Innovation D6F-PH Series Differential Pressure Sensor High Impedance MEMS Mass Flow Technology Economical I2C Digital Output Compact Package High Accuracy, ±3% Reading Linearized and Temperature Compensated Resistant to Bypass Tube Length Variation 0-250 Pa, ±50 Pa, ± 500 Pa www.components.omron.com www.components.omron.com ELECTRONICCOMPONENTS COMPONENTS ELECTRONIC D6F-PH Series DIFFERENTIAL PRESSURE SENSOR High Impedance MEMS Mass Flow Technology • Economical • I2C Digital Output • Compact Package • High Accuracy, ±3% Reading • Linearized and Temperature Compensated • Resistant to Bypass Tube Length Variation Ordering Information Measurement Range 0 to 250 Pa (0 to 1 in. H2O) -50 to +50 Pa (± 0.2 in. H2O) -500 to +500 Pa (± 2 in. H2O) Applicable Fluid Model D6F-PH0025AD1 D6F-PH0505AD3 D6F-PH5050AD3 Air Note: The Sensor can be calibrated for different gas types. Consult Omron. Characteristics Model D6F-PH0025AD1 D6F-PH0505AD3 D6F-PH5050AD3 ± 50 Pa ± 500 Pa Measurement Range (See Note 1) 0 to 250 Pa Calibration Gas (See Note 2) Air Port Type Barb joint, Maximum outside diameter: 4.9mm Power Supply 2.3 to 3.6 VDC Current Consumption 6 mA max. with no load and VCC of 3.3 V, GND=0 VDC, 25°C Resolution 12 bit Zero Point Tolerance (See Note 4) ± 0.2 Pa Span Tolerance (See Note 4) ± 3% R.D. Temperature Compensation Yes Span shift due to Temperature Variation ± 0.5% R.D. per 10°C Response Time 25 ms typical at 12 bit resolution (50 ms max). The processing time is 6 ms typical at 12 bit resolution. Gas Flow through Sensor (See Note 3) ≤ 63 mL/min ≤ 23 mL/min ≤ 100 mL/min Interface I2C Case Material PPS Degree of Protection IEC IP40 Withstand Pressure 10 kPa Operating Temperature -20 to 80°C (with no condensation or icing) Operating Humidity 35 to 85% RH (with no condensation or icing) Storage Temperature -40 to 80°C (with no condensation or icing) Storage Humidity 35 to 85% RH (with no condensation or icing) Insulation Resistance Between Sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC) Dielectric Strength Between Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.) Weight 5.2 g Note: 1. At standard atmospheric pressure (1013.25 hPa). 2. Dry gas must not contain large particles, e.g., dust, oil or mist. 3. Type D6F-PH is based on thermal flow principle. Air flow is needed to measure the differential pressure. Typical characteristic of air flow by differential pressure is shown in the “Engineering Data” section. 4. The zero point tolerance and span tolerance are independent uncertainties and add according to the principles of error propagation. Communication Method Master/Slave Slave / Address: HEX: 0x6C BIN: 110_1100 (7 bit) Fast Mode 400kHz Speed mode Signals SCL SDA Serial Clock Data Signal Flow Rate (sccm) I2C 50 40 30 20 10 0 -10 -20 -30 -40 -50 Relationship Between Pressure and Flow Rate -600 -400 -200 0 200 Pressure (Pa) 400 600 Note: Additional information can be found on the Omron website Phone: 847-882-2288 www.components.omron.com ©2013 Omron Electronic Components LLC, Printed in U.S.A. 5/2013 ELECTRONIC COMPONENTS