HMA Series Amplified pressure sensors FEATURES · 100 mbar to 10 bar, 1 to 150 psi gage or differential pressure · Increased media compatibility1 · Analog output · Precision ASIC signal conditioning · Calibrated and temperature compensated2 · SIL and DIP housings · RoHS compliant · Quality Management System according to ISO 13485:2003 and ISO 9001:2008 MEDIA COMPATIBILITY1,2 High pressure port: To be used with gases and liquids which are compatible with the wetted materials (high temperature polyamide, ceramic AL2O3, epoxy, fluorosilicone, glass, silicon). Low pressure port: To be used with non-corrosive, non-ionic working fluids such as clean dry air, dry gases and the like. SPECIFICATIONS Maximum ratings Supply voltage VS HMA...3 HMA...5 Output current Sink Source Environmental Temperature ranges Compensated Operating Storage3 Humidity limits (non-condensing) ELECTRICAL CONNECTION 2.7 ... 4.2 VDC 4.2 ... 5.5 VDC max. 6.5 VDC 1 mA 1 mA +Vs 1 3 Vout HMA -20 ... +85 °C -20 ... +85 °C -40 ... +125 °C ...95 %RH10 (100 % condensing or direct liquid media on high pressure port1) 4 C 2 GND 100 nF 10 nF 100 nF Vibration max. 10 g, 10...2000 Hz, random (EN 60068-2-64) Mechanical shock max. 50 g, 11 ms (EN 60068-2-27) Lead solder temperature max. 270 °C (JESD22-B106D) E / 11697 / B 1/15 www.first-sensor.com www.sensortechnics.com HMA Series Amplified pressure sensors PRESSURE SENSOR CHARACTERISTICS (TA=25 °C, RH=50 %) Part no. HMAM100U... HMAM100B... HMAM250U... HMAM250B... HMAB001U... HMAB001B... HMAB2x5U... HMAB005U... HMAB010U... HMAP001U... HMAP001B... HMAP100U... Proof pressure4 Operating pressure 0...100 mbar 0...±100 mbar 0...250 mbar 0...±250 mbar 0...1 bar 0...±1 bar 0...2.5 bar 0...5 bar 0...10 bar 0...1 psi 0...±1 psi 0...100 psi 2 bar 2 bar 2 bar 2 bar 5 bar 5 bar 10 bar 14 bar 14 bar 3 0 p si 3 0 p si 2 0 0 p si Other pressure ranges (e.g. 500 mbar, 5 psi, 150 psi) are available on request. Please contact First Sensor. PERFORMANCE CHARACTERISTICS2 (VS=5.0 VDC, TA=25 °C, RH=50 %, analog output signal is ratiometric to VS in the range of VS =4.2...5.5 V) All HMA...H5 devices (VS = 5.0) Characteristics Non-linearity (-20...85 °C)6 Accuracy7 Total accuracy (-20...85 °C)8 Response delay9 A/D resolution D/A resolution Current consumption All HMA...U...H5 (unidirectional devices) Characteristics Zero pressure offset Full scale span (FSS)5 Full scale output All HMA...B...H5 (bidirectional devices) Characteristics Zero pressure offset Full scale span (FSS)5 Output at max. specified pressure at min. specified pressure E / 11697 / B Min. Typ. Max. ±0.25 ±0.25 ±1.5 0.5 12 5.3 4.44 Min. 2.44 4.44 0.44 %FSS ms 11 Min. 0.44 Units bi t mA Typ. 0.50 4.00 4.50 Max. 0.56 Typ. 2.50 4.00 4.50 0.50 Max. 2.56 Units V 4.56 4.56 0.56 Units V 2/15 www.first-sensor.com www.sensortechnics.com HMA Series Amplified pressure sensors PERFORMANCE CHARACTERISTICS2 (VS=3.0 VDC, TA=25 °C, RH=50 %, analog output signal is ratiometric to VS in the range of VS =2.7...4.2 V) All HMA...H3 devices (VS = 3.0) Characteristics Non-linearity (-20...85 °C)6 Accuracy7 Total accuracy (-20...85 °C)8 Response delay9 A/D resolution D/A resolution Current consumption All HMA...U...H3 (unidirectional devices) Characteristics Zero pressure offset Full scale span (FSS)5 Full scale output All HMA...B...H3 (bidirectional devices) Characteristics Zero pressure offset Full scale span (FSS)5 Output at max. specified pressure at min. specified pressure Min. Typ. Max. ±0.25 ±0.25 ±1.5 0.5 12 4.5 2.664 Min. 1.464 2.664 0.264 Typ. 0.30 2.40 2.70 Typ. 1.50 2.40 2.70 0.30 %FSS ms 11 Min. 0.264 Units bi t mA Max. 0.336 Units V 2.736 Max. 1.536 2.736 0.336 Units V Specification notes: 1. All wetted materials are selected to give a high level of media compatibility. Media compatibility refers to media inside the pressure port and lid. Improved media compatibility on high pressure port (backward side of sensor chip) since media has no contact to electronic components. Nevertheless tests with the media used in the specific application are recommended. 2. Sensor is calibrated in air, changes in sensor behaviour based on physical effects caused by the specific media can occur. Weight of the media and wetting forces can influence the sensor characteristics. 3. Storage temperature of the sensor without package. 4. Proof pressure is the maximum pressure which may be applied without causing durable shifts of the electrical parameters of the sensing element. 5. Full Scale Span (FSS) is the algebraic difference between the output signal for the highest and lowest specified pressure. 6. Non-linearity is the measured deviation based on Best Fit Straight Line (BFSL). 7. Accuracy is the combined error from non-linearity and hysteresis. Hysteresis is the maximum output difference at any point within the operating pressure range for increasing and decreasing pressure. 8. Total accuracy is the combined error from offset and span calibration, non-linearity, pressure hysteresis, and temperature effects. Calibration errors include the deviation of offset and full scale from nominal values. 9. Max. delay time between pressure change at the pressure die and signal change at the output. 10. Tested 1h, up to 85 °C. Sensors are electronic components and should be handled only in ESD save environments. E / 11697 / B 3/15 www.first-sensor.com www.sensortechnics.com HMA Series Amplified pressure sensors PHYSICAL DIMENSIONS AND ELECTRICAL CONNECTION 1 2 3 4 HMA...U1... (SIL, axial no ports) Pin 1 2 3 4 Connection +Vs GND +Vout C first angle projection High pressure E / 11697 / B dimensions in mm 4/15 www.first-sensor.com www.sensortechnics.com HMA Series Amplified pressure sensors PHYSICAL DIMENSIONS AND ELECTRICAL CONNECTION (cont.) HMA...W1... (DIP, axial no ports) 5 4 6 3 7 2 8 1 Pin Connection 1 +Vs 2 GND 3 +Vout 4 C 5 I / C* 6 I / C* 7 I / C* 8 I / C* * Internal connection. Do not connect for any reason first angle projection High pressure E / 11697 / B dimensions in mm 5/15 www.first-sensor.com www.sensortechnics.com HMA Series Amplified pressure sensors PHYSICAL DIMENSIONS AND ELECTRICAL CONNECTION (cont.) 1 2 3 4 HMA...U7... (SIL, 2 ports axial opposite side, barbed) Pin 1 2 3 4 Connection +Vs GND +Vout C High pressure port first angle projection dimensions in mm E / 11697 / B 6/15 www.first-sensor.com www.sensortechnics.com HMA Series Amplified pressure sensors PHYSICAL DIMENSIONS AND ELECTRICAL CONNECTION (cont.) 1 2 3 4 HMA...X7... (SIL, 1 port axial, barbed) Pin 1 2 3 4 Connection +Vs GND +Vout C High pressure port first angle projection dimensions in mm E / 11697 / B 7/15 www.first-sensor.com www.sensortechnics.com HMA Series Amplified pressure sensors PHYSICAL DIMENSIONS AND ELECTRICAL CONNECTION (cont.) HMA...Z7... (DIP, 1 port axial, barbed) 5 4 6 3 7 2 8 1 Pin Connection 1 +Vs 2 GND 3 +Vout 4 C 5 I / C* 6 I / C* 7 I / C* 8 I / C* * Internal connection. Do not connect for any reason High pressure port first angle projection dimensions in mm E / 11697 / B 8/15 www.first-sensor.com www.sensortechnics.com HMA Series Amplified pressure sensors PHYSICAL DIMENSIONS AND ELECTRICAL CONNECTION (cont.) 1 2 3 4 HMA...U6... (SIL, 2 ports axial opposite side, straight big) Pin 1 2 3 4 Connection +Vs GND +Vout C High pressure port first angle projection dimensions in mm E / 11697 / B 9/15 www.first-sensor.com www.sensortechnics.com HMA Series Amplified pressure sensors PHYSICAL DIMENSIONS AND ELECTRICAL CONNECTION (cont.) 1 2 3 4 HMA...X6... (SIL, 1 port axial, straight big) Pin 1 2 3 4 Connection +Vs GND +Vout C High pressure port first angle projection dimensions in mm E / 11697 / B 10/15 www.first-sensor.com www.sensortechnics.com HMA Series Amplified pressure sensors PHYSICAL DIMENSIONS AND ELECTRICAL CONNECTION (cont.) HMA...Z6... (DIP, 1 port axial, straight big) 5 4 6 3 7 2 8 1 Pin Connection 1 +Vs 2 GND 3 +Vout 4 C 5 I / C* 6 I / C* 7 I / C* 8 I / C* * Internal connection. Do not connect for any reason High pressure port first angle projection dimensions in mm E / 11697 / B 11/15 www.first-sensor.com www.sensortechnics.com HMA Series Amplified pressure sensors PHYSICAL DIMENSIONS AND ELECTRICAL CONNECTION (cont.) 1 2 3 4 HMA...U5... (SIL, 2 ports axial opposite side, needle big) Pin 1 2 3 4 Connection +Vs GND +Vout C High pressure port first angle projection dimensions in mm E / 11697 / B 12/15 www.first-sensor.com www.sensortechnics.com HMA Series Amplified pressure sensors PHYSICAL DIMENSIONS AND ELECTRICAL CONNECTION (cont.) 1 2 3 4 HMA...X5... (SIL, 1 port axial, needle big) Pin 1 2 3 4 High pressure port Connection +Vs GND +Vout C first angle projection dimensions in mm E / 11697 / B 13/15 www.first-sensor.com www.sensortechnics.com HMA Series Amplified pressure sensors PHYSICAL DIMENSIONS AND ELECTRICAL CONNECTION (cont.) HMA...Z5... (DIP, 1 port axial, needle big) 5 4 6 3 7 2 8 1 High pressure port Pin Connection 1 +Vs 2 GND 3 +Vout 4 C 5 I / C* 6 I / C* 7 I / C* 8 I / C* * Internal connection. Do not connect for any reason dimensions in mm E / 11697 / B 14/15 www.first-sensor.com www.sensortechnics.com HMA Series Amplified pressure sensors NOMENCLATURE Series Pressure range Options HMA Calibration M100 100 mbar B Bidirectional M250 250 mbar U Unidirectional B 001 1 bar B 2x5 2.5 bar B 005 5 bar B 010 10 bar P 001 1 p si P 100 1 0 0 p si Housing Porting U SIL, 2 ports axial opposite side (W) DIP, 2 ports axial opposite side X Z (1) no port Grade Voltage H High (3) 3 V 5 5V 7 Barbed (5) Needle big (6) Straight big SIL, 1 port axial DIP, 1 port axial ( ) available on request. Please contact First Sensor. Example: HMA M100 U U 7 H 5 LABEL INFORMATION Digit 1 2 3 4 Series C h ar 5 Pressure range M A - HMA 6 1 p si 7 100 mbar 8 250 mbar A 1 bar B 2.5 bar C 5 bar L 1 0 0 p si M 10 bar 6 7 8 Pressure unit / Housing Porting pressure mode / calibration U bar, U SIL, 1 no port gage/differential, 2 ports axial unidirectional opposite side 7 Barbed B bar, W DIP, 5 Needle big gage/differential, 2 ports axial 6 Straight big bidirectional opposite side X SIL, 1 port, axial 9 10 11 12 13 14 Grade/ voltage Production code - High, 5 V / High, 3 V Z DIP, 1 port axial First Sensor reserves the right to make changes to any products herein. First Sensor does not assume any liability arising out of the application or use of any product or circuit described herein, neither does it convey any license under its patent rights nor the rights of others. E / 11697 / B 15/15 www.first-sensor.com www.sensortechnics.com