Order this document by MPX4250D/D SEMICONDUCTOR TECHNICAL DATA $"$ ! !"$%" "##%" # $ " !#$ "$ The MPX4250D series piezoresistive transducer is a state–of–the–art monolithic silicon pressure sensor designed for a wide range of applications, but particularly those employing a microcontroller or microprocessor with A/D inputs. This patented, single element transducer combines advanced micromachining techniques, thin–film metallization, and bipolar processing to provide an accurate, high level analog output signal that is proportional to the applied pressure. OPERATING OVERVIEW INTEGRATED PRESSURE SENSOR 0 to 250 kPa (0 to 36.3 psi) 0.2 to 4.91 Volts Output Features • Differential and Gauge Applications Only • 1.4% Maximum Error Over 0° to 85°C BASIC CHIP CARRIER ELEMENT CASE 867–08, STYLE 1 • Ideally suited for Microprocessor Interfacing • Patented Silicon Shear Stress Strain Gauge • Temperature Compensated Over – 40° to +125°C • Offers Reduction in Weight and Volume Compared to Existing Hybrid Modules • Durable Epoxy Unibody Element VS 3 THIN FILM TEMPERATURE COMPENSATION AND GAIN STAGE #1 X–ducer SENSING ELEMENT GAIN STAGE #2 AND GROUND REFERENCE SHIFT CIRCUITRY 1 PORT OPTION CASE 867B–04, STYLE 1 Vout PIN NUMBER 2 PINS 4, 5 AND 6 ARE NO CONNECTS GND Figure 1. Fully Integrated Pressure Sensor Schematic 1 Vout 4 N/C 2 Gnd 5 N/C 3 VS 6 N/C NOTE: Pins 4, 5, and 6 are internal device connections. Do not connect to external circuitry or ground. Pin 1 is noted by the notch in the Lead. MAXIMUM RATINGS(1) Parametrics Overpressure(2) (P1 > P2) Burst Pressure(2) (P1 > P2) Storage Temperature Operating Temperature Symbol Value Unit Pmax 400 kPa Pburst 1000 kPa Tstg – 40° to +125° °C TA – 40° to +125° °C 1. TC = 25°C unless otherwise noted. 2. Exposure beyond the specified limits may cause permanent damage or degradation to the device. Senseon and X–ducer are trademarks of Motorola, Inc. REV 1 Motorola Sensor Device Data Motorola, Inc. 1997 1 OPERATING CHARACTERISTICS (VS = 5.1 Vdc, TA = 25°C unless otherwise noted, P1 > P2) Symbol Min Typ Max Unit Pressure Range(1) Characteristic POP 0 — 250 kPa Supply Voltage(2) VS 4.85 5.1 5.35 Vdc Supply Current Io — 7.0 10 mAdc Minimum Pressure Offset(3) @ VS = 5.1 Volts (0 to 85°C) VOFF 0.139 0.204 0.269 Vdc Full Scale Output(4) @ VS = 5.1 Volts (0 to 85°C) VFSO 4.844 4.909 4.974 Vdc Full Scale Span(5) @ VS = 5.1 Volts (0 to 85°C) VFSS — 4.705 — Vdc Accuracy(6) (0 to 85°C) — — — ±1.4 %VFSS ∆V/∆P — 18.8 — mV/kPa Response Time(7) tR — 1.0 — ms Output Source Current at Full Scale Output lo+ — 0.1 — mAdc Warm–Up Time(8) — — 20 — mSec Offset Stability(9) — — ± 0.5 — %VFSS Symbol Min Typ Max Unit Weight, Basic Element (Case 867) — — 4.0 — Grams Common Mode Line Pressure(10) — — — 690 kPa Sensitivity MECHANICAL CHARACTERISTICS Characteristic NOTES: 1. 1.0 kPa (kiloPascal) equals 0.145 psi. 2. Device is ratiometric within this specified excitation range. 3. Offset (Voff) is defined as the output voltage at the minimum rated pressure. 4. Full Scale Output (VFSO) is defined as the output voltage at the maximum or full rated pressure. 5. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure. 6. Accuracy (error budget) consists of the following: • Linearity: Output deviation from a straight line relationship with pressure over the specified pressure range. • Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to and from the minimum or maximum operating temperature points, with zero differential pressure applied. • Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from the minimum or maximum rated pressure, at 25°C. • TcSpan: Output deviation over the temperature range of 0° to 85°C, relative to 25°C. • TcOffset: Output deviation with minimum rated pressure applied, over the temperature range of 0° to 85°C, relative to 25°C. • Variation from Nominal: The variation from nominal values, for Offset or Full Scale Span, as a percent of VFSS, at 25°C. 7. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure. 8. Warm–up is defined as the time required for the product to meet the specified output voltage after the Pressure has been stabilized. 9. Offset stability is the product’s output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test. 10. Common mode pressures beyond what is specified may result in leakage at the case–to–lead interface. 2 Motorola Sensor Device Data FLUORO SILICONE DIE COAT DIE STAINLESS STEEL METAL COVER ÉÉÉÉÉÉÉÉÉÉÉ ÉÉÉÉÉÉÉÉÉÉÉ ÉÉÉÉÉÉÉÉÉÉÉ ÉÉÉÉÉÉÉÉÉÉÉ P1 MPX4250D OUPUT (PIN 1) WIRE BOND LEAD FRAME A/D 50 pF 51 k µ PROCESSOR RTV DIE BOND P2 EPOXY CASE Figure 2. Cross–Sectional Diagram (Not to Scale) Figure 3. Typical Decoupling Filter for Sensor to Microprocessor Interface Figure 2 illustrates the Differential/Gauge Pressure Sensing Chip in the basic chip carrier (Case 867). A fluorosilicone gel isolates the die surface and wire bonds from the environment, while allowing the pressure signal to be transmitted to the sensor diaphragm. The MPX4250D series pressure sensor operating characteristics, and internal reliability and qualification tests are based on use of dry air as the pressure media. Media, other than dry air, may have adverse effects on sensor performance and long–term reliability. Contact the factory for information regarding media compatibility in your application. Figure 3 shows a typical decoupling circuit for interfacing the integrated sensor to the A/D input of a microprocessor. Proper decoupling of the power supply is recommended. Figure 4 shows the sensor output signal relative to pressure input. Typical, minimum, and maximum output curves are shown for operation over a temperature range of 0° to 85°C using the decoupling circuit below. (The output will saturate outside of the specified pressure range.) 5.0 4.5 OUTPUT (Volts) 4.0 3.5 MAX TRANSFER FUNCTION: Vout = VS* (0.00369*P + 0.04) ± Error VS = 5.1 Vdc TEMP = 0 to 85°C TYP 3.0 2.5 2.0 1.5 MIN 1.0 250 260 0 0 10 20 30 40 50 60 70 80 90 100 110 120 130 140 150 160 170 180 190 200 210 0.5 PRESSURE in kPa Figure 4. Output versus Differential Pressure Motorola Sensor Device Data 3 Transfer Function (MPX4250D) Nominal Transfer Value: Vout = VS x (0.00369 x P + 0.04) Nominal Transfer Value: (Pressure Error x Temp. Factor x 0.00369 x VS) Nominal Transfer Value: VS = 5.1 0.25 Vdc " " Temperature Error Band MPX4250D Series 4.0 3.0 Temperature Error Factor 2.0 Temp Multiplier – 40 0 to 85 +125 3 1 3 1.0 0.0 –40 –20 0 20 40 60 80 100 120 140 Temperature in °C NOTE: The Temperature Multiplier is a linear response from 0° to –40°C and from 85° to 125°C. Pressure Error Band 5.0 4.0 Pressure Error (kPa) 3.0 2.0 1.0 0 –1.0 –2.0 –3.0 –4.0 –5.0 0 25 50 75 100 125 150 175 200 225 250 Pressure (kPa) MPX4250D Series Pressure Error (max) 0 to 250 kPa ± 3.45 kPa ORDERING INFORMATION The MPX4250D series silicon pressure sensors are available in the basic element package or with pressure port fittings that provide mounting ease and barbed hose connections. Device Type Basic Element Ported Elements 4 Options Case No. MPX Series Order No. Marking Differential/Gauge, Element Case 867–08 MPX4250D MPX4250D Differential/Gauge, Ported Case 867B–04 MPX4250DP MPX4250DP Differential/Gauge, Stove Pipe Port Case 867E–03 MPX4250GS MPX4250D Differential/Gauge, Axial Port Case 867F–03 MPX4250GSX MPX4250D Motorola Sensor Device Data PACKAGE DIMENSIONS C R M B NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. 3. DIMENSION –A– IS INCLUSIVE OF THE MOLD STOP RING. MOLD STOP RING NOT TO EXCEED 16.00 (0.630). POSITIVE PRESSURE (P1) –A– N PIN 1 SEATING PLANE 1 2 3 4 5 DIM A B C D F G J L M N R S L 6 –T– G J S F D 6 PL 0.136 (0.005) M T A M INCHES MIN MAX 0.595 0.630 0.514 0.534 0.200 0.220 0.027 0.033 0.048 0.064 0.100 BSC 0.014 0.016 0.695 0.725 30 _NOM 0.475 0.495 0.430 0.450 0.090 0.105 STYLE 1: PIN 1. 2. 3. 4. 5. 6. CASE 867–08 ISSUE N MILLIMETERS MIN MAX 15.11 16.00 13.06 13.56 5.08 5.59 0.68 0.84 1.22 1.63 2.54 BSC 0.36 0.40 17.65 18.42 30 _NOM 12.07 12.57 10.92 11.43 2.29 2.66 VOUT GROUND VCC V1 V2 VEX BASIC ELEMENT (D) –T– A U L SEATING PLANE R NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. PORT #1 POSITIVE PRESSURE (P1) V DIM A B C D F G J K L N P Q R S U V –Q– N B K 1 PIN 1 –P– C J 0.25 (0.010) M T Q 3 4 5 6 S G M 2 F D 6 PL 0.13 (0.005) M T P CASE 867B–04 ISSUE E S Q S INCHES MIN MAX 1.145 1.175 0.685 0.715 0.305 0.325 0.027 0.033 0.048 0.064 0.100 BSC 0.014 0.016 0.695 0.725 0.290 0.300 0.420 0.440 0.153 0.159 0.153 0.159 0.230 0.250 0.220 0.240 0.910 BSC 0.182 0.194 STYLE 1: PIN 1. 2. 3. 4. 5. 6. MILLIMETERS MIN MAX 29.08 29.85 17.40 18.16 7.75 8.26 0.68 0.84 1.22 1.63 2.54 BSC 0.36 0.41 17.65 18.42 7.37 7.62 10.67 11.18 3.89 4.04 3.89 4.04 5.84 6.35 5.59 6.10 23.11 BSC 4.62 4.93 VOUT GROUND VCC V1 V2 VEX PRESSURE SIDE PORTED (AP) Motorola Sensor Device Data 5 PACKAGE DIMENSIONS – CONTINUED C –B– NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. A DIM A B C D E F G J K N S V V PIN 1 PORT #1 POSITIVE PRESSURE (P1) 6 K 4 3 2 1 S J N 5 G F E D –T– 6 PL 0.13 (0.005) M T B M CASE 867E–03 ISSUE D INCHES MIN MAX 0.690 0.720 0.245 0.255 0.780 0.820 0.027 0.033 0.178 0.186 0.048 0.064 0.100 BSC 0.014 0.016 0.345 0.375 0.300 0.310 0.220 0.240 0.182 0.194 STYLE 1: PIN 1. 2. 3. 4. 5. 6. MILLIMETERS MIN MAX 17.53 18.28 6.22 6.48 19.81 20.82 0.69 0.84 4.52 4.72 1.22 1.63 2.54 BSC 0.36 0.41 8.76 9.53 7.62 7.87 5.59 6.10 4.62 4.93 VOUT GROUND VCC V1 V2 VEX PRESSURE SIDE PORTED (AS) –T– C A U E –Q– N V B R PIN 1 PORT #1 POSITIVE PRESSURE (P1) –P– 0.25 (0.010) M T Q 6 M 5 4 3 2 1 S K J 0.13 (0.005) M T P S D 6 PL Q S G F CASE 867F–03 ISSUE D NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. DIM A B C D E F G J K N P Q R S U V INCHES MIN MAX 1.080 1.120 0.740 0.760 0.630 0.650 0.027 0.033 0.160 0.180 0.048 0.064 0.100 BSC 0.014 0.016 0.220 0.240 0.070 0.080 0.150 0.160 0.150 0.160 0.440 0.460 0.695 0.725 0.840 0.860 0.182 0.194 STYLE 1: PIN 1. 2. 3. 4. 5. 6. MILLIMETERS MIN MAX 27.43 28.45 18.80 19.30 16.00 16.51 0.68 0.84 4.06 4.57 1.22 1.63 2.54 BSC 0.36 0.41 5.59 6.10 1.78 2.03 3.81 4.06 3.81 4.06 11.18 11.68 17.65 18.42 21.34 21.84 4.62 4.93 VOUT GROUND VCC V1 V2 VEX PRESSURE SIDE PORTED (ASX) 6 Motorola Sensor Device Data Motorola reserves the right to make changes without further notice to any products herein. Motorola makes no warranty, representation or guarantee regarding the suitability of its products for any particular purpose, nor does Motorola assume any liability arising out of the application or use of any product or circuit, and specifically disclaims any and all liability, including without limitation consequential or incidental damages. “Typical” parameters which may be provided in Motorola data sheets and/or specifications can and do vary in different applications and actual performance may vary over time. All operating parameters, including “Typicals” must be validated for each customer application by customer’s technical experts. Motorola does not convey any license under its patent rights nor the rights of others. Motorola products are not designed, intended, or authorized for use as components in systems intended for surgical implant into the body, or other applications intended to support or sustain life, or for any other application in which the failure of the Motorola product could create a situation where personal injury or death may occur. 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