Freescale Semiconductor Technical Data MPXM2202 Rev 2, 09/2005 200 kPa On-Chip Temperature Compensated and Calibrated Silicon Pressure Sensors MPXM2202 SERIES The MPXM2202 device is a silicon piezoresistive pressure sensors providing a highly accurate and linear voltage output directly proportional to the applied pressure. The sensor is a single, monolithic silicon diaphragm with the strain gauge and a thin-film resistor network integrated on-chip. The chip is laser trimmed for precise span and offset calibration and temperature compensation. COMPENSATED AND CALIBRATED PRESSURE SENSOR 0 TO 200 kPA (0 TO 29 psi) 40 mV FULL SCALE SPAN (TYPICAL) Features • • • • Temperature Compensated Over 0°C to + 85°C Available in Easy-to-Use Tape and Reel Ratiometric to Supply Voltage Gauge Ported and Non Ported Options MPAK PACKAGE Typical Applications • • • • • • • MPXM2202D/A CASE 1320-02 Pump/Motor Controllers Robotics Level Indicators Medical Diagnostics Pressure Switching Barometers Altimeters MPXM2202GS/AS CASE 1320A-02 ORDERING INFORMATION Device Type Nonported Ported Options Case No. MPX Series Order No. Absolute, Element Only 1320 MPXM2202D Absolute, Element Only 1320 MPXM2202DT1 Absolute, Element Only 1320 MPXM2202A Absolute, Element Only 1320 MPXM2202AT1 Absolute, Axial 1320A MPXM2202GS Port Absolute, Axial 1320A MPXM2202GST1 Port Absolute, Axial 1320A MPXM2202AS Port Absolute, Axial 1320A MPXM2202AST1 Port Packing Options Rails Device Marking MPXM2202D Tape & Reel MPXM2202D Rails MPXM2202A Tape & Reel MPXM2202A Rails MPXM2202G Tape & Reel MPXM2202G Rails MPXM2202A Tape & Reel MPXM2202A © Freescale Semiconductor, Inc., 2005. All rights reserved. PIN NUMBER 1 GND 3 VS 2 +VOUT 4 -VOUT Figure 1 shows a block diagram of the internal circuitry on the stand-alone pressure sensor chip. VS 3 Thin Film Temperature Compensation and Calibration Circuitry X-ducer Sensing Element 2 VOUT+ 4 V OUT- 1 GND Figure 1. Temperature Compensated Pressure Sensor Schematic VOLTAGE OUTPUT VERSUS APPLIED DIFFERENTIAL PRESSURE The differential voltage output of the sensor is directly proportional to the differential pressure applied. The output voltage of the differential or gauge sensor increases with increasing pressure applied to the pressure side relative to the vacuum side. Similarly, output voltage increases as increasing vacuum is applied to the vacuum side relative to the pressure side. Table 1. Maximum Ratings(1) Rating Symbol Value Unit Maximum Pressure Pmax 400 kPa Storage Temperature Tstg -40 to +125 °C Operating Temperature TA -40 to +125 °C 1. Exposure beyond the specified limits may cause permanent damage or degradation to the device. MPXM2202 2 Sensors Freescale Semiconductor Table 2. Operating Characteristics (VS = 10 Vdc, TA = 25°C.) Characteristic Symbol Min Typ Max Unit POP 0 — 200 kPa VS — 10 16 Vdc IO — 6.0 — mAdc VFSS 38.5 40 41.5 mV VOFF -1.0 -2.0 — — 1.0 2.0 mV ∆V/∆P — 0.2 — mV/kPa — — -0.6 -1.0 — — 0.4 1.0 %VFSS Pressure Hysteresis(5) (0 to 100 kPa) — — ±0.1 — %VFSS Temperature Hysteresis(5) (-40°C to +125°C) — — ±0.5 — %VFSS TCVFSS -2.0 — 2.0 %VFSS TCVOFF -1.0 — 1.0 mV ZIN 1000 — 2500 Ω ZOUT 1400 — 3000 Ω tR — 1.0 — ms Warm-Up — — 20 — ms Offset Stability(7) — — ±0.5 — %VFSS Pressure Range(1) Supply Voltage(2) Supply Current Full Scale Span(3) Offset(4) MPXM2202D/G Series MPXM2202A Series Sensitivity Linearity(5) MPXM2202D/G Series MPXM2202A Series Temperature Effect on Full Scale Span(5) (5) Temperature Effect on Offset Input Impedance Output Impedance Response Time(6) (10% to 90%) 1. 1.0 kPa (kiloPascal) equals 0.145 psi. 2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional error due to device self-heating. 3. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure. 4. Offset (Voff) is defined as the output voltage at the minimum rated pressure. 5. Accuracy (error budget) consists of the following: • Linearity: • • • • Output deviation from a straight line relationship with pressure, using end point method, over the specified pressure range. Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from the minimum or maximum rated pressure, at 25°C. Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to and from the minimum or maximum operating temperature points, with zero differential pressure applied. TcSpan: Output deviation at full rated pressure over the temperature range of 0 to 85°C, relative to 25°C. TcOffset: Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85°C, relative to 25°C. 6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure. 7. Offset stability is the product's output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test. MPXM2202 Sensors Freescale Semiconductor 3 the “best case” linearity error (lower numerical value), the calculations required are burdensome. Conversely, an end point fit will give the “worst case” error (often more desirable in error budget calculations) and the calculations are more straightforward for the user. The specified pressure sensor linearities are based on the end point straight line method measured at the midrange pressure. LINEARITY Linearity refers to how well a transducer's output follows the equation: VOUT = VOFF + sensitivity x P over the operating pressure range. There are two basic methods for calculating nonlinearity: (1) end point straight line fit (see Figure 2) or (2) a least squares best line fit. While a least squares fit gives Least Square Deviation Least Squares Fit Exaggerated Performance Curve Relative Voltage Output Least Square Deviation Straight Line Deviation End Point Straight Line Fit Offset 0 50 100 Pressure(% Fullscale) Figure 2. Linearity Specification Comparison is directly proportional to the differential pressure and is essentially a straight line. A silicone gel isolates the die surface and wire bonds from the environment, while allowing the pressure signal to be transmitted to the silicon diaphragm. ON-CHIP TEMPERATURE COMPENSATION AND CALIBRATION Figure 3 shows the minimum, maximum and typical output characteristics of the MPXM2202 series at 25°C. The output VS = 10 Vdc TA = 25°C 40 Output (mVdc) 35 TYP 30 25 20 Span Range (TYP) MAX 15 10 MIN 5 kPa PSI 0 -5 0 25 50 7.25 75 100 14.5 125 150 21.75 175 200 29 Offset (TYP) Figure 3. Output versus Pressure Differential MPXM2202 4 Sensors Freescale Semiconductor PACKAGE DIMENSIONS PAGE 1 OF 2 CASE 1320-02 ISSUE B MPXM2202 Sensors Freescale Semiconductor 5 PACKAGE DIMENSIONS PAGE 2 OF 2 CASE 1320-02 ISSUE B MPXM2202 6 Sensors Freescale Semiconductor PACKAGE DIMENSIONS PIN 4 PIN 1 PAGE 1 OF 2 CASE 1320A-02 ISSUE A MPXM2202 Sensors Freescale Semiconductor 7 PACKAGE DIMENSIONS PAGE 2 OF 2 CASE 1320A-02 ISSUE A MPXM2202 8 Sensors Freescale Semiconductor How to Reach Us: Home Page: www.freescale.com E-mail: [email protected] USA/Europe or Locations Not Listed: Freescale Semiconductor Technical Information Center, CH370 1300 N. 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