MS54xx MINIATURE SMD PRESSURE SENSOR • • • • • • • 1, 7, 12, and 70 bar absolute pressure range Uncompensated Piezoresistive silicon micromachined sensor Miniature surface mount Ceramic or PCB carrier Low noise, high sensitivity, high linearity RoHS-compatible & Pb-free* DESCRIPTION The MS54xx SMD pressure sensor series is designed for pressure sensor systems with highest demands on resolution and accuracy. The device consists of a silicon micromachined pressure sensor die mounted on a 6.2 x 6.4 mm ceramic carrier or a 6.1 x 6.3 mm PCB protected by a metal or plastic cap. The MS54xx can be delivered in a high sensitivity version giving a maximal output voltage or in a high linearity version. Both versions provide an output voltage directly proportional to the applied pressure. Carrier Ceramic PCB Full Scale Pressure High Sensitivity Versions High Linearity Versions Product Code Full Scale Span / Linearity Product Code Full Scale Span / Linearity 1 bar MS5401-AM 240 mV / ±0.2% FS MS5401-BM 150 mV / ±0.05% FS 7 bar MS5407-AM 392 mV / ±0.2% FS MS5412-BM 150 mV / ±0.05% FS MS5401-BPF 150 mV / ±0.05% FS 12 bar 70 bar MS5470-AM 310 mV / ±0.25% FS 1 bar MS5401-APF 240 mV / ±0.2% FS FEATURES • Low cost SMD package • Small size • High reliability, low drift • -40°C to +125 °C operation range • Gel protection against humidity and water APPLICATIONS • Brake systems • High resolution altimeters, variometers • Barometers • Engine management • Water proof watches and diving computers • Tire pressure monitoring systems (TPMS) * The European RoHS directive 2002/95/EC (Restriction of the use of certain Hazardous Substances in electrical and electronic equipment) bans the use of lead, mercury, cadmium, hexavalent chromium and polybrominated biphenyls (PBB) or polybrominated diphenyl ethers (PBDE). DA54xx_014 000054xx280 ECN 1243 June 15th, 2009 1 PIN CONFIGURATION 3: VS+ 4: OUT+ 1: OUT- 2: GND PIN DESCRIPTION Pin Name Pin No. OUTGND VS+ OUT+ 1 2 3 4 Function Negative output voltage of Wheatstone bridge Ground Supply voltage of Wheatstone bridge Positive output voltage of Wheatstone bridge ABSOLUTE MAXIMUM RATINGS Parameter Supply voltage Storage temperature Overpressure MS5401-AM MS5401-APF MS5401-BPF MS5401-BM MS5407-AM MS5412-BM MS5470-AM Symbol VS+ TS P Conditions o Ta = 25 C Ta = 25 oC Min Max Unit -40 20 +125 V o C - 5 5 5 10 21 30 180 bar Notes (1) (2) - NOTES 1) The MS5401-BM is qualified referring to ISO Standard 2281 and can withstand an absolute pressure of 11 bar in salt water or 100 m water respectively. 2) The MS5407-AM is qualified referring to ISO Standard 2281 and can withstand an absolute pressure of 21 bar in salt water or 200 m water respectively. DA54xx_014 000054xx280 ECN 1243 June 15th, 2009 2 ELECTRICAL CHARACTERISTICS HIGH SENSITIVITY VERSIONS (VS+ = 5 V; Ta = 25°C ) Parameter Min Typ Max Unit 0 - 1 bar Full-scale span (FS) 190 240 290 mV Sensitivity 190 240 290 mV/bar Linearity - ±0.15 ±0.4 % FS Operating pressure range 0 - 7 bar Full-scale span (FS) 322 392 462 mV Sensitivity 46 56 66 mV/bar Linearity - ±0.15 ±0.4 % FS Operating pressure range 0 - 70 bar Full-scale span (FS) 250 310 370 mV Sensitivity 3.6 4.4 5.3 mV/bar Operating pressure range MS5401-AM MS5401-APF MS5407-AM MS5470-AM Linearity All Ranges Notes 1, 6 1, 6 - ±0.25 ±0.50 % FS Operating temperature range -40 - 125 °C Zero pressure offset -40 0 40 mV Pressure hysteresis - - ±0.20 % FS 2, 6 Temperature hysteresis - 0.3 0.8 % FS 3, 6 Repeatability - - ±0.20 % FS 4, 6 3.0 3.4 3.8 +2 400 2 900 +3 300 kΩ ppm/°C 5, 6 -1 500 -80 -1 900 - -2 300 +80 ppm/°C µV/°C 5, 6 5, 6 Bridge resistance Temperature coefficient of resistance Temperature coefficient of span Temperature coefficient of offset 1, 6 NOTES 1) Deviation at one half full-scale pressure from the least squares best line fit over pressure range. 2) Maximum difference of output voltage after 1 pressure cycle at any pressure within the operating pressure range. 3) Maximum difference in offset after one thermal cycle from -40°C to +125°C. 4) Same as 2) after 10 pressure cycles. 5) Slope of the end-point straight line from 25°C to 60°C. 6) Not 100% tested. DA54xx_014 000054xx280 ECN 1243 June 15th, 2009 3 ELECTRICAL CHARACTERISTICS (CONT.) HIGH LINEARITY VERSIONS (VS+ = 5 V; Ta = 25°C ) Parameter Min Type Max Unit Notes 0 - 1 bar 8 Full-scale span (FS) 120 150 180 mV Sensitivity 120 150 180 mV/bar Linearity - ±0.05 ±0.2 % FS 1, 6 Operating pressure range 0 - 12 bar 8 Full-scale span (FS) 120 150 180 mV Sensitivity 10 12.5 15 mV/bar ±0.05 ±0.15 % FS Operating pressure range MS5401-BM MS5401-BPF MS5412-BM Linearity All Ranges 1, 6 Operating temperature range -40 - 125 °C Zero pressure offset -40 0 40 mV Pressure hysteresis - - ±0.20 % FS Temperature hysteresis - 0.3 0.8 % FS 3, 6 Repeatability - - ±0.20 % FS 4, 6, 7 3.0 3.4 3.8 +2 400 2 900 +3 300 kΩ ppm/°C 5, 6 -1 500 -80 -1 900 - -2 300 +80 ppm/°C µV/°C 5, 6 5, 6 Bridge resistance Temperature coefficient of resistance Temperature coefficient of span Temperature coefficient of offset 2, 6 NOTES 1) Deviation at one half full-scale pressure from the least squares best line fit over pressure range. 2) Maximum difference of output voltage after 1 pressure cycle at any pressure within the operating pressure range. 3) Maximum difference in offset after one thermal cycle from -40°C to +125°C. 4) Same as 2) after 10 pressure cycles. 5) Slope of the end-point straight line from 25°C to 60°C. 6) Not 100% tested. 7) MS5412-BM: Max. 0.3% FS 8) This sensor family is optimised for the linearity; it is suitable for applications with higher pressure where the linearity requirement is less critical. DA54xx_014 000054xx280 ECN 1243 June 15th, 2009 4 APPLICATION INFORMATION GENERAL The MS54xx is a miniaturised absolute pressure sensor series which has been designed as a surface mount device (SMD). Its main advantages are the high performance of the semiconductor sensor and a design which makes it suitable for applications requiring small dimensions and cost efficiency. The sensor element of the MS54xx consists of a micromachined silicone membrane with Pyrex glass wafer-bonded under vacuum to the back side for reference pressure. Implanted resistors make use of the piezoresistive effect to sense pressure applied to the membrane. The sensor is mounted using a special process allowing best offset stability making the device suitable for direct PCB assembly. Typical applications for this miniaturised pressure sensor MS54xx are altitude measurements and the measurement of atmospheric reference pressure in medical and industrial equipment as well as in automotive and household applications, consumer electronics and pneumatics. Full Scale Pressure High Sensitivity Versions (MS54xx-Axx) 1 bar Variometer, Altimeter, Barometer 7 bar Divers Watch, Tire Pressure, Electronic Scale 12 bar 70 bar High Linearity Versions (MS54xx-Bxx) High End Altimeter, Medical Instrumentation High End Electronic Scale Pneumatic Brake, Diving Computer Engine Control, Diving Computer HUMIDITY, WATER PROTECTION MS54xx-xM with METAL CAP: The MS54xx-AM / -BM has an anticorrosive and antimagnetic metallic protection cap filled with silicone gel for enhanced protection against humidity. The properties of this gel ensure function of the sensor even when in direct water contact. This feature can be useful for waterproof watches or other applications, where direct water contact cannot be avoided. Nevertheless the user should avoid drying of hard materials like for example salt particles on the silicone gel surface. In this case it is advisable to rinse with clean water afterwards. Special care has to be taken not to mechanically damage the gel. Damaged gel may lead to air entrapment and consequently to unstable sensor signal, especially if the damage is close to the sensor surface. The metal cap is fabricated of special anticorrosive alloy in order to avoid any galvanic effects within the end product. The MS5401-BM is qualified referring to the ISO Standard 2281 and can withstand a pressure of 11 bar in salt water. The concentration of the sea water used for the qualification is 41 g of sea salt per 1 litre of DI water. The MS5407-AM satisfies salt-water testing with a pressure capability of 21 bar. For underwater operations as specified in ISO Standard 2281 it is important to seal the sensor with a rubber Oring around the metal cap. Any salt water reaching the contact side (ceramic and pads) of the sensor could lead to permanent damage. Especially for "water-resistant 100 m" watches and for diving computers, it is recommended to provide a stable mechanical pusher from the backside of the sensor; otherwise the overpressure may push the sensor backwards and even deform the electronic board on which the sensor is mounted. MS54xx-xPx with PLASTIC CAP: The sensor die of the MS54xx-xPx is protected by a drop of silicone gel. The properties of this gel ensure function of the sensor even in a humid environment. DA54xx_014 000054xx280 ECN 1243 June 15th, 2009 5 LIGHT SENSITIVITY The MS54xx is sensitive to sunlight (visible and near-infrared spectrum). This is due to the strong photo effect of silicon. As the effect is reversible there will be no damage, but the user has to take care that in the final product the sensor cannot be exposed to direct light during operation as it effects the measurement. This can be achieved for instance by placing mechanical parts with holes in such that light cannot pass. CONNECTION TO PCB The package outline of the module enables the use of a flexible PCB to connect it. This can be important for applications in watches and other special devices, and will also reduce mechanical stress on the device. For applications subjected to mechanical shock, it is recommended to enhance the mechanical reliability of the solder junctions by covering the rim or the corners of MS54xx ceramic substrate with glue or globtop-like material. SOLDERING Please refer to the application note AN808 for all soldering issues. CLEANING The MS54xx has been manufactured under clean-room conditions. Each device is inspected for homogeneity and cleanness of the silicone gel. It is therefore recommended to assemble the sensor under class 10 000 or better conditions. Should this not be possible, it is recommended to protect the sensor opening during assembly from entering particles and dust. To avoid cleaning of the PCB, solder paste of type “no-clean” must be used. Cleaning might damage the sensor. RECOMMENDED PAD LAYOUT Recommended pad layout for soldering of the MS54xx on a printed circuit board DA54xx_014 000054xx280 ECN 1243 June 15th, 2009 6 PACKAGE OUTLINES VERSIONS WITH CERAMIC CARRIER AND METAL CAP Device package outlines of MS54xx-AM and MS54xx-BM (M = anticorrosive and antimagnetic stainless steel cap) DA54xx_014 000054xx280 ECN 1243 June 15th, 2009 7 VERSIONS WITH PCB CARRIER AND PLASTIC CAP Device package outlines of MS54xx-APF and MS54xx-BPF DA54xx_014 000054xx280 ECN 1243 June 15th, 2009 8 PACKING The MS54xx is packed in 51 cm (20-inch) antistatic plastic tubes with rubber end-plugs of different colours: one green and one black. The dot on the carrier next to Pin 1 is facing the green end-plug. Each tube contains 80 sensors. The tubes are marked "ANTISTATIC" and have an information label. See the drawings below for more details. PACKING TUBE OUTLINES 4.4 Information label 8.2 510 All measures in mm ORDERING INFORMATION MS5401-AM MS5401-APF MS5401-BM MS5401-BPF MS5407-AM MS5412-BM MS5470-AM Ax x Bx x x Mx xPx xx F Miniature Pressure Sensor 1 bar, high sensitivity, ceramic carrier Miniature Pressure Sensor 1 bar, high sensitivity, PCB carrier Miniature Pressure Sensor 1 bar, high linearity, ceramic carrier Miniature Pressure Sensor 1 bar, high linearity, PCB carrier Miniature Pressure Sensor 7 bar, high sensitivity, ceramic carrier Miniature Pressure Sensor 12 bar, high linearity, ceramic carrier Miniature Pressure Sensor 70 bar, high sensitivity, ceramic carrier Art.-Nr. 325401001 Art.-Nr. 325401004 Art.-Nr. 325401000 Art.-Nr. 325401005 Art.-Nr. 325407000 Art.-Nr. 325412000 Art.-Nr. 325470000 = high sensitivity = high linearity = anticorrosive and antimagnetic metallic cap = plastic cap = PCB carrier DA54xx_014 000054xx280 ECN 1243 June 15th, 2009 9 CONTACTS Factory and European Sales office Intersema Sensoric SA Ch. Chapons-des-Prés 11 CH-2022 Bevaix Switzerland Phone: +41 32 847 9550 Fax: +41 32 847 9569 e-mail: Website: www.intersema.ch USA Measurement Specialties Inc. 1000 Lucas Way Hampton, VA 23666 USA Phone: Fax: e-mail: Website: +1 800 555 1551 +1 757 766 4297 [email protected] www.meas-spec.com Phone: Fax: e-mail: Website: +86 755 8330 1004 +86 755 8330 6797 [email protected] www.meas-spec.com ASIA Measurement Specialties (China), Ltd. F1.6-4D, Tian An Development Compound Shenzhen, China 518048 NOTICE Intersema reserves the right to make changes to the products contained in this data sheet in order to improve the design or performance and to supply the best possible products. Intersema assumes no responsibility for the use of any circuits shown in this data sheet, conveys no license under any patent or other rights unless otherwise specified in this data sheet, and makes no claim that the circuits are free from patent infringement. Applications for any devices shown in this data sheet are for illustration only and Intersema makes no claim or warranty that such applications will be suitable for the use specified without further testing or modification. DA54xx_014 000054xx280 ECN 1243 June 15th, 2009 10