Freescale Semiconductor, Inc. MOTOROLA Order this document by MMA6231Q SEMICONDUCTOR TECHNICAL DATA ±10g Dual Axis Micromachined Accelerometer MMA6231Q MMA6233Q The MMA6200 series of low cost capacitive micromachined accelerometers feature signal conditioning, a 1-pole low pass filter and temperature compensation. Zero-g offset full scale span and filter cut-off are factory set and require no external devices. A full system self-test capability verifies system functionality. • • • • • • • • • • Low Noise Low Cost Low Power 2.7 V to 3.6 V Operation 6mm x 6mm x 1.98 mm QFN Integral Signal Conditioning with Low Pass Filter Linear Output Ratiometric Performance Self-Test Robust Design, High Shocks Survivability MMA6230Q Series: X-Y AXIS SENSITIVITY MICROMACHINED ACCELEROMETER ±10 g Bottom View Typical Applications • • • • • • • Pedometer Appliance Control Impact Monitoring Vibration Monitoring and Recording Position & Motion Sensing Freefall Detection Smart Portable Electronics 16 LEAD QFN CASE 1477-01 Pin Assignment Device Name IDD Case No. Package N/C YOUT Bandwidth Response N/C ORDERING INFORMATION XOUT Top View 16 15 14 13 MMA6231Q 300 Hz 1.2 mA 1477-01 QFN-16, Tube N/C 1 12 ST MMA6231QR2 300 Hz 1.2 mA 1477-01 QFN-16,Tape & Reel N/C MMA6233Q 900 Hz 2.2 mA 1477-01 QFN-16, Tube MMA6233QR2 900 Hz 2.2 mA 1477-01 QFN-16,Tape & Reel 10 N/C VSS 4 9 N/C REV 0 © Motorola, Inc. 2004 For More Information On This Product, Go to: www.freescale.com 5 6 7 8 N/C N/C N/C 11 N/C 2 VDD 3 N/C Freescale Semiconductor, Inc... Features Freescale Semiconductor, Inc. VDD G-CELL SENSOR ST SELF-TEST X-INTEGRATOR X-GAIN CONTROL LOGIC & EEPROM TRIM CIRCUITS Y-INTEGRATOR X-FILTER OSCILLATOR Y-GAIN Y-FILTER X-TEMP COMP XOUT CLOCK GEN Y-TEMP COMP YOUT VSS Freescale Semiconductor, Inc... Figure 1. Simplified Accelerometer Functional Block Diagram MAXIMUM RATINGS (Maximum ratings are the limits to which the device can be exposed without causing permanent damage.) Rating Symbol Value Unit Maximum Acceleration (all axis) gmax ±2000 g Supply Voltage VDD -0.3 to +3.6 V Drop Test1 Ddrop 1.2 m Tstg -40 to +125 °C Storage Temperature Range NOTE: 1. Dropped onto concrete surface from any axis ELECTRO STATIC DISCHARGE (ESD) WARNING: This device is sensitive to electrostatic discharge. Although the Motorola accelerometers contain internal 2000 V ESD protection circuitry, extra precaution must be taken by the user to protect the chip from ESD. A charge of over 2000 volts can accumulate on the human body or associated test equipment. A charge of this magnitude can alter the performance or cause failure of the chip. When handling the accelerometer, proper ESD precautions should be followed to avoid exposing the device to discharges which may be detrimental to its performance. Motorola Sensor Device Data MMA6200 Series 2 For More Information On This Product, Go to: www.freescale.com Freescale Semiconductor, Inc. Operating Characteristics Unless otherwise noted: -20°C < TA < 85°C, 3.0 V < VDD < 3.6 V, Acceleration = 0g, Loaded output1 Characteristic Symbol Min Typ Max Unit VDD 2.7 3.3 3.6 V MMA6231Q IDD — 1.2 1.5 mA MMA6233Q IDD — 2.2 3.0 mA Operating Temperature Range TA -20 — +85 °C Acceleration Range gFS — 10 — g VOFF 1.485 1.65 1.815 V Operating Range2 Supply Voltage3 Supply Current Output Signal Freescale Semiconductor, Inc... Zero g (TA = 25°C, VDD = 3.3 V)4 Zero g Sensitivity (TA = 25°C, VDD = 3.3 V) Sensitivity VOFF, TA — 2.0 — mg/°C S 111 120 129 mV/g S, TA — 0.015 — %/°C f_3dB — 300 — Hz Bandwidth Response MMA6231Q MMA6233Q f_3dB — 900 — Hz NLOUT -1.0 — +1.0 % FSO MMA6231Q RMS (0.1 Hz – 1 kHz) nRMS — 0.7 — mVrms MMA6233Q RMS (0.1 Hz – 1 kHz) nRMS — 0.6 — MMA6231Q nPSD — 50 — MMA6233Q nPSD — 30 — Output Response gST 2.0 — — g Input Low VIL — — 0.3 VDD V Nonlinearity Noise Power Spectral Density RMS (0.1 Hz – 1 kHz) ug/√Hz Self-Test Input High VIH 0.7 VDD — VDD V RPO 43 57 71 kΩ tST — 2.0 — ms VFSO VSS +0.25 — VDD -0.25 V CL — — 100 pF ZO — 50 300 Ω MMA6231Q tRESPONSE — 2.0 — ms MMA6233Q tRESPONSE — 0.7 — ms Pull-Down Resistance5 Response Time6 Output Stage Performance Full-Scale Output Range (IOUT = 200 µA) Capacitive Load Drive7 Output Impedance Power-Up Response Time Mechanical Characteristics VZX, YX, ZY -5.0 — +5.0 % FSO Transverse Sensitivity8 NOTES: 1. For a loaded output, the measurements are observed after an RC filter consisting of a 1.0 kΩ resistor and a 0.1 µF capacitor to ground. 2. These limits define the range of operation for which the part will meet specification. 3. Within the supply range of 2.7 and 3.6 V, the device operates as a fully calibrated linear accelerometer. Beyond these supply limits the device may operate as a linear device but is not guaranteed to be in calibration. 4. The device can measure both + and - acceleration. With no input acceleration the output is at midsupply. For positive acceleration the output will increase above VDD/2. For negative acceleration, the output will decrease below VDD/2. 5. The digital input pin has an internal pull-down resistance to prevent inadvertent self-test initiation due to external board level leakages. 6. Time for the output to reach 90% of its final value after a self-test is initiate. 7. Preserves phase margin (60°) to guarantee output amplifier stability. 8. A measure of the device’s ability to reject an acceleration applied 90° from the true axis of sensitivity. Motorola Sensor Device Data MMA6200 Series 3 For More Information On This Product, Go to: www.freescale.com Freescale Semiconductor, Inc. Freescale Semiconductor, Inc... PRINCIPLE OF OPERATION The Motorola accelerometer is a surface-micromachined integrated-circuit accelerometer. The device consists of a surface micromachined capacitive sensing cell (g-cell) and a signal conditioning ASIC contained in a single integrated circuit package. The sensing element is sealed hermetically at the wafer level using a bulk micromachined cap wafer. The g-cell is a mechanical structure formed from semiconductor materials (polysilicon) using semiconductor processes (masking and etching). It can be modeled as a set of beams attached to a movable central mass that move between fixed beams. The movable beams can be deflected from their rest position by subjecting the system to an acceleration (Figure 2). As the beams attached to the central mass move, the distance from them to the fixed beams on one side will increase by the same amount that the distance to the fixed beams on the other side decreases. The change in distance is a measure of acceleration. The g-cell plates form two back-to-back capacitors (Figure 2). As the center plate moves with acceleration, the distance between the plates changes and each capacitor's value will change, (C = Aε/D). Where A is the area of the plate, ε is the dielectric constant, and D is the distance between the plates. The ASIC uses switched capacitor techniques to measure the g-cell capacitors and extract the acceleration data from the difference between the two capacitors. The ASIC also signal conditions and filters (switched capacitor) the signal, providing a high level output voltage that is ratiometric and proportional to acceleration. Acceleration SPECIAL FEATURES Filtering These Motorola accelerometers contain an onboard single-pole switched capacitor filter. Because the filter is realized using switched capacitor techniques, there is no requirement for external passive components (resistors and capacitors) to set the cut-off frequency. Self-Test The sensor provides a self-test feature allowing the verification of the mechanical and electrical integrity of the accelerometer at any time before or after installation. A fourth plate is used in the g-cell as a self-test plate. When a logic high input to the self-test pin is applied, a calibrated potential is applied across the self-test plate and the moveable plate. The resulting electrostatic force (Fe = 1/2 AV2/d2) causes the center plate to deflect. The resultant deflection is measured by the accelerometer's ASIC and a proportional output voltage results. This procedure assures both the mechanical (g-cell) and electronic sections of the accelerometer are functioning. Motorola accelerometers include fault detection circuitry and a fault latch. Parity of the EEPROM bits becomes odd in number. Self-test is disabled when EEPROM parity error occurs. Ratiometricity Ratiometricity simply means the output offset voltage and sensitivity will scale linearly with applied supply voltage. That is, as supply voltage is increased, the sensitivity and offset increase linearly; as supply voltage decreases, offset and sensitivity decrease linearly. This is a key feature when interfacing to a microcontroller or an A/D converter because it provides system level cancellation of supply induced errors in the analog to digital conversion process. Figure 2. Simplified Transducer Physical Model Motorola Sensor Device Data MMA6200 Series 4 For More Information On This Product, Go to: www.freescale.com Freescale Semiconductor, Inc. 16 15 14 13 N/C 12 ST 1 10 N/C VSS 4 9 N/C 5 6 7 8 N/C N/C N/C 11 N/C 2 VDD 3 N/C Freescale Semiconductor, Inc... N/C Pin Name 1, 5 - 7, 13, 16 N/C 14 15 XOUT R 1 kΩ YOUT VSS VDD R 1 kΩ A/D IN C 0.1 µF A/D IN C 0.1 µF C 0.1 µF VSS C 0.1 µF VDD VRH C 0.1 µF POWER SUPPLY Figure 3. Pinout Description Pin No. P0 ST MICROCONTROLLER N/C YOUT N/C XOUT Top View ACCELEROMETER BASIC CONNECTIONS Description Figure 5. Recommend PCB Layout for Interfacing Accelerometer to Microcontroller Notes: No internal connection. Leave unconnected. 1. Use 0.1 µF capacitor on VDD to decouple the power source. YOUT Output voltage of the accelerometer. Y Direction. 2. Physical coupling distance of the accelerometer to the microcontroller should be minimal. XOUT Output voltage of the accelerometer. X Direction. 3. Flag underneath package is connected to ground. 3 VDD Power supply input. 4 VSS The power supply ground. 2, 8 - 11 N/C Used for factory trim. Leave unconnected. 5. Use an RC filter with 1.0 kΩ and 0.1 µF on the outputs of the accelerometer to minimize clock noise (from the switched capacitor filter circuit). 12 ST Logic input pin used to initiate self-test. 6. PCB layout of power and ground should not couple power supply noise. 4. Place a ground plane beneath the accelerometer to reduce noise, the ground plane should be attached to all of the open ended terminals shown in Figure 5. 7. Accelerometer and microcontroller should not be a high current path. VDD MMA6200Q Series 3 VDD 0.1 µF YOUT 14 1 kΩ 0.1 µF 4 12 8. A/D sampling rate and any external power supply switching frequency should be selected such that they do not interfere with the internal accelerometer sampling frequency (16 kHz for Low IDD and 52 kHz for Standard IDD for the sampling frequency). This will prevent aliasing errors. VSS XOUT 15 ST Logic Input 1 kΩ 0.1 µF Figure 4. Accelerometer with Recommended Connection Motorola Sensor Device Data MMA6200 Series 5 For More Information On This Product, Go to: www.freescale.com Freescale Semiconductor, Inc. DYNAMIC ACCELERATION Top View +Y 16 15 14 13 Freescale Semiconductor, Inc... +X 1 12 2 11 3 10 4 9 5 6 7 -X 8 -Y 16-Pin QFN Package STATIC ACCELERATION Top View Direction of Earth's gravity field.* XOUT @ 0g = 1.65V XOUT @ 0g = 1.65V YYOUT @ -1g = 1.53V OUT @ -1g = 0.85V XOUT @ @ +1g == 2.45V XOUT 1.77V YOUT@ @0g 0g== 1.65V 1.65V YOUT OUT @ XXOUT @-1g -1g==0.85V 1.53V OUT @ 0g = 1.65V YY OUT @ 0g = 1.65V OUT @ XXOUT @0g0g= =1.65V 1.65V YOUT @@ +1g = 2.45V +1g = 1.77V Y OUT * When positioned as shown, the Earth's gravity will result in a positive 1g output Motorola Sensor Device Data MMA6200 Series 6 For More Information On This Product, Go to: www.freescale.com Freescale Semiconductor, Inc. 6 PIN 1 INDEX AREA M A 0.1 C 2X 0.15 C G 0.08 C 1.98+0.1 5 6 (0.203) (0.102) M 0.15 C SEATING PLANE VIEW ROTATED 90˚ CLOCKWISE 4 0.1 C A B 16X 4.24 4.04 EXPOSED DIE ATTACH PAD 13 (45˚) 0.1 DETAIL M PIN 1 INDEX 16 DETAIL M 12 4.24 4.04 1 0.5 NOTES: 1. ALL DIMENSIONS ARE IN MILLIMETERS. 2. INTERPRET DIMENSIONS AND TOLERANCES PER ASME Y14.5M, 1994. 3. THIS DIMENSION APPLIES TO METALLIZED TERMINAL AND IS MEASURED BETWEEN 0.25MM AND 0.30MM FROM TERMINAL TIP. 4. THIS DIMENSION REPRESENTS TERMINAL FULL BACK FROM PACKAGE EDGE UP TO 0.1MM IS ACCEPTABLE. 5. COPLANARITY APPLIES TO THE EXPOSED HEAT SLUG AS WELL AS THE TERMINAL. 6. RADIUS ON TERMINAL IS OPTIONAL. 0.1 C A B 9 4 12X 8 16X 1 5 0.63 0.43 16X VIEW M-M 0.60 0.40 0.1 M C A B 0.05 M C 3 CASE 1477-01 ISSUE O MINIMUM RECOMMENDED FOOTPRINT FOR SURFACE MOUNTED APPLICATIONS Surface mount board layout is a critical portion of the total design. The footprint for the surface mount packages must be the correct size to ensure proper solder connection interface between the board and the package. With the correct footprint, the packages will self-align when subjected to a solder reflow process. It is always recommended to design boards with a solder mask layer to avoid bridging and shorting between solder pads. 6.0 0.55 4.25 9 8 13 12 1.00 5 16 0.50 6.0 Freescale Semiconductor, Inc... C DETAIL G 2X B (0.5) (1) 1 Pin 1 ID (non metallic) Motorola Sensor Device Data 4 Solder areas MMA6200 Series 7 For More Information On This Product, Go to: www.freescale.com Freescale Semiconductor, Inc... Freescale Semiconductor, Inc. Information in this document is provided solely to enable system and software implementers to use Motorola products. There are no express or implied copyright licenses granted hereunder to design or fabricate any integrated circuits or integrated circuits based on the information in this document. Motorola reserves the right to make changes without further notice to any products herein. Motorola makes no warranty, representation or guarantee regarding the suitability of its products for any particular purpose, nor does Motorola assume any liability arising out of the application or use of any product or circuit, and specifically disclaims any and all liability, including without limitation consequential or incidental damages. “Typical” parameters which may be provided in Motorola data sheets and/or specifications can and do vary in different applications and actual performance may vary over time. All operating parameters, including “Typicals” must be validated for each customer application by customer’s technical experts. Motorola does not convey any license under its patent rights nor the rights of others. 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All other product or service names are the property of their respective owners. © Motorola, Inc. 2004 HOW TO REACH US: USA/EUROPE/LOCATIONS NOT LISTED: Motorola Literature Distribution P.O. Box 5405, Denver, Colorado 80217 1-800-521-6274 or 480-768-2130 JAPAN: Motorola Japan Ltd.; SPS, Technical Information Center 3-20-1 Minami-Azabu. Minato-ku, Tokyo 106-8573, Japan 81-3-3440-3569 ASIA/PACIFIC: Motorola Semiconductors H.K. Ltd.; Silicon Harbour Centre 2 Dai King Street, Tai Po Industrial Estate, Tai Po, N.T., Hong Kong 852-26668334 HOME PAGE: http://motorola.com/semiconductors MMA6231Q For More Information On This Product, Go to: www.freescale.com