Agilent N9201A Array Structure Parametric Test Option Technical Overview Introduction The decreasing size of features on integrated circuits (45 nm and smaller) is driving the need for new parametric test capabilities. These capabilities must accommodate the advanced test structures developed for fast yield ramp up in process integration as well as process monitoring in semiconductor manufacturing. High-throughput measurement of highvolume parametric data is required to shorten the time for ramping up the process yield. This is accomplished by statistically analyzing and correcting the cause of wide range of process performance variations across a 300 mm wafer. Advanced test structures, addressable array test structures that contain address decoder circuitry, and a large number of test array elements with fewer probing pads and silicon area have been developed by major semiconductor manufacturers for this purpose. The Agilent N9201A Parametric Test Option offers high throughput parametric measurement capability for a variety of addressable array test structures (e.g. passive array, active array and clocked latched active array) with synchronized mixed operation of DC SMUs and digital outputs. Digital outputs (parallel, serial, or clock signals) are used for the address decoder that is built into addressable array test structures. This allows the selection of the specific array element to be measured. DC SMUs measure the DC voltage and current parameters of selected array elements. The DC power source is used for applying the power supply voltage (Vdd) to the address decoder logic circuitry that is built-in the addressable array test structures. The N9201A is able to provide a maximum of 48 signal lines using the extended path ports of the 4070/4080 test head. This can be any combination of available SMUs, digital outputs, and DC power source outputs. The signals pass through the 4070/4080 test head down to the probe card. The N9201A is controlled by SPECS (Semiconductor Process Evaluation Core Software), a test shell environment for the 4070 Series and 4080 Series. The N9201A can be provided as an upgrade for existing 4070 Series and 4080 Series users. Measurement functions DC current, DC voltage, and digital output DC measurement Spot and sweep Measurement unit:* High speed medium power SMU (MPSMU); 8 SMU minimum configuration; SMUs may be added in increments of one up to a maximum of 40 SMUs *Note: High Speed MPSMU specification is specified at the connectors of the equipment’s front panel Range of operation: -42 V to 42 V; -200 mA to 200 mA Minimum resolution: 100 µV; 5 pA Maximum voltage between common and ground: ± 42 V Ground unit (GNDU) specification Output voltage: 0 V ± 100 µV Maximum sink current: 0.5 A Output terminal/connection: Triaxial connector, Kelvin (remote sensing) Voltage range, resolution and accuracy Voltage range ±2 V ±20 V ±40 V ±100 V Force resolution 100 µV 1 mV 2 mV 5 mV Measure resolution 100 µV 1 mV 2 mV 5 mV Force accuracy 1 Measure accuracy 2 ±(0.03% ±(0.03% ±(0.03% ±(0.04% ±(0.03% ±(0.03% ±(0.03% ±(0.03% + 900 µV) + 4 mV) + 7 mV) + 15 mV) + 700 µV) + 4 mV) + 8 mV) + 20 mV) Maximum current 200 mA 200 mA 2 3 1 ± (% of output/measurement value + offset voltage) 2 200 mA (Vout ≤ 20 V), 50 mA (20 V <Vout ≤40 V), Vout is the output voltage in volts. 3 200 mA (Vout ≤ 20 V), 50mA (20 V <Vout ≤40 V), 20 mA (40 V <Vout ≤42 V). Vout is the output voltage in volts. Current range, resolution and accuracy Current range ±100 nA ±1 µA ±10 µA ±100 µA ±1 mA ±10 mA ±100 mA ±200 mA 1 2 3 Force resolution 5 pA 50 pA 500 ppA 5 nA 50 nA 500 nA 5 µA 10 µA Measure resolution 5 pA 50 pA 500 pA 5 nA 50 nA 500 nA 5 µA 10 µA Force accuracy 1 Measure accuracy 2 ±(0.12% + 50 pA + 200 fA x Vo) ±(0.12% + 400 pA + 2 pA x Vo) ±(0.12% + 5 nA + 20 pA x Vo) ±(0.12% + 40 nA + 200 pA x Vo) ±(0.12% + 500 nA + 2 nA x Vo) ±(0.12% + 4 µA + 20 nA x Vo) ±(0.12% + 50 µA + 200 nA x Vo) ±(0.12% +100 µA + 400 nA x Vo) ±(0.1% + 30 pA + 200 fA x Vo) ±(0.1% + 200 pA + 2 pA x Vo) ±(0.1% + 3 nA + 20 pA x Vo) ±(0.1% + 20 nA + 200 pA x Vo) ±(0.1% + 300 nA + 2 nA x Vo) ±(0.1% + 2 µA + 20 nA x Vo) ±(0.1% + 30 µA + 200 nA x Vo) ±(0.1% + 60 µA + 400 nA x Vo) 2 3 ±(% of output/measurement value + offset current A (fixed part determined by the output/measurement range + the proportional part that is multiplied by Vo)) 42 V (Io ≤ 20 mA), 40 V (20 mA <Io ≤50 mA), 20 V (50 mA <Io ≤100 mA), Io is the output current in Amps. 42 V (Io ≤20 mA), 40 V (20 mA <Io ≤50 mA), 20 V (50 mA <Io ≤200 mA), Io is the output current in Amps. Digital output DC power source** Digital output characteristics: 16 digital output lines maximum when the N9201A has 8 or less SMUs; 32 digital output lines maximum when the N9201A has more than 8 SMUs Output voltage: High voltage: 0.3 V to 8.0 V Low voltage: 0.0 V Maximum output current: ± 64 mA Minimum state transition time: 20 µs 1 channel and GND Output rating: 0.03 V to + 10.25 V Programming accuracy: Voltage: 0.1% ± 20 mV Current limit: 0.15% ± 20 mA 2 Maximum voltage 42 V 42 V 42 V 42 V 42 V 42 V **Note: DC power source specification is specified at the connectors of the equipment’s front panel General specifications Accuracy is specified at Temperature: 23°C ± 5°C Humidity: 5% to 70% RH Warm up time: at least 40 minutes. Self-calibration: Within one hour after calibration Integration time: Medium or long Operation and storage Operating temperature range: 5°C to 30°C Operating humidity range: 5% to 70% (noncondensing) Storage temperature -20°C to 50°C (< 80% RH, noncondensing) Power requirements Allowable voltage range at maximum current: 100 Vac – 120 Vac @ 20 A 200 Vac – 240 Vac @10 A Regulatory and standards compliance EMC: EMC Directive 89/336/EEC, 93/68/EEC IEC/EN61326-1 ICES-001 AS/NZS 2064.1 Safety: Low voltage directive 73/23/EEC, 93/68/EEC IEC/EN61010-1 CSA C22.2 No. 61010-1 Certification marking: CW, c CSA us, C-tick, ICES/NMB-001 Dimensions System cabinet: 600 mm (W) by 1050 mm (D) by 1818 mm (H) Weight System cabinet: Approximately 360 kg (including 40 SMUs, 32 digital outputs, 1 DC power source, and required cables) Recommended probers and probe cards* Probers: • ACCRETECH UF3000 • TEL P12XL Probe cards: • JEM (Japan electronic materials Co.) • MJC (Micronics Japan Co.) • K&S (Kulicke & Soffa Industries Inc.) • FormFactor * Please contact your local sales representative regarding the latest information on recommended probers and probe cards. N9201A-to-4070/4080 Series connection capabilities SMU1 SMU3 SMU5 SMU7 GNDU SMU2 SMU4 SMU6 SMU8 SMUs Digital outputs DC power source 1 2 3 4 . . . . 39 40 1 2 3 . . . 31 32 1 GND 1 2 3 4 5 6 . . . . . . . . . . . . . Maximum 48 extended ports N9201A measurement hardware resources 4070/4080 Series test head 45 46 47 48 1 2 3 4 5 . . . . . . . . . . . . 43 44 45 46 47 48 48 DUT pins 3 Web Resources N9201A Web Site Visit our N9201A web site for additional product information and literature. www.agilent.com/see/N9201A Agilent Email Updates www.agilent.com/find/emailupdates Get the latest information on the products and applications you select. Remove all doubt Our repair and calibration services will get your equipment back to you, performing like new, when promised. You will get full value out of your Agilent equipment throughout its lifetime. 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