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SEMICONDUCTOR TECHNICAL DATA
ARCHIVED BY FREESCALE SEMICONDUCTOR, INC. 2005
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The MPX2050 series device is a silicon piezoresistive pressure sensors providing a
highly accurate and linear voltage output — directly proportional to the applied pressure.
The sensor is a single, monolithic silicon diaphragm with the strain gauge and a thin–film
resistor network integrated on–chip. The chip is laser trimmed for precise span and offset
calibration and temperature compensation.
0 to 50 kPa (0 to 7.25 psi)
40 mV FULL SCALE SPAN
(TYPICAL)
Features
• Unique Silicon Shear Stress Strain Gauge
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• Temperature Compensated Over 0°C to +85°C
• Easy to Use Chip Carrier Package Options
• Ratiometric to Supply Voltage
• Differential and Gauge Options
MPX2050D
CASE 344
• ±0.25% Linearity (MPX2050)
Application Examples
• Pump/Motor Controllers
• Robotics
• Level Indicators
• Medical Diagnostics
• Pressure Switching
• Non–Invasive Blood Pressure Measurement
MPX2050GP
CASE 344B
Figure 1 shows a block diagram of the internal circuitry on the stand–alone pressure
sensor chip.
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Figure 1. Temperature Compensated Pressure Sensor Schematic
VOLTAGE OUTPUT versus APPLIED DIFFERENTIAL PRESSURE
The differential voltage output of the sensor is directly proportional to the differential
pressure applied.
The output voltage of the differential or gauge sensor increases with increasing
pressure applied to the pressure side (P1) relative to the vacuum side (P2). Similarly,
output voltage increases as increasing vacuum is applied to the vacuum side (P2)
relative to the pressure side (P1).
MPX2050GSX
CASE 344F
PIN NUMBER
1
Gnd
3
VS
2
+Vout
4
–Vout
NOTE: Pin 1 is noted by the notch in
the lead.
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Sensor Device Data
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MAXIMUM RATINGS(NOTE)
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Rating
Symbol
Value
Unit
Maximum Pressure (P1 > P2)
Pmax
200
kPa
Storage Temperature
Tstg
–40 to +125
°C
Operating Temperature
TA
–40 to +125
°C
NOTE: Exposure beyond the specified limits may cause permanent damage or degradation to the device.
OPERATING CHARACTERISTICS (VS = 10 Vdc, TA = 25°C unless otherwise noted, P1 > P2)
Characteristic
Pressure
Supply
Range(1)
Voltage(2)
Min
Typ
Max
Unit
POP
0
—
50
kPa
VS
—
10
16
Vdc
Io
—
6.0
—
mAdc
Full Scale Span(3)
MPX2050
VFSS
38.5
40
41.5
mV
Offset(4)
MPX2050
Voff
–1.0
—
1.0
mV
∆V/∆P
—
0.8
—
mV/kPa
—
–0.25
—
0.25
%VFSS
—
—
±0.1
—
%VFSS
Sensitivity
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Supply Current
Symbol
Linearity(5)
Pressure
MPX2050
Hysteresis(5)
(0 to 50 kPa)
—
—
±0.5
—
%VFSS
TCVFSS
–1.0
—
1.0
%VFSS
TCVoff
–1.0
—
1.0
mV
Input Impedance
Zin
1000
—
2500
Ω
Output Impedance
Zout
1400
—
3000
Ω
tR
—
1.0
—
ms
—
—
20
—
ms
—
—
±0.5
—
%VFSS
Temperature
Hysteresis(5)
(–40°C to +125°C)
Temperature Effect on Full Scale Span(5)
Temperature Effect on Offset(5)
Response
Time(6)
Warm–Up
Offset
Stability(7)
(10% to 90%)
NOTES:
1. 1.0 kPa (kiloPascal) equals 0.145 psi.
2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional
error due to device self–heating.
3. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
minimum rated pressure.
4. Offset (Voff) is defined as the output voltage at the minimum rated pressure.
5. Accuracy (error budget) consists of the following:
• Linearity:
Output deviation from a straight line relationship with pressure, using end point method, over the specified
pressure range.
• Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is
cycled to and from the minimum or maximum operating temperature points, with zero differential pressure
applied.
• Pressure Hysteresis:
Output deviation at any pressure within the specified range, when this pressure is cycled to and from the
minimum or maximum rated pressure, at 25°C.
• TcSpan:
Output deviation at full rated pressure over the temperature range of 0 to 85°C, relative to 25°C.
• TcOffset:
Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85°C, relative
to 25°C.
6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to
a specified step change in pressure.
7. Offset stability is the product’s output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.
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LINEARITY
Linearity refers to how well a transducer’s output follows
the equation: Vout = Voff + sensitivity x P over the operating
pressure range. There are two basic methods for calculating
nonlinearity: (1) end point straight line fit (see Figure 2) or (2)
a least squares best line fit. While a least squares fit gives
the “best case” linearity error (lower numerical value), the
calculations required are burdensome.
Conversely, an end point fit will give the “worst case” error
(often more desirable in error budget calculations) and the
calculations are more straightforward for the user. Motorola’s
specified pressure sensor linearities are based on the end
point straight line method measured at the midrange pressure.
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Figure 2. Linearity Specification Comparison
ON–CHIP TEMPERATURE COMPENSATION and CALIBRATION
Figure 3 shows the minimum, maximum and typical output
characteristics of the MPX2050 series at 25°C. The output is
directly proportional to the differential pressure and is essentially a straight line.
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Figure 3. Output versus Pressure Differential
Figure 4 illustrates the differential or gauge configuration
in the basic chip carrier (Case 344). A silicone gel isolates
the die surface and wire bonds from the environment, while
allowing the pressure signal to be transmitted to the silicon
diaphragm.
The MPX2050 series pressure sensor operating charac-
Motorola Sensor Device Data
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The effects of temperature on Full–Scale Span and Offset
are very small and are shown under Operating Characteristics.
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Figure 4. Cross–Sectional Diagram (not to scale)
teristics and internal reliability and qualification tests are
based on use of dry air as the pressure media. Media other
than dry air may have adverse effects on sensor performance and long term reliability. Contact the factory for information regarding media compatibility in your application.
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PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE
Motorola designates the two sides of the pressure sensor
as the Pressure (P1) side and the Vacuum (P2) side. The
Pressure (P1) side is the side containing the silicone gel
which isolates the die. The Motorola MPX pressure sensor is
Part Number
designed to operate with positive differential pressure
applied, P1 > P2.
The Pressure (P1) side may be identified by using the
table below:
Case Type
Pressure (P1) Side Identifier
MPX2050D
344
Stainless Steel Cap
MPX2050DP
344C
Side with Part Marking
MPX2050GP
344B
Side with Port Attached
MPX2050GSX
344F
Side with Port Attached
MPX2050 series pressure sensors are available in differential and gauge configurations. Devices are available in the basic
element package or with pressure port fittings which provide printed circuit board mounting ease and barbed hose pressure
connections.
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ORDERING INFORMATION
MPX Series
Device Type
Options
Case Type
Order Number
Device Marking
Basic Element
Differential
344
MPX2050D
MPX2050D
Ported Elements
Differential, Dual Port
344C
MPX2050DP
MPX2050DP
Gauge
344B
MPX2050GP
MPX2050GP
Gauge Axial PC Mount
344F
MPX2050GSX
MPX2050D
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PACKAGE DIMENSIONS
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Motorola Sensor Device Data
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PACKAGE DIMENSIONS — CONTINUED
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NOTES
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the suitability of its products for any particular purpose, nor does Motorola assume any liability arising out of the application or use of any product or circuit,
and specifically disclaims any and all liability, including without limitation consequential or incidental damages. “Typical” parameters can and do vary in different
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MPX2050/D