 33 MHz
30 ns to 10 s
10 ns
100 ns³
±1 % (±0.01 % ²)
10 ns to (period – 10 ns)
2.5 ns (Tr and Tf ≤ 8 µs)
10 ns (Tr or Tf > 8 µs)
50 ns (25 ns typical)³
±(3 % + 2 ns)
8 ns to 400 ms
Programmable range
Resolution
Minimum
Accuracy
Programmable range
Resolution
Advanced feature:
Voltage monitor: The HV-SPGU has a
voltage monitor function to measure the
voltage at the DUT terminal.
ALWG (arbitrary linear
waveform generator) function
Monitoring over current limit
Pulse range and pulse parameter¹
Maximum slew rate: 1000 V/µs (50 Ω load)
Measurement accuracy (open load):
±(0.1 % of reading + 25 mV)
50 Ω load
1. At 1 µs after completing transition.
2. Typical (±1 %)
3. This value is specified under the following condition: [(Number of installed HV-SPGUs) x 0.2 A]
+ [DC current output by all modules (including HV-SPGUs)] < 3.0 A
4. Following the specified condition with transition time.
Pulse period jitter: 0.001 % +150 ps
Noise: 10 mVrms (at DC output)
–20 V to +20 V
–40 V to +40 V
±(0.5 % + 50 mV)
0.2 mV (±10 V range)
0.8 mV (±40 V range)
0.4 mV (±10 V range)
1.6 mV (±40 V range)
SMA
50 Ω²
800 mA peak (400 mA average³)
±(5 % + 20 mV)
Vbase
10%
Tr
10%
Tf
11
Example 1. ALWG setup table and pattern
Pattern
P3
15
P4
P7
10
P1
0
P2
P5
P8
P6
P9
P10
500 ns
0
Point
Time
Voltage
1
2
3
4
5
6
7
8
9
10
0
50 ns
70 ns
100 ns
200 ns
300 ns
320 ns
400 ns
450 ns
500 ns
0.0 V
0.0 V
15.0 V
15.0 V
0.0 V
0.0 V
10.0 V
10.0 V
0.0 V
0.0 V
Example 2. ALWG complex waveform
Pattern 1
Pattern 3
Pattern 2 x 5
Pattern 2
16440A SMU/pulse generator
selector
The Agilent 16440A SMU/pulse generator
selector switches either a SMU or PGU to
the associated output port. You can
expand to four channels by adding an
additional 16440A. The PGU port on
channel 1 provides a “PGU OPEN” function,
which can disconnect the PGU by opening
a semiconductor relay. The Agilent B1500A
and 16445A are required to use the
16440A.
The following specifications data is
specified at 23 °C ± 5 °C and 50% relative
humidity.
• Channel configuration:
2 channels (CH 1 and CH 2).
Can add an additional 2 channels
(CH 3 and CH 4) by adding another
16440A (selector expander).
Channel 1 (CH 1)
Channel 2 (CH 2)
Channel 3 (CH 3) 2
Channel 4 (CH 4) 2
Input
2 (SMU and PGU 1)
2 (SMU and PGU)
2 (SMU and PGU 1)
2 (SMU and PGU)
1. PGU channels 1 & 3 have a built-in series semiconductor relay.
2. Available when a second 16440A (selector expander) is
installed.
• Voltage and current range
Input port
SMU
PGU
Maximum
voltage
200 V
40 V
Maximum
current
1.0 A
0.2 A 1
1. This is peak-to-peak ac current.
16445A SMU/PGU selector connection
adaptor
The Agilent 16445A selector adapter
is required to control and to supply DC
power to the Agilent 16440A SMU/pulse
generator selector.
Power requirement: 100 to 240 V, 50/60 Hz
Maximum volt-amps (VA): 20 VA
12
Output
1
1
1
1
WGFMU (waveform generator/fast measurement unit) module specification
Overview
The WGFMU is a self-contained module
offering the combination of arbitrary
linear waveform generation (ALWG) with
synchronized fast current or voltage (IV)
measurement. The ALWG function allows
you to generate not only DC, but also
various types of AC waveforms. In addition
to this versatile sourcing capability, the
WGFMU can also perform measurement in
synchronization with the applied waveform, which enables accurate high-speed
IV characterization.
Specifications
Number of output channels:
2 channels per module
Measurement functions, voltage forcing, voltage measurement, and current
measurement
Mode
Function
V force ranges
Fast IV
V force/I measure,
V force/V measure
PG
V force/V measure
DC
V force/I measure,
V force/V measure
-3 V to +3 V
-5 V to +5 V
-10 V to 0 V
0 V to +10 V
-3 V to +3 V
-5 V to +5 V
-3 V to +3 V
-5 V to +5 V
-10 V to 0 V
0 V to +10 V
Max ±25 V
SMU pass- Measurement
through
using SMU
V measure
ranges
-5 V to +5 V
-10 V to +10 V
I measure ranges
-5 V to +5 V
—
-5 V to +5 V
-10 V to 10 V
1 µA, 10 µA, 100 µA,
1 mA, 10 mA
—
Max ±100 mA
1 µA, 10 µA, 100 µA,
1 mA, 10 mA.
Voltage force accuracy, resolution, and timing
Modes: Fast IV, PG (pulse generator),
DC, and SMU pass-through
V force (Fast IV mode)
V force (PG mode)
RSU:
Output Connector: SMA
Source Impedance: 50 Ω (nominal)
at DC in PG mode
Accuracy
Resolution 2
SMU path: Maximum voltage ±25 V,
Maximum current ±100 mA
V monitor terminal:
Connector: BNC
Overshoot/undershoot
Noise
Rise time Trise (10 to 90%)/
Fall time Tfall (90 to 10%)
Pulse period
Source Impedance: 50 Ω (nominal) at DC
The terminal outputs a buffered signal
equal to 1/10 of Vout (into a 50 Ω load)
Pulse width
-5 V to 5 V, -10 V to 0 V, 0 V to 10 V
-5 V to 5 V (open load)
-2.5 V to 2.5 V (50 Ω load)
±0.1% of setting ±0.1% of range 1
96 μV (-3 to 3V)
160 μV (all ranges except for -3 V to 3 V)
±(5%+20 mV) 3
Maximum 0.1 mVrms4
Accuracy: -5% to (+5% +10 ns) of setting 5
Minimum: 24 ns, PG mode and 50 Ω load
Timing Accuracy: ±1% of setting 6
Minimum:100 ns, PG mode and 50 Ω load
Accuracy: ±(3%+2 ns) 7
Minimum: 50 ns, PG mode and 50 Ω load
WGFMU to RSU cable length:
The WGFMU and RSU are connected by
a special composite cable. The following
configurations are available:
Voltage measurement accuracy, resolution, and noise
• 3m
Noise 10
Accuracy
Resolution 9
±(0.1% of reading ±0.1% of range) 8
680 μV (-5 V to +5 V range)
1.4 mV (-10 V to +10 V range)
Maximum 4 mVrms (-5 V to +5 V range)
• 5m
• 1.5 m
• 2.4 m + connector adapter + 0.6 m
• 4.4 m + connector adapter + 0.6 m
Note: The connector adapter is used when
routing the cable through the prober’s
connector panel.
1. Independent of the range or the mode. DC constant voltage output. Load impedance must be ≥ 1 MΩ
(1 μA range) or ≥ 200 kΩ (all other current ranges) for Fast IV mode, or ≥ 1 MΩ for PG mode.
2. Can vary at most 5% based on the result of calibration.
3. PG mode, 50 Ω load, Trise and Tfall >16 ns with the 1.5 m cable, >32 ns with 3 m cable, or >56 ns
with 5 m cable
4. Theoretical value for observed time 100 ns to 1 ms, supplemental information
5. PG mode, 50 Ω load, Trise and Tfall ≥ 24 ns
6. PG mode, 50 Ω load, pulse period ≥ 100 ns
7. PG mode, 50 Ω load, pulse width ≥ 50 ns
8. Independent of the range or the mode. DC constant voltage output. Applicable condition: 10,000
averaging samples for 10 μA range and above; 100,000 averaging samples for the 1 μA range.
9. Display resolution. Can vary at most 5% based on the result of calibration.
10. 0 V output, open load, no averaging. Maximum 1.5 mVrms as supplemental information.
13
Current measurement accuracy and resolution
Accuracy
Resolution 2
Noise (Effective resolution)
±(0.1% of reading ±0.2% of range) 1
0.014% of range
Maximum 0.2% of range 3
1. Independent of the range or the mode. DC constant voltage output. Applicable condition: 10,000
averaging samples for 10 μA range and above; 100,000 averaging samples for the 1 μA range.
2. Display resolution. Can vary at most 5% based on the result of calibration
3. Effective value at 0 V output, open load, and no averaging. Supplemental information
ALWG function
Maximum number of vectors
Maximum number of sequences
Maximum number of loop counts
Length of a vector
Sampling rate
Averaging time
Hardware memory
2048
512
1 to 1012
10 ns to 10,000 s with 10 ns resolution
5 ns, or 10 ns to 1 s with 10 ns resolution
10 ns to 20 ms with 10 ns resolution
About 4 M data points/channel (typical)
Trigger output
Level: TTL
Trigger width: 10 ns
Generated synchronously with ALWG waveform.
Supplemental Information
RSU SMU path:
Leak current: < 100 pA
Residual resistance: <300 mΩ
Jitter: <1 ns
Skew between channels: <3 ns, under no electrostatic discharge condition.
Trigger output skew: <3 ns
Current range change time: <150 μs*
* The time until the measured current settles within ± 0.3 % of the final result value after the
range change.
Minimum rise/fall time*
Mode
PG mode
Fast IV mode
Current measurement range
NA
10 mA
1 mA
100 μA
10 μA
1 μA
Minimum rise/fall time
0 to 1V
0 to 5 V
0 to 10V
30 ns
30 ns
NA
80 ns
80 ns
80 ns
250 ns
250 ns
250 ns
600 ns
600 ns
1.5 μs
2 μs
4.5 μs
7 μs
6 μs
—
—
—
35 μs
75 μs
Load condition
25 pF, open
25 pF, 1 MΩ
25 pF, open
* This is the minimum setting value effective for suppressing overshoot and distortion.
14
Settling time*
Mode
Current
measurement
range
NA
10 mA
1 mA
100 μA
10 μA
1 μA
PG mode
Fast IV mode
Settling time
Voltage
Current
measurement
measurement
150 ns
NA
150 ns
100 ns
150 ns
250 ns
400 ns
1μs
1.2 μs
10 μs
6 μs
80 μs
Load condition
25 pF, open
25 pF, 1 kΩ
25 pF, 10 kΩ
25 pF, 100 kΩ
25 pF, 1 MΩ
25 pF, 10 MΩ
* The time until the measured value settles within ± 0.3 % of the final result value after the output
voltage is changed from the initial value (0 V). Applicable condition: Rise time = 10 ns
Minimum pulse width*
Mode
PG mode
Fast IV mode
Current measurement range
NA
10 mA
1 mA
100 μA
10 μA
1 μA
Minimum pulse width
170 ns
180 ns
500 ns
1.6 μs
14.5 μs
115 μs
Load condition
25 pF, open
25 pF, 1 kΩ
25 pF, 10 kΩ
25 pF, 100 kΩ
25 pF, 1 MΩ
25 pF, 10 MΩ
* The time until the pulse peak output value (0 to 5 V) settles within ±0.3% of the setup value after
the output voltage is changed from the initial value (0 V). Applicable condition: Rise time is set to
the minimum rise/fall time shown in the above table.
Software
Instrument library for WGFMU control
Operating system:
Microsoft Windows XP Professional SP2
and Windows Vista Business SP1
NBTI and general-purpose EasyEXPERT
Application Tests
Sample programs (NBTI and generalpurpose measurement using WGFMU
and RTS data analysis)
WGFMU supported prober vendors
Cascade Microtech
Suss MicroTec
Vector Semicon
Note: The maximum number of installable
RSUs for a given prober depends upon
the available space. Please contact your
local sales representative for details on
connecting and mounting the WGFMU
and RSU.
15
Agilent EasyEXPERT software
Functions
VAR1
Operation mode:
Application test mode, Classic test mode,
Quick test mode
Primary sweep controls the staircase
(DC or pulsed) voltage or current sweep.
Maximum number of VAR1 steps:
N1 = 1001
Key features
• Categorized and predefined application
test library
• GUI-based application test editor
• Save/Recall “My Favorite Setups”
• Define/customize application library
• Execute measurement
(Single/Repeat/Append)
• Quick test execution
• Direct control (GPIB FLEX)
• Save/Recall measurement data and
settings
• Test result data management
• Import/Export device definition,
measurement settings, my favorite
setup, measurement data, and
application library
• Graph plot display/analysis/printing
• Switching matrix control
• Workspace management
• Self-test, self-calibration, diagnostics
Application library
Sample application tests are supplied for
the following categories; they are subject
to change without notice.
Structure, CMOS, Bipolar (BJT),
Memory, Mixed Signal Device, TFT,
Discrete, Reliability, Power Device,
Nanotechnology, Utility
Measurement mode details
The Agilent B1500A supports the following
measurement modes:
• Staircase sweep
• Multi-channel sweep¹
• Pulsed sweep
• Staircase sweep with pulsed bias
• IV sampling
• High speed IV sampling
• CV sweep
• C-t sampling
• C-f sweep
• List sweep
• Linear search²
• Binary search²
1. EasyEXPERT does not support VAR1’ in
multi-channel sweep mode.
2. They are supported by FLEX command only.
Each SMU can be set to VAR1 (primary
sweep), VAR2 (secondary sweep), VAR1’
(synchronous sweep), or CONST (constant
voltage/current source).
16
VAR2
Subordinate linear staircase or linear
pulsed sweep. After primary sweep is
completed, the VAR2 unit output voltage
or current is changed.
Maximum number of VAR2 steps:
N2 = 1001 (1 ≤ N1 × N2 ≤ 128128)
VAR1’
Staircase or pulse sweep synchronized
with the VAR1 sweep. Sweep is made with
a user specified ratio and offset value.
VAR1’ output is calculated as VAR1’ = a x
VAR1 + b, where “a” is the user specified
ratio and “b” is the user specified offset
value.
CONST
A source unit can be set as a constant
voltage or current source depending on
the unit.
Staircase sweep measurement mode
Forces swept voltage or current, and
measures DC voltage or current. One
channel can sweep current or voltage
while up to ten channels can measure
current or voltage. A second channel can
be synchronized with the primary sweep
channel as an additional voltage or current
sweep source.
a pulsed bias voltage or current. A third
channel can be synchronized with the
primary sweep channel as an additional
voltage or current sweep source.
Sampling (time domain)
measurement mode
Displays the time sampled voltage/current
data (by SMU) versus time.
Sampling channels: Up to 10
Sampling mode: Linear, logarithmic (log)
Sampling points:
For linear sampling:
1 to 100,001/(number of channels)
For log sampling:
1 to 1+ (number of data for 11 decades)
Sampling interval range:
100 μs +20 μs x (num. of channels – 1)
to 2 ms, 10 µs resolution
2 ms to 65.535 s, 1 ms resolution
Hold time, bias hold time:
-90 ms to -100 µs, 100 µs resolution
0 to 655.35 s, 10 ms resolution
Measurement time resolution: 100 µs
Standby mode
SMUs in “Standby” remain programmed to
their specified output value even as other
units are reset for the next measurement.
Current offset cancel
Sweep direction: Single or double sweep
This function subtracts the offset current
from the current measurement raw data,
and returns the result as the measurement
data. This function is used to compensate
the error factor (offset current) caused
by the measurement path such as the
measurement cables, manipulators, or
probe card.
Hold time: 0 to 655.35 s, 10 ms resolution
Time stamp
Delay time: 0 to 65.5350 s, 100 µs
resolution
The B1500A supports a time stamp
function utilizing an internal quartz clock.
Resolution: 100 µs
Number of steps: 1 to 1001
Sweep mode: Linear or logarithmic (log)
Pulsed sweep measurement mode:
Forces pulsed swept voltage or current,
and measures DC voltage or current.
A second channel can be programmed
to output a staircase sweep voltage or
current synchronized with the pulsed
sweep output.
Staircase sweep with pulsed bias
measurement mode
Forces swept voltage or current, and
measures DC voltage or current. A second
channel can be programmed to output
Other measurement characteristics
Measurement control:
Single, repeat, append, and stop
SMU setting capabilities:
Limited auto ranging, voltage/current
compliance, power compliance, automatic sweep abort functions, self-test,
and self-calibration
Arithmetic and analysis
functions
User functions
Up to 20 user-defined functions can be
defined using arithmetic expressions.
Measured data and pre-defined variables
can be used in the computation. The
results can be displayed on the LCD.
Arithmetic operators
+, -, *, /, ^, abs (absolute value),
at (arc tangent), avg (averaging), cond
(conditional evaluation), delta, diff (differential), exp (exponent), integ (integration),
lgt (logarithm, base 10), log (logarithm,
base e), mavg (moving average), max,
min, sqrt, trigonometric function, inverse
trigonometric function, and so on.
Physical constants
Keyboard constants are stored in memory
as follows:
q: Electron charge, 1.602177E-19 C
k: Boltzman’s constant, 1.380658E-23
ε (e): Dielectric constant of vacuum,
8.854188E-12
The following unit symbols are also
available on the keyboard:
-15
Other functions
On a graphics plot, the markers and lines
can be automatically located using the
auto analysis setup. Parameters can be
automatically determined using automatic
analysis, user function, and read out
functions.
Import/export files
-12
-9
a (10 ), f (10 ), p (10 ), n (10 ),
u or µ (10-6), m (10-3), k (103), M (106),
G (109), T (1012) , P (1015)
Analysis capabilities
Overlay graph comparison
Graphical plots can be stored and overlaid.
Scale
Up to 20 user-defined parameters can be
displayed on the graphics screen.
Interfaces
Analysis functions
Up to 20 user-defined analysis functions can be defined using arithmetic
expressions.
Read out functions
The read out functions are built-in functions for reading various values related to
the marker, cursor, or line.
Supported external instruments
EasyEXPERT Standard edition:
Graph plot
• Supported by switching matrix GUI:
B2200A/B2201A
Data display window can be printed. Only
X-Y graph can be printed.
Two lines, normal mode, grad mode,
tangent mode, and regression mode
• Supported by application tests: E5250A
(E5252A cards), 4284A/E4980A, 81110A,
3458A
EasyEXPERT Plus edition:
Graph plot file
Graph plot can be stored as image data to
clip board or mass storage device.
• All external instruments supported by
EasyEXPERT Standard edition
File type: bmp, gif, png, emf
• Also supported by switching matrix GUI:
E5250A (E5252A cards)
Output
Furnished software
Display mode
• Prober control execution files
X-Y graph, list, and parameter
• Desktop EasyEXPERT software with
license-to-use for Standard edition
X-axis and up to eight Y-axes, linear and
log scale, real time graph plotting
Line
Trigger I/O
Trigger in/out synchronization pulses
before and after setting and measuring
DC voltage and current. Arbitrary trigger
events can be masked or activated
independently.
Marker
Direct cursor
GPIB, interlock, USB (USB 2.0, front 2,
rear 2), LAN (100BASE-TX/10BASE-T),
trigger in/out, digital I/O
Only available using GPIB FLEX commands.
Measured data, pre-defined variables,
and read out functions can be used in the
computation. The results can be displayed
on the LCD.
X-Y graph display
Cursor
Data storage
Hard disk drive, DVD-ROM/CD-R/CD-RW
drive
Auto scale and zoom
Marker to min/max, interpolation, direct
marker, and marker skip
File type:
Agilent EasyEXPERT format, XML-SS
format, CSV format
Data variable display
Display mode
Engineering units
-18
Automatic analysis function
List display
Measurement data and calculated user
function data are listed in conjunction
with VAR1 step number or time domain
sampling step number. Up to 20 data sets
can be displayed.
• 4155/56 setup file converter tool
(Supported operating systems:
Microsoft Windows 2000 Professional,
XP Home or Professional, and Vista
Business)
• A VXIplug&play driver for the B1500A
(Supported operating systems:
Microsoft Windows 2000 Professional
and XP Professional)
17
Agilent Desktop EasyEXPERT software
Desktop EasyEXPERT is the same
software that is built-in to the PC-based
Agilent B1500A Semiconductor Device
Analyzer, except that it runs on a standalone PC. Just like standard EasyEXPERT,
Desktop EasyEXPERT supports all aspects
of parametric test, from basic manual
measurements to test automation across
a wafer in conjunction with a semiautomatic wafer prober.
Prober control
Supported instruments
All popular semiautomatic wafer probers
are supported by Desktop EasyEXPERT.
You can define wafer, die, and module
information for probing across an entire
wafer. You can also combine wafer prober
control with either Quick Test mode or an
application test based test sequence to
perform multiple testing on various devices
across the wafer.
• B1500A
Features and benefits
Automatic data export
Large application test library
Desktop EasyEXPERT comes with over
200 application tests conveniently
organized by device type, application, and
technology. Many of these application
tests will run on the 4155/4156 without
modification, and you can easily edit and
customize the furnished application tests
to fit your specific needs.
Offline capability
Desktop EasyEXPERT can be run in either
online or offline mode. In the offline mode
you can perform tasks such as analyzing
data and creating new application tests.
This frees up your existing analyzer from
being needed for development work
and enables you to use it for its primary
purpose: making measurements.
GUI-based classic test mode
Desktop EasyEXPERT offers a classic
test mode that maintains the look, feel,
and terminology of the 4155/4156 user
interface. In addition, it improves the
4155/4156 user interface by taking full
advantage of Microsoft Windows GUI
features.
Easy test sequencing
A GUI-based Quick Test mode enables
you to perform test sequencing without
programming. You can select, copy, rearrange and cut-and-paste any application
tests with a few simple mouse clicks. Once
you have selected and arranged your tests,
simply click on the measurement button to
begin running an automated test sequence.
The Desktop EasyEXPERT has the ability
to automatically export measurement data
in real time, in a variety of formats. You
can save data to any drive connected to
the PC. If you wish, you can export data to
a network drive and view test results on
your desktop PC as your instruments are
performing the testing in your lab.
• Supported 4155/4156 firmware:
HOSTC: 03.08 or later
SMUC: 04.08 or later
Supported external instruments
Desktop EasyEXPERT Standard edition:
• Supported by switching matrix GUI:
B2200A/B2201A
• Supported by application tests: E5250A
(E5252A cards), 4284A/E4980A, 81110A,
3458A
Desktop EasyEXPERT Plus edition:
• All external instruments supported by
Desktop EasyEXPERT Standard edition
• Also supported by switching matrix GUI:
E5250A (E5252A cards)
System requirements
The following are the minimum requirement for executing Desktop EasyEXPERT.
Operating system
and service pack
Microsoft Windows XP
Professional SP2
Processer
Intel Celeron 2 GHz
Memory
512 Megabytes DDR266
Display
XGA 1024x768 (SXGA 1280x1024 recommended)
HDD
1 GB free space on the C drive, 10 GB (30 GB recommended)
free space on a drive for test setup/result data strage.
.NET Framework
Microsoft
.NET Framework Ver. 2.0
Redistributable Package
Microsoft .NET
Framework 2.0 SP1
Microsoft .NET Framework
Ver. 3.0
IO Libraries
(for online mode)
Agilent IO Libraries Suite 15.0
Agilent IO Libraries Suite 15.0
Microsoft Windows
Vista Business SP1
Vista certified PC with
1GB memory
Supported GPIB I/F (for online mode)
Agilent 82350B
B1500A
4155B/C
4156B/C
O
O
Agilent 82357A
X
O
Agilent 82357B
X
O
O = Supported
X = Not supported
18
• 4155B, 4156B, 4155C, and 4156C
Supported 4155/4156
functionality
General specifications
Furnished accessories
Temperature range
Desktop EasyEXPERT Standard edition:
Operating: +5 °C to +40 °C
Storage: -20 °C to +60 °C
Power cable
Manual CD-ROM
Desktop EasyEXPERT CD-ROM
Software CD-ROM (including VXIplug&play
driver and utility tools)
License-to-use for Desktop EasyEXPERT
standard edition
• I/V Sweep
• B2200A and B2201A switching matrix
GUI control
Desktop EasyEXPERT Plus edition:
The following functions are additionally
supported.
• I/V-t sampling (except thinned out mode)
• VSU/VMU (except differential voltage
measurement using VMU)
• PGU (41501B)
• E5250A/E5252A switching matrix GUI
control
Setup converter tool
In addition to Desktop EasyEXPERT,
Agilent supplies a free setup converter
tool that runs on any Windows-based
PC. This tool can convert 4155 and 4156
measurement setup files (file extensions
MES or DAT) into equivalent Desktop
EasyEXPERT classic test mode setup files.
Humidity range
Operating: 20 % to 70 % RH,
non-condensing
Storage: 10 % to 90 % RH, non-condensing
Altitude
Operating: 0 m to 2,000 m (6,561 ft)
Storage: 0 m to 4,600 m (15,092 ft)
Power requirement
AC voltage: 90 V to 264 V
Line frequency: 47 Hz to 63 Hz
Maximum volt-amps (VA)
B1500A: 900 VA
Regulatory compliance
EMC:
IEC61326-1:+A1/EN61326-1:+A1
AS/NZS 2064.1
Safety:
CSA C22.2 No.1010.1-1992
IEC61010-1:+A2/EN61010-1:+A2
UL3111-1:1994
Certification
CE, CSA, NRTL/C, C-Tick
Dimensions
B1500A:
420 mm W x 330 mm H x 575 mm D
N1301A-100 SMU CMU unify unit:
148 mm W x 75 mm H x 70 mm D
N1301A-200 guard switch unit:
33.2 mm W x 41.5 mm H x 32.8 mm D
E5288A Atto-sense and switch unit:
132 mm W × 88.5 mm H × 50 mm D
B1531A RSU:
45.2 mm W x 70 mm H x 82 mm D
16440A SMU/PGU selector:
250 mm W × 50 mm H × 275 mm D
16445A Selector adaptor:
250 mm W × 50 mm H × 260 mm D
Weight
B1500A (empty): 20 kg
B1510A: 2.0 kg
B1511A: 1.0 kg
B1517A: 1.2 kg
B1520A: 1.5 kg
B1525A: 1.3 kg
B1530A: 1.3 kg
B1531A: 0.13 kg
E5288A: 0.5 kg
N1301A-100: 0.8 kg
N1301A-200: 0.1 kg
16440A: 1.1 kg
16445A: 1.0 kg
19
Order information
Mainframe and modules
B1500A
Semiconductor device analyzer mainframe
The following modules are available:
High power SMU (HPSMU)
Medium power SMU (MPSMU)
High resolution SMU (HRSMU)
Atto-sense switch unit (ASU)
Multi frequency CMU (MFCMU)
High voltage SPGU (HV-SPGU)
Waveform generator/fast measurement unit
(WGFMU)
B1500A-050
50 Hz line frequency
B1500A-060
60 Hz line frequency
B1500A-A6J
ANSI Z540 compliant calibration
B1500A-UK6
Commercial calibration certificate with test data
B1500A-ABA English documentation
B1500A-ABJ Japanese documentation
B1540A-001
Agilent EasyEXPERT with license-to-use for
standard version
B1540A-002
License-to-use for Agilent EasyEXPERT Plus
B1541A
Agilent Desktop EasyEXPERT software and
measurement libraries
B1541A-001
Agilent Desktop EasyEXPERT with license-to-use
for standard version
B1541A-002
License-to-use for Agilent Desktop EasyEXPERT
Plus
B1500 accessories
16444A-001
Keyboard
16444A-002
Mouse
16444A-003
Stylus pen
N1253A-100
Digital I/O cable
N1253A-200
Digital I/O BNC box
N1254A-100
GNDU to Kelvin adapter
N1254A-108
ASU magnetic stand
SMU cables
16494A-001
Triaxial cable (1.5 m)
16494A-002
Triaxial cable (3 m)
16493K-001
Kelvin triaxial cable (1.5 m)
16493K-002
Kelvin triaxial cable (3 m)
CMU accessories
N1300A-001
CMU cable (1.5 m)
N1300A-002
CMU cable (3 m)
N1301A-100
SMU CMU unify unit (SCUU)
N1301A-102
SMU CMU unify unit cable (3 m)
N1301A-110
SMU CMU unify unit magnetic stand
N1301A-200
Guard switch unit (GSWU)
N1301A-201
Guard switch unit cable (1 m)
N1301A-202
Guard switch unit cable (3 m)
20
HV-SPGU accessories
16440A
SMU/PGU selector
16440A-003
Control cable (40 cm)
16445A
SMU/PGU selector connection adapter
16445A-001
Control cable for B1500A to 16440A (1.5 m)
16445A-002
Control cable for B1500A to 16440A (3 m)
16493P-001
SPGU cable (1.5 m)
16493P-002
SPGU cable (3 m)
16493Q-001
SPGU synchronization cable
WGFMU accessories
16493R
WGFMU cables and accessories
16493R-001
0.6 m cable between WGFMU and RSU
16493R-002
2.4 m cable between WGFMU and RSU
16493R-003
3 m cable between WGFMU and RSU
16493R-004
5 m cable between WGFMU and RSU
16493R-005
4.4 m cable between WGFMU and RSU
16493R-006
1.5 m cable between WGFMU and RSU
16493R-101
SSMC-SSMC cable (50 mm) for current return path
16493R-102
SSMC-SSMC cable (70 mm) for current return path
16493R-202
SMA-SSMC cable (200 mm) between RSU and
DC probe
16493R-302
SMA-SMA cable (200 mm) between RSU and
RF probe
16493R-801
WGFMU connector adapter (female-female)
16493R-802
Magnet stand for RSU
16493R-803
Sync cable for WGFMU
Other accessories
16442B
Test fixture
16493G
Digital I/O cable
16493J-001
Interlock cable (1.5 m)
16493J-002
Interlock cable (3 m)
16493L-001
GNDU cable (1.5 m)
16493L-002
GNDU cable (3 m)
Part numbers for adding additional modules
B1510A
High power source/monitor unit module
B1511A
Medium power source/monitor unit module
B1517A
High resolution source/monitor unit module
E5288A
Atto-sense and switch unit
B1520A
Multi frequency capacitance measurement unit
module
B1525A
High voltage semiconductor pulse generator unit
module
B1530A
Waveform generator/fast measurement unit
module
21
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Revised: October 1, 2008
Microsoft and Windows are U.S. registered
trademarks of Microsoft Corporation.
Product specifications and descriptions in this
document subject to change without notice.
© Agilent Technologies, Inc. 2007-2009
Printed in USA, February 13, 2009
5989-2785EN