Model 87 UltraStable™ 316 SS Pressure Sensor High Performance, Small Profile 0-100 mV Output Temperature Compensated Absolute and Sealed Gage þ Hydraulic Controls þ Process Control þ Robotics þ Oceanography þ Refrigeration/Compressors þ Pressure Transmitters DESCRIPTION This is a micro machined piezoresistive silicon pressure sensor. It is designed for OEM applications where compatibility with corrosive media must be maintained. The sensor chip is mounted on a TO style header, which is resistance welded to a 316 stainless steel package, sealing a small volume of silicone oil between the diaphragm and the sensor chip. The ISO pressure housing utilizes the oil column to couple the piezoresisteve sensor to the isolation diaphragm. A thickfilm ceramic compensation board with laser trimmed resistors, and additional gain set resistor to normalize pressure sensitivity are an integral part of the sensor package. A variety of threaded process fittings are available. Fittings include standards like 1/4 and 1/8 NPT as well as custom process fittings. Electrical options include cable and connector. FEATURES þ Weldable, Optional Process Fittings þ ±0.25 Pressure Non-linearity þ ±1.0% Temperature Performance þ ±0.25 Interchangeable Span (provided by gain set resistor) þ Solid State Reliability þ Low Power DIMENSIONS STANDARD RANGES Range 1-70 psia psis 0 to 1000 ● ● 0 to 3000 ● ● 0 to 5000 ● ● ISO – Wide Temperature Range Model 87 UltraStable™ 316 SS Pressure Sensor PERFORMANCE SPECIFICATIONS All parameters measured at 1.5mA drive and at 25°C, after 10 second warm up, unless otherwise specified. Unless specifically indicated, only those parameters indicated as tested are verified on each part. Parameters are specified for the compensation version only. PARAMETERS MIN TYP MAX UNITS NOTES Full Scale Output Span 75 100 125 mV 1 Zero Offset -1 0 1 mV 0.25 % Span Pressure Non Linearity -0.25 Pressure Hysteresis 50 2 µV Input and Output Resistance 2000 4000 Ω Temp. Error - Span -0.75 +0.75 % Span 3 Temp. Error - Zero -0.75 +0.75 % Span 3 2750 Thermal Hysteresis - Span 0.05 % Span 3 Thermal Hysteresis - Zero 0.05 % Span 3 Supply Current 0.5 Output Load Resistance Insulation Resistance (50 VDC) 1.5 2.0 mA 5 MΩ 4 50 MΩ 5 Compensation Operating Temperature –20°C to +85°C 6 Operating Temperature Range –40°C to +125°C 6 Storage Temperature Range –55°C to +125°C 6 Media - Pressure Port Liquids and Gases compatible with 316L Stainless Steel. Media - Reference Port Liquids and Gases. Compatible with Silicon, Pyrex, Gold, Fluorosilicone Rubber and 316L Stainless Steel. Weight 11 g 7 Notes 1. All 3000 psi and 5000 psi parts are tested at 2500 psi. 5. Between case and sensing element. 2. Best fit straight line. 6. 3. Over temperature range -20°C to +85°C, % span, with respect to +25°C. Maximum temperature range for product with standard cable and connector is –20°C to +105°C. 7. Weight depends upon configuration (cable, connector, pressure fitting). 4. Load resistance to reduce measurement errors due to output loading. ORDERING INFORMATION APPLICATION SCHEMATIC CONNECTIONS PAD NO. / CABLE FUNCTION 1 +OUT 2 -EX 3 +EX 4 -OUT 5 GAIN 6 GAIN April 2000 ISO – Wide Temperature Range 1-71