ETC 87-3000A-8P

Model 87 UltraStable™
316 SS Pressure Sensor
High Performance, Small Profile
0-100 mV Output
Temperature Compensated
Absolute and Sealed Gage
þ
Hydraulic Controls
þ
Process Control
þ
Robotics
þ
Oceanography
þ
Refrigeration/Compressors
þ
Pressure Transmitters
DESCRIPTION
This is a micro machined piezoresistive silicon pressure sensor.
It is designed for OEM applications where compatibility with
corrosive media must be maintained. The sensor chip is
mounted on a TO style header, which is resistance welded to a
316 stainless steel package, sealing a small volume of silicone oil
between the diaphragm and the sensor chip. The ISO pressure
housing utilizes the oil column to couple the piezoresisteve
sensor to the isolation diaphragm. A thickfilm ceramic
compensation board with laser trimmed resistors, and
additional gain set resistor to normalize pressure sensitivity are
an integral part of the sensor package. A variety of threaded
process fittings are available. Fittings include standards like 1/4
and 1/8 NPT as well as custom process fittings. Electrical
options include cable and connector.
FEATURES
þ
Weldable, Optional Process Fittings
þ
±0.25 Pressure Non-linearity
þ
±1.0% Temperature Performance
þ
±0.25 Interchangeable Span
(provided by gain set resistor)
þ
Solid State Reliability
þ
Low Power
DIMENSIONS
STANDARD RANGES
Range
1-70
psia
psis
0 to 1000
●
●
0 to 3000
●
●
0 to 5000
●
●
ISO – Wide Temperature Range
Model 87 UltraStable™
316 SS Pressure Sensor
PERFORMANCE SPECIFICATIONS
All parameters measured at 1.5mA drive and at 25°C, after 10 second warm up, unless otherwise specified. Unless specifically indicated, only those parameters
indicated as tested are verified on each part. Parameters are specified for the compensation version only.
PARAMETERS
MIN
TYP
MAX
UNITS
NOTES
Full Scale Output Span
75
100
125
mV
1
Zero Offset
-1
0
1
mV
0.25
% Span
Pressure Non Linearity
-0.25
Pressure Hysteresis
50
2
µV
Input and Output Resistance
2000
4000
Ω
Temp. Error - Span
-0.75
+0.75
% Span
3
Temp. Error - Zero
-0.75
+0.75
% Span
3
2750
Thermal Hysteresis - Span
0.05
% Span
3
Thermal Hysteresis - Zero
0.05
% Span
3
Supply Current
0.5
Output Load Resistance
Insulation Resistance (50 VDC)
1.5
2.0
mA
5
MΩ
4
50
MΩ
5
Compensation Operating Temperature
–20°C to +85°C
6
Operating Temperature Range
–40°C to +125°C
6
Storage Temperature Range
–55°C to +125°C
6
Media - Pressure Port
Liquids and Gases compatible with 316L Stainless Steel.
Media - Reference Port
Liquids and Gases. Compatible with Silicon, Pyrex, Gold, Fluorosilicone
Rubber and 316L Stainless Steel.
Weight
11 g
7
Notes
1. All 3000 psi and 5000 psi parts are tested at 2500 psi.
5.
Between case and sensing element.
2.
Best fit straight line.
6.
3.
Over temperature range -20°C to +85°C, % span, with respect to
+25°C.
Maximum temperature range for product with standard cable and
connector is –20°C to +105°C.
7.
Weight depends upon configuration (cable, connector, pressure fitting).
4.
Load resistance to reduce measurement errors due to output loading.
ORDERING INFORMATION
APPLICATION SCHEMATIC
CONNECTIONS
PAD NO. / CABLE
FUNCTION
1
+OUT
2
-EX
3
+EX
4
-OUT
5
GAIN
6
GAIN
April 2000
ISO – Wide Temperature Range
1-71