1907 Westlands Centre, 20 Westlands Road, Quarry Bay, Hong Kong Tel : (+852) 2565 6979 Fax : (+852) 2565 0319 Email : [email protected] Website : www.jlworld.com Page 1 of 4 060220-A3 MTX2-02G Dual Axis Accelerometer – Low g Dual Axis Silicon Accelerometer Die The MTX2-02G series capacitive silicon accelerometer sensors are manufactured in class 10 clean room using state of the art CMOS and bulk micro-machining capabilities. They are manufactured in six inched wafers, utilizing DRIE techniques and patented processes. An applied force or acceleration (including gravity) causes a capacitance shift in a differential capacitor, which is converted to a pulse density modulation by an integrated ASIC. The XY sensing element is a differential capacitor fabricated in single crystal silicon with a high aspect ratio thereby offering excellent performance in sensitivity and linearity. The sensing element is enclosed in a hermetic wafer-level package using wafer to wafer bonding. This allows it to be assembled in different types of packaging including low cost over-molded plastic packages. Dies are fully probed and inspected and can be shipped in waffle pack. FEATURES THE MAIN FIELD OF APPLICATIONS − Excellent accuracy over 2g range − Acceleration Measurement − Good temperature performance − Vibration measurement − Low cost design − Inclination Measurement − Capacitive, high performance − 100% factory tested − High volume manufacturing − Patented process Preliminary 1907 Westlands Centre, 20 Westlands Road, Quarry Bay, Hong Kong Tel : (+852) 2565 6979 Fax : (+852) 2565 0319 Email : [email protected] Website : www.jlworld.com Page 2 of 4 060220-A3 MTX2-02G Dual Axis Accelerometer – Low g DIMENSIONS Plan View (w/o silicon cap) Plan View AA FF EE CC DD BB Dim AA BB CC DD EE FF KK LL MM NN OO PP QQ Typical 3688 630 1790 550 510 370 200 358 358 358 358 358 200 KK YR YM Y YL LL MM XL XR XM PP OO NN QQ Side view JJ II HH GG Dim GG HH (glass substrate) II (silicon device wafer) JJ (silicon cap wafer) Typical 4170 500 30 200 All units in um. Preliminary 1907 Westlands Centre, 20 Westlands Road, Quarry Bay, Hong Kong Tel : (+852) 2565 6979 Fax : (+852) 2565 0319 Email : [email protected] Website : www.jlworld.com Page 3 of 4 060220-A3 MTX2-02G Dual Axis Accelerometer – Low g ELECTRICAL AND DIE LAYOUT YM YL YR XM XL Pad Description XL X axis left capacitance (fixed electrode) X axis right capacitance(fixed electrode) Y axis left capacitance(fixed electrode) Y axis right capacitance(fixed electrode) Common electrode for applying voltage bias (moving electrode) XR YL YR M YL YM YR XL XM XR XR Preliminary 1907 Westlands Centre, 20 Westlands Road, Quarry Bay, Hong Kong Tel : (+852) 2565 6979 Fax : (+852) 2565 0319 Email : [email protected] Website : www.jlworld.com Page 4 of 4 060220-A3 MTX2-02G Dual Axis Accelerometer – Low g TECHNICAL DATA Parameter Operating Temperature Range Storage Temperature Range Measuring Range Probe voltage Leakage current Nominal Capacitance @ 0V Capacitance change @1V Min Typical Max Unit -40 - +85 o -40 - 125 o -2 - 1 2 4 +2 5 6 g V nA pF 100 350 600 C C fF Preliminary