Catalog

BT-CCD camera
C8000-30
FEATURES
High-sensitivity imaging from UV to nearinfrared wavelengths
- UV: Quantum efficiency over 60 % (at 200 nm)
- Near-infrared: Quantum efficiency over 90 % (at 650 nm)
Quantum efficiency in UV source (reference data)
(This is typical value)
F2
ArF
KrF
Fourth harmonic generation
of a YAG laser
i line
Wavelength (nm)
157
193
248
266
365
Quantum efficiency (%) (typ.)
84
57
69
50
47
Light source
light irradiation may cause a drop in sensitivity and increase the dark current of the
* UV
CCD sensor.
Real time background subtraction
Recursive filter (2, 4, 8, 16, 32 and 64 frames selectable)
The C8000-30 employs an ultrahigh-sensitivity back-thinned
CCD sensor made by Hamamatsu, which offers extremely
high quantum efficiency in a wide range of UV, VIS and NIR
wavelengths. The high UV sensitivity from 120 nm is useful
for semiconductor mask inspection and measurement
applications. Also, the high NIR sensitivity is useful for
fluorescence measurement, NIR LD measurement and so on.
PRINCIPLE
In a normal CCD with front-illuminated CCD structure, the light
sensitive pixels have a charge transfer function as well, and this
function requires the front surface of light sensitive pixels to be
covered by a semi-transparent Poly-Si electrode for the charge
transfer function. The Poly-Si electrode absorbs some percentage
of incoming photons depending on their wavelength. Especially of
of the UV light is not able to reach the light sensitive pixels.
To overcome this disadvantage, in a back-thinned CCD, the CCD
is turned upside down and this back side of the CCD is thinned to
10-15 μm in thickness. Incident photons now enter the CCD from
the back-thinned side, without the Poly-Si electrode in the light
path. Then QE values of greater than 90 % can be achieved.
SPECTRAL RESPONSE
Quantum efficiency (%)
100
80
60
40
Normal CCD
Back-Thinned CCD
(Front-Illuminated CCD)
Light
Light
sensitive
pixels
20
Gate
electrodes
Light
e-
0
200
400
600
800
1000
Light
sensitive
pixels
1200
Wavelength (nm)
e-
* Without sapphire window. With the sapphire window, the spectral response
is decreased due to the transmittance characteristics of the window.
Gate electrodes
SYSTEM CONFIGURATION
C8000-30
Lens
Computer frame grabber board
Power cable 5 m
A9071-05
Microscope
HAMAMATSU
CAMERA ADAPTER
A13206-01
Software
Computer
POWER
Video camera
microscope attachment
Camera adapter
A13206-01
Standard
Options
OPTIONS
SYSTEM SPECIFICATIONS
Imaging device
Back-thinned frame transfer CCD
Effective number of pixels
640 (H)
14 μm (H)
Cell size
Effective area
8.96 mm (H)
binning
480 (V)
14 μm (V)
6.72 mm (V)
31.4 frames/s
1 1
Frame rate
• Camera adapter : A13206-01
• Power cable 5 m : A9071-05
C8000-30
Type number
2 2
58.3 frames/s
4 4
101.8 frames/s
Readout noise (rms) (typ.)
150 electrons
Full well capacity (typ.)
30 000 electrons
Cooling method
Passive air-cooled
Cooling temperature
+ 5 ˚C (room temperature + 20 ˚C)
A/D converter
12 bit
Exposure time
30.8 ms to 1 s
Analog gain
Approx. 1 to 5 times (16 steps)
Sub-array
8 pixels increments (V)
External trigger mode
Edge trigger, Level trigger, Start trigger, Synchronous readout trigger
Image processing functions
Background subtraction, Recursive filter
Lens mount
C-mount
Interface
CameraLink Base Configuration
External control
CameraLink
Power requirements
DC +12 V
Power consumption
Approx. 10 VA
Ambient operating temperature
0 ˚C to + 40 ˚C
Performance guaranteed temperature
0 ˚C to + 30 ˚C
Ambient storage temperature
- 10 ˚C to + 50 ˚C
Ambient operating humidity
70 % max. (with no condensation)
Ambient storage humidity
90 % max. (with no condensation)
DIMENSIONAL OUTLINES
(Unit: mm)
Camera head (Approx. 1.3 kg)
Camera adapter A13206-01 (Approx. 0.8 kg) (Option)
1-32UN C-mount
82±1
3.3±2
140±1
2.36±0.5
BT-CCD CAMERA
150
HAMAMATSU
C8000
CAMERA ADAPTER
160
A13206-01
8±0.5
82±1
41±0.5
60
POWER
67.7±1
4-M3 d=8
32±0.3
18±0.3
1/4-20UNC d=8
★ Product and software package names noted in this documentation are trademarks or registered trademarks of their respective manufacturers.
●
●
Subject to local technical requirements and regulations, availability of products included in this promotional material may vary. Please consult your local sales representative.
Information furnished by HAMAMATSU is believed to be reliable. However, no responsibility is assumed for possible inaccuracies or omissions.
Specifications and external appearance are subject to change without notice.
© 2015 Hamamatsu Photonics K.K.
HAMAMATSU PHOTONICS K.K.
www.hamamatsu.com
HAMAMATSU PHOTONICS K.K., Systems Division
812 Joko-cho, Higashi-ku, Hamamatsu City, 431-3196, Japan, Telephone: (81)53-431-0124, Fax: (81)53-435-1574, E-mail: [email protected]
U.S.A.: Hamamatsu Corporation: 360 Foothill Road, Bridgewater, N.J 08807, U.S.A., Telephone: (1)908-231-0960, Fax: (1)908-231-1218 E-mail: [email protected]
Germany: Hamamatsu Photonics Deutschland GmbH.: Arzbergerstr. 10, D-82211 Herrsching am Ammersee, Germany, Telephone: (49)8152-375-0, Fax: (49)8152-265-8 E-mail: [email protected]
France: Hamamatsu Photonics France S.A.R.L.: 19, Rue du Saule Trapu, Parc du Moulin de Massy, 91882 Massy Cedex, France, Telephone: (33)1 69 53 71 00, Fax: (33)1 69 53 71 10 E-mail: [email protected]
United Kingdom: Hamamatsu Photonics UK Limited: 2 Howard Court,10 Tewin Road, Welwyn Garden City, Hertfordshire AL7 1BW, UK, Telephone: (44)1707-294888, Fax: (44)1707-325777 E-mail: [email protected]
North Europe: Hamamatsu Photonics Norden AB: Torshamnsgatan 35 16440 Kista, Sweden, Telephone: (46)8-509-031-00, Fax: (46)8-509-031-01 E-mail: [email protected]
Italy: Hamamatsu Photonics Italia S.r.l.: Strada della Moia, 1 int. 6 20020 Arese (Milano), Italy, Telephone: (39)02-93581733, Fax: (39)02-93581741 E-mail: [email protected]
China: Hamamatsu Photonics (China) Co., Ltd.: B1201 Jiaming Center, No.27 Dongsanhuan Beilu, Chaoyang District, Beijing 100020, China, Telephone: (86)10-6586-6006, Fax: (86)10-6586-2866 E-mail: [email protected]
Cat. No. SCAS0009E03
APR/2015 HPK
Created in Japan
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