Order this document
by MPX2053/D
SEMICONDUCTOR TECHNICAL DATA
" "#%&#
!" $% #%
! #$$&# $!#$
The MPX2053/MPXV2053G device is a silicon piezoresistive pressure sensor
providing a highly accurate and linear voltage output — directly proportional to the
applied pressure. The sensor is a single, monolithic silicon diaphragm with the strain
gauge and a thin–film resistor network integrated on–chip. The chip is laser trimmed for
precise span and offset calibration and temperature compensation.
Features
• Temperature Compensated Over 0°C to +85°C
UNIBODY PACKAGE
Motorola Preferred Device
0 to 50 kPa (0 to 7.25 psi)
40 mV FULL SCALE SPAN
(TYPICAL)
• Easy–to–Use Chip Carrier Package Options
• Ratiometric to Supply Voltage
SMALL OUTLINE PACKAGE
SURFACE MOUNT
• Differential and Gauge Options
Application Examples
• Pump/Motor Controllers
MPX2053D
CASE 344
• Robotics
• Level Indicators
• Medical Diagnostics
• Pressure Switching
MPXV2053GP
CASE 1369
• Non–Invasive Blood Pressure Measurement
Figure 1 shows a block diagram of the internal
circuitry on the stand–alone pressure sensor chip.
+(
MPX2053GP
CASE 344B
) # !"
)"%')*'
$"%#() $#
#
! ') $#
'* )'.
(#( #
!"#)
+587
MPXV2053DP
CASE 1351
+587
PIN NUMBER
#
MPX2053DP
CASE 344C
Figure 1. Temperature Compensated Pressure
Sensor Schematic
Replaces MPX2050/D
REV 3
Motorola Sensor Device Data
Motorola, Inc. 2002
Gnd
5
N/C
2
+Vout
6
N/C
3
VS
7
N/C
4
–Vout
8
N/C
NOTE: Pin 1 is noted by the notch in
the lead.
VOLTAGE OUTPUT versus
APPLIED DIFFERENTIAL PRESSURE
The differential voltage output of the sensor is
directly proportional to the differential pressure applied.
The output voltage of the differential or gauge sensor
increases with increasing pressure applied to the
pressure side (P1) relative to the vacuum side (P2).
Similarly, output voltage increases as increasing vacuum is applied to the vacuum side (P2) relative to the
pressure side (P1).
Preferred devices are Motorola recommended choices for future use and
best overall value.
1
MPX2053GSX
CASE 344F
PIN NUMBER
1
Gnd
3
VS
2
+Vout
4
–Vout
MPX2053GVP
CASE 344D
NOTE: Pin 1 is noted by the notch in
the lead.
1
MAXIMUM
RATINGS(NOTE)
Rating
Symbol
Value
Unit
Maximum Pressure (P1 > P2)
Pmax
200
kPa
Storage Temperature
Tstg
–40 to +125
°C
Operating Temperature
TA
–40 to +125
°C
NOTE: Exposure beyond the specified limits may cause permanent damage or degradation to the device.
OPERATING CHARACTERISTICS (VS = 10 Vdc, TA = 25°C unless otherwise noted, P1 > P2)
Characteristic
Pressure
Supply
Range(1)
Voltage(2)
Supply Current
Symbol
Min
Typ
Max
Unit
POP
0
—
50
kPa
VS
—
10
16
Vdc
Io
—
6.0
—
mAdc
VFSS
38.5
40
41.5
mV
Voff
–1.0
—
1.0
mV
Sensitivity
∆V/∆P
—
0.8
—
mV/kPa
Linearity(5)
—
–0.6
—
0.4
%VFSS
—
—
±0.1
—
%VFSS
Full Scale Span(3)
Offset(4)
Pressure
Hysteresis(5)
(0 to 50 kPa)
—
—
±0.5
—
%VFSS
TCVFSS
–2.0
—
2.0
%VFSS
TCVoff
–1.0
—
1.0
mV
Input Impedance
Zin
1000
—
2500
Ω
Output Impedance
Zout
1400
—
3000
Ω
tR
—
1.0
—
ms
—
—
20
—
ms
—
—
±0.5
—
%VFSS
Temperature
Hysteresis(5)
(–40°C to +125°C)
Temperature Effect on Full Scale Span(5)
Temperature Effect on Offset(5)
Response
Time(6)
Warm–Up
Offset
Stability(7)
(10% to 90%)
NOTES:
1. 1.0 kPa (kiloPascal) equals 0.145 psi.
2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional
error due to device self–heating.
3. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
minimum rated pressure.
4. Offset (Voff) is defined as the output voltage at the minimum rated pressure.
5. Accuracy (error budget) consists of the following:
• Linearity:
Output deviation from a straight line relationship with pressure, using end point method, over the specified
pressure range.
• Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is
cycled to and from the minimum or maximum operating temperature points, with zero differential pressure
applied.
• Pressure Hysteresis:
Output deviation at any pressure within the specified range, when this pressure is cycled to and from the
minimum or maximum rated pressure, at 25°C.
• TcSpan:
Output deviation at full rated pressure over the temperature range of 0 to 85°C, relative to 25°C.
• TcOffset:
Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85°C, relative
to 25°C.
6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to
a specified step change in pressure.
7. Offset stability is the product’s output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.
2
Motorola Sensor Device Data
!()
(&*'
+ ) $#
!() (&*'( )
'!) ++$!)$*)%*)
LINEARITY
Linearity refers to how well a transducer’s output follows
the equation: Vout = Voff + sensitivity x P over the operating
pressure range. There are two basic methods for calculating
nonlinearity: (1) end point straight line fit (see Figure 2) or (2)
a least squares best line fit. While a least squares fit gives
the “best case” linearity error (lower numerical value), the
calculations required are burdensome.
Conversely, an end point fit will give the “worst case” error
(often more desirable in error budget calculations) and the calculations are more straightforward for the user. Motorola’s
specified pressure sensor linearities are based on the end
point straight line method measured at the midrange pressure.
-')
%'$'"#
*'+
()' ) ! #
+ ) $#
# %$ #)
()' ) ! # )
$()
%'((*' *!!(!
Figure 2. Linearity Specification Comparison
ON–CHIP TEMPERATURE COMPENSATION and CALIBRATION
Figure 3 shows the minimum, maximum and typical output
characteristics of the MPX2053/MPXV2053G series at 25°C.
The output is directly proportional to the differential pressure
and is essentially a straight line.
$*)%*)4+21
+( +21
) °
"%- % %
).%
"-
9
$()
).%
Figure 3. Output versus Pressure Differential
Figure 4 illustrates the differential or gauge configuration
in the basic chip carrier (Case 344). A silicone gel isolates
the die surface and wire bonds from the environment, while
allowing the pressure signal to be transmitted to the silicon
diaphragm.
The MPX2053/MPXV2053G series pressure sensor oper-
Motorola Sensor Device Data
( ! $#
$)
() #!(( ()!
")! $+'
ÉÉÉÉÉÉÉÉÉÉÉ
ÉÉÉÉÉÉÉÉÉÉÉ
ÉÉÉÉÉÉÉÉÉÉÉ
ÉÉÉÉÉÉÉÉÉÉÉ
ÉÉÉÉÉÉÉÉÉÉÉ
%
%$-.
(
, ' $#
"#
3%/
%(
(%#
'#
).%
The effects of temperature on Full–Scale Span and Offset
are very small and are shown under Operating Characteristics.
! '"
%
')+ $#
Figure 4. Cross–Sectional Diagram (not to scale)
ating characteristics and internal reliability and qualification
tests are based on use of dry air as the pressure media. Media other than dry air may have adverse effects on sensor
performance and long term reliability. Contact the factory for
information regarding media compatibility in your application.
3
PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE
Motorola designates the two sides of the pressure sensor
as the Pressure (P1) side and the Vacuum (P2) side. The
Pressure (P1) side is the side containing the silicone gel
which isolates the die. The Motorola MPX pressure sensor is
Part Number
designed to operate with positive differential pressure
applied, P1 > P2.
The Pressure (P1) side may be identified by using the
table below:
Case Type
Pressure (P1) Side Identifier
MPX2053D
344C
Stainless Steel Cap
MPX2053DP
344C
Side with Part Marking
MPX2053GP
344B
Side with Port Attached
MPX2053GSX
344F
Side with Port Attached
MPX2053GVP
344D
Stainless Steel Cap
MPXV2053GP
1369
Side with Port Attached
MPXV2053DP
1351
Side with Part Marking
ORDERING INFORMATION — UNIBODY PACKAGE (MPX2053 SERIES)
MPX Series
Device Type
Options
Order Number
Case Type
Device Marking
Basic Element
Differential
344
MPX2053D
MPX2053D
Ported Elements
Differential, Dual Port
344C
MPX2053DP
MPX2053DP
Gauge
344B
MPX2053GP
MPX2053GP
Gauge, Axial PC Mount
344F
MPX2053GSX
MPX2053D
Gauge, Vacuum
344D
MPX2053GVP
MPX2053GVP
ORDERING INFORMATION — SMALL OUTLINE PACKAGE (MPXV2053G SERIES)
Device Type
Ported Elements
4
Options
Case No.
MPX Series Order No.
Packing Options
Marking
Gauge, Side Port, SMT
1369
MPXV2053GP
Trays
MPXV2053G
Differential, Dual Port, SMT
1351
MPXV2053DP
Trays
MPXV2053G
Motorola Sensor Device Data
SMALL OUTLINE PACKAGE DIMENSIONS
E
A
e
e/2
.014 (0.35)
θ
L
D
A1
DETAIL G
F
b
E1
B
N
∅T
K
A
P
"
#$)(
$#)'$!! # "#( $# #
#)'%') "#( $#( # )$!'#( %'
(" . " "#( $#( # $ #$) #!* "$!
!( $' %'$)'*( $#( "$! !( $'
%'$)'*( $#( (!! #$) -
%' ( "#( $# 0 $( #$) #!* "'
%'$)'*( $# !!$,! "' %'$)'*( $#
(!! "- "*"
M
"
θ
DETAIL G
C
!
(
(
°
°
(
(
°
°
CASE 1369–01
ISSUE O
Motorola Sensor Device Data
5
SMALL OUTLINE PACKAGE DIMENSIONS—CONTINUED
E
A
e
e/2
.014 (0.35)
θ
L
D
A1
DETAIL G
F
b
"
E1
B
N
C
#$)(
$#)'$!! # "#( $# #
#)'%') "#( $#( # )$!'#( %'
(" . " "#( $#( # $ #$) #!* "$!
!( $' %'$)'*( $#( "$! !( $'
%'$)'*( $#( (!! #$) -
%' ( "#( $# 0 $( #$) #!* "'
%'$)'*( $# !!$,! "' %'$)'*( $#
(!! "- "*"
"
M
DETAIL G
().! %# #
+6
#
+587
#
#
#
#
!
∅T
A
P
().! % # #
+587
+6
+587
#
#
#
#
K
θ
(
°
°
(
°
°
CASE 1351–01
ISSUE O
6
Motorola Sensor Device Data
UNIBODY PACKAGE DIMENSIONS
C
R
M
B
–A–
Z
N
PIN 1
#$)(
"#( $# # # )$!'# # %' ("
. " $#)'$!! # "#( $# #
"#( $# ( #!*( + $ ) "$!
()$% ' # "$! ()$% ' # #$) )$ -
L
–T–
J
G
F
D
F
Y
4 PL
"
) "
().! % # '$*#
$*)%*)
(*%%!.
$*)%*)
DAMBAR TRIM ZONE:
THIS IS INCLUDED
WITHIN DIM. “F” 8 PL
().! % # +
(*%%!.
(*%%!.
'$*#
(
#$"
(
#$"
().! % # #
+$*)
+(
+$*)
CASE 344–15
ISSUE Z
#$)(
"#( $# # # )$!'# # %' #(
. $#)'$!! # "#( $# #
–A–
–T–
U
L
R
H
N
PORT #1
POSITIVE
PRESSURE
(P1)
–Q–
B
PIN 1
K
–P–
J
"
) &
S
(
F
C
G
D 4 PL
"
) (
(
&
(
(
(
(
(
().! % # '$*#
$*)%*)
(*%%!.
$*)%*)
CASE 344B–01
ISSUE B
Motorola Sensor Device Data
7
UNIBODY PACKAGE DIMENSIONS — CONTINUED
PORT #1
R
#$)(
"#( $# # # )$!'# # %' #(
. " $#)'$!! # "#( $# #
–A–
U
V
W
L
H
PORT #2
N
PORT #1
POSITIVE PRESSURE
(P1)
PORT #2
VACUUM
(P2)
–Q–
B
PIN 1
K
–P–
–T–
–T–
"
) &
(
S
F
J
G
D 4 PL
C
"
) (
(
&
(
(
(
(
(
().! % # '$*#
$*)%*)
(*%%!.
$*)%*)
CASE 344C–01
ISSUE B
#$)(
"#( $# # # )$!'# # %' #(
. $#)'$!! # "#( $# #
–A–
U
L
–T–
R
H
PORT #2
VACUUM
(P2)
POSITIVE
PRESSURE
(P1)
N
–Q–
B
K
PIN 1
S
C
J
F
–P–
"
) &
(
G
D 4 PL
"
) (
(
&
(
(
(
(
(
().! % # '$*#
$*)%*)
(*%%!.
$*)%*)
CASE 344D–01
ISSUE B
8
Motorola Sensor Device Data
UNIBODY PACKAGE DIMENSIONS — CONTINUED
–T–
C
A
E
–Q–
U
#$)(
"#( $# # # )$!'# # %'
#( . " $#)'$!! # "#( $# #
N
V
B
R
PORT #1
POSITIVE
PRESSURE
(P1)
PIN 1
–P–
"
) &
"
S
K
J
F
D 4 PL
(
(
G
"
) %
(
&
(
().! % # '$*#
+ $*)
+ (*%%!.
+ $*)
CASE 344F–01
ISSUE B
Motorola Sensor Device Data
9
NOTES
10
Motorola Sensor Device Data
NOTES
Motorola Sensor Device Data
11
Motorola reserves the right to make changes without further notice to any products herein. Motorola makes no warranty, representation or guarantee regarding
the suitability of its products for any particular purpose, nor does Motorola assume any liability arising out of the application or use of any product or circuit,
and specifically disclaims any and all liability, including without limitation consequential or incidental damages. “Typical” parameters can and do vary in different
applications and actual performance may vary over time. All operating parameters, including “Typicals” must be validated for each customer application by
customer’s technical experts. Motorola does not convey any license under its patent rights nor the rights of others. Motorola products are not designed,
intended, or authorized for use as components in systems intended for surgical implant into the body, or other applications intended to support or sustain life,
or for any other application in which the failure of the Motorola product could create a situation where personal injury or death may occur. Should Buyer purchase
or use Motorola products for any such unintended or unauthorized application, Buyer shall indemnify and hold Motorola and its officers, employees,
subsidiaries, affiliates, and distributors harmless against all claims, costs, damages, and expenses, and reasonable attorney fees arising out of, directly or
indirectly, any claim of personal injury or death associated with such unintended or unauthorized use, even if such claim alleges that Motorola was negligent
regarding the design or manufacture of the part. Motorola and the Stylized M Logo are registered trademarks of Motorola, Inc. Motorola, Inc. is an Equal
Opportunity/Affirmative Action Employer.
MOTOROLA and the Stylized M Logo are registered in the US Patent & Trademark Office. All other product or service names are the property of their respective
owners.
Motorola, Inc. 2002.
How to reach us:
USA/EUROPE/Locations Not Listed: Motorola Literature Distribution; P.O. Box 5405, Denver, Colorado 80217. 1–303–675–2140 or 1–800–441–2447
JAPAN: Motorola Japan Ltd.; SPS, Technical Information Center, 3–20–1, Minami–Azabu. Minato–ku, Tokyo 106–8573 Japan. 81–3–3440–3569
ASIA/PACIFIC: Motorola Semiconductors H.K. Ltd.; Silicon Harbour Centre, 2 Dai King Street, Tai Po Industrial Estate, Tai Po, N.T., Hong Kong. 852–26668334
Technical Information Center: 1–800–521–6274
HOME PAGE: http://www.motorola.com/semiconductors/
12
◊
Motorola Sensor Device Data
MPX2053/D