Data Sheet MX210Q Page 1 of 8 MX210Q (RATIOMETRIC) Low Cost, 10g, Dual Axis Accelerometer with Analog Outputs General Description Features The MX210Q is a very low cost dual-axis acceleration sensor on a monolithic IC. With no moving parts, the device is extremely reliable and is manufactured on a submicron CMOS process enabling small geometries and small die size, resulting in low overall cost and high functionality. The MX210Q is primarily designed for applications requiring high performance and where overall system cost is a driving factor in component selection. The MX210Q measures acceleration with a full-scale range of up to ±10g and produces an Analog signal output. The X,Y accelerometer outputs are scaled proportionately to the VDD, VDA supply voltage with the scale of 44%. Typical noise floor is 750 µg/√Hz rms, allowing signals below 1 .0 milli-g to be resolved in 1 Hz bandwidth. Frequency response extends to 40 Hz. The frequency response can be extended to 160 Hz with the implementation of a simple external circuit. See Application Note (AN-00MX-003). The MX210Q is a dc accelerometer with the capability to measure both ac acceleration, (typical of vibration) or dc accelerations, (such as inertial force or constant, gravity-induced accelerations). The MX210Q offers a calibrated temperature sensor output with a positive temperature coefficient of 5.0 mV/°C. This device can be temperature compensated easily. The change in sensitivity over the temperature range –40°C to 125°C is predictable and follows the physical gas laws. The following equation can be used to predict the sensitivity at any given temperature: SIN X (TIN)2.67 = SFIN X (TFIN)2.67 Temperature in °K See Application Note (AN-00MX-002). The MX210Q is available in a metal can (TO-100) or an LCC surface mount device; both are hermetically sealed and are operational over the temperature range -40°C to 125°C. • Dual axis acceleration outputs • Analog outputs, ratiometric • 1.0 mg Resolution in 1Hz bandwidth • 40 Hz Bandwidth expandable to 160 Hz See Application Note (AN-00MX-003) • Quiescent Supply Voltage: 3.5 mA • 0g output voltage 2.315V (with 5V supply) Applications • Automotive - Vehicle Security/Active Suspension/ABS/HED Angle Control • Security - Gas Line/Elevator/Fatigue Sensing • Office Automation Equipment - Computer Peripherals/Disk Drives/PDA’s/Mouse Smart Pens/Cell Phones/Printer Head Acceleration Sensor • Gaming - Joystick/RF Interface/Menu Selection • White Goods - Spin Vibration Control • 50,000g shock survival • 2.70V to 5.25V Single Supply • On-chip mixed signal processing • Continuous sensors self test • Temperature sensor output (Tout) 5mV/°K • Packaged in 8 pin LCC SMD or 10 pin TO-100 THRU-HOLE • Hermetically sealed packaging • Reference voltage (VREF) 2.50V Block Diagram of MX21XX Information furnished by MEMSIC is believed to be accurate and reliable. However, no responsibility is assumed by MEMSIC for its use, nor for any infringements of patents or other rights of third parties which may result from its use. No license is granted by implications or otherwise under any patent or patent rights of MEMSIC. Technical information. Subject to change without notice. MX210Q ANALOG Data Sheet N 8/1/01 ®MEMSIC, Inc. 2000. 100 Burtt Road, Andover, MA 01810 Tel: 978.623.8188 • Fax: 978.623.9945 www.memsic.com Data Sheet MX210Q Page 2 of 8 MX210Q SPECIFICATIONS Analog Electrical Characteristics Measurements @ 25°C Acceleration = 0g unless otherwise noted VDD, VDA = 5.0V unless otherwise specified Parameter Conditions SENSOR Measurement Range1 Nonlinearity Alignment Error2 MEMSIC MX210Q Min Typ Max Units 1 Guarantee by measurements of initial offset and sensitivity. Each axis +/- 10.0 Best Fit Straight Line 2% +/- 1.0 g % of FS degrees +/- 2.5 SENSITIVITY ANALOG OUTPUTS Sensitivity Each axis Temperature Changes8 Delta from 25°C per formula SIN X (TIN)2.67 = SFIN X (TFIN)2.67 Cross-Axis Sensitivity3 X sensor to Y sensor ZERO g BIAS LEVEL NOTES Alignment error is specified as the angle between the true and indicated axis of sensitivity. 2 Cross-axis sensitivity is the algebraic sum of the alignment and the inherent sensitivity errors. 3 Specification refers to the maximum change in parameter from its initial value at 25°C to its worst case value at Tmin to Tmax of the specified temperature range. 4 45 11 Each axis 50 55 +/- 2 2.0 2.2 mV/g % 2.4 V Noise density (µg/√Hz rms) is the average noise at any frequency in the bandwidth of the device. 5 The voltage is required to ramp full scale before making a measurement. 6 0g Offset vs. Temperature4 NOISE PERFORMANCE Noise Density 5 in 40 Hz Bandwidth 2.0 mg/°C @ +25°C 750 1000 40 160 Hz Hz Tout Voltage Temp sensor sensitivity 25°C 1.23 1.25 1.27 5 V REFERENCE 9 25°C 2.4 2.5 2.6 X, Y OUTPUTS10 POWER SUPPLY Operating Voltage Range Specified Performance Quiescent Supply Current @ 5V Quiescent Supply Current @ 2.7V Turn-On Time6 TEMPERATURE RANGE Operating Range µg/√Hz rms Defined as the output change from ambient to maximum temperature or minimum. For more details refer to Application Note (AN-00MX-002). 8 FREQUENCY RESPONSE 3 dB Bandwidth 3 dB Bandwidth7 SELF TEST Voltage Delta at outputs @5V Supply @2.7V Supply Note: Frequency compensating circuit will achieve 160 Hz operations. See Application Note (AN-00MX-002) . Application boards available. 7 Continuous, Output rails with failure Current drive capabilities, source/sink V mV/°K V For more details refer to Application Note (AN-00MX-001). 9 Operating at maximum current drive capabilities, shifting of baseline sensitivity may occur. 10 Ratiometric analog output voltage will be 44.0% of VDD, VDA supply. 11 -2.5 2.7 3.0 4.0 200 -40 5.0 2.7 V V +2.5 mA 5.25 V 3.5 4.5 400 mA mA ms 125 °C All min and max specifications are subject to change without notification. Information furnished by MEMSIC is believed to be accurate and reliable. However, no responsibility is assumed by MEMSIC for its use, nor for any infringements of patents or other rights of third parties which may result from its use. No license is granted by implications or otherwise under any patent or patent rights of MEMSIC. Technical information. Subject to change without notice. MX210Q ANALOG Data Sheet N 8/1/01 ®MEMSIC, Inc. 2000. 100 Burtt Road, Andover, MA 01810 Tel: 978.623.8188 • Fax: 978.623.9945 www.memsic.com Data Sheet MX210Q Page 3 of 8 ABSOLUTE MAXIMUM RATINGS* Symbol Parameter Rating VDD Supply Voltage to Ground Potential -0.5 to 7.0 Volts TSTG Storage Temperature -65 to +150 Deg C Acceleration Units 50,000 TO-100 g *Stresses above those listed under "Absolute Maximum Ratings" may cause permanent damage to the device. These are stress ratings only; the functional operation of this device at these or any other conditions above those indicated in the operational sections of this specification is not implied. Exposure to absolute maximum rating conditions for extended periods may affect device reliability. PACKAGE CHARACTERISTICS Package TO-100 LCC-8 ThetaJA 150°C/W 110°C/W ThetaJC 25°C/W 22°C/W Device Weight 0.04 oz 0.02 oz Y +g TOP VIEW ORDERING GUIDE Model MX210QC MX210QL TO-100 Axes of Sensitivity Package Style TO-100 Metal Can LCC-8 SMD * * LCC parts are shipped in tape and reel packaging. X +g LCC-8 NOTE Y +g Drops onto hard surfaces can cause shocks of greater than 50,000g and exceed the absolute maximum rating of the device. Care should be exercised in handling to avoid damage. CAUTION TOP VIEW X +g ESD (electrostatic discharge) sensitive device. LCC-8 Axes of Sensitivity MX210Q ANALOG Data Sheet N 8/1/01 ®MEMSIC, Inc. 2000. 100 Burtt Road, Andover, MA 01810 Tel: 978.623.8188 • Fax: 978.623.9945 www.memsic.com Data Sheet MX210Q Page 4 of 8 Pin Function Descriptions TOP-100 and LCC-8 PIN DESCRIPTION: TO -100 Package * Pin 1 2 3 4 5 6 7 8 9 10 Name VDD TOUT AOUTY GND n/c VDA AOUTX VREF SCK RBias Description Digital Supply Voltage Temperature Acceleration Signal Ground no connection Analog Supply Voltage Acceleration Signal 2.50V Reference Voltage Serial Clock no connection 1 10 9 2 8 3 7 4 5 6 Top View PIN DESCRIPTION: LCC-8 Package * Pin 1 2 3 4 5 6 7 8 * Name TOUT AOUTY GND VDA AOUTX VREF SCK VDD Description Temperature Acceleration Signal Ground Analog Supply Voltage Acceleration Signal 2.50V Reference Voltage Serial Clock Digital Supply Voltage Optional external clock factory programmed per customer request Top View MX210Q ANALOG Data Sheet N 8/1/01 ®MEMSIC, Inc. 2000. 100 Burtt Road, Andover, MA 01810 Tel: 978.623.8188 • Fax: 978.623.9945 www.memsic.com Data Sheet MX210Q Page 5 of 8 Pin Definition VDD - This is the digital power supply input for the MX20XX. The DC voltage should be between 2.70 and 5.25 volts. VDA - This is the analog power supply input for the MX20XX. VDA should always be connected to VDD. GND - This is the ground pin for the MX20XX. AOUTX - This pin is the output of the x-acceleration sensor. AOUTY - This pin is the output of the y-acceleration sensor. TOUT - This pin is the buffered output of the temperature sensor. The voltage at TOUT is an indication of the die temperature. This voltage can be measured and used to compensate out the temperature dependence of accelerometer sensitivity. SCK - Standard product is delivered with an Internal Clock option. Ground this pin when operating with the Internal Clock. The External Clock must be ordered special from the factory. VREF - A reference voltage is output from this pin. MX210Q ANALOG Data Sheet N 8/1/01 ®MEMSIC, Inc. 2000. 100 Burtt Road, Andover, MA 01810 Tel: 978.623.8188 • Fax: 978.623.9945 www.memsic.com Data Sheet MX210Q Page 6 of 8 Package Outline LCC-8 mm (in) Information furnished by MEMSIC is believed to be accurate and reliable. However, no responsibility is assumed by MEMSIC for its use, nor for any infringements of patents or other rights of third parties which may result from its use. No license is granted by implications or otherwise under any patent or patent rights of MEMSIC. Preliminary technical information. Subject to change without notice. MX210Q ANALOG Data Sheet N 8/1/01 ®MEMSIC, Inc. 2000. 100 Burtt Road, Andover, MA 01810 Tel: 978.623.8188 • Fax: 978.623.9945 www.memsic.com Data Sheet MX210Q Page 7 of 8 Package Outline TO-100 mm (in) Information furnished by MEMSIC is believed to be accurate and reliable. However, no responsibility is assumed by MEMSIC for its use, nor for any infringements of patents or other rights of third parties which may result from its use. No license is granted by implications or otherwise under any patent or patent rights of MEMSIC. Preliminary technical information. Subject to change without notice. MX210Q ANALOG Data Sheet N 8/1/01 ®MEMSIC, Inc. 2000. 100 Burtt Road, Andover, MA 01810 Tel: 978.623.8188 • Fax: 978.623.9945 www.memsic.com Data Sheet MX210Q Page 8 of 8 Printed Circuit Board Layout and Filter Requirements R3= C3= R4= C4= Layout Notes Filtering Notes 1. Use robust low inductance ground wiring 2. Liberal use of ceramic bypass capacitors 3. The capacitors should be located as close as possible to the device supply pins (VDA, VDD). 4. The capacitor lead length should be as short as possible. Surface mount capacitors are preferred. 1. Low pass filter – 200Hz, -3db 2. Ceramic capacitors C3, C4 3. f = 1/2πRC 4. Resistor R3, R4 – 1/8 Watt, 5% tolerance 5. Reference Application Note # AN-00MX-004 Information furnished by MEMSIC is believed to be accurate and reliable. However, no responsibility is assumed by MEMSIC for its use, nor for any infringements of patents or other rights of third parties which may result from its use. No license is granted by implications or otherwise under any patent or patent rights of MEMSIC. Technical information. Subject to change without notice. MX201Q ANALOG Data Sheet N 8/1/01 ®MEMSIC, Inc. 2000. 100 Burtt Road, Andover, MA 01810 Tel: 978.623.8188 • Fax: 978.623.9945 www.memsic.com