VSO® Low Flow Normally closed proportional solenoid valve FEATURES · 2-way normally closed · Applications where control is critical or flow is required below 600 sccm · Provides computer-automated calibrations and full calibration traceability · Uses either DC current or pulse width modulation with closed loop feedback to deliver optimal system performance · Maintains ideal flow through thermal compensation · Highly repeatable · Oxygen and analytically clean MEDIA COMPATIBILITY PHYSICAL PROPERTIES Air, argon, helium, hydrogen, methane, nitrogen, oxygen & others Operating environment Storage temperature Voltage -40 to 70 °C Length 45.3 mm (1.785 in) Width 16.5 mm (0.625 in) max. 2 W Height 17 mm (0.67 in) max. 6.5, 8, 12 or 18 VDC Porting manifold mount with 17 µm screens Weight 63 g (2.2 oz) ELECTRICAL Power 0 to 55 °C 0.508 cm3 (0.031 in3) Internal volume Filtration (recommended) Lubrication 17 µm None required VSO is a registered trademark of Parker Hannifin Corporation. October 2006 / 255 1/4 www.sensortechnics.com VSO® Low Flow Normally closed proportional solenoid valve PERFORMANCE CHARACTERISTICS Part no. Orifice siz es Leak rate1 R esp o n se 910000200... 0.003" (0.076 mm) ≤0.2 sccm of helium (bubble tight) <15 msec cycling FLOW CURVE2 Notes: 1 sccm denotes Standard Cubic Centimeters per Minute. It is a unit for the flow rate at standard conditions of temperature and pressure. 1000 sccm = 1 slpm. 2 slpm denotes Standard Liters per Minute. It is a unit for the flow rate at standard conditions of temperature and pressure. 1 slpm = 1000 sccm. October 2006 / 255 2/4 www.sensortechnics.com VSO® Low Flow Normally closed proportional solenoid valve OUTLINE DRAWING Basic valve dimensions Port and mounting hole diagrams dimensions in inches (mm) October 2006 / 255 3/4 www.sensortechnics.com VSO® Low Flow Normally closed proportional solenoid valve ELECTRICAL INTERFACE (Wire leads, no terminals) PNEUMATIC INTERFACE (No barbs, face seal to manifold with screeen) ORDERING INFORMATION Coil selection Series Options 910 Model number 000200 VSO, low flow, 0.003" (0.076 mm) orifice size Max. voltage* Resistance** Current*** 001: 6.5 VDC 47 Ω 0.152 A 002: 8 V DC 68 Ω 0.115 A 003: 12 V D C 136 Ω 0.080 A 004: 18 V D C 274 Ω 0.060 A * max. voltage for continuous full flow, ambient temp. 55°C ** coil resistance for room temp. *** input current for full flow Example: 910 000200 001 Note: Not all combinations might be available. Please contact your nearest Sensortechnics sales representative for further information. Sensortechnics reserves the right to make changes to any products herein. Sensortechnics does not assume any liability arising out of the application or use of any product or circuit described herein, neither does it convey any license under its patent rights nor the rights of others. October 2006 / 255 4/4 www.sensortechnics.com