Imaging D A T A S H E E T Lighting Telecom Mercury Short Arc Lamps HSH2510NIL0 Lamps for Photolithography Description PerkinElmer Optoelectronics is a leading manufacturer of mercury short arc lamps ranging in output power from 1000 to 8000 watts. These lamps are used in the production of printed circuit boards, liquid crystal displays and semiconductors. The HSH Series lamps are used worldwide in microlithography systems manufactured by ASML, Canon, GCA, Nikon, Karl Suss, Ultratech Stepper, and SVG. With extremely high stability, uniform output distribution and extended lamp lifetimes, the HSH Series has become the lamp choice of many of the world’s leading semiconductor manufacturers. Applications hours to more than two thousand hours. The HSH Series provides longer lifetimes, outstanding uniformity, and excellent spectral quality which results in increased throughput, reduced downtime and an overall reduction in the cost of ownership. • Microlithography PerkinElmer has been a leading manufacturer of high intensity arc lamps for more than 30 years and is a premier lamp supplier for solid state lasers, medical equipment, NASA space systems and microlithography. PerkinElmer has steadily advanced lamp performance from 1000 watts to 8000 watts. With the introduction of new materials and proprietary manufacturing processes, we have extended lamp lifetimes from several hundred . www.perkinelmer.com/opto HSH2510NILO Physical Specifications Operational Specifications Range Description Nominal Power 2500 watts Current 109 amps (DC) 96.2-125 amps (DC) Voltage 23 volts (DC) 20-26 volts (DC) Current Ripple 3% Temperature (at base) 220ºC (max) Lifetime 1500 hours Specification 4.5 mm (max) 33.5 mm Dia and Cable 33.5 mm Dia (M14-P1.5) Description Arc Gap Anode Base Cathode Base Spectral Output 100 90 Relative Intensity (%) Dimensions ANODE (+) END UP 80 70 60 50 40 30 20 10 0 250 300 350 400 450 500 550 600 650 700 750 Wavelength (nm) Ø76 MAX Typical Performance Graph 100 325 Relative Intensity (%) 90 351 MAX 160 CATHODE (-) END DOWN 80 70 60 50 40 30 20 10 0 0 All dimensions are in millimeters. 300 600 900 1200 1500 Hours of Operation Notes Part Number References 1. Lamp must be operated with anode end up and cathode end down. Inclination of lamp axis to vertical must not exceed 10º. Used In Nikon NSR-2205 i14E Replaces SUV2510NIL HBO2510W/NIL PerkinElmer welcomes inquiries about special lamps. We would be pleased to discuss the requirements of your application and the feasibility of designing a lamp specifically suited to your needs. For more information e-mail us at [email protected] or visit our web site at www.perkinelmer.com/opto. All values are nominal; specifications subject to change without notice. USA: PerkinElmer Optoelectronics 44370 Christy St. Fremont, CA 94538 Phone: (510) 979-6500 Fax: (510) 687-1140 Europe: PerkinElmer Optoelectronics GmbH Wenzel-Jaksch-Str. 31 65199 Wiesbaden Germany Phone: +49 611 492 0 Fax: +49 611 492 177 Asia: PerkinElmer Optoelectronics 47 Ayer Rajah Crescent #06-12 Singapore 139947 Phone: +65 775 2022 Fax: +65 775 1008 © 2000 PerkinElmer inc. All rights reserved. . DS-192 Rev C 1101 www.perkinelmer.com/opto