JLWORLD MTX2-02G

1907 Westlands Centre, 20 Westlands Road, Quarry Bay, Hong Kong
Tel : (+852) 2565 6979
Fax : (+852) 2565 0319
Email : [email protected]
Website : www.jlworld.com
Page 1 of 4
060220-A3
MTX2-02G
Dual Axis Accelerometer – Low g
Dual Axis Silicon
Accelerometer Die
The MTX2-02G series capacitive silicon
accelerometer sensors are manufactured in class
10 clean room using state of the art CMOS and
bulk micro-machining capabilities. They are
manufactured in six inched wafers, utilizing DRIE
techniques and patented processes.
An applied force or acceleration (including gravity)
causes a capacitance shift in a differential
capacitor, which is converted to a pulse density
modulation by an integrated ASIC. The XY
sensing element is a differential capacitor
fabricated in single crystal silicon with a high
aspect ratio thereby offering excellent
performance in sensitivity and linearity.
The sensing element is enclosed in a hermetic
wafer-level package using wafer to wafer bonding.
This allows it to be assembled in different types of
packaging including low cost over-molded plastic
packages.
Dies are fully probed and inspected and can be
shipped in waffle pack.
FEATURES
THE MAIN FIELD OF APPLICATIONS
−
Excellent accuracy over 2g range
−
Acceleration Measurement
−
Good temperature performance
−
Vibration measurement
−
Low cost design
−
Inclination Measurement
−
Capacitive, high performance
−
100% factory tested
−
High volume manufacturing
−
Patented process
Preliminary
1907 Westlands Centre, 20 Westlands Road, Quarry Bay, Hong Kong
Tel : (+852) 2565 6979
Fax : (+852) 2565 0319
Email : [email protected]
Website : www.jlworld.com
Page 2 of 4
060220-A3
MTX2-02G
Dual Axis Accelerometer – Low g
DIMENSIONS
Plan View (w/o silicon cap)
Plan View
AA
FF
EE
CC
DD
BB
Dim
AA
BB
CC
DD
EE
FF
KK
LL
MM
NN
OO
PP
QQ
Typical
3688
630
1790
550
510
370
200
358
358
358
358
358
200
KK
YR
YM
Y
YL
LL
MM
XL
XR
XM
PP
OO
NN
QQ
Side view
JJ
II
HH
GG
Dim
GG
HH (glass substrate)
II (silicon device wafer)
JJ (silicon cap wafer)
Typical
4170
500
30
200
All units in um.
Preliminary
1907 Westlands Centre, 20 Westlands Road, Quarry Bay, Hong Kong
Tel : (+852) 2565 6979
Fax : (+852) 2565 0319
Email : [email protected]
Website : www.jlworld.com
Page 3 of 4
060220-A3
MTX2-02G
Dual Axis Accelerometer – Low g
ELECTRICAL AND DIE LAYOUT
YM
YL
YR
XM
XL
Pad
Description
XL
X axis left capacitance
(fixed electrode)
X axis right
capacitance(fixed
electrode)
Y axis left
capacitance(fixed
electrode)
Y axis right
capacitance(fixed
electrode)
Common electrode for
applying voltage bias
(moving electrode)
XR
YL
YR
M
YL
YM
YR
XL
XM
XR
XR
Preliminary
1907 Westlands Centre, 20 Westlands Road, Quarry Bay, Hong Kong
Tel : (+852) 2565 6979
Fax : (+852) 2565 0319
Email : [email protected]
Website : www.jlworld.com
Page 4 of 4
060220-A3
MTX2-02G
Dual Axis Accelerometer – Low g
TECHNICAL DATA
Parameter
Operating Temperature
Range
Storage Temperature
Range
Measuring Range
Probe voltage
Leakage current
Nominal Capacitance @
0V
Capacitance change @1V
Min
Typical
Max
Unit
-40
-
+85
o
-40
-
125
o
-2
-
1
2
4
+2
5
6
g
V
nA
pF
100
350
600
C
C
fF
Preliminary