Imaging D A T A S H E E T Lighting Telecom Mercury Short Arc Lamps HSH3500PILO Lamps for Photolithography Description PerkinElmer Optoelectronics is a leading manufacturer of mercury short arc lamps ranging in output power from 1000 to 8000 watts. These lamps are used in the production of printed circuit boards, liquid crystal displays and semiconductors. The HSH Series lamps are used worldwide in microlithography systems manufactured by ASML, Canon, GCA, Nikon, Karl Suss, Ultratech Stepper, and SVG. With extremely high stability, uniform output distribution and extended lamp lifetimes, the HSH Series has become the lamp choice of many of the world’s leading semiconductor manufacturers. Applications hours to more than two thousand hours. The HSH Series provides longer lifetimes, outstanding uniformity, and excellent spectral quality which results in increased throughput, reduced downtime and an overall reduction in the cost of ownership. PerkinElmer has been a leading manufacturer of high intensity arc lamps for more than 30 years and is a premier lamp supplier for solid state lasers, medical equipment, NASA space systems and microlithography. PerkinElmer has steadily advanced lamp performance from 1000 watts to 8000 watts. With the introduction of new materials and proprietary manufacturing processes, we have extended lamp lifetimes form several hundred • Microlithography . www.perkinelmer.com/opto HSH3500PILO Physical Specifications Operational Specifications Description Nominal Power 3500 watts Range Current 152 amps (DC) 135-175 amps (DC) Voltage 23 volts (DC) 20-26 volts (DC) Current Ripple 3% Temperature (at base) 220ºC (max) Lifetime 1500 hours Specification 4.5 mm (max) 40 mm Dia (M6) 32.5 mm Dia (M12) Description Arc Gap Anode Base Cathode Base Spectral Output 100 90 Dimensions Relative Intensity (%) 80 ANODE (+) END UP 70 60 50 40 30 20 10 0 250 300 350 400 450 500 550 600 650 700 750 Wavelength (nm) 324 Max Typical Performance Graph 100 Relative Intensity (%) 90 155.5 CATHODE (-) END DOWN 80 70 60 50 40 30 20 10 0 Ø81.5 0 All dimensions are in millimeters. 200 400 600 800 1000 1200 1400 Hours of Operation Notes Part Number References 1. Lamp must be operated with anode end up and cathode end down. Inclination of lamp axis to vertical must not exceed 10º. Used In ASML 5500 / 200B, /250C Replaces SUV-3500-PIL HBO-3500-W/PI PerkinElmer welcomes inquiries about special lamps. We would be pleased to discuss the requirements of your application and the feasibility of designing a lamp specifically suited to your needs. For more information e-mail us at [email protected] or visit our web site at www.perkinelmer.com/opto. All values are nominal; specifications subject to change without notice. USA: PerkinElmer Optoelectronics 44370 Christy St. Fremont, CA 94538 Phone: (510) 979-6500 Fax: (510) 687-1140 Europe: PerkinElmer Optoelectronics GmbH Wenzel-Jaksch-Str. 31 65199 Wiesbaden Germany Phone: +49 611 492 0 Fax: +49 611 492 177 Asia: PerkinElmer Optoelectronics 47 Ayer Rajah Crescent #06-12 Singapore 139947 Phone: +65 775 2022 Fax: +65 775 1008 © 2000 PerkinElmer inc. All rights reserved. . DS-193 Rev C 1101 www.perkinelmer.com/opto