SM5102 SILICON MICROSTRUCTURES INCORPORATED • OEM Silicon Pressure Die OEM SILICON PRESSURE SENSOR DIE DESCRIPTION Compensated The SM5102 is a silicon micro-machined, piezoresistive pressure-sensing chip. These devices are available in full-scale ranges from 5 to 300 psi and are ideal for OEM and high volume applications. Provided in die form, these sensors can be mounted on ceramic or PC board substrates as part of an OEM system. They also may be packaged into proprietary, or application specific sensor lines. Die are probed, inked and diced, and shipped on tape. Custom pressure ranges available in highvolume applications. Field-shield, high stability parts are also available on a custom-bases. FEATURES • • • • • High Volume, Low Cost Gage and Absolute Versions Constant Current or Constant Voltage Drive Millivolt Output 5, 15, 30, 60, 100 and 300 PSI Ranges Available APPLICATIONS • • • • • • Altimeters Tire Gauges Medical Instrumentation Industrial Sensors Diving Modules Home Appliances Rev 1.2 8_02 2001-2002 Silicon Microstructures, Inc. ♦ 1701 McCarthy Blvd. ♦ Milpitas, CA 95035 USA Tel: 408-577-0100 ♦ Fax: 408-577-0123 ♦ [email protected] ♦ WWW.Si-Micro.Com SM5102 CHARACTERISTICS FOR SM5102 - SPECIFICATIONS All parameters are measured at 5.000V supply at room temperature, unless otherwise specified. Excitation Voltage Excitation Current Span (FS Range) 5 psi 15 psi 30 psi 60 psi 100 psi 300 psi Offset TC Span TC Offset TC Resistance Linearity Bridge Impedance Proof Pressure Burst Pressure Operating Temperature Storage Temperature Min Typ Max Units Notes 0 0 5 1.5 10 3 V mA 1 75 115 130 130 130 130 -50 -24 -7 24 -0.3 2.70 3X 5X -40 -55 100 145 165 180 200 220 0 -19 -1 27.5 ±0.05 3.15 125 175 195 220 250 275 50 -15.5 +7 33 0.3 4.00 mV mV mV mV mV mV mV o %FS/100 C o %FS/100 C o %/100 C %FS kohm Rated FS Rated FS o C o C 2 Notes: 1. Bridge may be driven with positive or negative voltage as long as Vsub is not connected. Positive output for positive pressure applied to circuit side of die when bridge is driven with positive voltage. 2. Measured at 5V constant voltage excitation. 3. Measured from 0 to 70 C 4. Defined as best straight line. 125 150 3 4 1.80 mm +V exc. + Sig 1.80 mm 1.38 mm -V exc. Vsub Pad size = 0.12 X 0.12 mm -V exc. Positive output for pressure applied to the top (circuit) side of the sensor Die dimensions in mm See separate Application Notes for typical range of variation in Saw dimensions. Pressure Ranges Model Number SM5102- 015 - A Pressure range 2.00 mm SM5102 die (2 mm square as sawn). Covered under USA Mask-Copyright and may be covered under US Patent Numbers 5,812,047 and 6,089,099 ORDERING INFORMATION: Pressure Type A: Absolute G: Gage -Sig Pressure Type PSI 5102 5 005 15 015 30 030 60 060 100 100 300 300 Custom ranges available in high volumes Notice: Silicon Microstructures, Inc. reserves the right to make changes to the product contained in this publication. Silicon Microstructures, Inc. assumes no responsibility for the use of any circuits described herein, conveys no license under any patent or other right, and makes no representation that the circuits are free of patent infringement. While the information in this publication has been checked, no responsibility, however, is assumed for inaccuracies. Silicon Microstructures, Inc. does not recommend the use of any of its products in life support applications where the failure or malfunction of the product can reasonably be expected to cause failure of a life-support system or to significantly affect its safety or effectiveness. Products are not authorized for use in such applications. Rev 1.2 8_02 2001-2002 Silicon Microstructures, Inc. ♦ 1701 McCarthy Blvd. ♦ Milpitas, CA 95035 USA Tel: 408-577-0100 ♦ Fax: 408-577-0123 ♦ [email protected] ♦ WWW.Si-Micro.Com