Intersema MS765 Pressure sensor die (0-0.5 bar) Datasheet

MS765
PRESSURE SENSOR DIE (0-0.5 BAR)
•
•
•
•
0 to 50 kPa range (0.5 bar or 7.25 PSI)
Absolute/differential pressure sensors
Medical/industrial applications
RoHS-compatible & Pb-free1
DESCRIPTION
The sensor element of the MS765 consists of a silicon micro-machined membrane. Implanted resistors make
use of the piezo-resistive effect to sense the membrane deflection and transform it in an electrical signal. This
sensor, which has outstanding span values, is available in various configurations. The absolute pressure sensor
employs a sealed vacuum reference cavity underneath the membrane. The Pyrex glass wafer used for this
sealing has a thickness of 0.2 mm (MS765-A_0.2) or 0.5 mm (MS765-A_0.5). There are two gauge versions
available: one with a drilled Pyrex glass (MS765-D) and the other without Pyrex glass (MS765-S).
FEATURES
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•
•
Uncompensated pressure sensor die
Output Span 170 mV @ 500 mbar & 5V
Temperature Range -40°…+125°C
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•
•
Linearity 0.05% (typical)
Small Die Size 1.96 x 2.10 mm (MS765-A)
Low Cost, High reliability
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Blood pressure meters
Industrial applications
APPLICATION
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•
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Absolute/Differential pressure sensor systems
Variometers
Liquid level control
ELECTRICAL CONNECTIONS
Positive output for pressure applied topside
Vs+
EPI
Vs+ : Supply voltage of Wheatstone bridge
Epi : Connection of epitaxial layer (membrane)
Out+
Out-
Out- : Negative output
Out+ : Positive output
GND1 : Ground
GND2 : Ground
GND1
GND2
1
The European RoHS directive 2002/95/EC (Restriction of the use of certain Hazardous Substances in electrical and electronic equipment)
bans the use of lead, mercury, cadmium, hexavalent chromium and polybrominated biphenyls (PBB) or polybrominated diphenyl ethers
(PBDE).
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BOND PAD CONFIGURATION
Important remarks:
Out+
MS765
GND1
GND2
Vs+
As the sensing elements are diffused resistances, the voltage
applied on the ground pads (GND1 and GND2) has to be lower
than the voltage applied on supply voltage pad (Vs+).
Epi
The epitaxial layer is connected to the Vs+ pin on the die.
Out-
Gold ball bonding or aluminium wedge bonding can be used to
wire-bond the sensor. The quality of the wire-bonding is equipment
and process dependant. For this reason, it is strongly
recommended that a thorough wire-bonding qualification is made
by the end user if the sensor is going to be operated over an
extended temperature range.
LAYOUT (Absolute sensors)
MS765-A_0.2
MS765-A_0.5
Pad opening in passivation is 100 µm
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LAYOUT (Gauge sensors)
MS765-D
MS765-S
Pad opening in passivation is 100 µm
FULL SCALE PRESSURE
kPa
bar
mbar
PSI
atm
mm Hg
m H2O
Inches H2O
50
0.5
500
7.5
0.5
375
5.1
200
ABSOLUTE MAXIMUM RATINGS
Parameter
Supply voltage
Storage temperature
Pressure overload
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Symbol
VS+
TS
Conditions
Min
Max
Unit
-40
20
+150
3
V
C
Bar
o
Ta = 25 C
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ELECTRICAL CHARACTERISTICS
(Reference conditions: Supply Voltage VS+ = 5 Vdc; Ambient Temperature Ta = 25°C )
Parameter
Operating Pressure Range
Min
Typ
Max
Unit
0
0.5
Bar
Operating Temperature Range
-40
125
°C
Bridge Resistance
3.0
3.4
3.8
kΩ
Span (FS) @ 500 mbar
150
170
190
mV
Span (FS) @ 250 mbar
75
85
95
mV
Span (FS) @ 50 mbar
13
17
20
mV
Zero Pressure Offset
-40
0
40
mV
± 0.05
± 0.2
+ 2800
- 1900
Pressure Hysteresis
Repeatability
Linearity
Temperature Coefficient of Resistance
Span
Offset
+ 2400
- 1500
- 80
Temperature Hysteresis
Notes
% FS
1
+ 3300
- 2300
+ 80
ppm/°C
ppm/°C
µV/°C
2
± 0.05
± 0.15
% FS
3
± 0.05
± 0.15
% FS
4
0.3
% FS
5
NOTES
1) Deviation at one half full-scale pressure from the least squares best line fit over pressure range (0 to 0.5 bar).
2) Slope of the endpoint straight line from 25°C to 60°C.
3) Output deviation at any pressure within the specified range, when this pressure is cycled to and from the
minimum or maximum rated pressure, at 25°C.
4) Same as 3) after 10 pressure cycles
5) Maximum difference in offset after one thermal cycle from -40°C to +125°C.
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PICKING TOOLS
The MS765 sensors have a sensitive membrane size of 0.95 x 0.95 mm and outer dimensions of 2.1 x 1.96 mm
(MS765-A_0.2, MS765-A_0.5 and MS765-D) and 2.13 x 1.99 mm (MS765-S). The pick and place tool has to be
of a soft material such as rubber (Hardness 78-97 Shore A). Its external size must fit the sensor and the vacuum
cavity must be as large as the membrane itself. Successful tests have been made with specific SPT tools, see
SPT drawing and references below.
Ensure that the ejection pins do not touch the membrane for gauge versions.
SPT references
External dimension
Internal dimensions
RTR-A1-060x060
TL & TW: 0.06 inch /1.52 mm
∅H: 0.035 inch / 0.89 mm
CTR-A1-080
∅F: 0.08 inch / 2.03 mm
∅H: 0.035 inch / 0.89 mm
ORDERING INFORMATION
Product Code
Type
Product
Art.-Nr.
MS765-A_0.2
Absolute
0.5 bar Pressure Sensors 0.2 mm Pyrex sawn on b/f
76525022
MS765-A_0.5
Absolute
0.5 bar Pressure Sensors 0.5 mm Pyrex sawn on b/f
76525021
MS765-D
Differential
0.5 bar Pressure Sensors sawn on b/f
76525121
MS765-S
Differential
0.5 bar Pressure Sensors no Pyrex sawn on b/f
76525221
The MS765 dice are supplied sawn on blue foil, mounted on plastic rings
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FACTORY CONTACTS
Factory and European Sales office
Intersema Sensoric SA
Ch. Chapons-des-Prés 11
CH-2022 Bevaix
Switzerland
Phone:
+41 32 847 9550
Fax:
+41 32 847 9569
e-mail:
Website: www.intersema.ch
USA
Measurement Specialties Inc.
1000 Lucas Way
Hampton, VA 23666
USA
Phone:
Fax:
e-mail:
Website:
+1 800 555 1551
+1 757 766 4297
[email protected]
www.meas-spec.com
Phone:
Fax:
e-mail:
Website:
+86 755 8330 1004
+86 755 8330 6797
[email protected]
www.meas-spec.com
ASIA
Measurement Specialties (China), Ltd.
F1.6-4D, Tian An Development
Compound
Shenzhen, China 518048
NOTICE
Intersema reserves the right to make changes to the products contained in this data sheet in order to improve the design or performance
and to supply the best possible products. Intersema assumes no responsibility for the use of any circuits shown in this data sheet, conveys
no license under any patent or other rights unless otherwise specified in this data sheet, and makes no claim that the circuits are free from
patent infringement. Applications for any devices shown in this data sheet are for illustration only and Intersema makes no claim or
warranty that such applications will be suitable for the use specified without further testing or modification.
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